CN102951593B - Electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth - Google Patents
Electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth Download PDFInfo
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- CN102951593B CN102951593B CN201210395413.5A CN201210395413A CN102951593B CN 102951593 B CN102951593 B CN 102951593B CN 201210395413 A CN201210395413 A CN 201210395413A CN 102951593 B CN102951593 B CN 102951593B
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Abstract
The invention discloses an electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth. The electro-thermal-driven micro-electro-mechanical comb tooth mechanism comprises a left-shift electrothermal actuator, a right-shift electrothermal actuator, a fixed tooth, a moving tooth, four first anchor regions and an insulating substrate, wherein the fixed tooth consists of a left-shift fixed tooth and a right-shift fixed tooth; the left-shift electrothermal actuator is connected with one end of the left-shift fixed tooth, and the two ends of the left-shift fixed tooth are respectively connected to the first anchor regions; the right-shift electrothermal actuator is connected with one end of the right-shift fixed tooth, and the two ends of the right-shift fixed tooth are respectively connected to the first anchor regions; the left-shift fixed tooth comprises a first wide beam, a left-shift comb tooth and four first folding beams; the right-shift fixed tooth comprises a first wide beam, a right-shift comb tooth and four second folding beams; the moving tooth comprises a quality block, a moving tooth comb tooth, two second anchor regions and two third folding beams; and a left-shift stop block is arranged on the first wide beam, and a right-shift stop block is arranged on the second wide beam. Under the driving of an electrothermal driving force, the micro-electro-mechanical comb tooth mechanism regulates the intervals of the teeth to enable a signal generated by micro-electro-mechanical vibration to be strong.
Description
Technical field
The invention belongs to mems structure technical field, specifically, relate to a kind of micro electronmechanical comb mechanism of electrothermal drive modulation backlash.
Background technology
Comb structure has in MEMS to be applied widely, such as, and resonator, accelerometer, turn meter, gyro etc.Traditional comb structure by determining tooth and dynamic tooth is composed of, determine tooth and dynamic space of teeth arrange and usually have many right.In traditional structure, determine tooth and keep inactive state, do not have vertical and horizontal displacement, dynamic tooth is then usual takes exercises with vibration mode under the effect of external force, and its direction of motion is along the length direction of tooth.
Due to the restriction of machining accuracy, the gap of determining tooth and dynamic tooth in comb structure can not be less than the resolution ratio of technique, is also subject to the depth-width ratio restriction of dry etching simultaneously.On the other hand, the amplitude of dynamic tooth motion except and outside the Pass the size of added external force has, also with to determine tooth relevant with the gap of dynamic tooth.Because the comb gap of traditional structure is immutable, it is very little that the restriction being subject to again technique can not be done, and therefore, the sensing detecting signal produced by microeletromechanical vibratory is also very faint.
Have researcher to propose the adjustable comb structure in monolateral gap, but there are following two major defects in this structure: because the normally multipair structure of comb, the reduction in monolateral gap must cause the gap of another side to increase, the driving force wasted; Because the gap on dynamic tooth both sides is asymmetric, cause the electrostatic force determining between cog on dynamic tooth and both sides to vary in size, the one dimension rectilinear motion of dynamic tooth will be affected, and occur two-dimensional motion.
Summary of the invention
Technical problem: technical problem to be solved by this invention is: the micro electronmechanical comb mechanism providing a kind of electrothermal drive modulation backlash, this micro electronmechanical comb mechanism is under the driving of electrothermal drive power, and modulation backlash, the signal that microeletromechanical vibratory is produced is strong.
Technical scheme: for achieving the above object, the technical solution used in the present invention is:
A kind of micro electronmechanical comb mechanism of electrothermal drive modulation backlash, this micro electronmechanical comb mechanism comprises the electrical actuator that moves to left, the electrical actuator that moves to right, to determine tooth by moving to left and move to right determine that tooth forms determine tooth, dynamic tooth, four the first anchor district and dielectric substrate, the electrical actuator that moves to left is connected with the one end of determining tooth that moves to left, the two ends of determining tooth that move to left are connected in the first anchor district, the electrical actuator that moves to right is connected with the one end of determining tooth that moves to right, and the two ends of determining tooth that move to right are connected in the first anchor district;
Described moving to left determines that tooth comprises the first wide beam, the comb that moves to left, four the first folded beams transversely bent, the comb that moves to left is fixed on the side of the first wide beam, one end of first wide beam is connected with the electrical actuator that moves to left, and the both sides at the first wide beam two ends are connected in a first anchor district respectively by first folded beam; Move to left and determine tooth and be in vacant state;
Described moving to right determines that tooth comprises the second wide beam, the comb that moves to right, four the second folded beams transversely bent, the comb that moves to right is fixed on the side of the second wide beam, one end of second wide beam is connected with the electrical actuator that moves to right, and the both sides at the second wide beam two ends are connected in a first anchor district respectively by second folded beam; Move to right and determine tooth and be in vacant state;
Four described the first anchor districts are fixedly connected with on an insulating substrate respectively;
Described dynamic tooth comprises mass, dynamic stripping fork tooth, two the second anchor districts and two the 3rd folded beams longitudinally bent, two the second anchor districts are fixedly connected with on an insulating substrate, each second anchor district is connected with one end of the 3rd folded beam, the other end of the 3rd folded beam is connected with mass, dynamic stripping fork tooth is arranged on the side of mass, and the comb that moves to right, dynamic stripping fork tooth and the comb that moves to left alternately are arranged successively, the distance that the adjacent distance moved to right between comb and dynamic stripping fork tooth equals adjacent dynamic stripping fork tooth and moves to left between comb; Mass, dynamic stripping fork tooth and the 3rd folded beam are all in vacant state;
Described the first wide beam determining tooth that moves to left is provided with the stop block that moves to left, the second wide beam determining tooth that moves to right is provided with the stop block that moves to right, move to left stop block and the stop block that moves to right is oppositely arranged, and move to left stop block and the distance moved to right between stop block are less than the twice of the adjacent designed distance between comb and dynamic stripping fork tooth of moving to right.
Beneficial effect: compared with prior art, the present invention has following beneficial effect:
This micro electronmechanical comb mechanism is under the driving of electrothermal drive power, and modulation backlash, the signal that microeletromechanical vibratory is produced is strong.In micro electronmechanical comb mechanism of the present invention, the comb that moves to right, dynamic stripping fork tooth and the comb that moves to left alternately are arranged successively.By applying electric current respectively to the 3rd anchor district moved to right in electrical actuator and the 4th anchor district moved to left in electrical actuator, moving to right of making to be connected with the electrical actuator that moves to right is determined teeth directional and is moved right, and moving to left of being connected with the electrical actuator that moves to left is determined teeth directional and moved left.Move to right and determine tooth and the gap of determining between tooth synchronous adjustment itself and dynamic stripping fork tooth that moves to left, the sensing detecting signal amplitude of sensor can be increased.By changing size of current, the displacement of move to right electrical actuator and the electrical actuator that moves to left can be adjusted.In micro-electro-mechanical sensors design, structure of the present invention can be quoted easily, reduce gap, the detection sensitivity of sensor can be increased widely.On the other hand, if the drive signal amplitude changing backlash changes in time, gap can be made also to change in time, can the dynamic tooth Oscillation Amplitude being in resonant condition be modulated thus, realize the amplitude modulation of signal, expand the range of application of comb structure.
Accompanying drawing explanation
Fig. 1 is top view of the present invention.
Fig. 2 is local structural graph of the present invention.
Fig. 3 is A-A sectional view in Fig. 2.
Fig. 4 is B-B sectional view in Fig. 2.
Fig. 5 is the first anchor district schematic diagram on an insulating substrate in the present invention.
Fig. 6 is in the embodiment of the present invention 1, the top view of ground floor polysilicon layer.
Fig. 7 is in the embodiment of the present invention 1, the top view after ground floor polysilicon layer and second layer polysilicon layer compound.
Fig. 8 is in the embodiment of the present invention 1, the top view of third layer polysilicon layer.
Have in figure: dielectric substrate 100, move to right electrical actuator 101, move to left electrical actuator 102, move to left and determine tooth 103, move to right and determine tooth 104, mass 105, dynamic stripping fork tooth 106, first wide beam 107, move to left comb 108, second wide beam 109, move to right comb 110, first folded beam 111, first anchor district 112, second folded beam 113, 3rd folded beam 114, second anchor district 115, move to left stop block 116, move to right stop block 117, second thin straight beam 118, second wide straight beam 119, second thin short straight beam 120, second tie-beam 121, 3rd anchor district 122, first thin short straight beam 123, first wide straight beam 124, first thin straight beam 125, first tie-beam 126, 4th anchor district 127, ground floor polysilicon layer 200, second layer polysilicon layer 201, third layer polysilicon layer 202, metal derby 203.
Detailed description of the invention
Below in conjunction with accompanying drawing, further description is done to the present invention.
As shown in Figures 1 to 4, the micro electronmechanical comb mechanism of electrothermal drive modulation backlash of the present invention, comprise the electrical actuator 102 that moves to left, the electrical actuator 101 that moves to right, to determine tooth 103 by moving to left and move to right determine that tooth 104 forms determine tooth, dynamic tooth, four the first anchor districts 112 and dielectric substrate 100.The electrical actuator 102 that moves to left is connected with the one end of determining tooth 103 that moves to left, and the two ends of determining tooth 103 that move to left are connected in the first anchor district 112.The electrical actuator 101 that moves to right is connected with the one end of determining tooth 104 that moves to right, and the two ends of determining tooth 104 that move to right are connected in the first anchor district 112.Move to left and determine the first folded beam 111 that tooth 103 comprises the first wide beam 107, the comb 108, four that moves to left transversely bends.The first folded beam 111 transversely bent, when mobile, can only transversely move.The comb 108 that moves to left is fixed on the side of the first wide beam 107, and one end of the first wide beam 107 is connected with the electrical actuator that moves to left, and the both sides at the first wide beam 107 two ends are connected in a first anchor district 112 respectively by first folded beam 111.Move to left and determine tooth 103 and be in vacant state.Move to right and determine the second folded beam 113 that tooth 104 comprises the second wide beam 109, the comb 110, four that moves to right transversely bends.The second folded beam 113 transversely bent, when mobile, can only transversely move.The comb 110 that moves to right is fixed on the side of the second wide beam 109, and one end of the second wide beam 109 is connected with the electrical actuator that moves to right, and the both sides at the second wide beam 109 two ends are connected in a first anchor district 112 respectively by second folded beam 113.Move to right and determine tooth 104 and be in vacant state.Four the first anchor districts 112 are fixedly connected in dielectric substrate 100 respectively.
Dynamic tooth comprises mass 105, dynamic stripping fork tooth 106, two the second anchor districts 115 and two the 3rd folded beams 114 longitudinally bent.Two the second anchor districts 115 are fixedly connected in dielectric substrate 100.Each second anchor district 115 is connected with one end of the 3rd folded beam 114, and the other end of the 3rd folded beam 114 is connected with mass 105.The 3rd longitudinally bending folded beam 114, when mobile, can only move longitudinally.Dynamic stripping fork tooth 106 is arranged on the side of mass 105, and the comb 110 that moves to right, dynamic stripping fork tooth 106 and the comb 108 that moves to left alternately are arranged successively.That is, comb with the comb 110 that moves to right, dynamic stripping fork tooth 106, the comb 108 that moves to left for sequence of unit arrangement, the comb 110 that namely moves to right, move stripping fork tooth 106, move to left comb 108 ..., the comb 110 that moves to right, dynamic stripping fork tooth 106, move to left comb 108.The distance that the adjacent distance moved to right between comb 110 and dynamic stripping fork tooth 106 equals adjacent dynamic stripping fork tooth 106 and moves to left between comb 108.Mass 105, dynamic stripping fork tooth 106 and the 3rd folded beam 114 are all in vacant state.The first wide beam 107 determining tooth 103 that moves to left is provided with the stop block 116 that moves to left, and the second wide beam 109 determining tooth 104 that moves to right is provided with the stop block 117 that moves to right, and the stop block 116 that moves to left is oppositely arranged with the stop block 117 that moves to right.Stop block 116 and the distance moved to right between stop block 117 of moving to left is less than the twice of the adjacent designed distance between comb 110 and dynamic stripping fork tooth 106 of moving to right.After designed distance refers to that processes completes, the distance between the comb remained static.
That is, when move to left stop block 116 and the stop block 117 that moves to right inconsistent time, the distance moved to right between comb 110 and dynamic stripping fork tooth 106, and dynamic stripping fork tooth 106 and the distance that moves to left between comb 108 just can not have adjusted again.By arranging move to left stop block 116 and the stop block 117 that moves to right, avoid moving to right between comb 110 and dynamic stripping fork tooth 106, and the Contact of dynamic stripping fork tooth 106 and the comb 108 that moves to left.
Further, the electrical actuator 101 that moves to right is arranged in move to right determines the left side of tooth 104.The electrical actuator 101 that moves to right comprises two groups of electric heating performance elements that move to right.Often the group electric heating performance element that moves to right comprises the first thin straight beam 125, first wide straight beam 124, first tie-beam 126, first thin short straight beam 123 and two Ge Sanmao districts 122.3rd anchor district 122 is fixed in dielectric substrate 100.The width of the first thin straight beam 125 is less than the width of the first wide straight beam 124.One end of first thin straight beam 125 is connected to determines in the 3rd anchor district 122 of tooth 104 away from moving to right, one end of first wide straight beam 124 is connected to one end of the first thin short straight beam 123, and the other end of the first thin short straight beam 123 is connected to be determined in the 3rd anchor district 122 of tooth 104 near moving to right.The other end of the first thin straight beam 125 is connected with the first tie-beam 126 respectively with the other end of the first wide straight beam 124, and one end of the first tie-beam 126 is connected with the second wide beam 109.First thin straight beam 125, the first thin short straight beam 123 of wide straight beam 124, first and the first tie-beam 126 are all in vacant state.Two groups of electric heating performance elements that move to right are symmetrical along the center line of the second wide beam 109.
Further, the electrical actuator 102 that moves to left is arranged in move to left determines the right side of tooth 103.The electrical actuator 102 that moves to left comprises two groups of electric heating performance elements that move to left.Often the group electric heating performance element that moves to left comprises the second thin straight beam 118, second wide straight beam 119, second tie-beam 121, second thin short straight beam 120 and two Ge Simao districts 127.4th anchor district 127 is fixed in dielectric substrate 100.The width of the second thin straight beam 118 is less than the width of the second wide straight beam 119, one end of second thin straight beam 118 is connected to determines in the 4th anchor district 127 of tooth 103 away from moving to left, one end of second wide straight beam 119 is connected to one end of the second thin short straight beam 120, the other end of the second thin short straight beam 120 is connected to be determined in the 4th anchor district 127 of tooth 103 near moving to left, the other end of the second thin straight beam 118 is connected with the second tie-beam 121 respectively with the other end of the second wide straight beam 119, and one end of the second tie-beam 121 is connected with the first wide beam 107.Second thin straight beam 118, the second thin short straight beam 120 of wide straight beam 119, second and the second tie-beam 121 are in vacant state.Two groups of electric heating performance elements that move to left are symmetrical along the center line of the first wide beam 107.
Further, described move to left comb 108 and the first wide beam 107 perpendicular, move to right determine tooth 104 and the second wide beam 109 perpendicular, mass 105 is perpendicular with dynamic stripping fork tooth 106.
Further, move to right the first wide straight beam 124, first thin straight beam 125, first tie-beam 126 in electric heating performance element and the first thin short straight beam 123 of described often group is an overall structure.Be set to overall structure, be convenient to manufacture.
Further, move to left wide straight beam 119, second tie-beam 121 of the thin straight beam of second in electric heating performance element 118, second and the second thin short straight beam 120 of described often group is an overall structure.Be set to overall structure, be convenient to manufacture.
In technique scheme, four first folded beam 111 one end are connected on the first wide beam 107, and four first folded beam 111 other ends are connected in a first anchor district 112.The support to the first wide beam 107 and the comb 108 that moves to left is formed by four the first folded beams 111.Four second folded beam 113 one end are connected on the second wide beam 109, and four second folded beam 113 other ends are connected in a first anchor district 112.The support to the second wide beam 109 and the comb 110 that moves to right is formed by four the second folded beams 113.
The operation principle of the micro electronmechanical comb mechanism of the electrothermal drive modulation backlash of said structure is: apply electric current respectively to the 3rd anchor district 122 moved to right in electrical actuator 101 and the 4th anchor district 127 moved to left in electrical actuator 102.Moving to right in electrical actuator 101, because the width of the first wide straight beam 124 is greater than the first thin straight beam 125, so the resistance of the first wide straight beam 124 is less than the resistance of the first thin straight beam 125.When electric current is by the first wide straight beam 124 and the first thin straight beam 125, the heat that the first wide straight beam 124 produces is less than the heat that the first thin straight beam 125 produces.According to the principle of expanding with heat and contract with cold, the degrees of expansion of the first wide straight beam 124 is less than the degrees of expansion of the first thin straight beam 125, thus causes the first tie-beam 126 to move right, and then moving to right of causing being connected with the electrical actuator 101 that moves to right is determined tooth 104 and moved right.In like manner, moving to left in electrical actuator 102, because the width of the second wide straight beam 119 is greater than the second thin straight beam 120, so the resistance of the second wide straight beam 119 is less than the resistance of the second thin straight beam 120.When electric current is by the second wide straight beam 119 and the second thin straight beam 120, the heat that the second wide straight beam 119 produces is less than the heat that the second thin straight beam 120 produces.According to the principle of expanding with heat and contract with cold, the degrees of expansion of the second wide straight beam 119 is less than the degrees of expansion of the second thin straight beam 120, thus causes the second tie-beam 121 to be moved to the left, and then moving to left of causing being connected with the electrical actuator 102 that moves to left is determined tooth 103 and be moved to the left.Move to right and determine tooth 104 and move to left to determine the movement of tooth 103, make the distance moved to right between comb 110 and dynamic stripping fork tooth 106, and the distance moved to left between comb 108 and dynamic stripping fork tooth 106 all diminishes.Obviously, electric current is larger, and the displacement of move to right electrical actuator 101 and the electrical actuator 102 that moves to left is larger, and it is more that the distance moved to right between comb 110 and dynamic stripping fork tooth 106 reduces, and it is more that the distance moved to left between comb 108 and dynamic stripping fork tooth 106 also reduces.So just reach the object in modulation comb gap.By arranging the spacing of move to left stop block 116 and the stop block 117 that moves to right, can control to move to right between comb 110 and dynamic stripping fork tooth 106, and the minimum clearance between comb 108 and dynamic stripping fork tooth 106 that moves to left.
Structure of the present invention adopts basic micro-electromechanical processing technology to complete.As shown in Figure 6 to 8, during preparation, structural material of the present invention is from bottom to top: dielectric substrate 100, ground floor polysilicon layer 200, second layer polysilicon layer 201, third layer polysilicon layer 202 and metal level 203.
The thin straight beam of first in the electrical actuator 101 that move to right 125, the first thin short straight beam 123 of wide straight beam 124, first tie-beam 126, first and the second wide beam 109 are an overall structure, all adopt third layer polysilicon layer 202 to make.
The thin straight beam of second in the electrical actuator 102 that move to left 118, the second thin short straight beam 120 of wide straight beam 119, second tie-beam 121, second and the first wide beam 107 are an overall structure, all adopt second layer polysilicon layer 201 to make.
Move to left the first wide beam 107 of determining tooth 103 and the first folded beam 111 is manufactured by second layer polysilicon layer 201.Move to left and determine the comb 108 that moves to left of tooth 103, main body is along its length by second layer polysilicon layer 201 and the superimposed manufacture of third layer polysilicon layer 202.
Move to right the second wide beam 109 of determining tooth 104 and the second folded beam 113 is manufactured by third layer polysilicon layer 202.Move to right and determine the comb 110 that moves to right of tooth 104, main body is along its length by second layer polysilicon layer 201 and the superimposed manufacture of third layer polysilicon layer 202.
Move to left determine tooth 103 move to left stop block 116 and move to right determine tooth 104 the stop block 117 that moves to right by second layer polysilicon layer 201 and the superimposed manufacture of third layer polysilicon layer 202.
Under the region that the second wide beam 109 of determining tooth 104 of moving to right covers, first be air layer, then being only moves to left determines the part of tooth 103, comprise the local of the first wide beam 107, the coupling part of move to left comb 108 and the first wide beam 107, and the coupling part of the first wide beam 107 and the first folded beam 111.
Mass 105 in dynamic tooth, dynamic stripping fork tooth 106 and the 3rd folded beam 114 are formed by stacking by second layer polysilicon layer 201 and third layer polysilicon layer 202.
As shown in Figure 5, the first anchor district 115 of anchor district 112, second, the 3rd anchor district 127 of anchor district 122 the 4th are formed by stacking by four layer materials: be ground floor polysilicon layer 200 from bottom to top, it is connected with dielectric substrate 100; Second layer polysilicon layer 201; Third layer polysilicon layer 202; Realize the metal level 203 of electrical connection.
The manufacturing process of this structure is described with typical three layers of polysilicon microcomputer electric surface processing technology below.
Select N-type semiconductor silicon chip, the silicon dioxide layer of heat growth 100 nano thickness, is deposited the silicon nitride of one deck 500 nano thickness, forms dielectric substrate by chemical vapor deposition method.Adopt chemical vapor deposition method deposit the ground floor polysilicon of 300 nanometers and carry out N-type heavy doping and make this layer of polysilicon become conductor, formed the part in anchor district by photoetching process etching.Use chemical vapor deposition method to deposit the phosphorosilicate glass (PSG) of 2000 nano thickness, formed the figure in anchor district by photoetching process.Utilize the second layer polysilicon of chemical vapor deposition method deposit 2000 nano thickness, carry out N-type heavy doping to polysilicon, photoetching process forms the figure being positioned at second layer polysilicon.Use chemical vapor deposition method to deposit the phosphorosilicate glass (PSG) of 1500 nano thickness, form the figure such as anchor district, the superimposed district of comb by photoetching process.Utilize the third layer polysilicon of chemical vapor deposition method deposit 1500 nano thickness, carry out N-type heavy doping to polysilicon, photoetching process forms the figure being positioned at third layer polysilicon.Stripping technology is adopted to form metal electrode figure in anchor district.Finally by corrosion releasing structure.
The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (6)
1. a micro electronmechanical comb mechanism for electrothermal drive modulation backlash, is characterized in that: this micro electronmechanical comb mechanism comprise the electrical actuator that moves to left (102), the electrical actuator that moves to right (101), to determine tooth (103) by moving to left and move to right determine that tooth (104) forms determine tooth, dynamic tooth, four the first anchor districts (112) and dielectric substrate (100);
Described moving to left is determined tooth (103) and is comprised the first wide beam (107), the comb that moves to left (108), four the first folded beams (111) transversely bent, the comb (108) that moves to left is fixed on the side of the first wide beam (107), one end of first wide beam (107) is connected with the electrical actuator that moves to left (102), and the both sides at the first wide beam (107) two ends are connected in a first anchor district (112) respectively by first folded beam (111); Move to left and determine tooth (103) and be in vacant state;
Described moving to right is determined tooth (104) and is comprised the second wide beam (109), the comb that moves to right (110), four the second folded beams (113) transversely bent, the comb (110) that moves to right is fixed on the side of the second wide beam (109), one end of second wide beam (109) is connected with the electrical actuator that moves to right (101), and the both sides at the second wide beam (109) two ends are connected in a first anchor district (112) respectively by second folded beam (113); Move to right and determine tooth (104) and be in vacant state;
Four described the first anchor districts (112) are fixedly connected in dielectric substrate (100) respectively;
Described dynamic tooth comprises mass (105), dynamic stripping fork tooth (106), two the second anchor districts (115) and two the 3rd folded beams (114) longitudinally bent, two the second anchor districts (115) are fixedly connected in dielectric substrate (100), each second anchor district (115) is connected with one end of the 3rd folded beam (114), the other end of the 3rd folded beam (114) is connected with mass (105), dynamic stripping fork tooth (106) is arranged on the side of mass (105), and the comb that moves to right (110), dynamic stripping fork tooth (106) and the comb that moves to left (108) are alternately arranged successively, distance between the adjacent comb that moves to right (110) and dynamic stripping fork tooth (106) equals the distance between adjacent dynamic stripping fork tooth (106) and the comb that moves to left (108), mass (105), dynamic stripping fork tooth (106) and the 3rd folded beam (114) are all in vacant state,
Described the first wide beam (107) determining tooth (103) that moves to left is provided with the stop block that moves to left (116), the second wide beam (109) determining tooth (104) that moves to right is provided with the stop block that moves to right (117), move to left stop block (116) and the stop block that moves to right (117) is oppositely arranged, and the distance between the stop block that moves to left (116) and the stop block that moves to right (117) is less than the twice of designed distance between the adjacent comb that moves to right (110) and dynamic stripping fork tooth (106).
2. the micro electronmechanical comb mechanism of electrothermal drive modulation backlash according to claim 1, it is characterized in that: the described electrical actuator that moves to right (101) is arranged in move to right determines the left side of tooth (104), the electrical actuator (101) that moves to right comprises two groups of electric heating performance elements that move to right, often the group electric heating performance element that moves to right comprises the first thin straight beam (125), first wide straight beam (124), first tie-beam (126), first thin short straight beam (123) and two Ge Sanmao districts (122), 3rd anchor district (122) is fixed in dielectric substrate (100), the width of the first thin straight beam (125) is less than the width of the first wide straight beam (124), one end of first thin straight beam (125) is connected to determines in the 3rd anchor district (122) of tooth (104) away from moving to right, one end of first wide straight beam (124) is connected to one end of the first thin short straight beam (123), the other end of the first thin short straight beam (123) is connected to be determined in the 3rd anchor district (122) of tooth (104) near moving to right, the other end of the first thin straight beam (125) is connected with the first tie-beam (126) respectively with the other end of the first wide straight beam (124), one end of first tie-beam (126) is connected with the second wide beam (109), first thin straight beam (125), first wide straight beam (124), first tie-beam (126) and the first thin short straight beam (123) are all in vacant state, two groups of electric heating performance elements that move to right are symmetrical along the center line of the second wide beam (109).
3. the micro electronmechanical comb mechanism of electrothermal drive modulation backlash according to claim 1, it is characterized in that: the described electrical actuator that moves to left (102) is arranged in move to left determines the right side of tooth (103), the electrical actuator (102) that moves to left comprises two groups of electric heating performance elements that move to left, often the group electric heating performance element that moves to left comprises the second thin straight beam (118), second wide straight beam (119), second tie-beam (121), second thin short straight beam (120) and two Ge Simao districts (127), 4th anchor district (127) is fixed in dielectric substrate (100), the width of the second thin straight beam (118) is less than the width of the second wide straight beam (119), one end of second thin straight beam (118) is connected to determines in the 4th anchor district (127) of tooth (103) away from moving to left, one end of second wide straight beam (119) is connected to one end of the second thin short straight beam (120), the other end of the second thin short straight beam (120) is connected to be determined in the 4th anchor district (127) of tooth (103) near moving to left, the other end of the second thin straight beam (118) is connected with the second tie-beam (121) respectively with the other end of the second wide straight beam (119), one end of second tie-beam (121) is connected with the first wide beam (107), second thin straight beam (118), second wide straight beam (119), second thin short straight beam (120) and the second tie-beam (121) are in vacant state, two groups of electric heating performance elements that move to left are symmetrical along the center line of the first wide beam (107).
4. according to the micro electronmechanical comb mechanism of the electrothermal drive modulation backlash described in Claims 2 or 3, it is characterized in that: the described comb that moves to left (108) is perpendicular with the first wide beam (107), the comb (110) that moves to right is perpendicular with the second wide beam (109), and mass (105) is perpendicular with dynamic stripping fork tooth (106).
5. according to the micro electronmechanical comb mechanism of electrothermal drive modulation backlash according to claim 2, it is characterized in that: move to right the first wide straight beam (124) in electric heating performance element, the first thin straight beam (125), the first tie-beam (126) and the first thin short straight beam (123) of described often group is an overall structure.
6. according to the micro electronmechanical comb mechanism of electrothermal drive modulation backlash according to claim 3, it is characterized in that: the move to left thin straight beam (118) of second in electric heating performance element, the second wide straight beam (119), the second tie-beam (121) and the second thin short straight beam (120) of described often group is an overall structure.
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| CN201210395413.5A CN102951593B (en) | 2012-10-17 | 2012-10-17 | Electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth |
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| CN201210395413.5A CN102951593B (en) | 2012-10-17 | 2012-10-17 | Electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth |
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| CN103424057B (en) * | 2013-09-05 | 2016-01-13 | 东南大学 | Micro electromechanical structure deflection angle measures vernier scale |
| CN103424064B (en) * | 2013-09-05 | 2015-12-09 | 东南大学 | High-resolution micrometer vernier scale for micro electro mechanical system |
| JP2015123526A (en) * | 2013-12-26 | 2015-07-06 | ソニー株式会社 | Function element, acceleration sensor, and switch |
| CN107628587B (en) * | 2017-09-21 | 2019-07-23 | 中国传媒大学 | A kind of multistage electrothermal drive MEMS actuator and its manufacturing method |
| CN111381073B (en) * | 2020-05-01 | 2021-11-30 | 深迪半导体(绍兴)有限公司 | MEMS accelerometer and method for improving shock resistance thereof |
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| JPH10209792A (en) * | 1997-01-17 | 1998-08-07 | Seiko Epson Corp | Saw resonator |
| US7177063B2 (en) * | 2003-08-12 | 2007-02-13 | Terraop Ltd. | Bouncing mode operated scanning micro-mirror |
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| CN101079607A (en) * | 2007-05-15 | 2007-11-28 | 东南大学 | Small mechanical filter of static comb driving folding beam |
| CN101955151A (en) * | 2010-09-26 | 2011-01-26 | 中国科学院上海微系统与信息技术研究所 | Two-dimensional comb tooth electrostatic driver based on silicon plastic deformation principle and manufacturing method thereof |
| CN102324344A (en) * | 2011-05-27 | 2012-01-18 | 东南大学 | Radio-frequency micromechanical switch with bidirectional push-pull comb-tooth unit |
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