CN102897704A - Micro-electro-mechanical comb tooth mechanism capable of adjusting tooth gaps by electrostatic force - Google Patents
Micro-electro-mechanical comb tooth mechanism capable of adjusting tooth gaps by electrostatic force Download PDFInfo
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- CN102897704A CN102897704A CN2012103949067A CN201210394906A CN102897704A CN 102897704 A CN102897704 A CN 102897704A CN 2012103949067 A CN2012103949067 A CN 2012103949067A CN 201210394906 A CN201210394906 A CN 201210394906A CN 102897704 A CN102897704 A CN 102897704A
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Abstract
The invention discloses a micro-electro-mechanical comb tooth mechanism capable of adjusting tooth gaps by electrostatic force. The mechanism comprises an electrostatic drive tooth, a fixed tooth consisting of a leftward movement fixed tooth and a rightward movement fixed tooth, a movable tooth, first anchor areas, and an insulation substrate; the first anchor areas are fixedly connected with the insulation substrate; the leftward movement fixed tooth comprises a first wide beam, leftward movement comb teeth and four first folding beams which are bent in a horizontal direction; the rightward movement fixed tooth comprises a second wide beam, rightward movement comb teeth, and four second folding beams which are bent in a horizontal direction; the electrostatic drive tooth comprises comb teeth and a third anchor area; the leftward movement comb teeth, the comb teeth and the leftward movement comb teeth are sequentially and alternatively distributed; the movable tooth comprises a mass block, movable tooth comb teeth, second anchor areas and third folding beams which are bent in a longitudinal direction; the rightward movement comb teeth, the movable tooth comb teeth and the leftward movement comb teeth are sequentially and alternatively distributed; and the first wide beam is provided with a leftward movement stop block; and the second wide beam is provided with a rightward movement stop block. The micro-electro-mechanical comb tooth mechanism adjusts the tooth gaps under the drive of electrostatic force, so that strong signals are produced by micro-electro-mechanical vibration.
Description
Technical field
The invention belongs to the mems structure technical field, specifically, relate to the micro electronmechanical broach mechanism of a kind of electrostatic force modulation backlash.
Background technology
Comb structure has in MEMS widely to be used, for example, and resonator, accelerometer, turn meter, gyro etc.Traditional comb structure is by deciding tooth and moving tooth is composed of, decide tooth and moving space of teeth arrange and usually have many right.In the traditional structure, decide tooth and keep inactive state, do not have the vertical and horizontal displacement, moving tooth is then taken exercises with vibration mode under the effect of external force usually, and its direction of motion is along the length direction of tooth.
Because the restriction of machining accuracy, the gap of deciding tooth and moving tooth in the comb structure can not less than the resolution ratio of technique, also be subject to the depth-width ratio restriction of dry etching simultaneously.On the other hand, the amplitude of moving tooth motion except and outside the Pass institute's size of adding external force has, go back with to decide tooth relevant with the gap of moving tooth.Because the broach gap of traditional structure is immutable, what be subject to again that the restriction of technique can not do is very little, therefore, also very faint by the sensing detecting signal that micro electronmechanical vibration produces.
Have the researcher to propose the adjustable comb structure in monolateral gap, but there are following two major defects in this structure: because broach is normally many to structure, driving force has on one side been wasted in the gap increase that reduces to cause another side in monolateral gap; Because the gap on moving tooth both sides is asymmetric, cause the electrostatic force of deciding between cog on moving tooth and both sides to vary in size, the one dimension rectilinear motion of moving tooth will be affected, and two-dimensional motion occur.
Summary of the invention
Technical problem: technical problem to be solved by this invention is: the micro electronmechanical broach mechanism of a kind of electrostatic force modulation backlash is provided, and this micro electronmechanical broach mechanism is under the driving of electrostatic force, and the modulation backlash is so that the signal that micro electronmechanical vibration produces is strong.
Technical scheme: for achieving the above object, the technical solution used in the present invention is:
The micro electronmechanical broach mechanism of a kind of electrostatic force modulation backlash, this micro electronmechanical broach mechanism comprises the static driving gear, decide tooth by moving to left and move to right decide that tooth forms decide tooth, moving tooth, four the first anchor district and dielectric substrate, four the first anchor districts are fixedly connected on respectively on the dielectric substrate;
Described move to left decide that tooth comprises the first wide beam, the horizontal first fold stoplogs of bending of the broach that moves to left, four edges, the broach that moves to left is fixed on the both sides of the first wide beam, the both sides at the first wide beam two ends are connected in the first anchor district by a first fold stoplog respectively; Move to left and decide tooth and be in vacant state;
Described move to right decide that tooth comprises the second wide beam, horizontal the second folded beams of bending of the broach that moves to right, four edges, the broach that moves to right is fixed on the both sides of the second wide beam, the both sides at the second wide beam two ends are connected in the first anchor district by second folded beam respectively; Move to right and decide tooth and be in vacant state;
Described static driving gear comprises broach and the 3rd anchor district, and the 3rd anchor district is fixedly connected on the dielectric substrate, and broach is fixed on a side in the 3rd anchor district, and the broach that moves to right, broach and the broach that moves to left are alternately arranged successively; Broach is in vacant state;
Described moving tooth comprises mass, moving stripping fork tooth, two the second anchor districts and two are crooked the 3rd folded beam longitudinally, two the second anchor districts are fixedly connected on the dielectric substrate, each second anchor district is connected with an end of the 3rd folded beam, the other end of the 3rd folded beam is connected with mass, moving stripping fork tooth is arranged on a side of mass, and broach moves to right, moving stripping fork tooth and the broach that moves to left alternately arrange successively, the adjacent distance that moves to right between broach and the moving stripping fork tooth, adjacent moving stripping fork tooth and the distance between the broach of moving to left, the adjacent distance that moves to right between broach and the broach, and adjacent broach and the distance that moves to left between the broach equate; Mass, moving stripping fork tooth and the 3rd folded beam all are in vacant state;
Described the first wide beam of deciding tooth that moves to left is provided with the stop block that moves to left, the second wide beam of deciding tooth that moves to right is provided with the stop block that moves to right, move to left stop block and the stop block that moves to right is oppositely arranged, and move to left stop block and the distance between the stop block of moving to right are less than the twice of the adjacent designed distance between broach and the moving stripping fork tooth of moving to right.
Beneficial effect: compared with prior art, the present invention has following beneficial effect:
This micro electronmechanical broach mechanism is under the driving of electrostatic force, and the modulation backlash is so that the signal that micro electronmechanical vibration produces is strong.In the micro electronmechanical broach of the present invention mechanism, the side in mechanism, the broach that moves to right, moving stripping fork tooth and the broach that moves to left are alternately arranged successively, the opposite side in mechanism, the broach that moves to right, broach and the broach that moves to left are alternately arranged successively.Between the 3rd anchor district and the first anchor district, apply voltage, simultaneously, between the second anchor district and the first anchor district, apply voltage, decide teeth directional and move right so that move to right, move to left and decide teeth directional and move left.Move to right and decide tooth and move to left to decide tooth and adjust synchronously gap between itself and moving stripping fork tooth or the broach, can increase the sensing detecting signal amplitude of sensor.Apply voltage swing by change, can adjust the displacement of move to right broach and the broach that moves to left.In the micro-electro-mechanical sensors design, can quote easily structure of the present invention, reduce inter-lobe clearance, increase widely the detection sensitivity of sensor.On the other hand, if change the drive signal amplitude temporal evolution of backlash then can make also temporal evolution of gap, can modulate the moving tooth Oscillation Amplitude that is in resonant condition thus, realize the amplitude modulation of signal, expand the range of application of comb structure.
Description of drawings
Fig. 1 is top view of the present invention.
Fig. 2 is local structural graph of the present invention.
Fig. 3 is A-A cutaway view among Fig. 2.
Fig. 4 is B-B cutaway view among Fig. 2.
Fig. 5 is the first schematic diagram of anchor district on dielectric substrate among the present invention.
Fig. 6 be the present invention in the preparation, the top view of ground floor polysilicon layer.
Fig. 7 be the present invention in the preparation, the top view after ground floor polysilicon layer and second layer polysilicon layer are compound.
Fig. 8 be the present invention in the preparation, the top view of the 3rd layer of polysilicon layer.
Have among the figure: dielectric substrate 100, broach 101, the 3rd anchor district 102, move to left and decide tooth 103, move to right and decide tooth 104, mass 105, moving stripping fork tooth 106, the first wide beam 107, broach 108 moves to left, the second wide beam 109, broach 110 moves to right, first fold stoplog 111, the first anchor district 112, the second folded beam 113, the 3rd folded beam 114, the second anchor district 115, stop block 116 moves to left, stop block 117 moves to right, ground floor polysilicon layer 200, second layer polysilicon layer 201, the 3rd layer of polysilicon layer 202, metal derby 203.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is done further description.
As shown in Figures 1 to 4, the micro electronmechanical broach mechanism of a kind of electrostatic force modulation of the present invention backlash, comprise the static driving gear, decide tooth 103 by moving to left and move to right decide that tooth 104 forms decide tooth, moving tooth, four the first anchor districts 112 and dielectric substrate 100.Four the first anchor districts 112 are fixedly connected on respectively on the dielectric substrate 100.Move to left decide that tooth 103 comprises the first wide beam 107, the horizontal first fold stoplogs 111 of bending of the broach 108 that moves to left, four edges.The first fold stoplog 111 that the edge laterally bends can only be along transverse shifting when mobile.The broach 108 that moves to left is fixed on the both sides of the first wide beam 107.The both sides at the first wide beam 107 two ends are connected in the first anchor district 112 by a first fold stoplog 111 respectively.Move to left and decide tooth 103 and be in vacant state.Move to right decide that tooth 104 comprises the second wide beam 109, horizontal the second folded beams 113 of bending of the broach 110 that moves to right, four edges.The broach 110 that moves to right is fixed on the both sides of the second wide beam 109.The both sides at the second wide beam 109 two ends are connected in the first anchor district 112 by second folded beam 113 respectively.Move to right and decide tooth 104 and be in vacant state.The static driving gear comprises broach 101 and the 3rd anchor district 102.The 3rd anchor district 102 is fixedly connected on the dielectric substrate 100.Broach 101 is fixed on a side in the 3rd anchor district 102, and the broach 110 that moves to right, broach 101 and the broach 108 that moves to left are alternately arranged successively.That is to say, arrange as sequence of unit take the broach 110 that moves to right, broach 101, the broach 108 that moves to left, the broach 110 that namely moves to right, broach 101, the broach 108 that moves to left ..., the broach 110 that moves to right, broach 101, broach 108 moves to left.Broach 101 is in vacant state.Moving tooth comprises longitudinally crooked the 3rd folded beam 114 of mass 105, moving stripping fork tooth 106, two the second anchor districts 115 and two.Two the second anchor districts 115 are fixedly connected on the dielectric substrate 100.Each second anchor district 115 is connected with an end of the 3rd folded beam 114, the other end of the 3rd folded beam 114 is connected with mass 105, moving stripping fork tooth 106 is arranged on a side of mass 105, and the broach 110 that moves to right, moving stripping fork tooth 106 and the broach 108 that moves to left are alternately arranged successively.That is to say, arrange for sequence of unit take the broach 110 that moves to right, moving stripping fork tooth 106, the broach 108 that moves to left, the broach 110 that namely moves to right, move stripping fork tooth 106, the broach 108 that moves to left ..., the broach 110 that moves to right, moving stripping fork tooth 106, broach 108 moves to left.The adjacent distance between broach 110 and the moving stripping fork tooth 106 of moving to right, adjacent moving stripping fork tooth 106 and the distance between the broach 108 of moving to left, the adjacent distance between broach 110 and the broach 101 and adjacent broach 101 and the distance that moves to left between the broach 108 of moving to right equate.Mass 105, moving stripping fork tooth 106 and the 3rd folded beam 114 all are in vacant state.The first wide beam 107 of deciding tooth 103 that moves to left is provided with the stop block 116 that moves to left, and the second wide beam 109 of deciding tooth 104 that moves to right is provided with the stop block 117 that moves to right, and move to left stop block 116 and the stop block 117 that moves to right are oppositely arranged.Move to left stop block 116 and the distance between the stop block 117 of moving to right less than the twice of the adjacent designed distance between broach 110 and the moving stripping fork tooth 106 of moving to right.After designed distance refers to that processes is finished, the distance between the broach that remains static.That is to say, when move to left stop block 116 and the stop block 117 of moving to right are inconsistent, the distance between broach 110 and the moving stripping fork tooth 106 of moving to right, and moving stripping fork tooth 106 and the distance that moves to left between the broach 108 just can not have been adjusted again.By setting move to left stop block 116 and the stop block 117 that moves to right, avoid moving to right between broach 110 and the moving stripping fork tooth 106, and moving stripping fork tooth 106 and the contact between the broach 108 that moves to left.
Further, described broach 108 and the first wide beam 107 of moving to left is perpendicular, moves to right to decide tooth 104 and the second wide beam 109 is perpendicular, and mass 105 is perpendicular with moving stripping fork tooth 106, and broach 101 and the 3rd anchor district 102 are perpendicular.
In technique scheme, four first fold stoplog 111 1 ends are connected on the first wide beam 107, and four first fold stoplog 111 other ends are connected in the first anchor district 112.By the support of four first fold stoplogs, 111 formation to the first wide beam 107 and the broach 108 that moves to left.Four the second folded beam 113 1 ends are connected on the second wide beam 109, and four the second folded beam 113 other ends are connected in the first anchor district 112.By the support of four the second folded beams, 113 formation to the second wide beam 109 and the broach 110 that moves to right.
The operation principle of the micro electronmechanical broach mechanism of the electrostatic force modulation backlash of said structure is: apply voltage between the 3rd anchor district 102 and the first anchor district 112, simultaneously, apply voltage between the second anchor district 115 and the first anchor district 112, this voltage magnitude is identical with the voltage magnitude that applies between the 3rd anchor district 102 and the first anchor district 112.By the electrostatic force that applies voltage and produce, making moves to left decides tooth 103 and moves to right to decide tooth 104 centered by broach 101 or moving stripping fork tooth 106, mobile in opposite directions.Obviously, execute alive amplitude larger, it is more that the distance between broach 110 and the moving stripping fork tooth 106 of moving to right reduces, and it is more that the distance between broach 108 and the moving stripping fork tooth 106 of moving to left also reduces.So just reach the purpose in modulation broach gap.By the move to left spacing of stop block 116 and the stop block 117 that moves to right of setting, can control and move to right between broach 110 and the moving stripping fork tooth 106, move to right between broach 110 and the broach 101, move to left between broach 108 and the broach 101, and the minimum clearance between broach 108 and the moving stripping fork tooth 106 of moving to left.
Structure of the present invention adopts basic micro-electromechanical processing technology to finish.To shown in Figure 8, during preparation, structural material of the present invention is from bottom to top such as Fig. 6: dielectric substrate 100, ground floor polysilicon layer 200, second layer polysilicon layer 201, the 3rd layer of polysilicon layer 202 and metal level 203.
The first wide beam 107 and the first fold stoplog 111 of deciding tooth 103 that move to left made by second layer polysilicon layer 201.Move to left and decide the broach 108 that moves to left of tooth 103, main body along its length is by second layer polysilicon layer 201 and the 3rd layer of polysilicon layer 202 superimposed manufacturing.
The second wide beam 109 and the second folded beam 113 of deciding tooth 104 that move to right made by the 3rd layer of polysilicon layer 202.Move to right and decide the broach 110 that moves to right of tooth 104, main body along its length is by second layer polysilicon layer 201 and the 3rd layer of polysilicon layer 202 superimposed manufacturing.
Move to left decide tooth 103 move to left stop block 116 and move to right decide tooth 104 the stop block 117 that moves to right by second layer polysilicon layer 201 and the 3rd layer of polysilicon layer 202 superimposed manufacturing.
As shown in Figure 5, the first anchor district 112, the second anchor district 115 and the 3rd anchor district 102 are formed by stacking by four layer materials: be ground floor polysilicon layer 200 from bottom to top, it is connected with dielectric substrate 100; Second layer polysilicon layer 201; The 3rd layer of polysilicon layer 202; Realize the metal level 203 of electrical connection.
The below illustrates the manufacturing process of this structure with typical three layers of polysilicon microcomputer electric surface processing technology.
Select the N-type semiconductor silicon chip, the silicon dioxide layer of heat growth 100 nano thickness, the silicon nitride by chemical vapor deposition method deposition one deck 500 nano thickness forms dielectric substrate.Adopt chemical vapor deposition method to deposit the ground floor polysilicon of 300 nanometers and carry out N-type heavy doping and make this layer polysilicon become conductor, form the part in anchor district by the photoetching process etching.The use chemical vapor deposition method deposits the phosphorosilicate glass (PSG) of 2000 nano thickness, forms the figure in anchor district by photoetching process.Utilize the second layer polysilicon of chemical vapor deposition method deposit 2000 nano thickness, polysilicon is carried out N-type heavy doping, photoetching process forms the figure that is positioned at second layer polysilicon.Use chemical vapor deposition method to deposit the phosphorosilicate glass (PSG) of 1500 nano thickness, form the figures such as anchor district, the superimposed district of broach by photoetching process.Utilize the 3rd layer of polysilicon of chemical vapor deposition method deposit 1500 nano thickness, polysilicon is carried out N-type heavy doping, photoetching process forms the figure that is positioned at the 3rd layer of polysilicon.Adopt stripping technology to form the metal electrode figure in the anchor district.At last by the corrosion releasing structure.
The above only is preferred embodiment of the present invention; be noted that for those skilled in the art; under the prerequisite that does not break away from the principle of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (2)
1. the micro electronmechanical broach mechanism of an electrostatic force modulation backlash, it is characterized in that: this micro electronmechanical broach mechanism comprises the static driving gear, decide tooth (103) by moving to left and move to right decide that tooth (104) forms decide tooth, moving tooth, four the first anchor districts (112) and dielectric substrate (100), four the first anchor districts (112) are fixedly connected on respectively on the dielectric substrate (100);
Described moving to left decided the first fold stoplogs (111) that tooth (103) comprises the first wide beam (107), the broach that moves to left (108), four horizontal bendings in edge, the broach (108) that moves to left is fixed on the both sides of the first wide beam (107), and the both sides at the first wide beam (107) two ends are connected in the first anchor district (112) by a first fold stoplog (111) respectively; Move to left and decide tooth (103) and be in vacant state;
Described moving to right decided the second folded beams (113) that tooth (104) comprises the second wide beam (109), the broach that moves to right (110), four horizontal bendings in edge, the broach (110) that moves to right is fixed on the both sides of the second wide beam (109), and the both sides at the second wide beam (109) two ends are connected in the first anchor district (112) by second folded beam (113) respectively; Move to right and decide tooth (104) and be in vacant state;
Described static driving gear comprises broach (101) and the 3rd anchor district (102), the 3rd anchor district (102) is fixedly connected on the dielectric substrate (100), broach (101) is fixed on a side in the 3rd anchor district (102), and the broach that moves to right (110), broach (101) and the broach that moves to left (108) are alternately arranged successively; Broach (101) is in vacant state;
Described moving tooth comprises mass (105), moving stripping fork tooth (106), two the second anchor districts (115) and two are crooked the 3rd folded beam (114) longitudinally, two the second anchor districts (115) are fixedly connected on the dielectric substrate (100), each second anchor district (115) is connected with an end of the 3rd folded beam (114), the other end of the 3rd folded beam (114) is connected with mass (105), moving stripping fork tooth (106) is arranged on a side of mass (105), and the broach that moves to right (110), moving stripping fork tooth (106) and the broach that moves to left (108) are alternately arranged the adjacent broach that moves to right (110) and the distance between the moving stripping fork tooth (106) successively, distance between adjacent moving stripping fork tooth (106) and the broach that moves to left (108), the adjacent broach that moves to right (110) and the distance between the broach (101), and the distance between adjacent broach (101) and the broach that moves to left (108) equates; Mass (105), moving stripping fork tooth (106) and the 3rd folded beam (114) all are in vacant state;
Described the first wide beam (107) of deciding tooth (103) that moves to left is provided with the stop block that moves to left (116), the second wide beam (109) of deciding tooth (104) that moves to right is provided with the stop block that moves to right (117), move to left stop block (116) and the stop block that moves to right (117) is oppositely arranged, and the distance between the stop block that moves to left (116) and the stop block that moves to right (117) is less than the twice of designed distance between the adjacent broach that moves to right (110) and the moving stripping fork tooth (106).
2. according to the micro electronmechanical broach mechanism of electrostatic force modulation claimed in claim 1 backlash, it is characterized in that: the described broach that moves to left (108) is perpendicular with the first wide beam (107), moving to right, it is perpendicular with the second wide beam (109) to decide tooth (104), mass (105) is perpendicular with moving stripping fork tooth (106), and broach (101) is perpendicular with the 3rd anchor district (102).
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| CN201210394906.7A CN102897704B (en) | 2012-10-17 | 2012-10-17 | Micro-electro-mechanical comb tooth mechanism capable of adjusting tooth gaps by electrostatic force |
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| CN201210394906.7A CN102897704B (en) | 2012-10-17 | 2012-10-17 | Micro-electro-mechanical comb tooth mechanism capable of adjusting tooth gaps by electrostatic force |
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| CN103145093A (en) * | 2013-03-18 | 2013-06-12 | 厦门大学 | Preparation method of comb tooth clearance silicon micro-inertial component with high depth-to-width ratio |
| CN103438783A (en) * | 2013-09-05 | 2013-12-11 | 东南大学 | Micro-electro-mechanical bidirectional vernier scale |
| CN103901229A (en) * | 2014-04-18 | 2014-07-02 | 清华大学 | Micromechanics accelerometer |
| CN111381073A (en) * | 2020-05-01 | 2020-07-07 | 深迪半导体(上海)有限公司 | MEMS accelerometer and method for improving shock resistance thereof |
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| CN102897704B (en) | 2015-03-04 |
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