CN102868382A - Coating electrode of SMD (surface mounted device) quartz-crystal resonator - Google Patents

Coating electrode of SMD (surface mounted device) quartz-crystal resonator Download PDF

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Publication number
CN102868382A
CN102868382A CN2012103555775A CN201210355577A CN102868382A CN 102868382 A CN102868382 A CN 102868382A CN 2012103555775 A CN2012103555775 A CN 2012103555775A CN 201210355577 A CN201210355577 A CN 201210355577A CN 102868382 A CN102868382 A CN 102868382A
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Prior art keywords
coated electrode
crystal resonator
quartz
smd
smd quartz
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CN2012103555775A
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CN102868382B (en
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刘青彦
梁羽杉
杨清明
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CHENGDU KINGBRI FREQUENCY TECHNOLOGY CO LTD
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CHENGDU KINGBRI FREQUENCY TECHNOLOGY CO LTD
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Abstract

The invention discloses a coating electrode of an SMD (surface mounted device) quartz-crystal resonator. The coating electrode is attached to the surface of a wafer and comprises a rectangular area and an arch area connected with the rectangular area. The FDLD index of the coating electrode relative to the SMD quartz-crystal resonator is obviously improved, and the performance of the coating electrode is improved.

Description

A kind of SMD quartz-crystal resonator coated electrode
Technical field
The present invention relates to the electronic devices and components field, relate in particular to a kind of SMD quartz crystal resonator electrode.
Background technology
Quartz-crystal resonator is the piezoelectric device made from piezoelectric quartz (namely quartzy), and it not only has high stability physical and chemical performance, and the elastic vibration loss is minimum.Compare with other electronic devices and components, piezoelectric quartz crystal also has very high frequency stability and high Q value, the Important Components that makes it become stabilized frequency and select frequency.Extensive use along with digitizer, market proposes higher requirement to the unfailing performance of crystal element and device, the FDLD index of quartz-crystal resonator, what reflect is that the quartz-crystal resonator operating frequency is with the difference of exciting power, the frequency change maximum that produces and the difference of minimum value are one of the key indexs of the quality of quartz crystal.Prior art is to adopt the rectangle silver-coated electrode, carries out the scanning of 30 steps from 0.01uW to 500uW in the volume production process, for FDLD＜± specification of 2ppm, the quality of shipment product can only be selected to guarantee by exhaustive test in its CPK＜1.33, production cost is high.
Summary of the invention
The present invention aims to provide a kind of SMD quartz-crystal resonator coated electrode, is used for improving the FDLD index of SMD quartz-crystal resonator, improves the performance of SMD quartz-crystal resonator.
For achieving the above object, the present invention realizes by the following technical solutions:
SMD quartz-crystal resonator coated electrode disclosed by the invention, coated electrode is attached to the surface of wafer; It is characterized in that: described coated electrode comprises rectangle region and connected arch area; This coated electrode shape is improved for FDLD obvious effect, for carrying out the scanning of 30 steps from 0.01uW to 500uW, and FDLD＜±-specification requirement of 2ppm, its CPK can reach more than 1.67.
Further, described coated electrode comprises lower chromium coating, silver coating, the upper chromium coating that is arranged in order from inside to outside; Lower chromium coating can strengthen the adhesive force between coated electrode and the wafer, and upper chromium coating can prevent coated electrode oxidation by air before the quartz-crystal resonator packaging process.
Preferably, the arcuate angle of described arch area is 80 to 100 degree.
Preferably, the chord length of described arch area equals vertical width of rectangle region.
Preferably, the lateral dimension of described coated electrode is 1.2mm, and longitudinal size is 1.0mm.
Preferably, the thickness of described lower chromium coating is 2 to 3nm.
Preferably, the thickness of described upper chromium coating is 1 to 2nm.
SMD quartz-crystal resonator coated electrode provided by the invention, improvement has obvious effect for FDLD, for carry out the scanning of 30 steps from 0.01uW to 500uW, FDLD＜±-specification requirement of 2ppm, its CPK can reach more than 1.67, and process rate significantly promotes, and properties of product are improved; Effectively protection wafer surface electrode is not oxidized in the processing procedure before encapsulation; frequency change and aging characteristics after the encapsulation are largely increased; the equivalence annual aging characteristic can be brought up to ± 2.5ppm by former ± 5ppm, can have former for the CPK of frequency〉1.33 rise to 1.67.
Description of drawings
Fig. 1 is structural representation of the present invention;
Fig. 2 is cutaway view of the present invention;
Chromium coating, 4-silver coating, the upper chromium coating of 5-, 6-rectangle region, 7-arch area under 1-wafer, 2-coated electrode, the 3-among the figure.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing, the present invention is further elaborated.
Such as Fig. 1, SMD quartz-crystal resonator coated electrode disclosed by the invention, coated electrode 2 is attached to the surface of wafer 1; Coated electrode 2 comprises rectangle region 6 and connected arch area 7.
Such as Fig. 2, further, coated electrode 2 comprises lower chromium coating 3, silver coating 4, the upper chromium coating 5 that is arranged in order from inside to outside.
Preferably, the arcuate angle of arch area 7 is 80 to 100 degree.
Preferably, the chord length of arch area 7 equals vertical width of rectangle region 6.
Preferably, the lateral dimension of coated electrode 2 is 1.2mm, and longitudinal size is 1.0mm.
Preferably, the thickness of lower chromium coating 3 is 2 to 3nm.
Preferably, the thickness of upper chromium coating 5 is 1 to 2nm.
Certainly; the present invention also can have other various embodiments; in the situation that do not break away from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make according to the present invention various corresponding changes and distortion, but these corresponding changes and distortion all should belong to the protection range of the appended claim of the present invention.

Claims (7)

1. SMD quartz-crystal resonator coated electrode, coated electrode (2) is attached to the surface of wafer (1); It is characterized in that: described coated electrode (2) comprises rectangle region (6) and connected arch area (7).
2. SMD quartz-crystal resonator coated electrode according to claim 1, it is characterized in that: described coated electrode (2) comprises lower chromium coating (3), silver coating (4), the upper chromium coating (5) that is arranged in order from inside to outside.
3. SMD quartz-crystal resonator coated electrode according to claim 1 is characterized in that: the arcuate angle of described arch area (7) is 80 to 100 degree.
4. SMD quartz-crystal resonator coated electrode according to claim 1, it is characterized in that: the chord length of described arch area (7) equals vertical width of rectangle region (6).
5. SMD quartz-crystal resonator coated electrode according to claim 1, it is characterized in that: the lateral dimension of described coated electrode (2) is 1.2mm, longitudinal size is 1.0mm.
6. SMD quartz-crystal resonator coated electrode according to claim 2 is characterized in that: the thickness of described lower chromium coating (3) is 2 to 3nm.
7. SMD quartz-crystal resonator coated electrode according to claim 2 is characterized in that: the thickness of described upper chromium coating (5) is 1 to 2nm.
CN201210355577.5A 2012-09-21 2012-09-21 Coating electrode of SMD (surface mounted device) quartz-crystal resonator Active CN102868382B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113824425A (en) * 2021-09-24 2021-12-21 杭州鸿星电子有限公司 Quartz crystal resonator/oscillator and design method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201490982U (en) * 2009-09-09 2010-05-26 安徽铜峰电子股份有限公司 Chip for SMD5032-12MHz crystal resonator
CN101814904A (en) * 2010-04-24 2010-08-25 烟台大明电子有限公司 Quartz crystal resonator and manufacture process thereof
CN201821325U (en) * 2010-09-29 2011-05-04 铜陵市峰华电子有限公司 SMD crystal resonator wafer with composite coating films
WO2011108715A1 (en) * 2010-03-04 2011-09-09 株式会社大真空 Electronic component package sealing member, electronic component package, and method for fabricating electronic component package sealing member
CN202197254U (en) * 2011-07-27 2012-04-18 广东惠伦晶体科技股份有限公司 Quartz crystal resonator electrode
CN202872743U (en) * 2012-09-21 2013-04-10 成都晶宝时频技术股份有限公司 SMD quartz crystal resonator film-plated electrode

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201490982U (en) * 2009-09-09 2010-05-26 安徽铜峰电子股份有限公司 Chip for SMD5032-12MHz crystal resonator
WO2011108715A1 (en) * 2010-03-04 2011-09-09 株式会社大真空 Electronic component package sealing member, electronic component package, and method for fabricating electronic component package sealing member
CN101814904A (en) * 2010-04-24 2010-08-25 烟台大明电子有限公司 Quartz crystal resonator and manufacture process thereof
CN201821325U (en) * 2010-09-29 2011-05-04 铜陵市峰华电子有限公司 SMD crystal resonator wafer with composite coating films
CN202197254U (en) * 2011-07-27 2012-04-18 广东惠伦晶体科技股份有限公司 Quartz crystal resonator electrode
CN202872743U (en) * 2012-09-21 2013-04-10 成都晶宝时频技术股份有限公司 SMD quartz crystal resonator film-plated electrode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113824425A (en) * 2021-09-24 2021-12-21 杭州鸿星电子有限公司 Quartz crystal resonator/oscillator and design method thereof
CN113824425B (en) * 2021-09-24 2022-03-08 杭州鸿星电子有限公司 Quartz crystal resonator or oscillator and design method thereof

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