CN102879907A - Light splitting device capable of improving light uniformity - Google Patents
Light splitting device capable of improving light uniformity Download PDFInfo
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- CN102879907A CN102879907A CN2012102097869A CN201210209786A CN102879907A CN 102879907 A CN102879907 A CN 102879907A CN 2012102097869 A CN2012102097869 A CN 2012102097869A CN 201210209786 A CN201210209786 A CN 201210209786A CN 102879907 A CN102879907 A CN 102879907A
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Abstract
A light splitting device for improving light uniformity, comprising: the light source comprises a light source unit, a light splitter, a first light collecting lens, a light homogenizing piece and a second light collecting lens. The light splitter is used for generating monochromatic light after the light of the light source unit passes through. The light-equalizing piece comprises a hollow cylindrical body, a reflecting film coated on the inner peripheral surface of the body, a light incoming surface facing the first light-collecting mirror, a light outgoing surface opposite to the light incoming surface, and a reflecting surface surrounding an optical axis of the light source unit and capable of reflecting light rays in multiple ways, wherein the reflecting surface defines a channel for the light rays to pass through. By means of the light homogenization effect of the light homogenizing piece, a sample on an irradiation plane can be uniformly illuminated, and the accuracy of spectral measurement and sample analysis is improved.
Description
Technical field
The present invention relates to a kind of light-dividing device, particularly relate to a kind of being applied in the spectral measurement equipment, and can promote the light-dividing device of light uniformity coefficient.
Background technology
Consult Fig. 1, be a kind of known light-dividing device 1, mainly comprise: a light source 11 and an optical splitter 12.The light that this light source 1 sends can be imported this optical splitter 12 by optical elements such as the unshowned catoptron of figure, collecting lens, light be subject to this optical splitter 12 light splitting, the modulation after, produce monochromatic light by this optical splitter 12, monochromatic light can be directly or via irradiated plane 10 of directive behind other optical element.This irradiated plane 10 can be put for a sample to be measured, and this sample is connected with a measurement mechanism, can carry out different spectral measurements according to different metering systems, for example absorption spectrum, reflectance spectrum, penetrate spectrum etc., be used for whereby the character such as chemical composition, configuration of surface, optical characteristics of analytic sample.
Because this light-dividing device 1 is not provided for making the optical element of equalizing light rays, so it is inhomogeneous that the monochromatic light that this optical splitter 12 produces is radiated on this irradiated plane 10, as shown in Figure 2, light intensity in these irradiated plane 10 centers is the strongest, the light intensity of the periphery on more past this plane is more weak, the inhomogeneous phenomenon of this light is too serious, causes light can't be radiated at equably on the whole sample, affects follow-up results of spectral measurements and the accuracy of sample analysis.
Summary of the invention
The object of the present invention is to provide a kind of function with uniform light, can promote the light-dividing device of light uniformity coefficient.The light-dividing device that promotes the light uniformity coefficient of the present invention comprises: a light source cell, and a side that is positioned at this light source cell also is used for making the light of this light source cell by the monochromatic optical splitter of rear generation.This light-dividing device also comprises all light spares of at least one first collecting lens,, and at least one second collecting lens.This first collecting lens is positioned at a side of this optical splitter, and the monochromatic light that this optical splitter produces is focused on.This all light spare be positioned at a side of this first collecting lens, and comprise the body of a hollow columnar, a reflectance coating that is coated on the inner peripheral surface of this body, incidence surface towards this first collecting lens, exiting surface in contrast to this incidence surface, and one run through this incidence surface and this exiting surface and around the reflecting surface of an optical axis of this light source cell, described incidence surface and exiting surface all are jointly to be formed by this body and reflectance coating, this reflecting surface is the inner surface of this reflectance coating, and this reflecting surface defines one along this optical axis and axially extended passage, the light that this passage comes for supplying from this first collecting lens incident passes through, and this reflecting surface is used for making behind the light Multi reflection light to be penetrated by this exiting surface again.This second collecting lens is positioned at this all side of light spare, and will by this all the light that comes of light spare focus on.
The light-dividing device that promotes the light uniformity coefficient of the present invention, the length that this passage extends along this optical axis is 10mm～200mm.
The light-dividing device that promotes the light uniformity coefficient of the present invention, the width of this passage and the height of this passage all are 2mm～20mm.
The light-dividing device that promotes the light uniformity coefficient of the present invention, this all the material of the body of light spare be metal, glass, quartz or silicon, the material of this reflectance coating is metal, dielectric material, or the combination of metal and dielectric material.
The light-dividing device that promotes the light uniformity coefficient of the present invention, the monochromatic wavelength that this optical splitter produces is 200nm～1800nm.
The light-dividing device that promotes the light uniformity coefficient of the present invention, this light source cell comprise a light source, and a catoptron that is used for the light that this light source of reflection sends and light is penetrated towards the direction focusing of this optical splitter.
The light-dividing device that promotes the light uniformity coefficient of the present invention, this catoptron are elliptical reflector.
The light-dividing device that promotes the light uniformity coefficient of the present invention, this light source cell also comprises a supplementary set light microscopic between this light source and this optical splitter, and this supplementary set light microscopic is propagated towards this optical splitter after the light of the light of this light source and this mirror reflects is focused on again.
The light-dividing device that promotes the light uniformity coefficient of the present invention comprises the first collecting lens that arranges before and after several.
The light-dividing device that promotes the light uniformity coefficient of the present invention comprises the second collecting lens that arranges before and after several.
Beneficial effect of the present invention is: by this all light uniformization effect of light spare, make the illumination on the irradiated plane even, and light enter this all before the light spare with afterwards, be subject to respectively this first collecting lens and this second collecting lens optically focused, light intensity be can promote, follow-up sample spectra analysis or other analysis are conducive to.
Description of drawings
Fig. 1 is a kind of schematic diagram of known light-dividing device, and the arrow among the figure is used for signal light;
Fig. 2 is the front view of an irradiated plane of this light-dividing device, and the uneven illumination that is used on this irradiated plane of signal is even;
Fig. 3 is the schematic diagram of light-dividing device of the promoted light uniformity coefficient of first preferred embodiment of the present invention, and the arrow among the figure is used for signal light;
Fig. 4 is one of this first preferred embodiment all stereographic map of light spare;
Fig. 5 is a stereographic map, shows all light spares of another kind of form of the present invention;
Fig. 6 is a stereographic map, shows all light spares of another form of the present invention;
Fig. 7 is the schematic diagram of light-dividing device of the promoted light uniformity coefficient of second preferred embodiment of the present invention, and the arrow among the figure is used for signal light;
Fig. 8 is the schematic diagram of light-dividing device of the promoted light uniformity coefficient of the 3rd preferred embodiment of the present invention, and the arrow among the figure is used for signal light.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent, below in conjunction with accompanying drawing the specific embodiment of the present invention is elaborated.At first need to prove, the present invention is not limited to following embodiment, and those skilled in the art should understand the present invention from the spirit that following embodiment embodies, and each technical term can be done the most wide in range understanding based on Spirit Essence of the present invention.Same or analogous member uses the same reference numerals to represent among the figure.
Consult Fig. 3,4, the light-dividing device of the promoted light uniformity coefficient of the present invention's the first preferred embodiment, can be applicable in the spectral measurement equipment, leading portion light splitting configuration as this measuring equipment, described light-dividing device comprises: all light spares 5 of a light source cell 2, an optical splitter 3, first collecting lens 4, a hollow, and second collecting lens 6.In this article, propagate the direction advance as the place ahead take light.
This light source cell 2 comprises a light source 21, and one is arranged on this light source 21 catoptron 22 on every side.This light source 21 can be Halogen lamp LED or xenon (Xe) lamp, but is not limited to this, and the light that this light source 21 sends is a kind of full spectrum light.Define one by this light source 21 and be parallel to optical propagation direction and the optical axis L of front and back extension.This catoptron 22 is to be arranged on this optical axis L with these light source 21 compartment of terrains, and certainly the rear of this light source 21 forward and towards this light source up and down around extend, be used for the light that this light source 21 of reflection sends, light is penetrated towards the direction focusing of this optical splitter 3, and the catoptron 22 of this enforcement is elliptical reflector 22.
This optical splitter 3 is positioned at the place ahead of this light source cell 2, and be monochromatic light optical splitter (monochromator), the light that is used for making this light source 21 is by rear generation monochromatic light, and described monochromatic wavelength can be the monochromatic light of 200 nanometers (nm)～1800 nanometer.Described optical splitter 3 is actually the dispersion phenomenon of utilizing prism or grating, or filter mirror group (filters) produces coloured light, but because these optical splitter 3 non-improvement emphasis of the present invention, so no longer explanation.
This first collecting lens 4 is positioned at the place ahead of this optical splitter 3, and again towards these all light spare 5 propagation, the concrete example of this first collecting lens 4 is convex lens after the monochromatic light focusing that is used for this optical splitter 3 is produced.
This all light spare 5 be spaced at the place ahead of this first collecting lens 4 along this optical axis L, all light spares 5 of the present embodiment are the integration rod mirror of a hollow, grow to extension along this optical axis L, and comprise the body 51 of a tetragonal hollow long column shape and a reflectance coating 52 that is coated on the inner peripheral surface of this body 51.The material of this body 51 is metal, glass, quartz or silicon for example, but be not limited to this, and this body 51 is actually by four up and down settings and front and back length and forms to the substrate combination of extending.The material of this reflectance coating 52 is reflectivity between 60%～99.99% material, can be the combination of metal, dielectric material or metal and dielectric material, and can be monofilm, also can be multilayer film.As this equal basic configuration of light spare 5, and this reflectance coating 52 has good light reflective, can promote the efficient that light reflectance and light are propagated forward by this body 51.
This body 51 and this reflectance coating 52 in conjunction with and form this all behind the light spare 5, this all light spare 5 comprise an incidence surface 53 towards this first collecting lens 4, the exiting surface 54 in contrast to this incidence surface 53, and one before and after this optical axis L ground to the reflecting surface 55 that extends and run through this incidence surface 53 and exiting surface 54.In the present embodiment, this incidence surface 53 and exiting surface 54 are that end surface by this body 51 and reflectance coating 52 forms jointly; This reflecting surface 55 is to be formed separately by this reflectance coating 52, and the namely inner surface of this reflectance coating 52, and this reflecting surface 55 defines one along the axially extended microscler passage 50 of this optical axis L.
All light spares 5 of the present embodiment are the even long column shape body of hollow that an xsect is square, shape and the size of this incidence surface 53 and exiting surface 54 are all identical, the distance of this incidence surface 53 and exiting surface 54 be equivalent to this all the length of light spare 5 be a, preferably a is 10 millimeters (mm)～200 millimeter, and described a also is equivalent to the length that this passage 50 extends along this optical axis L.The width of the left and right directions of this passage 50 is b, and the height of the above-below direction of this passage 50 is c, and b and c be all 2mm～20mm, and b and c can be identical, also can be not identical.In the numerical range of above-mentioned restriction, make this all light spare 5 under undersized design, just can reach good equal light effect, be conducive to that component size dwindles, light-weighted demand.
This second collecting lens 6 is positioned at this all the place ahead of light spare 5, makes by this to propagate after all the light of light spare 5 focuses on again, and then shines an irradiated plane 7 that is positioned at the place ahead.The concrete example of this second collecting lens 6 is convex lens.
When the present invention uses, the light of this light source 21 is subject to the reflection of this catoptron 22 optically focused and towards these optical splitter 3 incidents, this equal light spare 5 of directive after the monochromatic light that optical splitter 3 produces is focused on by this first collecting lens 4, monochromatic light from this all the incidence surface 53 of light spare 5 enter this passage 50, light is by in the process of this passage 50, be subject to the multipath reflection (namely light is subject to reflection many times in traveling process) of this reflecting surface 55, light is all reflected and diffusion light spare 5 inside equably at this, and because this all enough long (length of namely aforementioned restriction a) makes the light order of reflection more than enough to length the front and back of light spare 5, thereby the uniformity coefficient of light is penetrated in lifting, homogenized light is by this this second collecting lens 6 of exiting surface 54 directives, and by after these second collecting lens, 6 focusing, with this irradiated plane 7 of mode directive near directional light.
Therefore, be subject to this all after the homogenization of light spare 5, the light intensity that is radiated at this irradiated plane 7 is even, even the light intensity at the peripheral position of this irradiated plane 7 is still quite near the light intensity of this central part, therefore when a sample to be measured is arranged on the position of this irradiated plane 7, sample integral body can both be subject to uniform illumination, promotes the accuracy of spectral measurement and the accuracy of sample analysis.
It is worth mentioning that: because this equal good reflection effect of the reflecting surface 55 of light spare 5, can reduce the energy loss of light, make enter this all the most of light in the light spare 5 all can be penetrated by this exiting surface 54 again, and make irradiant energy and angle all comparatively concentrated, can promote the utilization factor of light.
Need to prove, this all light spare 5 be not limited to the form that Fig. 4 discloses, for example also can be as shown in Figure 5, its cross-sectional sizes is to become gradually large by this incidence surface 53 towards the direction of this exiting surface 54, in the case, the front and back of this passage 50 refer to bee-line between this incidence surface 53 and this exiting surface 54 to length, and this passage 50 measured left and right sides width b at any position no matter, equally all are to drop in the scope of 2mm～20mm; This all light spare 5 also can be hexagonal hollow long column shape body as shown in Figure 6, but need not limit its limit number when implementing.
In sum, by this all light uniformization effect of light spare 5, make the illumination on the irradiated plane 7 even, and light enter this all before the light spare 5 with afterwards, be subject to respectively this first collecting lens 4 and this second collecting lens 6 optically focused, light intensity be can promote, follow-up spectral analysis or other analysis are conducive to.
Consult Fig. 7, the second preferred embodiment and this first preferred embodiment of the light-dividing device that promotes the light uniformity coefficient of the present invention are roughly the same, different places are, the light source cell 2 of the present embodiment also comprises a supplementary set light microscopic 23 between this light source 21 and this optical splitter 3, the concrete example of this supplementary set light microscopic 23 is convex lens, be used for propagating towards this optical splitter 3 again after light with the light of this light source 21 and 22 reflections of this catoptron focuses on, can promote light intensity.Certainly, when this supplementary set light microscopic 23 was set, the position of the elements such as this optical splitter 3, catoptron 22, light source 21 all will adjust, to reach best light harvesting effect.
Consult Fig. 8, it is roughly the same that the present invention can promote the 3rd preferred embodiment and this first preferred embodiment of light-dividing device of light uniformity coefficient, different places are, the light-dividing device of the present embodiment comprises and arranges before and after two and at this optical splitter 3 and this equal the first collecting lens 4 between the light spare 5, and settings and be positioned at this all second collecting lens 6 in the place ahead of light spare 5 before and after three.
The present embodiment increases the quantity of described the first collecting lens 4, can promote monochromatic focusing, the light harvesting effect come by this optical splitter 3.Identical reason, the present embodiment increase the quantity of described the second collecting lens 6, can promote by this all focusing, the light harvesting effect of the light that comes of light spare 5.Cooperate the design of said elements, so that the overall light brightness that is incident upon in the predetermined area scope on the irradiated plane 7 is roughly the same, thereby promote the light uniformity coefficient.
By above each embodiment as can be known, the quantity of the first collecting lens 4 of the present invention and the second collecting lens 6 can be one, also can be several, must not limit to a number or amount during enforcement.
Should be understood that those skilled in the art can make various changes or modifications the present invention after having read above-mentioned instruction content of the present invention, these equivalent form of values fall within the application's appended claims limited range equally.
Claims (10)
1. light-dividing device that can promote the light uniformity coefficient, comprise: a light source cell, and a side that is positioned at this light source cell also is used for making the light of this light source cell by the monochromatic optical splitter of rear generation, it is characterized in that: this light-dividing device also comprises all light spares of at least one first collecting lens,, and at least one second collecting lens; This first collecting lens is positioned at a side of this optical splitter, and the monochromatic light that this optical splitter produces is focused on; This all light spare be positioned at a side of this first collecting lens, and comprise the body of a hollow columnar, a reflectance coating that is coated on the inner peripheral surface of this body, incidence surface towards this first collecting lens, exiting surface in contrast to this incidence surface, and one run through this incidence surface and this exiting surface and around the reflecting surface of an optical axis of this light source cell, described incidence surface and exiting surface all are jointly to be formed by this body and reflectance coating, this reflecting surface is the inner surface of this reflectance coating, and this reflecting surface defines one along this optical axis and axially extended passage, the light that this passage comes for supplying from this first collecting lens incident passes through, and this reflecting surface is used for making behind the light Multi reflection light to be penetrated by this exiting surface again; This second collecting lens is positioned at this all side of light spare, and will by this all the light that comes of light spare focus on.
2. the light-dividing device that promotes the light uniformity coefficient as claimed in claim 1, it is characterized in that: the length that this passage extends along this optical axis is 10mm～200mm.
3. the light-dividing device that promotes the light uniformity coefficient as claimed in claim 1 or 2, it is characterized in that: the width of this passage and the height of this passage are all 2mm～20mm.
4. the light-dividing device that promotes the light uniformity coefficient as claimed in claim 3 is characterized in that: this all the material of the body of light spare be metal, glass, quartz or silicon, the material of this reflectance coating is metal, dielectric material, or the combination of metal and dielectric material.
5. the light-dividing device that promotes the light uniformity coefficient as claimed in claim 1 is characterized in that: the monochromatic wavelength that this optical splitter produces is 200nm～1800nm.
6. the light-dividing device that promotes the light uniformity coefficient as claimed in claim 1, it is characterized in that: this light source cell comprises a light source, and a catoptron that is used for the light that this light source of reflection sends and light is penetrated towards the direction focusing of this optical splitter.
7. the light-dividing device that promotes the light uniformity coefficient as claimed in claim 6, it is characterized in that: this catoptron is elliptical reflector.
8. such as claim 6 or the 7 described light-dividing devices that promote the light uniformity coefficient, it is characterized in that: this light source cell also comprises a supplementary set light microscopic between this light source and this optical splitter, and this supplementary set light microscopic is propagated towards this optical splitter after the light of the light of this light source and this mirror reflects is focused on again.
9. the light-dividing device that promotes the light uniformity coefficient as claimed in claim 1 is characterized in that: this light-dividing device comprises the first collecting lens that arranges before and after several.
10. such as claim 1 or the 9 described light-dividing devices that promote the light uniformity coefficient, it is characterized in that: this light-dividing device comprises the second collecting lens that arranges before and after several.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100124938 | 2011-07-14 | ||
| TW100124938A TW201303273A (en) | 2011-07-14 | 2011-07-14 | Beam splitting apparatus capable of raising light uniformity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102879907A true CN102879907A (en) | 2013-01-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012102097869A Pending CN102879907A (en) | 2011-07-14 | 2012-06-25 | Light splitting device capable of improving light uniformity |
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| Country | Link |
|---|---|
| CN (1) | CN102879907A (en) |
| TW (1) | TW201303273A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104422515A (en) * | 2013-08-23 | 2015-03-18 | 赛默飞世尔（上海）仪器有限公司 | Optical structure for spectrophotometer |
| CN114839784A (en) * | 2022-04-14 | 2022-08-02 | 广东迪光医学科技有限公司 | Dodging device and laser equipment |
| CN114839784B (en) * | 2022-04-14 | 2024-07-05 | 广东迪光医学科技有限公司 | Light homogenizer and laser device |
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| CN101581662A (en) * | 2008-05-14 | 2009-11-18 | 中国科学院半导体研究所 | Absorption, reflection or transmission spectrum system having no stability requirement for excitation light source |
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| CN1307244A (en) * | 2000-02-04 | 2001-08-08 | 精工爱普生株式会社 | Projector |
| CN1441311A (en) * | 2003-03-24 | 2003-09-10 | 上海春晓光电科技有限公司 | Light rod type optical engine lighting system |
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| CN104422515A (en) * | 2013-08-23 | 2015-03-18 | 赛默飞世尔（上海）仪器有限公司 | Optical structure for spectrophotometer |
| CN114839784A (en) * | 2022-04-14 | 2022-08-02 | 广东迪光医学科技有限公司 | Dodging device and laser equipment |
| CN114839784B (en) * | 2022-04-14 | 2024-07-05 | 广东迪光医学科技有限公司 | Light homogenizer and laser device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI438409B (en) | 2014-05-21 |
| TW201303273A (en) | 2013-01-16 |
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Application publication date: 20130116 |