CN102878939B - Method for measuring non-contact gaps - Google Patents
Method for measuring non-contact gaps Download PDFInfo
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- CN102878939B CN102878939B CN201210405612.XA CN201210405612A CN102878939B CN 102878939 B CN102878939 B CN 102878939B CN 201210405612 A CN201210405612 A CN 201210405612A CN 102878939 B CN102878939 B CN 102878939B
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Abstract
The invention discloses a device and a method for measuring non-contact gaps. The method is used for measuring the three degrees of freedom of a gap formed between the lower surface of an upper measured object and the upper surface of a lower measured object. Measuring sensors are mounted on the upper measured object in a non-collinear three-point manner, measuring directions of the measuring sensors are perpendicular to the lower surface of the upper measured object, and zero positions of the measuring sensors are adjusted to coincide with the lower surface of the upper measured object. Three distances between laser emitting points on the lower surface of the upper measured object and corresponding laser reflecting points on the upper surface of the lower measured object are measured, and the three degrees of freedom between the lower surface of the upper measured object and the upper surface of the lower measured object can be obtained via algorithm processing. The method can be used for pose position measurement and regulation of an immersion unit mounted on a movement platform in immersed photoetching, can also be used for measuring pose position in a three-dimensional space, and is especially applicable to precise measurement for narrow gaps.
Description
Technical field
The present invention relates to a kind of geometrical dimensional measurement apparatus and method, particularly relate to a kind of contactless slot measurement apparatus and method.
Background technology
In lithography industry, small gaps is very common, but extremely important, such as: the liquid gap between submergence unit and silicon chip in liquid immersion lithography; Gas gap in imprint lithography between mask plate and silicon chip.This type of gap usually by have on-circular symmetry characteristic top testee lower surface and silicon chip upper surface formed.The quality in these gaps and the quality of exposing patterns closely related.When immersion lithographic apparatus exposes, submergence unit will be installed on above silicon chip, and drive silicon chip to carry out maintaining immersion flow field in the process scanned at wafer-supporting platform.In order to ensure exposure quality, the stable homogeneous of immersion flow field must be ensured.Submergence unit needs the distance controlling submergence unit lower surface and silicon chip upper surface when normally working, and keeping parallelism or within the scope of certain angle, therefore needing apparatus and method to measure this gap, providing metrical information for automatically adjusting to the spatial attitude of submergence unit and position.
In this slot measurement, the spatial pose of main detection silicon chip top testee, and the principle of a plane is determined according to 3, at least need three of not conllinear point data to be recorded, for the Three Degree Of Freedom parameter determining gap between top testee and bottom testee.Therefore, compact, Three Degree Of Freedom, accurate slot measurement system must be possessed, this system is the demand measured of demand fulfillment Three Degree Of Freedom at least, comprises two angular freedom and a displacement freedom, simultaneously the accuracy of demand fulfillment slot measurement and the requirement of rapidity.
Existing slot measurement method also can complete this function, but there is following problem:
(1) method of existing measuring slit mainly pays close attention to measurement and the adjustment of chinky altitude, but seldom pays close attention to and measure pitch angle and the relative rotation in gap.These slot measurement methods provide enough parameters cannot to 3DOF governor motion control module, regulate quickly and accurately the position of top testee and attitude very difficult.
(2) contact slot measurement mode easily easily produces wearing and tearing to product surface and damages, and repeatability is not high yet.
(3) contactless slot measurement method such as capacitance method utilizes insulating electrode (capacitor plate) and metal end to be measured and the electric capacity that formed carries out measuring, the change in gap causes the change of measuring electric capacity, then capacitance change is converted to the voltage or current signal that are easy to determination and analysis by testing circuit and modulate circuit.Capacitance method is widely used in the precision measurement of the mechanical quantity such as displacement, vibration, angle, acceleration, has the features such as structure is simple, volume is little, resolution is high, dynamic response is good.But its output impedance is high, and load capacity is poor; Effect of parasitic capacitance is large, makes instrument work very unstable, affects measuring accuracy; More critically capacitance method can only be measured a certain plane domain, and cannot obtain point data.
For meeting the requirement of etching system for high industrial output and photoetching quality, slot measurement must be accomplished accurately and fast.
Summary of the invention
In order to overcome the deficiency of slot measurement apparatus and method in background technology, the object of the present invention is to provide a kind of contactless slot measurement apparatus and method, can be used for measuring the gap of installing between submergence unit on the moving platform and silicon chip in liquid immersion lithography, accurately, repeatability is high, respond slot measurement apparatus and method fast.The present invention is equally applicable to general small gaps and measures occasion.
The technical solution used in the present invention is:
One, a contactless slot measurement device, described measurement mechanism comprises at least three non-contact displacement transducers and analysis and processing unit;
Three non-contact displacement transducers are installed on top testee respectively with the three-point shape formula of not conllinear, its non-contact measurement direction is all vertical with top testee lower surface, the measurement of three non-contact displacement transducers all overlaps with top testee lower surface zero point, and top testee lower surface is parallel relative to bottom testee upper surface or there is angle.
Two, a contactless slot measurement method, the measuring process of described measuring method is as follows:
1) three non-contact displacement transducers are installed on top testee respectively with the three-point shape formula of not conllinear, its non-contact measurement direction is all vertical with top testee lower surface;
2) three non-contact displacement transducers install with top testee after, top testee is placed on the testee of bottom, top testee lower surface is overlapped with bottom testee upper surface, by three synchronous zero setting of non-contact displacement transducer, make its three to measure and all overlap with top testee lower surface zero point;
3) after zero setting, as required top testee is fixed, determine the position orientation relation of top testee relative to bottom testee, then three non-contact displacement transducers carry out the space pose measurement of top testee lower surface and bottom testee upper surface simultaneously, distance between the laser emitting point laser reflection point corresponding to bottom testee upper surface of top testee lower surface is recorded, be designated as the first measuring distance, the second measuring distance, the 3rd measuring distance respectively, this direction of measurement is vertical with top testee lower surface;
4) by the first measuring distance recorded, the second measuring distance, the 3rd measuring distance by analysis processing unit draw gap Three Degree Of Freedom parameter, be respectively the vertical range of intersection point to bottom testee upper surface of top testee lower surface and own axes, the pitch angle of bottom testee upper surface and top testee lower surface, top testee is around the corner of own axes.Concrete analysis processing procedure is as follows:
With the tested upper surface in bottom for reference field OXY sets up basis coordinates system O-XYZ, with top object lower for reference field ouv sets up moving coordinate system o-uvw, when the initial point of moving coordinate system to be positioned on basis coordinates OZ axle and above plane OXY time, d can be used respectively, beta, gamma three parameters describe the spatial pose relation between OXY plane and ouv plane.
For the laser emission point of installing arbitrarily, θ '
2with θ '
3be the actual installation angle of two adjacent laser displacement sensors, r
iit is the actual installation radius of i-th laser displacement sensor.Coordinate in o-uvw moving coordinate system can be expressed as [r
icos θ
ir
isin θ
i0 1]
t, laser is launched in the other direction along OZ axle, wherein
The coordinate of laser reflection point in o-uvw moving coordinate system on reference field OXY is P '=[r
icos θ
ir
isin θ
i-L
i1]
t, wherein L
ifor the distance between measured launching site and reflection spot.
Moving coordinate system o-uvw can be obtained by the translation of basis coordinates system O-XYZ and pivoting.The detailed process of these three parameters in space coordinate transformation and being defined as follows:
During initial position, moving coordinate system o-uvw overlaps completely with basis coordinates system O-XYZ.
Moving coordinate system o-uvw turns over γ around basis coordinates system OZ axle, and its value is in (-π, π) scope;
Moving coordinate system o-uvw is along basis coordinates system OZ axle translation d, and its value is greater than 0;
Moving coordinate system o-uvw turns over β around basis coordinates system OY axle, and its value is in (0, pi/2) scope;
Therefore the coordinate of the reflection spot P of laser under O-XYZ coordinate system is by such as down conversion acquisition:
Because laser reflection point is on base plane OXY, therefore the Z-direction coordinate of reflection spot P under O-XYZ coordinate system is 0.Namely
d-L
iCosβ-r
iSinβCosθ
i＝0
For the laser displacement sensor that three are installed arbitrarily, acquisition three groups of measurement data can make by we:
Can system of equations be obtained thus as follows:
Through arranging
By measuring the distance between different laser emission point and reflection spot, in conjunction with actual installation parameter, can calculate and obtain γ, β, d tri-parameters.
The measurement range at the bottom testee upper surface of described measuring method and the pitch angle (β) of top testee lower surface is determined by following a few part: respectively with the first non-contact displacement transducer, the second non-contact displacement transducer, the 3rd non-contact displacement transducer corresponding first install radius, second and install the measurement range that radius, the 3rd installs radius and non-contact displacement transducer, and the intersection point of top testee lower surface and own axes is to the vertical range of bottom testee upper surface.
Described measuring method has self calibrating function, for measuring fixing pitch angle, by top testee when the rotation of own axes, under different corner, the measured value at pitch angle can there are differences, and the size of this difference value characterizes the repeatability quality of systematic survey, for different pitch angle, the max value of error of the accuracy quality that characterization system is measured can be obtained, in order to realize the precision calibration of measuring system by often organizing difference value.
Described measuring method improves the overall measurement accuracy of measuring method by following several respects.
Wherein:
1) measuring accuracy improving non-contact displacement transducer can improve the measuring accuracy of system for gap Three Degree Of Freedom parameter;
2) the installation dimension precision improving non-contact displacement transducer can improve the measuring accuracy of system for gap Three Degree Of Freedom parameter;
3) carry out installation parameter by the two-frequency laser interferometer that measuring accuracy is higher and correct the measuring error that can effectively reduce and install radius error and cause;
4) by increasing the quantity of non-contact displacement transducer, utilizing multi-group data to combine calculating and can effectively reduce random meausrement error.
The beneficial effect that the present invention has is:
1, structure of the present invention is simple, and sensor is easy for installation, good reliability;
2, measuring accuracy of the present invention is high, and response is fast, and repeatability is good;
3, the present invention is by increasing the quantity of non-contact displacement transducer, utilizes the idea of combination ordered series of numbers, obtains organizing measurement data more, can effectively reduce random meausrement error by calculating;
4, the present invention has self calibrating function, need not calibrate by the measurement mechanism that extraneous precision is higher, for pitch angle different between top testee from bottom testee, the maximal value of the inclination measurement error of the accuracy quality that characterization system is measured only need can be obtained by often organizing the measured value difference of pitch angle under different corner, then the more accurate installation parameter of non-contact displacement transducer be can obtain, demarcation and the optimization of measuring system realized.
The present invention is applicable to accurately measure the gap between the submergence unit installed on the moving platform and silicon chip in liquid immersion lithography, is also applicable to the occasion that other small gaps parameters are accurately measured.
Accompanying drawing explanation
Fig. 1 is isometric view of the present invention.
Fig. 2 is the vertical view of gap three of the present invention free parameter definition sketch.
Fig. 3 is the left view of gap three of the present invention free parameter definition sketch.
Fig. 4 is the mathematical model figure of description of the present invention three measuring distances and Three Degree Of Freedom parameters relationship.
Fig. 5 is measuring process process flow diagram of the present invention.
In figure: 1, bottom testee, 1A, bottom testee upper surface, 2, non-contact displacement transducer, 2A, the first non-contact displacement transducer, 2B, the second non-contact displacement transducer, 2C, the 3rd non-contact displacement transducer, 3, top testee, 3A, top testee lower surface, 3B, top testee own axes, 4, analysis and processing unit.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described further.
As Figure 1-Figure 4, the present invention includes
1, a contactless slot measurement device, is characterized in that: comprise at least three non-contact displacement transducers 2 and analysis and processing unit 4;
Three non-contact displacement transducers 2 are installed on top testee 3 respectively with the three-point shape formula of not conllinear, its non-contact measurement direction is all vertical with top testee lower surface 3A, the measurement of three non-contact displacement transducers 2 all overlaps with top testee lower surface 3A zero point, and top testee lower surface 3A is parallel relative to bottom testee upper surface 1A or there is angle.
2, the measuring process of a kind of contactless slot measurement method of described device is as follows:
1) three non-contact displacement transducers 2A, 2B, 2C are installed on top testee 3 respectively with the three-point shape formula of not conllinear, its non-contact measurement direction is all vertical with top testee lower surface 3A;
2) three non-contact displacement transducers 2 install with top testee 3 after, top testee 3 is placed on bottom testee 1, top testee lower surface 3A is overlapped with bottom testee upper surface 1A, by synchronous for three non-contact displacement transducers 2 zero setting, make its three to measure and all overlap with top testee lower surface 3A zero point;
3) after zero setting, as required top testee 3 is fixed, determine the position orientation relation of top testee 3 relative to bottom testee 1, then three non-contact displacement transducers 2 carry out the space pose measurement of top testee lower surface 3A and bottom testee upper surface 1A simultaneously, distance between the laser emitting point laser reflection point corresponding to bottom testee upper surface 1A of top testee lower surface 3A is recorded, and is designated as the first measuring distance L respectively
1, the second measuring distance L
2, the 3rd measuring distance L
3, this direction of measurement is vertical with top testee lower surface 3A;
4) by the first measuring distance L recorded
1, the second measuring distance L
2, the 3rd measuring distance L
3processing unit 4 draws gap Three Degree Of Freedom parameter by analysis, be respectively the vertical range d of intersection point to bottom testee upper surface 1A of top testee lower surface 3A and own axes 3B, the angle of inclination beta of bottom testee upper surface 1A and top testee lower surface 3A, top testee 3 is around the corner γ of own axes 3B.
The measurement range of the bottom testee upper surface 1A of described measuring method and the angle of inclination beta of top testee lower surface 3A is determined by following a few part: corresponding first install radius r respectively with the first non-contact displacement transducer 2A, the second non-contact displacement transducer 2B, the 3rd non-contact displacement transducer 2C
1, second install radius r
2, the 3rd install radius r
3and the measurement range of non-contact displacement transducer 2, the intersection point of top testee lower surface 3A and own axes 3B is to the vertical range d of bottom testee upper surface 1A.
Described measuring method has self calibrating function, for measuring fixing angle of inclination beta, by top testee 3 when the rotation of own axes 3B, under different corner γ, the measured value of angle of inclination beta can there are differences Δ β, the size of this discrepancy delta β value characterizes the repeatability quality of systematic survey, for different angle of inclination beta
i, by often organizing discrepancy delta β
ivalue can obtain the max value of error Δ β of the accuracy quality that characterization system is measured
max, in order to realize the precision calibration of measuring system.
Described measuring method improves the overall measurement accuracy of measuring method by following several respects;
Wherein:
1) measuring accuracy improving non-contact displacement transducer 2 can improve the measuring accuracy of system for gap Three Degree Of Freedom parameter;
2) the installation dimension precision improving non-contact displacement transducer 2 can improve the measuring accuracy of system for gap Three Degree Of Freedom parameter;
3) carry out installation parameter by the two-frequency laser interferometer that measuring accuracy is higher and correct the measuring error that can effectively reduce and install radius error and cause;
4) by increasing the quantity of non-contact displacement transducer 2, utilizing multi-group data to combine calculating and can effectively reduce random meausrement error.
As Figure 1 and Figure 4, bottom testee (silicon chip) and top testee (submergence unit) are parallel to each other or have certain pitch angle.First, second and third non-contact displacement transducer 2A, 2B, 2C of non-contact displacement transducer 2 are installed on top testee 3 in the mode of not collinear three points, its direction of measurement is all vertical with top testee 3 lower surface 3A, measures and all overlaps with top testee 3 lower surface 3A zero point.This non-contact displacement transducer 2 can select laser without contact displacement transducer, select in this example for laser displacement sensor be LK_H020, Keyence, its measuring accuracy is 0.0001um, and measurement range is ± 3mm.Laser displacement sensor installs angle by regulating to install radius or change, and to verify the measuring accuracy under different installation dimension, also can install 3 or 4 laser displacement sensors to verify the measuring accuracy under different laser displacement sensor quantity simultaneously.Also can by spectral interference formula laser displacement gauge alternately to compacter system.When top testee 3 with different attitude above bottom testee 1 time, have the displacement measurement of one group of non-contact displacement transducer 2 corresponding with it.During measurement, give off laser beam from the measuring head of first, second and third non-contact displacement transducer 2A, 2B, 2C, after arriving the upper surface 1A of bottom testee 1, different situations according to this surface reflect in the mode of diffuse reflection or mirror-reflection, received by the receiver of corresponding first, second and third non-contact displacement transducer 2A, 2B, 2C, thus obtain on three measurement points, the distance L1 to bottom testee 1 lower surface 1A vertical with top testee 3 lower surface 3A, L2, L3.
For obtaining the Three Degree Of Freedom parameter in gap as shown in Figure 2 and Figure 3---the intersection point of top testee 3 lower surface 3A and own axes 3B is to the vertical range d of bottom testee 1 upper surface 1A, the angle of inclination beta of bottom testee 1 upper surface 1A and top testee 3 lower surface 3A, top testee 3, around own axes 3B corner γ, sets up mathematical model as shown in Figure 3.
Concrete analysis processing procedure is as follows:
With the tested upper surface in bottom for reference field OXY sets up basis coordinates system O-XYZ, with top object lower for reference field ouv sets up moving coordinate system o-uvw, when the initial point of moving coordinate system to be positioned on basis coordinates OZ axle and above plane OXY time, d can be used respectively, beta, gamma three parameters describe the spatial pose relation between OXY plane and ouv plane.
Formula according to coordinate transform can derive measuring distance L
1, L
2, L
3and Three Degree Of Freedom parameter d, three relational expressions between β, γ, this relational expression comprises the installation radius r of first, second and third non-contact displacement transducer 2A, 2B, 2C
1, r
2, r
3and the angle theta of first and second non-contact displacement transducer 2A, 2B '
2, the angle theta of second and third non-contact displacement transducer 2A, 2B '
3.Coordinate in o-uvw moving coordinate system can be expressed as [r
icos θ
ir
isin θ
i0 1]
t, laser is launched in the other direction along OZ axle, wherein
The coordinate of laser reflection point in o-uvw moving coordinate system on reference field OXY is P '=[r
icos θ
ir
isin θ
i-L
i1]
t, wherein L
ifor the distance between measured launching site and reflection spot.
Moving coordinate system o-uvw can be obtained by the translation of basis coordinates system O-XYZ and pivoting.The detailed process of these three parameters in space coordinate transformation and being defined as follows:
During initial position, moving coordinate system o-uvw overlaps completely with basis coordinates system O-XYZ.
Moving coordinate system o-uvw turns over γ around basis coordinates system OZ axle, and its value is in (-π, π) scope;
Moving coordinate system o-uvw is along basis coordinates system OZ axle translation d, and its value is greater than 0;
Moving coordinate system o-uvw turns over β around basis coordinates system OY axle, and its value is in (0, pi/2) scope;
Therefore the coordinate of the reflection spot P of laser under O-XYZ coordinate system is by such as down conversion acquisition:
Because laser reflection point is on base plane OXY, therefore the Z-direction coordinate of reflection spot P under O-XYZ coordinate system is 0.Namely
d-L
iCosβ-r
iSinβCosθ
i＝0
For the laser displacement sensor that three are installed arbitrarily, acquisition three groups of measurement data can make by we:
Can system of equations be obtained thus as follows:
Through arranging
By measuring the distance between different laser emission point and reflection spot, in conjunction with actual installation parameter, can calculate and obtain γ, β, d tri-parameters.
This algorithm is stored in analysis and processing unit 4 through programming, by the measuring distance L recorded
1, L
2, L
3be input to analysis and processing unit 4 to process, the value of d, β, γ can be obtained, thus the position orientation relation between top testee 3 and bottom testee 1 can be determined.
Thus, when needs carry out self-timing signal to non-contact displacement transducer 2, the gap fixing to pitch angle, under different corner, can there is certain discrepancy delta β in the measured value of angle of inclination beta, and the size of Δ β value characterizes the repeatability quality of systematic survey.For different angle of inclination beta
i, by often organizing Δ β
ithe maximal value Δ β of the error of the accuracy quality that characterization system is measured can be obtained
max, in order to realize the precision calibration of measuring system.
Claims (3)
1. a contactless slot measurement method, is characterized in that, the step of this measuring method is as follows:
1) be installed on top testee (3) by three non-contact displacement transducers (2A, 2B, 2C) respectively with the three-point shape formula of not conllinear, its non-contact measurement direction is all vertical with top testee lower surface (3A);
2) three non-contact displacement transducers (2) install with top testee (3) after, top testee (3) is placed on bottom testee (1), top testee lower surface (3A) is overlapped with bottom testee upper surface (1A), by synchronous for three non-contact displacement transducers (2) zero setting, make its three to measure and all overlap with top testee lower surface (3A) zero point;
3) after zero setting, as required top testee (3) is fixed, determine the position orientation relation of top testee (3) relative to bottom testee (1), then three non-contact displacement transducers (2) carry out the space pose measurement of top testee lower surface (3A) and bottom testee upper surface (1A) simultaneously, distance between the laser emitting point laser reflection point corresponding to bottom testee upper surface (1A) on top testee lower surface (3A) is recorded, and is designated as the first measuring distance (L respectively
1), the second measuring distance (L
2), the 3rd measuring distance (L
3), this direction of measurement is vertical with top testee lower surface (3A);
4) by the first measuring distance (L recorded
1), the second measuring distance (L
2), the 3rd measuring distance (L
3) by analysis processing unit (4) draw gap Three Degree Of Freedom parameter, be respectively the vertical range (d) of intersection point to bottom testee upper surface (1A) of top testee lower surface (3A) and own axes (3B), the pitch angle (β) on bottom testee upper surface (1A) and top testee lower surface (3A), top testee (3) is around the corner (γ) of own axes (3B).
2. the contactless slot measurement method of one according to claim 1, it is characterized in that, the measurement range at described bottom testee upper surface (1A) and the pitch angle (β) on top testee lower surface (3A) is determined by following a few part: corresponding first install radius (r respectively with the first non-contact displacement transducer (2A), the second non-contact displacement transducer (2B), the 3rd non-contact displacement transducer (2C)
1), second radius (r is installed
2), the 3rd radius (r is installed
3) and the measurement range of non-contact displacement transducer (2), the intersection point of top testee lower surface (3A) and own axes (3B) is to the vertical range (d) of bottom testee upper surface (1A).
3. the contactless slot measurement method of one according to claim 1, it is characterized in that, described measuring method has self calibrating function, for measuring fixing pitch angle (β), by top testee (3) when the rotation of own axes (3B), under different corner (γ), the measured value at pitch angle (β) can there are differences (Δ β), the size of this difference (Δ β) value characterizes the repeatability quality of systematic survey, for different pitch angle (β
i), by often organizing difference (Δ β
i) value can obtain max value of error (the Δ β of accuracy quality that characterization system is measured
max), in order to realize the precision calibration of measuring system.
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|---|---|---|---|
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| EP3838578A1 (en) * | 2018-12-14 | 2021-06-23 | Natoli Engineering Company Inc | Device to level a feeder platform |
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| CN105043234B (en) * | 2015-08-19 | 2018-02-13 | 北京市市政工程研究院 | The monitoring device of malformation gap space form |
| CN110095071B (en) * | 2019-05-27 | 2021-05-18 | 延锋彼欧汽车外饰系统有限公司 | Electronic measurement checking fixture and electronic measurement method |
| CN112129258B (en) * | 2020-08-24 | 2022-07-26 | 中车唐山机车车辆有限公司 | Scratch depth measuring method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201034559Y (en) * | 2007-04-25 | 2008-03-12 | 上海大学 | Device for testing planarity and depth of parallelism of clintheriform workpieces top and plane |
| CN201503259U (en) * | 2009-08-28 | 2010-06-09 | 东莞市兆丰精密仪器有限公司 | Full-automatic multi-functional sensor geometrical measurement system |
| CN102193327A (en) * | 2010-03-12 | 2011-09-21 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN102706286A (en) * | 2012-06-25 | 2012-10-03 | 哈尔滨工业大学 | Laser measurement device for thickness of plate |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4228132B2 (en) * | 2002-10-18 | 2009-02-25 | 株式会社トプコン | Position measuring device |
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2012
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201034559Y (en) * | 2007-04-25 | 2008-03-12 | 上海大学 | Device for testing planarity and depth of parallelism of clintheriform workpieces top and plane |
| CN201503259U (en) * | 2009-08-28 | 2010-06-09 | 东莞市兆丰精密仪器有限公司 | Full-automatic multi-functional sensor geometrical measurement system |
| CN102193327A (en) * | 2010-03-12 | 2011-09-21 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN102706286A (en) * | 2012-06-25 | 2012-10-03 | 哈尔滨工业大学 | Laser measurement device for thickness of plate |
Non-Patent Citations (1)
| Title |
|---|
| 光刻机浸没液体控制系统的研究现状及进展;傅新等;《机 械 工 程 学 报》;20100831;第46卷(第16期);第170-175页 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3838578A1 (en) * | 2018-12-14 | 2021-06-23 | Natoli Engineering Company Inc | Device to level a feeder platform |
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