CN101581662A - Absorption, reflection or transmission spectrum system having no stability requirement for excitation light source - Google Patents

Absorption, reflection or transmission spectrum system having no stability requirement for excitation light source Download PDF

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Publication number
CN101581662A
CN101581662A CNA2008101065313A CN200810106531A CN101581662A CN 101581662 A CN101581662 A CN 101581662A CN A2008101065313 A CNA2008101065313 A CN A2008101065313A CN 200810106531 A CN200810106531 A CN 200810106531A CN 101581662 A CN101581662 A CN 101581662A
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China
Prior art keywords
light
light source
sample
reflection
beam splitter
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Pending
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CNA2008101065313A
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Chinese (zh)
Inventor
谭平恒
张俊
赵建华
姬扬
赵伟杰
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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Priority to CNA2008101065313A priority Critical patent/CN101581662A/en
Publication of CN101581662A publication Critical patent/CN101581662A/en
Pending legal-status Critical Current

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Abstract

The invention relates to an absorption, reflection or transmission spectrum system having no stability requirement for an excitation light source, comprising a light source, a light splitter, an excitation light source focusing element, a light beam splitter, a light intensity meter, a sample, a signal light collecting element, a detector and a computer. The light splitter is positioned at the rear of the light source and used for chromatically dispersing wide-spectrum light source emitted by the light source into a narrow-band light source or a monochromatic light source; the excitation light source focusing element is positioned at the rear of the light splitter and used for focusing the excitation light source split by the light splitter onto the sample to be tested; the light beam splitter is positioned at the rear of the excitation light source focusing element and used for reflecting part of the excitation light source split by the light splitter towards another direction and enabling the excitation light source to enter the light intensity meter; the light intensity meter is positioned on one side of the light path of the light beam splitter and used for detecting the intensity of the excitation light source reflected by the light beam splitter, wherein the intensity of the excitation light source is used as the intensity of reference light; the sample is positioned at the rear of the light beam splitter; the signal light collecting element is positioned at the rear of the sample and used for focusing the signal light emitted by the sample onto the detector; the detector is positioned at the rear of the signal light collecting element and used for detecting the intensity of the absorption, reflection or transmission signal light of the sample; and the computer is connected with the light splitter, the light intensity meter and the detector and used for controlling the operation of the whole set of the absorption, reflection or transmission spectrum system.

Description

To absorption, reflection and the transmitted spectrum system that has no stability requirement for excitation light source
Technical field
The present invention relates to the relevant characterization test technology of absorption, reflection and transmitted spectrum of the representational field of material, particularly material.
Background technology
Absorption, reflection and transmitted spectrum are one of very important spectral qualities of condensed state matter, are mainly used to study problems such as the level of energy of material and the absorption coefficient of light.
Now simple absorption, reflection and transmitted spectrum system excite beam splitting system mainly by light source, and sample chamber and detector are formed.With such system testing absorption, reflection and transmitted spectrum, earlier a catoptron is placed the sample chamber, allow the monochromatic light that excites beam splitting system to tell directly enter the excitation spectrum curve that detector is measured its exciting light, put sample then, the absorption of test sample product, reflection and transmitted spectrum again, with absorption, reflection and the transmitted spectrum surveyed to the excitation spectrum curve normalization of being surveyed after, just obtain the real absorption of sample, reflection and transmitted spectrum, twice promptly common mensuration.This method of testing is by a defective, promptly twice mensuration need be reused spectrometer, the repeatability of spectrometer operation and the stability of excitation source all can be proofreaied and correct the result reliability that is produced to the spectrum that records and be proposed to doubt in two time periods, this has also proposed very high requirement to the stability of light source power and the repeatability of spectrometer.If instrument repeatability is relatively poor or the less stable of light source power, will influence the result of test.
Above these problems are present common problems of being faced of common absorption, reflection and transmitted spectrum system.Can invent a kind of and simple absorption, reflection and transmitted spectrum system that excitation source stability all not require repeatable to spectrometer?
Summary of the invention
The object of the present invention is to provide absorption, reflection and the transmitted spectrum system of cover to having no stability requirement for excitation light source.The characteristics of this cover absorption, reflection and transmitted spectrum system are that it does not require spectrometer repeatability and excitation source stability when test absorption, reflection and transmitted spectrum, thereby can record very high absorption, reflection and the transmitted spectrum of signal to noise ratio (S/N ratio) of sample.
The invention provides a kind of absorption, reflection and transmitted spectrum system, it is characterized in that this system comprises having no stability requirement for excitation light source:
One light source;
One spectroscope, this spectroscope is positioned at after the light source, and the broad-spectrum light signal dispersion that is used for that light source is sent is narrow-band light source or monochromatic source;
One exciting light focal element, this exciting light focal element is positioned at after the spectroscope, is used for the exciting light that spectroscope is told is converged on institute's test sample product;
Beam splitter, this beam splitter are positioned at after the exciting light focal element, and a part of spectroscope being told exciting light reflexes to other direction, the light intensity meter of chatting after entering;
One light intensity meter, this light intensity meter are positioned at a side of beam splitter light path, are used for surveying the excitating light strength behind beam splitter reflection, as the reference light intensity;
One sample, this sample is positioned at after the beam splitter;
One flashlight gathering element, this flashlight gathering element is positioned at after the sample, the detector of chatting after the flashlight that is used for that sample is sent converges to;
One detector, this detector is positioned at after the flashlight gathering element, is used for surveying absorption, reflection or the transmission signal light intensity of sample;
One computing machine is connected with spectroscope, light intensity meter and detector respectively, is used for controlling the running of whole system.
Wherein light source is that needed per sample excitation wavelength scope is selected, and this light source is chosen as xenon lamp or the halogen tungsten lamp in the wide spectrum light source.
Wherein the grating of spectroscope is selected the spectral wavelength scope decision by exciting light.
Wherein the working range of beam splitter is greater than the excitation wavelength scope of sample.
Wherein beam splitter is the semi-reflective beam splitter, and the angle of this beam splitter on light path is 45 degree.
Description of drawings
For further specifying content of the present invention and characteristics, below in conjunction with accompanying drawing and implementation method the present invention is done a detailed description, wherein:
Fig. 1 is the structure diagram to the reflectance spectrum system that has no stability requirement for excitation light source.
Fig. 2 is the structure diagram to absorption that has no stability requirement for excitation light source and transmitted spectrum system.
Embodiment
See also illustrated in figures 1 and 2, absorption, reflection and the transmitted spectrum system of the present invention one cover to having no stability requirement for excitation light source, this system comprises:
One light source 10, this light source 10 are that needed per sample excitation wavelength scope is selected, and this light source 10 is xenon lamp or the halogen tungsten lamp in the wide spectrum light source;
One spectroscope 20, this spectroscope 20 is positioned at after the light source 10, and the broad-spectrum light signal dispersion that is used for that light source is sent is narrow-band light source or monochromatic source, and the grating of this spectroscope 20 is selected the spectral wavelength scope decision by exciting light;
One exciting light focal element 30, this exciting light focal element 30 is positioned at after the spectroscope 20, is used for the exciting light that spectroscope 20 is told is converged on the test sample product SP of institute;
One beam splitter 40, this beam splitter 40 is positioned at after the exciting light focal element 30, a part of spectroscope 20 being told exciting light reflexes to other direction, the light intensity meter of chatting after entering 50, the working range of this beam splitter 40 is greater than the excitation wavelength scope of sample, and the angle of this beam splitter 40 on light path is 45 degree;
One light intensity meter 50, this light intensity meter 50 is positioned at a side of beam splitter 40 light paths, is used for surveying the excitating light strength after beam splitter 40 reflections, as the reference light intensity;
One sample SP, this sample SP is positioned at after the beam splitter 40;
One flashlight gathering element 60, this flashlight gathering element 60 is positioned at after the sample SP, before the detector of chatting after being used for the flashlight that sample SP is sent converged to 70;
One detector 70, this detector 70 is positioned at after the flashlight gathering element 60, is used for surveying absorption, reflection or the transmission signal light intensity of sample;
One computing machine 80, this computing machine 80 respectively with control spectroscope 20, light intensity meter 50 is connected with detector 70, is used for controlling the running of whole system.
Compare native system is many beam splitter 40 and light intensity meter 50, and beam splitter 40 and the light intensity meter 50 core ingredient of native system just with other simple optical excitation fluorescent spectra systems.The path of native system light signal is shown in arrow among Fig. 1 and Fig. 2.The optical element of Fig. 1 and Fig. 2 is basic identical, different be exactly for realize absorbing/when transmitted spectrum is measured with reflective spectral measure and the configuration of being adopted on the light path of sample front and back is different.
Generally speaking, broad-spectrum light signal that light source 10 is sent is narrow-band light source or monochromatic source by chromatic dispersion during through spectroscope 20, light source after the spectroscope 20 chromatic dispersions light focal element 30 that is excited converges to sample SP, by beam splitter 40 a part of exciting light is reflected into into light intensity meter 50 simultaneously, the excitating light strength that light intensity meter 50 detects is the reference signal I of exciting light 0(λ); Converged to detector 70 by the optical signalling after absorption of sample, reflection or the transmission by flashlight gathering element 60, detector 70 measured light signals are I S(λ).Like this, the relative intensity of the absorption spectrum of sample, reflectance spectrum or transmitted spectrum just is the measured light signal strength of detector 70 and the ratio of the measured reference signal strength of light intensity meter 50, i.e. I S(λ)/I 0(λ).
Absolute strength for the absorption spectrum, reflectance spectrum or the transmitted spectrum that obtain sample, we establish the reflectivity of beam splitter 40 and the ratio of transmitance is R (λ) (annotate: this R (λ) value can be proofreaied and correct acquisition by standard reflection spectrometer or transmission spectrometer), so, the excitating light strength that incides sample SP is I 0(λ)/R (λ).The transmission coefficient that we establish flashlight gathering element 60 is T (λ) (annotate: this T (λ) value can be proofreaied and correct acquisition by the standard light spectrometer).If light intensity meter 50 is the identical detector of model with detector 70, the absolute strength of the absorption spectrum of sample, reflectance spectrum or transmitted spectrum is (I just so S(λ)/T (λ))/(I 0(λ)/R (λ)).If light intensity meter 50 is the different detector of model with detector 70, the ratio that we establish the detection efficiency of light intensity meter 50 and detector 70 is ξ 57(λ) (annotate: this T (λ) value can be proofreaied and correct acquisition by the standard light spectrometer), the absolute strength of the absorption spectrum of sample, reflectance spectrum or transmitted spectrum is (I just so S(λ) * ξ 57(λ)/T (λ))/(I 0(λ)/R (λ)).
By writing the spectrometer Control Software of computing machine, we can be factor ξ 57(λ) * R (λ)/T (λ) is stored in the computing machine as the function of excitation wavelength, and the relative absorption spectrum of each bar, reflectance spectrum or the transmission spectrum curve of being surveyed all be multiply by factor ξ 57(λ) * R (λ)/T (λ) carries out from normal moveout correction, so, just can obtain the real absorption spectrum of sample, reflectance spectrum or transmitted spectrum immediately once.
Because I S(λ) and I 0(λ) record simultaneously, therefore can very high requirement not arranged, simultaneously, can avoid common absorption yet stability of light source, reflection or transmitted light spectrometer are measured absorption because of using twice mensuration, reflection or transmitted spectrum and the repeatability of pair spectrometer has very high requirement.Owing to spectrometer of the present invention and measuring method thereof have been avoided the instability and the bad lower problem of spectral signal-noise ratio of bringing of spectrometer repeatability of light source, utilize the measured absorption of sample of this system, reflection or transmitted spectrum just to have very high signal to noise ratio (S/N ratio).
Above example illustrates that this cover that we design has the characteristics of some highly significants to absorption, reflection or the transmitted spectrum system that has no stability requirement for excitation light source, and is exactly that this system does not all require spectrometer repeatability and excitation source stability; Can obtain the real absorption of sample, reflection or transmitted spectrum immediately through once getting to compose; Can improve the signal to noise ratio (S/N ratio) of spectrum.This system will be applied in the technology of optical characterisation aspect of material.

Claims (5)

1. absorption, reflection and transmitted spectrum system to having no stability requirement for excitation light source is characterized in that this system comprises:
One light source;
One spectroscope, this spectroscope is positioned at after the light source, and the broad-spectrum light signal dispersion that is used for that light source is sent is narrow-band light source or monochromatic source;
One exciting light focal element, this exciting light focal element is positioned at after the spectroscope, is used for the exciting light that spectroscope is told is converged on institute's test sample product;
One beam splitter, this beam splitter are positioned at after the exciting light focal element, and a part of spectroscope being told exciting light reflexes to other direction, the light intensity meter of chatting after entering;
One light intensity meter, this light intensity meter are positioned at a side of beam splitter light path, are used for surveying the excitating light strength behind beam splitter reflection, as the reference light intensity;
One sample, this sample is positioned at after the beam splitter;
One flashlight gathering element, this flashlight gathering element is positioned at after the sample, the detector of chatting after the flashlight that is used for that sample is sent converges to;
One detector, this detector is positioned at after the flashlight gathering element, is used for surveying absorption, reflection or the transmission signal light intensity of sample;
One computing machine is connected with spectroscope, light intensity meter and detector respectively, is used for controlling the running of whole system.
2. absorption, reflection and the transmitted spectrum system to having no stability requirement for excitation light source according to claim 1, it is characterized in that, wherein light source is that needed per sample excitation wavelength scope is selected, and this light source is chosen as xenon lamp or the halogen tungsten lamp in the wide spectrum light source.
3. absorption, reflection and the transmitted spectrum system to having no stability requirement for excitation light source according to claim 1 is characterized in that, wherein the grating of spectroscope is selected the spectral wavelength scope decision by exciting light.
4. absorption, reflection and the transmitted spectrum system to having no stability requirement for excitation light source according to claim 1 is characterized in that wherein the working range of beam splitter is greater than the excitation wavelength scope of sample.
5. absorption, reflection and the transmitted spectrum system to having no stability requirement for excitation light source according to claim 1 is characterized in that wherein beam splitter is the semi-reflective beam splitter, and the angle of this beam splitter on light path is 45 degree.
CNA2008101065313A 2008-05-14 2008-05-14 Absorption, reflection or transmission spectrum system having no stability requirement for excitation light source Pending CN101581662A (en)

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Application Number Priority Date Filing Date Title
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102735628A (en) * 2012-06-21 2012-10-17 南京邮电大学 Real-time dynamic absorption spectrum test method
CN102879907A (en) * 2011-07-14 2013-01-16 光焱科技股份有限公司 Light splitting device capable of improving light uniformity
CN102928203A (en) * 2012-11-07 2013-02-13 中国电子科技集团公司第四十一研究所 Device and method for calibrating cut-off wavelength of polarization maintaining optical fiber
CN103528970A (en) * 2013-10-22 2014-01-22 长春长光思博光谱技术有限公司 Light path system in portable near-infrared analyzer
CN104607394A (en) * 2015-01-30 2015-05-13 合肥泰禾光电科技股份有限公司 Material illumination detection equipment and material separation equipment applying same
CN107389615A (en) * 2016-12-20 2017-11-24 苏州赛德福科学仪器有限公司 A kind of evaporation optical detection device and the evaporative light measuring method based on the device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102879907A (en) * 2011-07-14 2013-01-16 光焱科技股份有限公司 Light splitting device capable of improving light uniformity
CN102735628A (en) * 2012-06-21 2012-10-17 南京邮电大学 Real-time dynamic absorption spectrum test method
CN102928203A (en) * 2012-11-07 2013-02-13 中国电子科技集团公司第四十一研究所 Device and method for calibrating cut-off wavelength of polarization maintaining optical fiber
CN102928203B (en) * 2012-11-07 2016-02-17 中国电子科技集团公司第四十一研究所 A kind of polarization maintaining optical fibre cutoff wavelength calibrating installation and calibration steps thereof
CN103528970A (en) * 2013-10-22 2014-01-22 长春长光思博光谱技术有限公司 Light path system in portable near-infrared analyzer
CN104607394A (en) * 2015-01-30 2015-05-13 合肥泰禾光电科技股份有限公司 Material illumination detection equipment and material separation equipment applying same
CN107389615A (en) * 2016-12-20 2017-11-24 苏州赛德福科学仪器有限公司 A kind of evaporation optical detection device and the evaporative light measuring method based on the device
CN107389615B (en) * 2016-12-20 2020-03-24 苏州赛德福科学仪器有限公司 Evaporation light detection device and evaporation light measurement method based on same

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Open date: 20091118