CN102884324A - Screw vacuum pump - Google Patents

Screw vacuum pump Download PDF

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Publication number
CN102884324A
CN102884324A CN2011800226055A CN201180022605A CN102884324A CN 102884324 A CN102884324 A CN 102884324A CN 2011800226055 A CN2011800226055 A CN 2011800226055A CN 201180022605 A CN201180022605 A CN 201180022605A CN 102884324 A CN102884324 A CN 102884324A
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CN
China
Prior art keywords
rotor
vacuum pump
screw
screw vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2011800226055A
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Chinese (zh)
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CN102884324B (en
Inventor
托马斯·德赖费特
马格努斯·亚尼茨基
彼得·比尔克
罗兰德·米勒
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Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
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Publication of CN102884324A publication Critical patent/CN102884324A/en
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Publication of CN102884324B publication Critical patent/CN102884324B/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Abstract

The invention relates to a screw vacuum pump comprising screw rotors (12, 14) disposed in a suction chamber (10). The screw rotors (12, 14) are each supported by means of two bearing elements (20) in the pump housing and comprise a ratio of rotor length (I) to rotor axis spacing (d) that is greater than 3.0. The screw rotors (12, 14) further comprise a variable pitch, at least 7 turns, and an integral compression ratio of at least 4.5. The pitch after half of the turns is less than twice the pitch on the pressure side rotor outlet (24).

Description

Screw vacuum pump
Technical field
The present invention relates to a kind of screw vacuum pump.
Background technique
Screw vacuum pump has two screw rotors in the pump chamber that consists of by pump case.Screw rotor is bearing on the both sides usually, and can have the pitch profile that differently consists of.Rotor can have symmetrical or asymmetric castellated appearance, for example at " Wutz ", the vacuum technique handbook, 2010 the 10th edition, described in the 270-277 page or leaf.This class rotor has compression ratio in the machine usually, that is, and and the cavity volume ratio of the chamber of the suction side less than 4 and chamber on the pressure side.Under high suction pressure, higher compression ratio causes very high power consumpiton.This need to use the large drive motor (seeing that " Wutz " is the same, 276 pages) in disproportion ground.In addition, the problem that high temperature in compressing the zone on the pressure side that is created in screw rotor when improving, occurs.In this case, no longer possible by the heat radiation of pump case, to such an extent as to heat radiation must realize by the internal cooling of screw rotor.This expends technically, and has improved manufacture cost and the maintenance cost of screw vacuum pump.
In order to realize compression ratio in the high machine, explanation is that clearance height is changed in VDI report No.1932 2006.This explanation be, with clearance height, that is to say, especially the distance between screw rotor and pump case is configured to so that described distance the suction side on greater than on the pressure side going up.Owing to according to pattern of flow viscosity or molecule of pressure, can be received in larger gap on the suction side.In the situation that suction pressure is high, described gap combines with the reduction of rotor speed can cause the minimizing of internal compression.This causes less compression horsepower, causes thus producing lower heat.Yet disadvantageously, the minimizing of internal compression also causes reducing of suction capactity.
In addition, known to one-sided upper support or the rotor that supports in the mode that suspends.This major advantage that has is only must be provided with a bearing.This is arranged on the side that on the pressure side goes up or be arranged on transmission device.Can save in this case the second bearing on the suction side in the zone that is arranged on low pressure.Yet the screw rotor that supports in the mode that suspends must have the rotor of constructing shortly, because otherwise be created in the danger that rotor contacts with each other when moving.It is few that the relatively little structure length of rotor causes the quantity of spiral ring.In addition, the rotor that supports in the mode that suspends has larger diameter.In this case, rotor length and the ratio of the distance of rotor axis are usually less than 2.5.
Summary of the invention
The objective of the invention is, the screw vacuum pump with at least 4.5 " machine in compression ratio " is provided, wherein realized simple heat radiation.
According to the present invention, the solution of described purpose is achieved by feature claimed in claim 1.
Screw vacuum pump according to the present invention has the pump case that consists of pump chamber.In pump case, be provided with two screw rotors.Because screw rotor according to the present invention is long, what relate to is respectively at the screw rotor of both sides upper support, to such an extent as to each screw rotor is provided with two supporting elements.In addition, screw rotor has relatively little diameter, to such an extent as to the ratio of the length of screw rotor and the distance of rotor axis especially greater than 3.5, and especially is preferably greater than 4.0 greater than 3.0.In addition, screw rotor according to the present invention has variable pitch, and has and be at least 7, especially at least 9 and especially preferred at least 11 spiral rings.Compression ratio according to the present invention is at least 4.5, preferably at least 5.In order to avoid the overheated of rotor in the situation of large compression ratio according to the present invention, rotor has a plurality of spiral rings on the pressure side, and the pitch of described spiral ring only changes minutely or is constant.Therefore, according to the present invention, the pitch after the spiral ring of half is less than the pitch on rotor outlet of twice.Especially, the pitch after the spiral ring of half is less than 2 times pitch, particularly preferably less than 1.5 times the pitch on rotor outlet.Because the little pitch that on the pressure side go up and the preferred clearance height of correspondingly selecting at rotor according to the present invention changes, and compresses in the longer zone of rotor.This major advantage according to the present invention that has is that better heat radiation is possible.Such reason is, thereby compression work and used heat occur in the zone of high pressure basically, and owing to producing zone high pressure, that obviously prolong according to the present invention, it is large that the housing area becomes, to be used for heat absorption.In according to a preferred improvement project of screw vacuum pump of the present invention, propose to have respectively the only screw rotor of a threaded line.
Since propose according to the present invention in the zone of the length that on the pressure side goes up, in described zone, screw rotor has little pitch to be changed, thereby can realize at least 4.5 compression ratio, and the heat in this generation can be shed, to such an extent as to avoid rotor overheated.At this, must be noted that heat radiation is merely able to carry out in zone on the pressure side, because in zone low pressure or high vacuum, because little gas density, it is impossible that heat is delivered on the housing fully.
In addition, having the advantage that the expansion scheme according to the present invention of the screw rotor of high self-contained volume ratio has is that under little pressure, power consumpiton is little.Thus, for the initial pressure that is lower than 10mbar, can realize with respect to suction capactity, be lower than 12W/ (m 3H) power consumpiton.
In particularly preferred form of implementation, heat radiation is only undertaken by pump case.Therefore, except the heat radiation of being undertaken by medium itself, heat radiation is preferably only undertaken by pump case.Therefore, needn't be provided with the internal rotor cooling that expends technically.
In addition, the advantage that has according to setting of the present invention, have a plurality of spiral rings of little pitch variation in the zone on the pressure side of rotor is obviously to reduce noise producing.Such reason is, compress in longer zone, and therefore the pressure difference between the zone of last chamber and gas outlet is less.Therefore, reduce inverted ventilation, wherein, mineralization pressure ripple when inverted ventilation, described pressure wave causes noise producing.Because less inverted ventilation, when free exhaust, noise producing also reduces 3 to 6dB (A).This major advantage that has is to be provided with less silencer element.Owing to reducing the possibility of the architectural volume of baffler, thereby can again compensate at least in part the structure length owing to longer screw rotor of vacuum pump.
In addition preferably, the profile of screw rotor is symmetrical basically.Trapezoidal profile, cycloid profile or involute profile for example preferably in this case.Preferably, clearance height that is to say, the distance between screw rotor and inner walls especially is chosen as, and extends so that be compressed on the long zone on the outlet side of rotor.At this, especially preferredly be, under the cold conditions of turbomolecular pump, the ratio of cold clearance height/axial line distance〉2/1000.In addition, preferably, under running state, that is to say when reaching running temperature, produce the ratio of cold clearance height/axial line distance 12/1000.According to the present invention, clearance height preferably is chosen as so that when final pressure moves, only rotor length about 20% after just be lower than the average cavity chamber pressure of 100mbar, measure from inlet side.
In preferred form of implementation, screw vacuum pump according to the present invention has the rated speed of the rotating speed that turns greater than per minute 5000.In addition, for fear of overcompression, can in the zone on the pressure side of screw rotor, be provided with excess pressure valve.Replace or except excess pressure valve is set, can be provided with rotating speed control.By rotating speed is correspondingly reduced, can avoid overcompression equally.By two measures, can effectively be reduced in the power consumpiton under the high suction pressure, thus and reduction machine inner motor power.
Description of drawings
Below, elaborate with reference to the accompanying drawings the present invention by means of a preferred form of implementation.Shown in the accompanying drawing:
Fig. 1 illustrates the diagrammatic top view of two screw rotors constructed according to the invention, and
Fig. 2 and the schematic of pressure distribution curve illustrate explicitly compare with screw rotor according to the present invention, according to the schematic diagram of the screw rotor of prior art.
Embodiment
Two screw rotors shown in Figure 1 are arranged in the unshowned pump case.Consist of pump chamber 10 by pump case, in described pump chamber, be provided with two screw rotors 12,14.Two screw rotors have the shaft shoulder 16,18 in both sides, the described shaft shoulder is rotatably supported in the pump case by supporting element 20 respectively.In order to drive two screw rotors 12,14, usually with the shaft shoulder 18 or as an alternative the shaft shoulder 16 directly or by transmission device is connected with drive motor.The second screw rotor,, so that two screw rotors 12,14 synchronized with each other and rotates with opposite direction by identical drive motor by corresponding tooth section (not shown).By screw rotor, realize the suction of the medium to be conveyed on suction side (arrow 22), and realize the discharge of the medium on (arrow 24) on the pressure side.
The pitch of screw rotor illustrates by the line 26 that tilts to extend.As can be seen from Fig. 1, pitch changes in the length l of rotor.In zone 28 on the pressure side, pitch is significantly less than in the zone 30 of suction side.At this, according to the present invention, the pitch in zone 28 on the pressure side is configured to, so that the pitch in the zone 31 in the spiral ring of half mostly is the twice of the pitch on rotor outlet 24 most.This causes, and constructs long zone on the pressure side 28 by only slight modification pitch.In zone 28 on the pressure side, realize the compression of the most pressure difference between entrance and exit.Therefore, also conduction in zone 28 of most compression work.This causes, basically at described region generating heat to be discharged.At this, according to the present invention, realize the discharge of heat by being enclosed in screw rotor 12 in the zone on the pressure side, 14 housing.
According to the present invention, what relate to is the screw rotor 12,14 of long structure.Therefore, according to the present invention, screw rotor 12,14 length l and rotor axis apart from the ratio of d greater than 3.0.
In Fig. 2, shown in the upper area according to screw rotor 12 of the present invention, described screw rotor is corresponding to the screw rotor 12,14 in Fig. 1.In its lower section, screw rotor 32 according to prior art is shown.Screw rotor 32 is shorter, and has the spiral ring of lesser amt in zone on the pressure side, wherein only slightly changes pitch.In the rotor 32 according to prior art, obtain pressure distribution curve, as schematically illustrating by line 34.Therefrom as seen, in the zone on the pressure side 36 of screw rotor 32, realize violent pressure rise.
Based on rotor 12 according to expansion scheme of the present invention, zone 28 on the pressure side is obviously longer.In addition, correspondingly select clearance height (cold clearance height/axial line distance〉2/1000 and temperature gap height/axial line distance 12/1000).Therefore, obtain the pressure rise corresponding to the line 38 in chart, described pressure rise flatly distributes.

Claims (10)

1. screw vacuum pump has:
Consist of the pump case of pump chamber (10);
Two screw rotors (12,14) that are arranged in the described pump chamber (10), described screw rotor is bearing in the described pump case by two supporting elements (20) respectively, and the ratio of the distance (d) of the rotor length of described screw rotor (l) and rotor axis is greater than 3.0
Wherein, described screw rotor (12,14) has compression ratio in the machine of variable pitch, at least 7 spiral rings and at least 4.5, and
Wherein, described pitch after the spiral ring of half less than the pitch on the rotor outlet of on the pressure side going up (24) of twice.
2. screw vacuum pump according to claim 1 is characterized in that, each screw rotor (12,14) has only threaded line.
3. screw vacuum pump according to claim 1 and 2 is characterized in that, the profile substantial symmetry of described screw rotor (12,14) or asymmetric.
4. one of according to claim 1-3 described screw vacuum pump is characterized in that, only effectively cools off described pump case, to dispel the heat.
5. one of according to claim 1-4 described screw vacuum pump is characterized in that, the described ratio of rotor length (l) and the distance (d) of rotor axis is greater than 3.5, especially greater than 4.
6. one of according to claim 1-5 described screw vacuum pump is characterized in that, each screw vacuum pump (12,14) is provided with at least 9 spiral rings, preferably at least 11 spiral rings.
7. one of according to claim 1-6 described screw vacuum pump is characterized in that, described compression ratio is at least 5, is preferably at least 6.
8. one of according to claim 1-7 described screw vacuum pump is characterized in that, clearance height is chosen as, so that obtain the final pressure of at least 5Pa of vacuum pump.
9. one of according to claim 1-8 described screw vacuum pump is characterized in that, described maximum (top) speed turns greater than per minute 5000.
10. one of according to claim 1-9 described screw vacuum pump is provided with one or more excess pressure valves and/or can controls rotor speed by rotating speed, to avoid the overcompression in zone (28) on the pressure side.
CN201180022605.5A 2010-05-04 2011-05-03 Screw vacuum pump Active CN102884324B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010019402.6 2010-05-04
DE102010019402A DE102010019402A1 (en) 2010-05-04 2010-05-04 Screw vacuum pump
PCT/EP2011/057042 WO2011138318A2 (en) 2010-05-04 2011-05-03 Screw vacuum pump

Publications (2)

Publication Number Publication Date
CN102884324A true CN102884324A (en) 2013-01-16
CN102884324B CN102884324B (en) 2016-06-08

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CN201180022605.5A Active CN102884324B (en) 2010-05-04 2011-05-03 Screw vacuum pump

Country Status (7)

Country Link
EP (1) EP2567096B1 (en)
JP (1) JP5860035B2 (en)
KR (1) KR101855398B1 (en)
CN (1) CN102884324B (en)
DE (1) DE102010019402A1 (en)
TW (1) TWI568935B (en)
WO (1) WO2011138318A2 (en)

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CN105917100A (en) * 2014-01-15 2016-08-31 伊顿公司 Method of optimizing supercharger performance
CN109139471A (en) * 2018-09-03 2019-01-04 东北大学 A kind of horizontal rotors for dry double-screw vacuum pump having over-voltage degassing function
CN109642573A (en) * 2016-08-30 2019-04-16 莱宝有限公司 Screw vacuum pump
CN111448392A (en) * 2018-01-12 2020-07-24 莱宝有限公司 Compressor with a compressor housing having a plurality of compressor blades

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DE102016216279A1 (en) 2016-08-30 2018-03-01 Leybold Gmbh Vacuum-screw rotor
CN109162927A (en) * 2018-08-28 2019-01-08 安徽省华欣能源装备科技有限公司 A kind of supporting arrangement of helical-lobe compressor

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Cited By (7)

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Publication number Priority date Publication date Assignee Title
CN105917100A (en) * 2014-01-15 2016-08-31 伊顿公司 Method of optimizing supercharger performance
CN109642573A (en) * 2016-08-30 2019-04-16 莱宝有限公司 Screw vacuum pump
CN109642573B (en) * 2016-08-30 2020-09-29 莱宝有限公司 Screw vacuum pump
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CN111448392A (en) * 2018-01-12 2020-07-24 莱宝有限公司 Compressor with a compressor housing having a plurality of compressor blades
CN109139471A (en) * 2018-09-03 2019-01-04 东北大学 A kind of horizontal rotors for dry double-screw vacuum pump having over-voltage degassing function
CN109139471B (en) * 2018-09-03 2019-07-02 东北大学 A kind of horizontal rotors for dry double-screw vacuum pump having over-voltage degassing function

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JP5860035B2 (en) 2016-02-16
KR101855398B1 (en) 2018-05-08
KR20130100911A (en) 2013-09-12
EP2567096A2 (en) 2013-03-13
CN102884324B (en) 2016-06-08
DE102010019402A1 (en) 2011-11-10
EP2567096B1 (en) 2014-12-17
JP2013525690A (en) 2013-06-20
WO2011138318A3 (en) 2012-08-16

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