CN102902039A - Auto-focusing lens based on micro-electromechanical system - Google Patents
Auto-focusing lens based on micro-electromechanical system Download PDFInfo
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- CN102902039A CN102902039A CN2012104071276A CN201210407127A CN102902039A CN 102902039 A CN102902039 A CN 102902039A CN 2012104071276 A CN2012104071276 A CN 2012104071276A CN 201210407127 A CN201210407127 A CN 201210407127A CN 102902039 A CN102902039 A CN 102902039A
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Abstract
The invention discloses an auto-focusing lens based on a micro-electromechanical system. The auto-focusing lens comprises a lens seat and a lens group, wherein lenses in the lens group are sequentially and coaxially arranged in an inner cavity of the lens seat, one lens in the lens group is arranged on a lens frame of an MEMS (micro-electromechanical system) micro-platform, the MEMS micro-platform is connected with a circuit board arranged at the bottom of the MEMS micro-platform, the circuit board is electrically connected with an external circuit, and the lenses can realize automatic continuous zooming along with up-and-down movement of the lens frame along the direction of an optical axis. The auto-focusing lens has the advantages of compact structure, small volume, light weight and strong zooming capability, and can greatly reduce structure size, reduce driving power and assembly difficulty, realize faster and more precise linear movement of the single lens, further realize continuous focusing and enable the micro-auto-focusing lens to be applied to more extensive systems.
Description
Technical field
The present invention relates to the MEMS (micro electro mechanical system) field, relate in particular to a kind of autofocus lens based on MEMS (micro electro mechanical system), be used for realizing formation method and the equipment of automatically focusing.
Background technology
Along with the development of infotech, the structure of mobile phone is more and more less, and miniature photographic lens has been widely used in the mobile phone, can also be used for portable computer camera, PDA, security protection and supervisory system.The little photographic lens that is used for now mobile phone mostly is fixed focal length, and this requires photographic lens that enough little aperture is arranged in order to the enough depth of field is provided, make focal length be suitable for large-scale image-forming range, but stop down has limited the use of photographic lens under low light environment; And realize automatically focusing by mobile lens or lens combination, can avoid the problems referred to above.But traditional mechanical type focusing drive unit volume is large, and required driving-energy is high, and the speed of focusing simultaneously is also slower.
Foreign application patent (number of patent application: 033788A1) disclose a kind of MEMS (micro electro mechanical system) (MEMS) micro mirror and the job operation of producing micro mirror, consisted of by a minute surface and four actuating arms, its actuating arm adopts multilayer material to form, apply voltage and actuating arm, its material is along with expansion, and turn to the little lateral deviation of expansion coefficient, drive the minute surface motion.MEMS drives to compare than traditional machinery or voice coil loudspeaker voice coil Piezoelectric Driving mode has more significant advantage, and Linear-moving reduces the drives structure design difficulty more accurately, increase service life cycle, can carry out continuously automatically focusing, noiseless to the magnetic shutter, reduce to assemble complicacy.
Come a slice lens in the mobile lens group to realize automatically focusing if drive lens with MEMS, can greatly reduce the volume from focus lens, and can reduce greatly its driving voltage, its voltage only has several volts, has also improved greatly simultaneously focusing speed.Along with the raising of integrated technology, the MEMS manufacturing process also reaches its maturity, and more is convenient to the autofocus lens microminiaturization, reduces production costs, and guarantees simultaneously image quality.
Summary of the invention
The present invention is for addressing the above problem, a kind of autofocus lens based on MEMS (micro electro mechanical system) is proposed, its compact conformation, volume is little, lightweight, zoom capabilities is strong, and can greatly reduce physical dimension, reduce driving power and assembly difficulty, realize more fast accurate Linear-moving of single element lens, can realize continuous focusing, miniature autofocus lens can be applied to more widely in the system.
For reaching this purpose, the present invention by the following technical solutions:
A kind of autofocus lens based on MEMS (micro electro mechanical system), comprise lens mount and lens combination, lens in the described lens combination are successively in the coaxial inner chamber that is arranged at lens mount, a slice lens in the described lens combination are arranged on the mirror holder of MEMS microfluidic platform, described MEMS microfluidic platform is connected with the circuit board that is arranged at its bottom, and described circuit board is electrically connected with external circuit.
Further, described MEMS microfluidic platform comprises that inside is provided with the pedestal of through hole, is arranged at the mirror holder of described base interior, and is connected in the actuating arm between described pedestal and the mirror holder.
Further, described actuating arm comprises the first actuating arm, the second actuating arm, the 3rd actuating arm and 4 wheel driven swing arm, and described the first actuating arm, the second actuating arm, the 3rd actuating arm and 4 wheel driven swing arm are connected to four edges or four corner points of described base interior.
Further, described actuating arm is the multilayer folding structure, and the thermal expansivity of every layer material is different in the sandwich construction, and the working method of described actuating arm is adopted as electrothermal method work.
Further, the driving of described mirror holder is static driving, Electromagnetic Drive or electrothermal drive, and is preferred, and the type of drive of described mirror holder is for adopting electrothermal drive.
Further, described MEMS microfluidic platform adopts the flip chip bonding mode to realize being electrically connected with circuit board, utilize conducting resinl or scolder to be connected between the pin of described MEMS microfluidic platform and the pad of circuit board, the second level pad of described circuit board adopts connecting line to be electrically connected with external circuit.
Further, described MEMS microfluidic platform adopts the connecting line connected mode to realize being electrically connected with circuit board; Described connecting line connects the pin of MEMS microfluidic platform and the first order pad of described circuit board, and the second level pad of described circuit board adopts connecting line to be electrically connected with external circuit.
Further, described circuit board is PCB or stupalith circuit board, is provided with the through hole for printing opacity on the described circuit board, the corresponding setting with lens combination of described through hole.
Further, described circuit board is the glass material of printing opacity or the material circuit board of other light-permeables.
Further, conductor wire or conductive pole have been buried in the inside of described circuit board.
Further, described connecting line is the connection wire of gold thread, aluminum steel or other materials.
Further, described MEMS microfluidic platform is arranged at the lens place of the top of described lens combination.
Further, described MEMS microfluidic platform is arranged at the lens place bottom of described lens combination.
Further, described MEMS microfluidic platform is arranged at a lens place of the centre of described lens combination.
Beneficial effect of the present invention is: among the present invention any a slice lens in the lens combination are arranged on the mirror holder of MEMS microfluidic platform, drive the actuating arm of MEMS microfluidic platform by the mode of electrothermal drive, and drive its mirror holder with and on eyeglass move linearly, realize automatically focusing; By applying the inching that different voltage can be realized lens for four actuating arms, improved the optical property of lens; It is simple in structure, and overall dimensions is little, moving-member lightweight, thus reduce driving-energy, make the Linear-moving of lens more accurately fast, good reproducibility; MEMS is suitable for producing in enormous quantities, is applicable to microminiaturized product, can reduce power consumption, is convenient to produce and can reduce production costs.
Description of drawings
Fig. 1 is a kind of autofocus lens cut-open view based on MEMS (micro electro mechanical system) of the present invention;
Fig. 2 is the structural representation of MEMS microfluidic platform of the present invention when being positioned at the lens place, the top of lens combination;
Fig. 3 is the structural representation of MEMS microfluidic platform of the present invention when being positioned at the one lens place, centre of lens combination; Fig. 4 is the MEMS microfluidic platform structural representation of autofocus lens among Fig. 1;
Fig. 5 is MEMS microfluidic platform and the lens combination synoptic diagram of autofocus lens among Fig. 1;
Fig. 6 is MEMS microfluidic platform flip chip bonding connection diagram among Fig. 4;
Fig. 7 is MEMS microfluidic platform connecting line connection diagram among Fig. 4.
Wherein:
1, lens mount; 2, first lens; 3, the second lens; 4, the 3rd lens; 5, the 4th lens; 6, circuit board; 7, MEMS micro mirror platform; 8, pin; 34, movable lens; 51, connecting line; 52, MEMS microfluidic platform pin; 61, first order pad; 62, second level pad; 71, pedestal; 72, mirror holder; 73, the first actuating arm; 74, the second actuating arm; 75, the 3rd actuating arm; 76,4 wheel driven swing arm.
Embodiment
Further specify technical scheme of the present invention below in conjunction with accompanying drawing and by embodiment.
A kind of autofocus lens based on MEMS (micro electro mechanical system) shown in Fig. 1 to 7, comprise lens mount 1 and lens combination, lens in the described lens combination are successively in the coaxial inner chamber that is arranged at lens mount 1, a slice lens in the described lens combination are arranged on the mirror holder 72 of MEMS microfluidic platform 7, described MEMS microfluidic platform 7 is connected with the circuit board 6 that is arranged at its bottom, and described circuit board 6 is electrically connected with external circuit.
Preferably, in present embodiment, lens combination comprises first lens 2, the second lens 3, the 3rd lens 4 and 5 four lens of the 4th lens.
As shown in Figure 1, in the present embodiment, MEMS microfluidic platform 7 is arranged at the 4th lens 5 places bottom in the lens combination, and the 4th lens 5 are arranged on the MEMS microfluidic platform 7, and MEMS microfluidic platform 7 directly is electrically connected with the circuit board 6 of bottom; But the position of MEMS microfluidic platform 7 is not limited in this, as shown in Figure 2, MEMS microfluidic platform 7 can also be arranged on first lens 2 places of the top in the lens combination, first lens 2 is arranged on the MEMS microfluidic platform 7, and for example shown in Figure 3, MEMS microfluidic platform 7 can also be arranged on the second lens 3 or the 3rd lens 4 places in the lens combination, and the MEMS microfluidic platform can be realized being electrically connected with circuit board 6 or external circuit by the lead-in wire 8 that is arranged in the lens mount 1.
As shown in Figure 4, MEMS microfluidic platform 7 comprises that inside is provided with the pedestal 71 of through hole, this pedestal 71 is square, its inside is provided with mirror holder 72, be connected by actuating arm between mirror holder 72 and the pedestal 71, and the inside of mirror holder 2 arranges porose, be used for placing movable lens 34, wherein, movable lens 34 is a slice lens in the lens combination, is any a slice lens in first lens 2, the second lens 3, the 3rd lens 4 and 5 four lens of the 4th lens, and is preferred, in the present embodiment, movable lens 34 is the 4th lens 5.In the present invention, actuating arm comprises the first actuating arm 73, the second actuating arm 74, the 3rd actuating arm 75 and 4 wheel driven swing arm 76, wherein, the first actuating arm 73, the second actuating arm 74, the 3rd actuating arm 75 and 4 wheel driven swing arm 76 are connected to four edges or four corner points of pedestal 71 inside; Preferably, in the present embodiment, the first actuating arm 73, the second actuating arm 74, the 3rd actuating arm 75 and 4 wheel driven swing arm 76 are connected to the inside of pedestal 71 four edges, and four actuating arms are positioned at same plane, it is comprised of double-decker, and the thermal expansivity of the layers of material in the double-decker is different, and the working method of actuating arm is electrothermal method, is used for driving mirror holder 72.Further, the type of drive of mirror holder 72 is static driving, Electromagnetic Drive or electrothermal drive, and preferred, in the present invention, the type of drive of described mirror holder 72 is electrothermal drive.The MEMS microfluidic platform can be with reference to foreign application patent (number of patent application: the MEMS (micro electro mechanical system) that relates to 033788A1) (MEMS) micro mirror and the job operation of producing micro mirror.
As shown in Figure 5, with needing mobile any a slice lens 34 to be installed on the mirror holder 72 in the lens combination, form the MEMS lenticule assembly of variable-focus; After the energising heating, actuating arm is towards the high side deflection distortion of material thermal expansion coefficient, and drive MEMS microfluidic platform is done the linear movement of repeatability, the final lens that drive on the MEMS microfluidic platform 7 are also done the linear movement of repeatability, thereby change the focal length of system, in this process, keep rear cut-off distance constant, and then realize the scenery of different distance is focused automatically.Preferably, in the present embodiment, the linear displacement of MEMS microfluidic platform can reach 500um, and for reaching larger linear displacement, the MEMS microfluidic platform can adopt cascade structure, and the lens in optical axis direction mobile lens group can realize that 10cm is to focusing without studying carefully at a distance.When needing to adjust the focal length of lens, can adjust separately four actuating arms of MEMS to being installed on the face type adjustment of the lens on the MEMS microfluidic platform, be conducive to whole optics adjustment, increase the dirigibility of adjusting.Simultaneously, owing to be that mobile a slice lens can be realized focusing, need to have reduced the weight of moving-member, thus driving-energy reduced, thus energy efficient, and can reduce the impact of grit.
Figure 6 shows that a kind of preferred connected mode of MEMS microfluidic platform of the present invention and circuit board, MEMS microfluidic platform 7 adopts the flip chip bonding mode to realize being electrically connected with circuit board 6.Utilize conducting resinl or scolder to be connected between the pad of the pin of MEMS microfluidic platform 7 and circuit board 6, and conductor wire or conductive pole have been buried in the inside of circuit board 6, the second level pad 62 of circuit board 6 adopts connecting line 51 to be electrically connected with external circuit, external electric signal send electric signal in MEMS microfluidic platform 7 by the conductor wire in the circuit board 6 or conductive pole, drives the motion of signal controlling MEMS microfluidic platform 7 by this.Wherein, circuit board 6 can be PCB or stupalith circuit board or glass material circuit board, when selecting PCB and stupalith circuit board, need remain in advance the through hole of printing opacity on it, the corresponding setting with lens combination of this through hole is so that light can incide in the system, otherwise, when the substrate of circuit board 6 is transparent glass material or other light-permeable material circuit boards, can be directly and the MEMS microfluidic platform be packaged together, the circuit board that light can see through glass incide in the system and unaffected.Preferably, adopt the material of transparent glass or other light-permeables as the substrate of circuit board 6, this not only can make light directly see through system, and substrate need not to reserve light hole, so that design processing is simpler, the assembling difficulty reduces, thereby has improved production efficiency.MEMS microfluidic platform and circuit board adopt face-down bonding and conductive adhesive, make more compact structure, can realize more microminiaturized camera lens.
Figure 7 shows that the another kind of preferred connected mode of MEMS microfluidic platform of the present invention and circuit board, MEMS microfluidic platform 7 adopts the connecting line connected mode to realize being electrically connected with circuit board 6.Connecting line 51 connects the pin 52 of MEMS microfluidic platform 7 and the first order pad 61 of circuit board 6, and the second level pad 62 of circuit board 6 adopts connecting line 51 to be electrically connected with external circuit, by the motion of given driving signal controlling MEMS microfluidic platform 7; Further, described connecting line is the connection wire of gold thread, aluminum steel or other materials, and is preferred, is gold thread in the present embodiment.The MEMS microfluidic platform adopts the connecting line overlap joint to be connected with circuit board, and technical maturity is reliable, can realize automated production.
MEMS drives and compares with traditional Mechanical Driven mode, and drives structure is simple, and driving-energy is very little, and overall dimensions is little; In the present invention, the required driving voltage of MEMS is less than 10 volts, but its linear displacement can reach 500um even larger, and the MEMS linear displacement is fast and accurate for positioning, good reproducibility; MEMS is suitable for producing in enormous quantities, can reduce production costs; Therefore more be applicable to microminiaturized product, can reduce power consumption, be convenient to produce and can reduce production costs.
Know-why of the present invention has below been described in conjunction with specific embodiments.These are described just in order to explain principle of the present invention, and can not be interpreted as by any way limiting the scope of the invention.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other embodiment of the present invention, and these modes all will fall within protection scope of the present invention.
Claims (14)
1. autofocus lens based on MEMS (micro electro mechanical system), comprise lens mount (1) and lens combination, lens in the described lens combination are successively in the coaxial inner chamber that is arranged at lens mount (1), it is characterized in that: a slice lens in the described lens combination are arranged on the mirror holder (72) of MEMS microfluidic platform (7), described MEMS microfluidic platform (7) is connected with the circuit board (6) that is arranged at its bottom, and described circuit board (6) is electrically connected with external circuit.
2. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 1, it is characterized in that: described MEMS microfluidic platform (7) comprises that inside is provided with the pedestal of through hole (71), be arranged at the inner mirror holder (72) of described pedestal (71), and be connected in the actuating arm between described pedestal (71) and the mirror holder (72).
3. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 2, it is characterized in that: described actuating arm comprises the first actuating arm (73), the second actuating arm (74), the 3rd actuating arm (75) and 4 wheel driven swing arm (76), and described the first actuating arm (73), the second actuating arm (74), the 3rd actuating arm (75) and 4 wheel driven swing arm (76) are connected to described pedestal (71) inner four edges or four corner points.
4. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 3, it is characterized in that: described actuating arm is the multilayer folding structure, and the thermal expansivity of every layer material is different in the sandwich construction, and the working method of described actuating arm is electrothermal method.
5. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 2, it is characterized in that: the driving of described mirror holder (72) is static driving, Electromagnetic Drive or electrothermal drive, preferably, the type of drive of described mirror holder (72) is electrothermal drive.
6. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 1, it is characterized in that: described MEMS microfluidic platform (7) adopts the flip chip bonding mode to realize being electrically connected with circuit board (6), utilize conducting resinl or scolder to be connected between the pin of described MEMS microfluidic platform (7) and the pad of circuit board (6), the second level pad (62) of described circuit board (6) adopts connecting line (51) to be electrically connected with external circuit.
7. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 1 is characterized in that: described MEMS microfluidic platform (7) adopts the connecting line connected mode to realize being electrically connected with circuit board (6); Described connecting line (51) connects the pin (52) of MEMS microfluidic platform (7) and the first order pad (61) of described circuit board (6), and the second level pad (62) of described circuit board (6) adopts connecting line (51) to be electrically connected with external circuit.
8. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 6, it is characterized in that: described circuit board (6) is PCB or stupalith circuit board, be provided with the through hole for printing opacity on the described circuit board (6), the corresponding setting with lens combination of described through hole.
9. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 6, it is characterized in that: described circuit board (6) is the glass material of printing opacity or other light-permeable material circuit boards.
10. according to claim 6 to 9 each described a kind of autofocus lenses based on MEMS (micro electro mechanical system), it is characterized in that: conductor wire or conductive pole have been buried in the inside of described circuit board (6).
11. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 7 is characterized in that: described connecting line (51) is the connection wire of gold thread, aluminum steel or other materials.
12. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 1 is characterized in that: described MEMS microfluidic platform (7) is arranged at the lens place of the top of described lens combination.
13. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 1 is characterized in that: described MEMS microfluidic platform (7) is arranged at the lens place bottom of described lens combination.
14. a kind of autofocus lens based on MEMS (micro electro mechanical system) according to claim 1 is characterized in that: described MEMS microfluidic platform (7) is arranged at a lens place of the centre of described lens combination.
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| CN2012104071276A CN102902039A (en) | 2012-10-23 | 2012-10-23 | Auto-focusing lens based on micro-electromechanical system |
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| CN2012104071276A CN102902039A (en) | 2012-10-23 | 2012-10-23 | Auto-focusing lens based on micro-electromechanical system |
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| CN104834157A (en) * | 2015-04-13 | 2015-08-12 | 南昌欧菲光电技术有限公司 | Camera module and assembly structure thereof |
| CN106210527A (en) * | 2016-07-29 | 2016-12-07 | 广东欧珀移动通信有限公司 | The PDAF calibration steps moved based on MEMS and device |
| WO2017148434A1 (en) * | 2016-03-03 | 2017-09-08 | 宁波舜宇光电信息有限公司 | Microelectromechanical system device for positioning lens barrel |
| CN107277316A (en) * | 2017-06-12 | 2017-10-20 | 京东方科技集团股份有限公司 | Display device and its manufacture method |
| CN107922181A (en) * | 2015-09-24 | 2018-04-17 | 英特尔公司 | MEMS LED zooms |
| CN110383138A (en) * | 2016-11-20 | 2019-10-25 | 尤尼斯拜特罗有限责任公司 | Tunable MEMS etalon device |
| CN111045184A (en) * | 2015-12-11 | 2020-04-21 | 宁波舜宇光电信息有限公司 | Lens assembly and camera module using thermal change driver and automatic focusing method thereof |
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| CN107277316B (en) * | 2017-06-12 | 2020-05-12 | 京东方科技集团股份有限公司 | Display device and method for manufacturing the same |
| CN107277316A (en) * | 2017-06-12 | 2017-10-20 | 京东方科技集团股份有限公司 | Display device and its manufacture method |
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Application publication date: 20130130 |