CN102865818B - Contact type distance measuring device - Google Patents
Contact type distance measuring device Download PDFInfo
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- CN102865818B CN102865818B CN201210335327.5A CN201210335327A CN102865818B CN 102865818 B CN102865818 B CN 102865818B CN 201210335327 A CN201210335327 A CN 201210335327A CN 102865818 B CN102865818 B CN 102865818B
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- guide rail
- air guide
- displacement sensor
- laser displacement
- laser
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Abstract
The invention provides a kind of contact type distance measuring device, comprise right chaining pin, right air guide rail, right laser ruler, right end plate, right laser displacement sensor, right laser displacement sensor installing plate, right web member, right data cable connector, base plate, left laser displacement sensor installing plate, left laser ruler, left laser displacement sensor, left data cable connector, first member plate, left chaining pin, left spring, left air guide rail, left web member, left inlet suction port, right inlet suction port, right spring; The present invention has two the left chaining pins and right chaining pin oppositely installed, axle can be read in real time and tie up to the linear movement error produced in motion process, and this error amount is fed back to control system in time, to carry out error compensation to measured value, the impact that final elimination axial system error is brought measuring accuracy, further increase measuring accuracy, make the measuring accuracy realizing submicron order even less in field of precision measurement in precision die, Optical element manufacturing, digital control processing field become possibility.
Description
Technical field
The present invention relates to field of precision measurement equipment, be specifically related to a kind of contact type distance measuring device with axial system error compensate function.
Background technology
In field of precision measurement equipment, often need measure object surface appearance height or length, often be employed in fields such as precision die, optical mirror slip manufacture, digital control processings, accurately to measure the accurate error of shape error and position obtaining surface to be machined.
The measuring equipment that tradition is applied to this field has three-coordinates measuring machine, image measurer etc.Three-coordinates measuring machine is the metering system adopting contact, contact measuring head is utilized to measure the height in certain some relative datum face, measured object surface or length, and pass through the axle system of three-coordinates measuring machine, drive gauge head moves, to carry out a measurement or linear sweep measurement to measured object surface, thus obtain multiple measurement data, again through data fitting, to obtain the shape characteristic parameter on whole measured object surface, Special composition curved surface, again with the comparison of theoretical surface form and position tolerance, finally obtain mismachining tolerance, and judge machining precision with this.Image measurer is made a video recording to measured object surface by CCD camera technique, recycling machine vision and image processing techniques to take the diagram and process, to build the shape characteristic parameter on measured object surface, carry out mismachining tolerance decision method identical with three-coordinates measuring machine is identical, to obtain final machining precision.Because in application industry, machined object overwhelming majority surface is not all very clean, or surface has high brightness luminescence or even transparent material, when the surperficial form and position tolerance of this kind of measured object is measured, adopt image measurer can be subject to material behavior impact and cause precision to meet the demands, simultaneously, restrict by machine vision technique, be difficult to make measuring accuracy reach submicron order and arrange less.And when adopting three-coordinates measuring machine, in measuring process, need axle frenulum to move contact measuring head or the motion of image gauge head, to obtain the form and position tolerance on whole measured object surface.In axle system motion process, inevitably introduce spindle motion error, thus affect final measuring accuracy, constrain in the past measuring equipment measuring accuracy from micron order to the leap of submicron order.
Summary of the invention
For the defect existed in the above-mentioned background technology of prior art and problem, the object of this invention is to provide a kind of can solution in measuring process because the kinematic accuracy impact of axle system causes measuring accuracy to be difficult to the contact type distance measuring device of the problem reaching sub-micron or less precision.
In order to achieve the above object, the invention provides following technical scheme: a kind of contact type distance measuring device, comprise right chaining pin, right air guide rail, right laser ruler, right end plate, right laser displacement sensor, right laser displacement sensor installing plate, right web member, right data cable connector, base plate, left laser displacement sensor installing plate, left laser ruler, left laser displacement sensor, left data cable connector, first member plate, left chaining pin, left spring, left air guide rail, left web member, left inlet suction port, right inlet suction port, right spring; Wherein, left air guide rail and right air guide rail are arranged on the left and right sides of base plate, and be provided with left spring between described left air guide rail and first member plate, first member plate is provided with left chaining pin in the outer part; Be provided with right spring between right air guide rail and right end plate, right end plate is provided with right chaining pin in the outer part; One end of leading core of left air guide rail is provided with left web member, one end of leading core of right air guide rail is provided with right web member, described left web member is provided with left laser ruler, right web member is provided with right laser ruler, left laser ruler correspondence position is provided with left laser displacement sensor, and right laser ruler correspondence position is provided with right laser displacement sensor; Described left inlet suction port is connected with the core of leading of left air guide rail, and described right inlet suction port is connected with the core of leading of right air guide rail.
Preferred as technique scheme, described left air guide rail is identical with the structure of right air guide rail, comprising: air intake opening, guide pin bushing, lead core, and left air guide rail is connected with left spring by leading core, and right air guide rail is connected with right spring by leading core.
Preferred as technique scheme, the leading core and only can move left and right in the horizontal direction of left air guide rail and right air guide rail.
Preferred as technique scheme, the installation accuracy of the relatively left laser ruler of described left laser displacement sensor is regulated by left laser displacement sensor installing plate, and the installation accuracy of the relatively right laser ruler of right laser displacement sensor is regulated by right laser displacement sensor installing plate.
The present invention is compared with like product in the past, there are two opposing parallel and left chaining pin that is that oppositely install and right chaining pins, axle can be read in real time and tie up to the linear movement error produced in motion process, and this error amount is fed back to control system in time, to carry out error compensation to measured value, the impact that final elimination axial system error is brought measuring accuracy, further increase measuring accuracy, make the measuring accuracy realizing submicron order even less in field of precision measurement in precision die, Optical element manufacturing, digital control processing field become possibility.This device can be arranged on and measuring equipment use in the past, only need to change the gauge head on equipment in the past, and the calibrated bolck parallel with axle system is installed, shaft precision can carry out synchro measure, and real-Time Compensation falls the impact of shafting precision and measuring accuracy, this measuring motion passes through practical proof, after compensate for spindle motion error, within measuring accuracy can reach 50nm, there is wide application prospect.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the contact type distance measuring device of the embodiment of the present invention;
Fig. 2 is the structural representation of the left air guide rail described in the embodiment of the present invention, right air guide rail;
Fig. 3 is the working state schematic representation of the contact type distance measuring device of the embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing of the present invention, be clearly and completely described technical scheme of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
As shown in Figure 1, a kind of contact type distance measuring device that the embodiment of the present invention provides, comprises right chaining pin 1, right air guide rail 2, right laser ruler 3, right end plate 4, right laser displacement sensor 5, right laser displacement sensor installing plate 6, right web member 7, right data cable connector 8, base plate 9, left laser displacement sensor installing plate 10, left laser ruler 11, left laser displacement sensor 12, left data cable connector 13, first member plate 14, left chaining pin 15, left spring 16, left air guide rail 17, left web member 18, left inlet suction port 19, right inlet suction port 20, right spring 21; Wherein, left air guide rail 17 and right air guide rail 2 are arranged on the left and right sides of base plate 9, are provided with left spring 16 between described left air guide rail 17 and first member plate 14, are provided with left chaining pin 15 outside first member plate 14; Between right air guide rail 2 and right end plate 4, right spring 21 is installed, right chaining pin 1 is installed outside right end plate 4; One end of leading core of left air guide rail 17 is provided with left web member 18, one end of leading core of right air guide rail 2 is provided with right web member 7, described left web member 18 is provided with left laser ruler 11, right web member 7 is provided with right laser ruler 3, left laser ruler 11 correspondence position is provided with left laser displacement sensor 12, and right laser ruler 3 correspondence position is provided with right laser displacement sensor 5; Described left inlet suction port 19 is connected with the core of leading of left air guide rail 17, and described right inlet suction port 20 is connected with the core of leading of right air guide rail 2.
The installation accuracy of the relatively left laser ruler 11 of described left laser displacement sensor 12 is regulated by left laser displacement sensor installing plate 10, and the installation accuracy of the relatively right laser ruler 3 of right laser displacement sensor 5 is regulated by right laser displacement sensor installing plate 6.
As shown in Figure 2, described left air guide rail 17 is identical with the structure of right air guide rail 2, comprising: air intake opening 22, guide pin bushing 23, lead core 24, and left air guide rail 17 is connected with left spring 16 by leading core, and right air guide rail 2 is connected with right spring 21 by leading core; The leading core and only can move left and right in the horizontal direction of left air guide rail 17 and right air guide rail 2.
As shown in Figure 3, described left chaining pin 15 contacts with calibrated bolck 29, and right chaining pin 1 contacts with measured object 34; Left inlet suction port 19 is connected with the core of leading of left air guide rail 17, when giving by air intake opening 22 to left air guide rail 17 air feed, lead core and will be in suspended state, only can level move left and right owing to leading core, guide core inner is blown, and makes to lead core and moves laterally, make left spring 16 pressurized, control by controlling blow gas pressure the ergometry that left chaining pin 15 contacts calibrated bolck 29 surface, thus guarantee that each point ergometry is identical, measuring accuracy keeps stable and consistent; Described right inlet suction port 20 is connected with the core of leading of right air guide rail 2, equally, when giving right air guide rail 20 air feed, leading core and being also in suspended state, only level moving left and right owing to leading core, guide core inner is blown, making to lead core to move laterally, make right spring 21 pressurized, controlling by controlling blow gas pressure the ergometry that right chaining pin 1 contacts measured object 34 surface, thus guarantee that each point ergometry is identical, measuring accuracy keeps stable and consistent;
During application contact type distance measuring device of the present invention, as shown in Figure 3, contact type distance measuring device 32 is installed on Z linear axis 28, and Z linear axis 28 is fixed on Y linear axis 31, calibrated bolck 29 is fixed on the direction of the plane parallel formed with Y linear axis 31 and Z linear axis 28, and the parallel other end being fixed on contact type distance measuring device 32 of vacuum cup 25 relative standard block 29 of fixing measured object 34.During measurement, vacuum cup 25 is allowed measured object 34 absorption to be fixed.Y linear axis 31 and Z linear axis 28 is allowed to drive contact type distance measuring device 32 to move, and left chaining pin 15, right chaining pin 1 carry out scanning survey on the surface of calibrated bolck 29 and measured object 34 respectively, measurement data is in real time by the left laser displacement sensor 12 that left chaining pin 15 rear portion is corresponding, and right laser displacement sensor 5 corresponding to right chaining pin 1 rear portion reads.Suppose that right chaining pin 1 moves to the A point on measured object 34 surface, the error amount now read from the left laser displacement sensor 12 of left chaining pin 15 correspondence is Δ X1, the measured value that the right laser displacement sensor 5 of right chaining pin 1 correspondence reads is Δ X2, then actual this measured value X1=Δ X2 ?Δ X1, and then realize the real-Time Compensation of shaft precision.Control system drives Y linear axis 31 and Z linear axis 28 to move, and guarantees that right chaining pin 1 scans each point on measured object 34 surface, thus can obtain the measured value of the surperficial each point of measured object 34.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; change can be expected easily or replace, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should described be as the criterion with the protection domain of claim.
Claims (4)
1. a contact type distance measuring device, it is characterized in that, comprise right chaining pin, right air guide rail, right laser ruler, right end plate, right laser displacement sensor, right laser displacement sensor installing plate, right web member, right data cable connector, base plate, left laser displacement sensor installing plate, left laser ruler, left laser displacement sensor, left data cable connector, first member plate, left chaining pin, left spring, left air guide rail, left web member, left inlet suction port, right inlet suction port, right spring; Wherein, left air guide rail and right air guide rail are arranged on the left and right sides of base plate, and be provided with left spring between described left air guide rail and first member plate, first member plate is provided with left chaining pin in the outer part; Be provided with right spring between right air guide rail and right end plate, right end plate is provided with right chaining pin in the outer part; One end of leading core of left air guide rail is provided with left web member, one end of leading core of right air guide rail is provided with right web member, described left web member is provided with left laser ruler, right web member is provided with right laser ruler, left laser ruler correspondence position is provided with left laser displacement sensor, and right laser ruler correspondence position is provided with right laser displacement sensor; Described left inlet suction port is connected with the core of leading of left air guide rail, and described right inlet suction port is connected with the core of leading of right air guide rail.
2. a kind of contact type distance measuring device according to claim 1, it is characterized in that, described left air guide rail is identical with the structure of right air guide rail, comprising: air intake opening, guide pin bushing, lead core, left air guide rail is connected with left spring by leading core, and right air guide rail is connected with right spring by leading core.
3. a kind of contact type distance measuring device according to claim 1, is characterized in that, the leading core and only can move left and right in the horizontal direction of described left air guide rail and right air guide rail.
4. a kind of contact type distance measuring device according to claim 1, it is characterized in that, the installation accuracy of the relatively left laser ruler of described left laser displacement sensor is regulated by left laser displacement sensor installing plate, and the installation accuracy of the relatively right laser ruler of right laser displacement sensor is regulated by right laser displacement sensor installing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210335327.5A CN102865818B (en) | 2012-09-12 | 2012-09-12 | Contact type distance measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210335327.5A CN102865818B (en) | 2012-09-12 | 2012-09-12 | Contact type distance measuring device |
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| Publication Number | Publication Date |
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| CN102865818A CN102865818A (en) | 2013-01-09 |
| CN102865818B true CN102865818B (en) | 2015-08-05 |
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| CN201210335327.5A Active CN102865818B (en) | 2012-09-12 | 2012-09-12 | Contact type distance measuring device |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389052A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical shape measuring device capable of compensating shaft system errors of wafer |
| CN104776782B (en) * | 2014-01-10 | 2018-03-02 | 上海微电子装备（集团）股份有限公司 | A kind of parallel plane gap measuring device and measuring method |
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| EP0373644A1 (en) * | 1988-12-15 | 1990-06-20 | Governor Of Toyama Prefecture Yutaka Nakaoki | Three-dimensional displacement gauge |
| CN2867286Y (en) * | 2005-06-13 | 2007-02-07 | 吉林大学 | Cyrtometer |
| CN101140163A (en) * | 2007-10-29 | 2008-03-12 | 北京恒安通达科技有限公司 | Contact and non-contact type dual-purpose surface roughness measuring systems |
| CN101358838A (en) * | 2007-08-03 | 2009-02-04 | 鸿富锦精密工业（深圳）有限公司 | Measurement method for object appearance |
| CN102059384A (en) * | 2009-11-12 | 2011-05-18 | 三菱电机株式会社 | Tubing weld seam determining method, weld seam cutting method and weld seam cutting device |
| CN201983764U (en) * | 2011-02-28 | 2011-09-21 | 宝山钢铁股份有限公司 | Pipe end ellipticity and diameter measuring device for large-caliber straight welded pipe |
| CN102322824A (en) * | 2011-05-31 | 2012-01-18 | 南京理工大学 | Dynamic measuring device for worm helix error and pitch error |
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2012
- 2012-09-12 CN CN201210335327.5A patent/CN102865818B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0255300A2 (en) * | 1986-07-29 | 1988-02-03 | Unisearch Limited | High sensitivity strain detector |
| EP0373644A1 (en) * | 1988-12-15 | 1990-06-20 | Governor Of Toyama Prefecture Yutaka Nakaoki | Three-dimensional displacement gauge |
| CN2867286Y (en) * | 2005-06-13 | 2007-02-07 | 吉林大学 | Cyrtometer |
| CN101358838A (en) * | 2007-08-03 | 2009-02-04 | 鸿富锦精密工业（深圳）有限公司 | Measurement method for object appearance |
| CN101140163A (en) * | 2007-10-29 | 2008-03-12 | 北京恒安通达科技有限公司 | Contact and non-contact type dual-purpose surface roughness measuring systems |
| CN102059384A (en) * | 2009-11-12 | 2011-05-18 | 三菱电机株式会社 | Tubing weld seam determining method, weld seam cutting method and weld seam cutting device |
| CN201983764U (en) * | 2011-02-28 | 2011-09-21 | 宝山钢铁股份有限公司 | Pipe end ellipticity and diameter measuring device for large-caliber straight welded pipe |
| CN102322824A (en) * | 2011-05-31 | 2012-01-18 | 南京理工大学 | Dynamic measuring device for worm helix error and pitch error |
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| CN102865818A (en) | 2013-01-09 |
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