CN102856656B - Metamaterial and preparation method thereof - Google Patents
Metamaterial and preparation method thereof Download PDFInfo
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- CN102856656B CN102856656B CN201210268726.4A CN201210268726A CN102856656B CN 102856656 B CN102856656 B CN 102856656B CN 201210268726 A CN201210268726 A CN 201210268726A CN 102856656 B CN102856656 B CN 102856656B
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Abstract
The invention provides a metamaterial. The metamaterial comprises at least one metamaterial slice, each metamaterial slice comprises a substrate and a plurality of artificial micro-structures distributed on the substrate, and the substrate is made from a benzocyclobutene resin material. According to the metamaterial, the substrate made from benzocyclobutene resin material has better dielectric property compared wit the existing metamaterial, the dielectric property is very stable even at high temperature, and therefore, the metamaterial produced by the substrate can also have high stability of dielectric property at high temperature.
Description
Technical field
The invention belongs to artificial composite material field, particularly relate to a kind of Meta Materials and preparation method thereof.
Background technology
Meta Materials refers to some artificial composite structures with the extraordinary physical property not available for natural material or composite material.By the structurally ordered design on the key physical yardstick of material, the restriction of some apparent natural law can be broken through, thus maybe must exceed the meta-materials function of the intrinsic common character of nature.Meta Materials generally includes substrate and cycle and is arranged in multiple man-made microstructure on substrate, and the part substrate of each man-made microstructure and its attachment can regard a metamaterial unit as.The characteristic of the man-made microstructure that the character of Meta Materials and function were arranged on substrate by the characteristic of substrate and cycle determines jointly.Corresponding to the electromagnetic wave of characteristic frequency, each metamaterial unit shows an effective dielectric constant and magnetic permeability, and these two physical parameters distinguish electric field response and the magnetic responsiveness of correspondence material.
The substrate that current Meta Materials uses mostly is the polymer composites such as FR-4, F4b.Dielectric property are unstable at a higher temperature for the substrate obtained as material, and namely at relatively high temperatures, the dielectric constant of this substrate is unstable, the less stable of the Meta Materials dielectric property therefore obtained by this class material.
The dielectric loss of benzocyclobutane olefine resin can be less than 0.0008 within the scope of 1kHz-1MHz, dielectric constant is 2.7, and this value is almost constant between 25-200 DEG C, and after frequency is more than 20GHz, the dielectric constant of its room temperature can also remain on 2.5, and when 10GHz, loss is lower than 0.002.Due to the dielectric property of its brilliance, make it in advanced microelectronic device, obtain application, comprise multilayer wiring, the embedding artificial lamp overlay film of the medium internal layer of aluminium and GaAs, the salient point of flip chip bonding and wiring, CSP encapsulation, high-frequency element and passive component uses as critical material.This material also has low hydroscopicity, high thermal stability and chemical stability (glass transition temperature Tg > 350 DEG C), and the advantage such as high film evenness (general > 95%).
The above-mentioned good characteristic of benzocyclobutane olefine resin makes it can as the substrate of Meta Materials.
Summary of the invention
Technical problem to be solved by this invention is, provides the Meta Materials that a kind of dielectric property are stable.
The technical scheme that the present invention adopts for technical problem that solution is above-mentioned is: a kind of Meta Materials, comprise at least one metamaterial sheet, each metamaterial sheet comprises substrate and is arranged in the multiple man-made microstructure on substrate, and described substrate is obtained by benzocyclobutene resin material.
Further, described man-made microstructure is metal micro structure, and described metal micro structure is made up of one or more metal wire.
Further, described metal wire is copper cash, silver-colored line or aluminum steel.
Further, described man-made microstructure is the alabastrine metal micro structure of plane, described metal micro structure has the first metal wire and the second metal wire mutually vertically divided equally, described first metal wire is identical with the length of the second metal wire, described first metal wire two ends are connected with two the first metal branch of equal length, described first metal wire two ends are connected on the mid point of two the first metal branch, described second metal wire two ends are connected with two the second metal branch of equal length, described second metal wire two ends are connected on the mid point of two the second metal branch, described first metal branch is equal with the length of the second metal branch.
Further, each first metal branch of the alabastrine metal micro structure of described plane and the two ends of each second metal branch are also connected with identical 3rd metal branch, and the mid point of corresponding 3rd metal branch is connected with the end points of the first metal branch and the second metal branch respectively.
Further, first metal wire of the alabastrine metal micro structure of described plane and the second metal wire are provided with two kinks, and the alabastrine metal micro structure of described plane all overlaps with former figure to the figure of any direction 90-degree rotation with the intersection point of the second metal wire around the first metal wire in plane residing for metal micro structure.
According to Meta Materials of the present invention, substrate is obtained by benzocyclobutene resin material, relative to existing Meta Materials, the dielectric property of substrate are better, dielectric property all very stable at very high temperatures, the Meta Materials therefore obtained by this substrate also can show the high stability of dielectric property when high temperature.
Present invention also offers a kind of Meta Materials preparation method in addition, the method comprises the steps:
S1, prepare benzocyclobutene substrate;
S2, on described benzocyclobutene substrate copper membrane;
S3, on copper film etching obtain multiple man-made microstructure of particular geometric pattern.
Further, the idiographic flow of step S1 is as follows:
First, be placed on mould hot-forming by benzocyclobutane olefine resin, hot pressing temperature is 200-300 DEG C, and hot pressing pressure is 30-80MPa, and the dwell time changes depending on hot pressing temperature; When hot pressing temperature is 200-250 DEG C, pressurize 1-5.5h; When hot pressing temperature is 250-270 DEG C, pressurize 20-80min, hot pressing temperature is 270-300 DEG C, pressurize 5-40min;
Then, remove mould on cold pressing device, cold pressing pressure and hot pressing pressure are consistent, and naturally cool to the demoulding after room temperature, obtain benzocyclobutene substrate.
Further, the idiographic flow of step S2 is as follows:
The pre-treatment of benzocyclobutene substrate; The benzocyclobutene substrate obtained by step S1 carries out blasting treatment, and the sand that sandblasting uses is resin sand, quartz sand, ceramic sand, steel sand, copper sand, iron sand, silicon carbide sand or emergy, and order number is 40-250 order, and pressure is 1kg/cm
2-10kg/cm
2;
And one of them coating hot-melt adhesive on the surface of cyclobutane substrate, copper film is placed on PUR, utilize hot press by copper film with and cyclobutane substrate press together, in hot pressing, hot pressing temperature is 90-185 DEG C, hot pressing pressure is 8-18kg/cm2, and hot pressing time is 30-90min, and vacuum degree is at below 25mbar.
Further, the thickness of described copper film is 0.005-0.1mm, and the thickness of PUR is 0.01-0.2mm, and the thickness of described benzocyclobutene substrate is 0.1-5mm.
Accompanying drawing explanation
Fig. 1 is the structural representation of Meta Materials of the present invention;
Fig. 2 is the superposition schematic diagram of its metamaterial sheet of Meta Materials of the present invention;
Fig. 3 is the schematic diagram of the alabastrine metal micro structure of plane of the present invention;
Fig. 4 is a kind of derived structure of the alabastrine metal micro structure of plane shown in Fig. 3;
Fig. 5 is a kind of distressed structure of the alabastrine metal micro structure of plane shown in Fig. 3.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
As shown in Figure 1, Meta Materials 100 of the present invention, comprises at least one metamaterial sheet 10, and each metamaterial sheet 10 comprises substrate 11 and arrangement multiple man-made microstructure 12 on the substrate 11, and described in described substrate 11, substrate is obtained by benzocyclobutene resin material.In Fig. 1, Meta Materials has three metamaterial sheet 10, and the quantity of metamaterial sheet 10 can be arranged flexibly according to different needs.As shown in Figure 2, multiple metamaterial sheet 10 can utilize PUR RJ to bond together.
According to Meta Materials of the present invention, substrate is obtained by benzocyclobutene resin material, relative to existing Meta Materials, the dielectric property of substrate are better, dielectric property all very stable at very high temperatures, the Meta Materials therefore obtained by this substrate also can show the high stability of dielectric property when high temperature.In addition, benzocyclobutane olefine resin also has good high-temperature stability and chemical stability, therefore the resistance to elevated temperatures of substrate made of benzocyclobutene resin and weather resistance also fine, these excellent characteristics, make this Meta Materials can be widely used in antenna, the fields such as radome.
Wherein, this Meta Materials is applied in field of antenna, only needs the arrangement of the man-made microstructure designed on substrate.
In the present invention, described man-made microstructure is preferably metal micro structure, and described metal micro structure is made up of one or more metal wire, and described metal wire is preferably copper cash, silver-colored line or aluminum steel.
In the present invention, described man-made microstructure can be the alabastrine metal micro structure of plane as shown in Figure 3, described alabastrine metal micro structure has the first metal wire J1 and the second metal wire J2 that mutually vertically divide equally, described first metal wire J1 is identical with the length of the second metal wire J2, described first metal wire J1 two ends are connected with two the first metal branch F1 of equal length, described first metal wire J1 two ends are connected on the mid point of two the first metal branch F1, described second metal wire J2 two ends are connected with two the second metal branch F2 of equal length, described second metal wire J2 two ends are connected on the mid point of two the second metal branch F2, described first metal branch F1 is equal with the length of the second metal branch F2.
Fig. 4 is a kind of derived structure of the alabastrine metal micro structure of plane shown in Fig. 3.It is all connected with identical 3rd metal branch F3 at the two ends of each first metal branch F1 and each second metal branch F2, and the mid point of corresponding 3rd metal branch F3 is connected with the end points of the first metal branch F1 and the second metal branch F2 respectively.The rest may be inferred, and the present invention can also derive the metal micro structure of other form.
Fig. 5 is a kind of distressed structure of the alabastrine metal micro structure of plane shown in Fig. 3, the metal micro structure of this kind of structure, first metal wire J1 and the second metal wire J2 is not straight line, but folding line, first metal wire J1 and the second metal wire J2 is provided with two kink WZ, but the first metal wire J1 remains vertical with the second metal wire J2 to be divided equally, by arrange kink towards with the relative position of kink on the first metal wire and the second metal wire, metal micro structure shown in Fig. 5 is all overlapped with former figure to the figure of any direction 90-degree rotation around the axis perpendicular to the first metal wire and the second metal wire intersection point.In addition, other can also be had to be out of shape, such as, the first metal wire J1 and the second metal wire J2 all arranges multiple kink WZ.
Present invention also offers a kind of Meta Materials preparation method in addition, the method comprises the steps:
S1, prepare benzocyclobutene substrate; First, be placed on mould hot-forming by benzocyclobutane olefine resin, hot pressing temperature is 200-300 DEG C, and hot pressing pressure is 30-80MPa, and the dwell time changes depending on hot pressing temperature; When hot pressing temperature is 200-250 DEG C, pressurize 1-5.5h; When hot pressing temperature is 250-270 DEG C, pressurize 20-80min, hot pressing temperature is 270-300 DEG C, pressurize 5-40min; Then, remove mould on cold pressing device, cold pressing pressure and hot pressing pressure are consistent, and naturally cool to the demoulding after room temperature, obtain benzocyclobutene substrate.
S2, on described benzocyclobutene substrate copper membrane; First, the pre-treatment of benzocyclobutene substrate is carried out; The benzocyclobutene substrate obtained by step S1 carries out blasting treatment, and the sand that sandblasting uses is resin sand, quartz sand, ceramic sand, steel sand, copper sand, iron sand, silicon carbide sand or emergy, and order number is 40-250 order, and pressure is 1kg/cm
2-10kg/cm
2; Then, and one of them coating hot-melt adhesive on the surface of cyclobutane substrate, copper film is placed on PUR, utilize hot press by copper film with and cyclobutane substrate press together, in hot pressing, hot pressing temperature is 90-185 DEG C, and hot pressing pressure is 8-18kg/cm
2, hot pressing time is 30-90min, and vacuum degree is at below 25mbar.
S3, on copper film etching obtain multiple man-made microstructure of particular geometric pattern.Will remove the diaphragm of etching area (region beyond multiple man-made microstructure), when etching, contact chemical solution, reaches the effect of dissolved corrosion, the final remaining multiple man-made microstructure of arranging on substrate being us and needing.
In said method, the thickness of described copper film is 0.005-0.1mm, and the thickness of PUR is 0.01-0.2mm, and the thickness of described benzocyclobutene substrate is 0.1-5mm.
In the present invention, PUR can use TPU PUR, PU PUR, PO PUR, EVA hot-melt adhesive etc.
Above disclosedly be only preferred embodiment of the present invention, certainly can not limit the interest field of the present invention with this, therefore according to the equivalent variations that the claims in the present invention are done, still belong to the scope that the present invention is contained.
Claims (8)
1. a Meta Materials preparation method, is characterized in that, comprises the steps:
S1, prepare benzocyclobutene substrate; First, be placed on mould hot-forming by benzocyclobutane olefine resin, hot pressing temperature is 200-300 DEG C, and hot pressing pressure is 30-80MPa, and the dwell time changes depending on hot pressing temperature; When hot pressing temperature is 200-250 DEG C, pressurize 1-5.5h; When hot pressing temperature is 250-270 DEG C, pressurize 20-80min, hot pressing temperature is 270-300 DEG C, pressurize 5-40min; Then, remove mould on cold pressing device, cold pressing pressure and hot pressing pressure are consistent, and naturally cool to the demoulding after room temperature, obtain benzocyclobutene substrate;
S2, on described benzocyclobutene substrate copper membrane; The pre-treatment of benzocyclobutene substrate; The benzocyclobutene substrate obtained by step S1 carries out blasting treatment, and the sand that sandblasting uses is resin sand, quartz sand, ceramic sand, steel sand, copper sand, iron sand, silicon carbide sand or emergy, and order number is 40-250 order, and pressure is 1kg/cm
2-10kg/cm
2; At one of them coating hot-melt adhesive on the surface of benzocyclobutene substrate, be placed in by copper film on PUR, utilize hot press copper film and benzocyclobutene substrate to be pressed together, in hot pressing, hot pressing temperature is 90-185 DEG C, and hot pressing pressure is 8-18kg/cm
2, hot pressing time is 30-90min, and vacuum degree is at below 25mbar;
S3, on copper film etching obtain multiple man-made microstructure of particular geometric pattern; Removed by the diaphragm of etching area of wanting beyond multiple man-made microstructure, when etching, contact chemical solution, reaches the effect of dissolved corrosion, with the final multiple man-made microstructure obtaining required arrangement on substrate;
Wherein, described multiple man-made microstructure is that a matrix array is arranged, the area of the man-made microstructure in each line successively decreases toward two ends from center, and the area of the man-made microstructure in each file successively decreases toward two ends from center.
2. Meta Materials preparation method according to claim 1, is characterized in that, the thickness of described copper film is 0.005-0.1mm, and the thickness of PUR is 0.01-0.2mm, and the thickness of described benzocyclobutene substrate is 0.1-5mm.
3. application rights requires a kind of Meta Materials that the Meta Materials preparation method described in 1 obtains, it is characterized in that, comprise at least one metamaterial sheet, each metamaterial sheet comprises substrate and is arranged in the multiple man-made microstructure on substrate, and described substrate is obtained by benzocyclobutene resin material; Described multiple man-made microstructure is that a matrix array is arranged, the area of the man-made microstructure in each line successively decreases toward two ends from center, and the area of the man-made microstructure in each file successively decreases toward two ends from center.
4. Meta Materials according to claim 3, is characterized in that, described man-made microstructure is metal micro structure, and described metal micro structure is made up of one or more metal wire.
5. Meta Materials according to claim 4, is characterized in that, described metal wire is copper cash, silver-colored line or aluminum steel.
6. Meta Materials according to claim 5, it is characterized in that, described man-made microstructure is the alabastrine metal micro structure of plane, described metal micro structure has the first metal wire and the second metal wire mutually vertically divided equally, described first metal wire is identical with the length of the second metal wire, described first metal wire two ends are connected with two the first metal branch of equal length, described first metal wire two ends are connected on the mid point of two the first metal branch, described second metal wire two ends are connected with two the second metal branch of equal length, described second metal wire two ends are connected on the mid point of two the second metal branch, described first metal branch is equal with the length of the second metal branch.
7. Meta Materials according to claim 6, it is characterized in that, each first metal branch of the alabastrine metal micro structure of described plane and the two ends of each second metal branch are also connected with identical 3rd metal branch, and the mid point of corresponding 3rd metal branch is connected with the end points of the first metal branch and the second metal branch respectively.
8. Meta Materials according to claim 6, it is characterized in that, first metal wire of the alabastrine metal micro structure of described plane and the second metal wire are provided with two kinks, and the alabastrine metal micro structure of described plane all overlaps with former figure to the figure of any direction 90-degree rotation with the intersection point of the second metal wire around the first metal wire in plane residing for metal micro structure.
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| CN102480001A (en) * | 2011-03-25 | 2012-05-30 | 深圳光启高等理工研究院 | Preparation method of metamaterial |
| CN202259698U (en) * | 2011-10-25 | 2012-05-30 | 哈尔滨理工大学 | Fractal structure-based multi-tape polarization insensitive terahertz metamaterial absorber |
| CN202275915U (en) * | 2011-07-29 | 2012-06-13 | 深圳光启高等理工研究院 | Resonant cavity |
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| CN102570044B (en) * | 2011-09-29 | 2014-02-19 | 深圳光启高等理工研究院 | Base station antenna |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102480001A (en) * | 2011-03-25 | 2012-05-30 | 深圳光启高等理工研究院 | Preparation method of metamaterial |
| CN202275915U (en) * | 2011-07-29 | 2012-06-13 | 深圳光启高等理工研究院 | Resonant cavity |
| CN202259698U (en) * | 2011-10-25 | 2012-05-30 | 哈尔滨理工大学 | Fractal structure-based multi-tape polarization insensitive terahertz metamaterial absorber |
Non-Patent Citations (1)
| Title |
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| Characterization and application of planar terahertz narrow bandpass filter with metamaterial resonators;Li-ming Si et al.;《Metamaterials, 2008 International Workshop on》;20081112;第351-352页 * |
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