CN102951593A - Electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth - Google Patents
Electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth Download PDFInfo
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- CN102951593A CN102951593A CN2012103954135A CN201210395413A CN102951593A CN 102951593 A CN102951593 A CN 102951593A CN 2012103954135 A CN2012103954135 A CN 2012103954135A CN 201210395413 A CN201210395413 A CN 201210395413A CN 102951593 A CN102951593 A CN 102951593A
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Abstract
The invention discloses an electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth. The electro-thermal-driven micro-electro-mechanical comb tooth mechanism comprises a left-shift electrothermal actuator, a right-shift electrothermal actuator, a fixed tooth, a moving tooth, four first anchor regions and an insulating substrate, wherein the fixed tooth consists of a left-shift fixed tooth and a right-shift fixed tooth; the left-shift electrothermal actuator is connected with one end of the left-shift fixed tooth, and the two ends of the left-shift fixed tooth are respectively connected to the first anchor regions; the right-shift electrothermal actuator is connected with one end of the right-shift fixed tooth, and the two ends of the right-shift fixed tooth are respectively connected to the first anchor regions; the left-shift fixed tooth comprises a first wide beam, a left-shift comb tooth and four first folding beams; the right-shift fixed tooth comprises a first wide beam, a right-shift comb tooth and four second folding beams; the moving tooth comprises a quality block, a moving tooth comb tooth, two second anchor regions and two third folding beams; and a left-shift stop block is arranged on the first wide beam, and a right-shift stop block is arranged on the second wide beam. Under the driving of an electrothermal driving force, the micro-electro-mechanical comb tooth mechanism regulates the intervals of the teeth to enable a signal generated by micro-electro-mechanical vibration to be strong.
Description
Technical field
The invention belongs to the mems structure technical field, specifically, relate to the micro electronmechanical broach mechanism of a kind of electrothermal drive modulation backlash.
Background technology
Comb structure has in MEMS widely to be used, for example, and resonator, accelerometer, turn meter, gyro etc.Traditional comb structure is by deciding tooth and moving tooth is composed of, decide tooth and moving space of teeth arrange and usually have many right.In the traditional structure, decide tooth and keep inactive state, do not have the vertical and horizontal displacement, moving tooth is then taken exercises with vibration mode under the effect of external force usually, and its direction of motion is along the length direction of tooth.
Because the restriction of machining accuracy, the gap of deciding tooth and moving tooth in the comb structure can not less than the resolution ratio of technique, also be subject to the depth-width ratio restriction of dry etching simultaneously.On the other hand, the amplitude of moving tooth motion except and outside the Pass institute's size of adding external force has, go back with to decide tooth relevant with the gap of moving tooth.Because the broach gap of traditional structure is immutable, what be subject to again that the restriction of technique can not do is very little, therefore, also very faint by the sensing detecting signal that micro electronmechanical vibration produces.
Have the researcher to propose the adjustable comb structure in monolateral gap, but there are following two major defects in this structure: because broach is normally many to structure, driving force has on one side been wasted in the gap increase that reduces to cause another side in monolateral gap; Because the gap on moving tooth both sides is asymmetric, cause the electrostatic force of deciding between cog on moving tooth and both sides to vary in size, the one dimension rectilinear motion of moving tooth will be affected, and two-dimensional motion occur.
Summary of the invention
Technical problem: technical problem to be solved by this invention is: the micro electronmechanical broach mechanism of a kind of electrothermal drive modulation backlash is provided, and this micro electronmechanical broach mechanism is under the driving of electrothermal drive power, and the modulation backlash is so that the signal that micro electronmechanical vibration produces is strong.
Technical scheme: for achieving the above object, the technical solution used in the present invention is:
The micro electronmechanical broach mechanism of a kind of electrothermal drive modulation backlash, this micro electronmechanical broach mechanism comprises the electrical actuator that moves to left, the electrical actuator that moves to right, decide tooth by moving to left and move to right decide that tooth forms decide tooth, moving tooth, four the first anchor district and dielectric substrate, the electrical actuator that moves to left is connected with the end of deciding tooth that moves to left, the two ends of deciding tooth that move to left are connected in the first anchor district, the electrical actuator that moves to right is connected with the end of deciding tooth that moves to right, and the two ends of deciding tooth that move to right are connected in the first anchor district;
Described move to left decide that tooth comprises the first wide beam, the horizontal first fold stoplogs of bending of the broach that moves to left, four edges, the broach that moves to left is fixed on a side of the first wide beam, one end of the first wide beam is connected with the electrical actuator that moves to left, and the both sides at the first wide beam two ends are connected in the first anchor district by a first fold stoplog respectively; Move to left and decide tooth and be in vacant state;
Described move to right decide that tooth comprises the second wide beam, horizontal the second folded beams of bending of the broach that moves to right, four edges, the broach that moves to right is fixed on a side of the second wide beam, one end of the second wide beam is connected with the electrical actuator that moves to right, and the both sides at the second wide beam two ends are connected in the first anchor district by second folded beam respectively; Move to right and decide tooth and be in vacant state;
Described four the first anchor districts are fixedly connected on respectively on the dielectric substrate;
Described moving tooth comprises longitudinally crooked the 3rd folded beam of mass, moving stripping fork tooth, two the second anchor districts and two, two the second anchor districts are fixedly connected on the dielectric substrate, each second anchor district is connected with an end of the 3rd folded beam, the other end of the 3rd folded beam is connected with mass, moving stripping fork tooth is arranged on a side of mass, and the broach that moves to right, moving stripping fork tooth and the broach that moves to left alternately arrange successively, and the adjacent distance that moves to right between broach and the moving stripping fork tooth equals adjacent moving stripping fork tooth and the distance between the broach of moving to left; Mass, moving stripping fork tooth and the 3rd folded beam all are in vacant state;
Described the first wide beam of deciding tooth that moves to left is provided with the stop block that moves to left, the second wide beam of deciding tooth that moves to right is provided with the stop block that moves to right, move to left stop block and the stop block that moves to right is oppositely arranged, and move to left stop block and the distance between the stop block of moving to right are less than the twice of the adjacent designed distance between broach and the moving stripping fork tooth of moving to right.
Beneficial effect: compared with prior art, the present invention has following beneficial effect:
This micro electronmechanical broach mechanism is under the driving of electrothermal drive power, and the modulation backlash is so that the signal that micro electronmechanical vibration produces is strong.In the micro electronmechanical broach of the present invention mechanism, the broach that moves to right, moving stripping fork tooth and the broach that moves to left are alternately arranged successively.By the 3rd anchor district in the electrical actuator that moves to right and the 4th anchor district that moves to left in the electrical actuator are applied respectively electric current, so that moving to right of being connected with the electrical actuator that moves to right decide teeth directional and move right, moving to left of being connected with the electrical actuator that moves to left decided teeth directional and moved left.Move to right and decide tooth and move to left to decide tooth and adjust synchronously gap between itself and the moving stripping fork tooth, can increase the sensing detecting signal amplitude of sensor.By the change size of current, can adjust the displacement of move to right electrical actuator and the electrical actuator that moves to left.In the micro-electro-mechanical sensors design, can quote easily structure of the present invention, reduce the gap, can increase widely the detection sensitivity of sensor.On the other hand, if change the drive signal amplitude temporal evolution of backlash then can make also temporal evolution of gap, can modulate the moving tooth Oscillation Amplitude that is in resonant condition thus, realize the amplitude modulation of signal, expand the range of application of comb structure.
Description of drawings
Fig. 1 is top view of the present invention.
Fig. 2 is local structural graph of the present invention.
Fig. 3 is A-A cutaway view among Fig. 2.
Fig. 4 is B-B cutaway view among Fig. 2.
Fig. 5 is the first schematic diagram of anchor district on dielectric substrate among the present invention.
Fig. 6 is in the embodiment of the invention 1, the top view of ground floor polysilicon layer.
Fig. 7 is in the embodiment of the invention 1, the top view after ground floor polysilicon layer and second layer polysilicon layer are compound.
Fig. 8 is in the embodiment of the invention 1, the top view of the 3rd layer of polysilicon layer.
Have among the figure: dielectric substrate 100, electrical actuator 101 moves to right, electrical actuator 102 moves to left, move to left and decide tooth 103, move to right and decide tooth 104, mass 105, moving stripping fork tooth 106, the first wide beam 107, broach 108 moves to left, the second wide beam 109, broach 110 moves to right, first fold stoplog 111, the first anchor district 112, the second folded beam 113, the 3rd folded beam 114, the second anchor district 115, stop block 116 moves to left, stop block 117 moves to right, the second thin straight beam 118, the second wide straight beam 119, the second thin short straight beam 120, the second tie-beam 121, the 3rd anchor district 122, the first thin short straight beam 123, the first wide straight beam 124, the first thin straight beam 125, the first tie-beam 126, the 4th anchor district 127, ground floor polysilicon layer 200, second layer polysilicon layer 201, the 3rd layer of polysilicon layer 202, metal derby 203.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is done further description.
As shown in Figures 1 to 4, the micro electronmechanical broach mechanism of electrothermal drive modulation of the present invention backlash, comprise the electrical actuator 102 that moves to left, the electrical actuator 101 that moves to right, decide tooth 103 by moving to left and move to right decide that tooth 104 forms decide tooth, moving tooth, four the first anchor districts 112 and dielectric substrate 100.The electrical actuator 102 that moves to left is connected with the end of deciding tooth 103 that moves to left, and the two ends of deciding tooth 103 that move to left are connected in the first anchor district 112.The electrical actuator 101 that moves to right is connected with the end of deciding tooth 104 that moves to right, and the two ends of deciding tooth 104 that move to right are connected in the first anchor district 112.Move to left decide that tooth 103 comprises the first wide beam 107, the horizontal first fold stoplogs 111 of bending of the broach 108 that moves to left, four edges.The first fold stoplog 111 that the edge laterally bends can only be along transverse shifting when mobile.The broach 108 that moves to left is fixed on a side of the first wide beam 107, and an end of the first wide beam 107 is connected with the electrical actuator that moves to left, and the both sides at the first wide beam 107 two ends are connected in the first anchor district 112 by a first fold stoplog 111 respectively.Move to left and decide tooth 103 and be in vacant state.Move to right decide that tooth 104 comprises the second wide beam 109, horizontal the second folded beams 113 of bending of the broach 110 that moves to right, four edges.The second folded beam 113 that the edge laterally bends can only be along transverse shifting when mobile.The broach 110 that moves to right is fixed on a side of the second wide beam 109, and an end of the second wide beam 109 is connected with the electrical actuator that moves to right, and the both sides at the second wide beam 109 two ends are connected in the first anchor district 112 by second folded beam 113 respectively.Move to right and decide tooth 104 and be in vacant state.Four the first anchor districts 112 are fixedly connected on respectively on the dielectric substrate 100.
Moving tooth comprises longitudinally crooked the 3rd folded beam 114 of mass 105, moving stripping fork tooth 106, two the second anchor districts 115 and two.Two the second anchor districts 115 are fixedly connected on the dielectric substrate 100.Each second anchor district 115 is connected with an end of the 3rd folded beam 114, and the other end of the 3rd folded beam 114 is connected with mass 105.Longitudinally the 3rd crooked folded beam 114 can only be along the longitudinal movement when mobile.Moving stripping fork tooth 106 is arranged on a side of mass 105, and the broach 110 that moves to right, moving stripping fork tooth 106 and the broach 108 that moves to left are alternately arranged successively.That is to say, broach is arranged for sequence of unit take the broach 110 that moves to right, moving stripping fork tooth 106, the broach 108 that moves to left, the broach 110 that namely moves to right, move stripping fork tooth 106, the broach 108 that moves to left ..., the broach 110 that moves to right, moving stripping fork tooth 106, broach 108 moves to left.The adjacent distance that moves to right between broach 110 and the moving stripping fork tooth 106 equals adjacent moving stripping fork tooth 106 and the distance between the broach 108 of moving to left.Mass 105, moving stripping fork tooth 106 and the 3rd folded beam 114 all are in vacant state.The first wide beam 107 of deciding tooth 103 that moves to left is provided with the stop block 116 that moves to left, and the second wide beam 109 of deciding tooth 104 that moves to right is provided with the stop block 117 that moves to right, and move to left stop block 116 and the stop block 117 that moves to right are oppositely arranged.Move to left stop block 116 and the distance between the stop block 117 of moving to right less than the twice of the adjacent designed distance between broach 110 and the moving stripping fork tooth 106 of moving to right.After designed distance refers to that processes is finished, the distance between the broach that remains static.
That is to say, when move to left stop block 116 and the stop block 117 of moving to right are inconsistent, the distance between broach 110 and the moving stripping fork tooth 106 of moving to right, and moving stripping fork tooth 106 and the distance that moves to left between the broach 108 just can not have been adjusted again.By setting move to left stop block 116 and the stop block 117 that moves to right, avoid moving to right between broach 110 and the moving stripping fork tooth 106, and moving stripping fork tooth 106 and the contact between the broach 108 that moves to left.
Further, the electrical actuator 101 that moves to right is arranged in to move to right and decides the left side of tooth 104.The electrical actuator 101 that moves to right comprises two groups of electric heating performance elements that move to right.The every group of electric heating performance element that moves to right comprises the first thin straight beam 125, the first wide straight beam 124, the first tie-beam 126, the first thin short straight beam 123 and two the 3rd anchor districts 122.The 3rd anchor district 122 is fixed on the dielectric substrate 100.The width of the first thin straight beam 125 is less than the width of the first wide straight beam 124.One end of the first thin straight beam 125 is connected in the 3rd anchor district 122 that decides tooth 104 away from moving to right, one end of the first wide straight beam 124 is connected to an end of the first thin short straight beam 123, and the other end of the first thin short straight beam 123 is connected near moving to right to be decided in the 3rd anchor district 122 of tooth 104.The other end of the first thin straight beam 125 be connected the other end of wide straight beam 124 and be connected with the first tie-beam 126 respectively, an end of the first tie-beam 126 is connected with the second wide beam 109.The first thin straight beam 125, the first wide straight beam 124, the first thin short straight beam 123 and the first tie-beam 126 all are in vacant state.Two groups of electric heating performance elements that move to right are symmetrical along the center line of the second wide beam 109.
Further, the electrical actuator 102 that moves to left is arranged in to move to left and decides the right side of tooth 103.The electrical actuator 102 that moves to left comprises two groups of electric heating performance elements that move to left.The every group of electric heating performance element that moves to left comprises the second thin straight beam 118, the second wide straight beam 119, the second tie-beam 121, the second thin short straight beam 120 and two the 4th anchor districts 127.The 4th anchor district 127 is fixed on the dielectric substrate 100.The width of the second thin straight beam 118 is less than the width of the second wide straight beam 119, one end of the second thin straight beam 118 is connected in the 4th anchor district 127 that decides tooth 103 away from moving to left, one end of the second wide straight beam 119 is connected to an end of the second thin short straight beam 120, the other end of the second thin short straight beam 120 is connected near moving to left to be decided in the 4th anchor district 127 of tooth 103, the other end of the second thin straight beam 118 be connected the other end of wide straight beam 119 and be connected with the second tie-beam 121 respectively, an end of the second tie-beam 121 is connected with the first wide beam 107.The second thin straight beam 118, the second wide straight beam 119, the second thin short straight beam 120 and the second tie-beam 121 are in vacant state.Two groups of electric heating performance elements that move to left are symmetrical along the center line of the first wide beam 107.
Further, described broach 108 and the first wide beam 107 of moving to left is perpendicular, moves to right to decide tooth 104 and the second wide beam 109 is perpendicular, and mass 105 is perpendicular with moving stripping fork tooth 106.
Further, the first wide straight beam 124 in the described every group of electric heating performance element that moves to right, the first thin straight beam 125, the first tie-beam 126 and the first thin short straight beam 123 are an overall structure.Be set to overall structure, be convenient to make.
Further, the second thin straight beam 118 in the described every group of electric heating performance element that moves to left, the second wide straight beam 119, the second tie-beam 121 and the second thin short straight beam 120 are an overall structure.Be set to overall structure, be convenient to make.
In technique scheme, four first fold stoplog 111 1 ends are connected on the first wide beam 107, and four first fold stoplog 111 other ends are connected in the first anchor district 112.By the support of four first fold stoplogs, 111 formation to the first wide beam 107 and the broach 108 that moves to left.Four the second folded beam 113 1 ends are connected on the second wide beam 109, and four the second folded beam 113 other ends are connected in the first anchor district 112.By the support of four the second folded beams, 113 formation to the second wide beam 109 and the broach 110 that moves to right.
The operation principle of the micro electronmechanical broach mechanism of the electrothermal drive modulation backlash of said structure is: the 4th anchor district 127 in the 3rd anchor district 122 in the electrical actuator 101 that moves to right and the electrical actuator 102 that moves to left is applied respectively electric current.In the electrical actuator 101 that moves to right, because the width of the first wide straight beam 124 is greater than the first thin straight beam 125, so the resistance of the first wide straight beam 124 is less than the resistance of the first thin straight beam 125.When electric current passes through the first wide straight beam 124 and the first thin straight beam 125, the heat that the heat that the first wide straight beam 124 produces produces less than the first thin straight beam 125.According to the principle of expanding with heat and contract with cold, the degrees of expansion of the first wide straight beam 124 is less than the degrees of expansion of the first thin straight beam 125, thereby causes the first tie-beam 126 to move right, and then moving to right of causing being connected with the electrical actuator 101 that moves to right decided tooth 104 and moved right.In like manner, in the electrical actuator 102 that moves to left, because the width of the second wide straight beam 119 is greater than the second thin straight beam 120, so the resistance of the second wide straight beam 119 is less than the resistance of the second thin straight beam 120.When electric current passes through the second wide straight beam 119 and the second thin straight beam 120, the heat that the heat that the second wide straight beam 119 produces produces less than the second thin straight beam 120.According to the principle of expanding with heat and contract with cold, the degrees of expansion of the second wide straight beam 119 is less than the degrees of expansion of the second thin straight beam 120, thereby causes the second tie-beam 121 to be moved to the left, and then moving to left of causing being connected with the electrical actuator 102 that moves to left decided tooth 103 and be moved to the left.Move to right and decide tooth 104 and move to left to decide the movement of tooth 103, so that the distance between broach 110 and the moving stripping fork tooth 106 of moving to right, and the distance that moves to left between broach 108 and the moving stripping fork tooth 106 all diminishes.Obviously, electric current is larger, and the displacement of move to right electrical actuator 101 and the electrical actuator 102 that moves to left is larger, and it is more that the distance between broach 110 and the moving stripping fork tooth 106 of moving to right reduces, and it is more that the distance between broach 108 and the moving stripping fork tooth 106 of moving to left also reduces.So just reach the purpose in modulation broach gap.By the move to left spacing of stop block 116 and the stop block 117 that moves to right of setting, can control and move to right between broach 110 and the moving stripping fork tooth 106, and the minimum clearance between broach 108 and the moving stripping fork tooth 106 of moving to left.
Structure of the present invention adopts basic micro-electromechanical processing technology to finish.To shown in Figure 8, during preparation, structural material of the present invention is from bottom to top such as Fig. 6: dielectric substrate 100, ground floor polysilicon layer 200, second layer polysilicon layer 201, the 3rd layer of polysilicon layer 202 and metal level 203.
The the first thin straight beam 125, the first wide straight beam 124, the first tie-beam 126, the first thin short straight beam 123 and the second wide beam 109 that move to right in the electrical actuator 101 are an overall structure, all adopt the 3rd layer of polysilicon layer 202 to make.
The the second thin straight beam 118, the second wide straight beam 119, the second tie-beam 121, the second thin short straight beam 120 and the first wide beam 107 that move to left in the electrical actuator 102 are an overall structure, all adopt second layer polysilicon layer 201 to make.
The first wide beam 107 and the first fold stoplog 111 of deciding tooth 103 that move to left made by second layer polysilicon layer 201.Move to left and decide the broach 108 that moves to left of tooth 103, main body along its length is by second layer polysilicon layer 201 and the 3rd layer of polysilicon layer 202 superimposed manufacturing.
The second wide beam 109 and the second folded beam 113 of deciding tooth 104 that move to right made by the 3rd layer of polysilicon layer 202.Move to right and decide the broach 110 that moves to right of tooth 104, main body along its length is by second layer polysilicon layer 201 and the 3rd layer of polysilicon layer 202 superimposed manufacturing.
Move to left decide tooth 103 move to left stop block 116 and move to right decide tooth 104 the stop block 117 that moves to right by second layer polysilicon layer 201 and the 3rd layer of polysilicon layer 202 superimposed manufacturing.
Under the zone that the second wide beam 109 of deciding tooth 104 of moving to right covers, it at first is air layer, then the part that being only moves to left decides tooth 103, comprise the part of the first wide beam 107, the coupling part of move to left broach 108 and the first wide beam 107, and the coupling part of the first wide beam 107 and first fold stoplog 111.
Mass 105 in the moving tooth, moving stripping fork tooth 106 and the 3rd folded beam 114 are formed by stacking by second layer polysilicon layer 201 and the 3rd layer of polysilicon layer 202.
As shown in Figure 5, the first anchor district 112, the second anchor district 115, the 4th anchor district 127, the 3rd anchor district 122 are formed by stacking by four layer materials: be ground floor polysilicon layer 200 from bottom to top, it is connected with dielectric substrate 100; Second layer polysilicon layer 201; The 3rd layer of polysilicon layer 202; Realize the metal level 203 of electrical connection.
The below illustrates the manufacturing process of this structure with typical three layers of polysilicon microcomputer electric surface processing technology.
Select the N-type semiconductor silicon chip, the silicon dioxide layer of heat growth 100 nano thickness, the silicon nitride by chemical vapor deposition method deposition one deck 500 nano thickness forms dielectric substrate.Adopt chemical vapor deposition method to deposit the ground floor polysilicon of 300 nanometers and carry out N-type heavy doping and make this layer polysilicon become conductor, form the part in anchor district by the photoetching process etching.The use chemical vapor deposition method deposits the phosphorosilicate glass (PSG) of 2000 nano thickness, forms the figure in anchor district by photoetching process.Utilize the second layer polysilicon of chemical vapor deposition method deposit 2000 nano thickness, polysilicon is carried out N-type heavy doping, photoetching process forms the figure that is positioned at second layer polysilicon.Use chemical vapor deposition method to deposit the phosphorosilicate glass (PSG) of 1500 nano thickness, form the figures such as anchor district, the superimposed district of broach by photoetching process.Utilize the 3rd layer of polysilicon of chemical vapor deposition method deposit 1500 nano thickness, polysilicon is carried out N-type heavy doping, photoetching process forms the figure that is positioned at the 3rd layer of polysilicon.Adopt stripping technology to form the metal electrode figure in the anchor district.At last by the corrosion releasing structure.
The above only is preferred embodiment of the present invention; be noted that for those skilled in the art; under the prerequisite that does not break away from the principle of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (6)
1. the micro electronmechanical broach mechanism of an electrothermal drive modulation backlash, it is characterized in that: this micro electronmechanical broach mechanism comprises the electrical actuator that moves to left (102), electrical actuator (101) moves to right, decide tooth (103) by moving to left and move to right to decide the tooth of deciding that tooth (104) forms, moving tooth, four the first anchor districts (112) and dielectric substrate (100), the electrical actuator (102) that moves to left is connected with the end of deciding tooth (103) that moves to left, the two ends of deciding tooth (103) that move to left are connected in the first anchor district (112), the electrical actuator (101) that moves to right is connected with the end of deciding tooth (104) that moves to right, and the two ends of deciding tooth (104) that move to right are connected in the first anchor district (112);
Described moving to left decided the first fold stoplogs (111) that tooth (103) comprises the first wide beam (107), the broach that moves to left (108), four horizontal bendings in edge, the broach (108) that moves to left is fixed on a side of the first wide beam (107), one end of the first wide beam (107) is connected with the electrical actuator that moves to left (102), and the both sides at the first wide beam (107) two ends are connected in the first anchor district (112) by a first fold stoplog (111) respectively; Move to left and decide tooth (103) and be in vacant state;
Described moving to right decided the second folded beams (113) that tooth (104) comprises the second wide beam (109), the broach that moves to right (110), four horizontal bendings in edge, the broach (110) that moves to right is fixed on a side of the second wide beam (109), one end of the second wide beam (109) is connected with the electrical actuator that moves to right (101), and the both sides at the second wide beam (109) two ends are connected in the first anchor district (112) by second folded beam (113) respectively; Move to right and decide tooth (104) and be in vacant state;
Described four the first anchor districts (112) are fixedly connected on respectively on the dielectric substrate (100);
Described moving tooth comprises mass (105), moving stripping fork tooth (106), two the second anchor districts (115) and two are crooked the 3rd folded beam (114) longitudinally, two the second anchor districts (115) are fixedly connected on the dielectric substrate (100), each second anchor district (115) is connected with an end of the 3rd folded beam (114), the other end of the 3rd folded beam (114) is connected with mass (105), moving stripping fork tooth (106) is arranged on a side of mass (105), and the broach that moves to right (110), moving stripping fork tooth (106) and the broach that moves to left (108) replace successively to be arranged, the adjacent broach that moves to right (110) and the distance between the moving stripping fork tooth (106) equal the distance between adjacent moving stripping fork tooth (106) and the broach that moves to left (108); Mass (105), moving stripping fork tooth (106) and the 3rd folded beam (114) all are in vacant state;
Described the first wide beam (107) of deciding tooth (103) that moves to left is provided with the stop block that moves to left (116), the second wide beam (109) of deciding tooth (104) that moves to right is provided with the stop block that moves to right (117), move to left stop block (116) and the stop block that moves to right (117) is oppositely arranged, and the distance between the stop block that moves to left (116) and the stop block that moves to right (117) is less than the twice of designed distance between the adjacent broach that moves to right (110) and the moving stripping fork tooth (106).
2. the micro electronmechanical broach mechanism of electrothermal drive modulation according to claim 1 backlash, it is characterized in that: the described electrical actuator that moves to right (101) is arranged in to move to right decides the left side of tooth (104), the electrical actuator (101) that moves to right comprises two groups of electric heating performance elements that move to right, the every group of electric heating performance element that moves to right comprises the first thin straight beam (125), the first wide straight beam (124), the first tie-beam (126), the first thin short straight beam (123) and two the 3rd anchor districts (122), the 3rd anchor district (122) is fixed on the dielectric substrate (100), the width of the first thin straight beam (125) is less than the width of the first wide straight beam (124), one end of the first thin straight beam (125) is connected in the 3rd anchor district (122) that decides tooth (104) away from moving to right, one end of the first wide straight beam (124) is connected to an end of the first thin short straight beam (123), the other end of the first thin short straight beam (123) is connected near moving to right to be decided in the 3rd anchor district (122) of tooth (104), the other end of the first thin straight beam (125) be connected the other end of wide straight beam (124) and be connected with the first tie-beam (126) respectively, one end of the first tie-beam (126) is connected with the second wide beam (109), the first thin straight beam (125), the first wide straight beam (124), the first tie-beam (126) and the first thin short straight beam (123) all are in vacant state; Two groups of electric heating performance elements that move to right are symmetrical along the center line of the second wide beam (109).
3. the micro electronmechanical broach mechanism of electrothermal drive modulation according to claim 1 backlash, it is characterized in that: the described electrical actuator that moves to left (102) is arranged in to move to left decides the right side of tooth (103), the electrical actuator (102) that moves to left comprises two groups of electric heating performance elements that move to left, the every group of electric heating performance element that moves to left comprises the second thin straight beam (118), the second wide straight beam (119), the second tie-beam (121), the second thin short straight beam (120) and two the 4th anchor districts (127), the 4th anchor district (127) is fixed on the dielectric substrate (100), the width of the second thin straight beam (118) is less than the width of the second wide straight beam (119), one end of the second thin straight beam (118) is connected in the 4th anchor district (127) that decides tooth (103) away from moving to left, one end of the second wide straight beam (119) is connected to an end of the second thin short straight beam (120), the other end of the second thin short straight beam (120) is connected near moving to left to be decided in the 4th anchor district (127) of tooth (103), the other end of the second thin straight beam (118) be connected the other end of wide straight beam (119) and be connected with the second tie-beam (121) respectively, one end of the second tie-beam (121) is connected with the first wide beam (107), the second thin straight beam (118), the second wide straight beam (119), the second thin short straight beam (120) and the second tie-beam (121) are in vacant state; Two groups of electric heating performance elements that move to left are symmetrical along the center line of the first wide beam (107).
4. according to the micro electronmechanical broach mechanism of claim 2 or 3 described electrothermal drive modulation backlashes, it is characterized in that: the described broach that moves to left (108) is perpendicular with the first wide beam (107), moving to right, it is perpendicular with the second wide beam (109) to decide tooth (104), and mass (105) is perpendicular with moving stripping fork tooth (106).
5. according to the micro electronmechanical broach mechanism of electrothermal drive modulation claimed in claim 2 backlash, it is characterized in that: the first wide straight beam (124) in the described every group of electric heating performance element that moves to right, the first thin straight beam (125), the first tie-beam (126) and the first thin short straight beam (123) are an overall structure.
6. according to the micro electronmechanical broach mechanism of electrothermal drive modulation claimed in claim 3 backlash, it is characterized in that: the second thin straight beam (118) in the described every group of electric heating performance element that moves to left, the second wide straight beam (119), the second tie-beam (121) and the second thin short straight beam (120) are an overall structure.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210395413.5A CN102951593B (en) | 2012-10-17 | 2012-10-17 | Electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth |
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| CN201210395413.5A CN102951593B (en) | 2012-10-17 | 2012-10-17 | Electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth |
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| CN103424057A (en) * | 2013-09-05 | 2013-12-04 | 东南大学 | Vernier scale for measuring deflection angles of micro electro mechanical structure |
| CN103424064A (en) * | 2013-09-05 | 2013-12-04 | 东南大学 | High-resolution micrometer vernier scale for micro electro mechanical system |
| CN104743494A (en) * | 2013-12-26 | 2015-07-01 | 索尼公司 | Functional device, acceleration sensor, and switch |
| CN107628587A (en) * | 2017-09-21 | 2018-01-26 | 中国传媒大学 | A kind of multistage electrothermal drive big displacement big corner MEMS actuator and its manufacture method |
| CN111381073A (en) * | 2020-05-01 | 2020-07-07 | 深迪半导体(上海)有限公司 | MEMS accelerometer and method for improving shock resistance thereof |
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| CN103424057A (en) * | 2013-09-05 | 2013-12-04 | 东南大学 | Vernier scale for measuring deflection angles of micro electro mechanical structure |
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| CN107628587A (en) * | 2017-09-21 | 2018-01-26 | 中国传媒大学 | A kind of multistage electrothermal drive big displacement big corner MEMS actuator and its manufacture method |
| CN111381073A (en) * | 2020-05-01 | 2020-07-07 | 深迪半导体(上海)有限公司 | MEMS accelerometer and method for improving shock resistance thereof |
| CN111381073B (en) * | 2020-05-01 | 2021-11-30 | 深迪半导体(绍兴)有限公司 | MEMS accelerometer and method for improving shock resistance thereof |
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