CN102840857B - Single structural three-axis micro-electromechanical gyroscope - Google Patents
Single structural three-axis micro-electromechanical gyroscope Download PDFInfo
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- CN102840857B CN102840857B CN201110172537.2A CN201110172537A CN102840857B CN 102840857 B CN102840857 B CN 102840857B CN 201110172537 A CN201110172537 A CN 201110172537A CN 102840857 B CN102840857 B CN 102840857B
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Abstract
The invention discloses a single structural three-axis micro-electromechanical gyroscope which consists of an xz axis structure for measuring the angular speeds of the x axis and the y axis and a y axis structure for measuring the angular speed of the y axis. The xz axis structure is arranged symmetrically along the x axis. The y axis structure is symmetrically along the y axis. The adjacent xz axis structure and the y axis structure are externally connected by a cord so that the three-axis structure obtains a single expanding-retracting drive. Two mass blocks of the xz axis and y axis are connected through a cross-shaped connector, and synchronous movements with inverse phases can be realized when the angular speeds of the x axis, the y axis and the z axis are sensed, so that differential outputs of the axis are realized.
Description
Technical field
The present invention relates to a kind of micro-electro-mechanical gyroscope, particularly relate to a kind of single structure three axis microelectromechanicdevice gyroscope with Decoupling Characteristics, belong to MEMS (micro electro mechanical system) (MEMS) field.
Background technology
Micro-electro-mechanical gyroscope is the inertia device based on MEMS (micro electro mechanical system), can be used to the angular velocity measuring moving object.Compare with conventional gyro, it is little that micro-electro-mechanical gyroscope has volume, and quality is light, cheap, is more suitable for the features such as production in enormous quantities.Conventional gyro, comprises mechanical gyroscope, lasergyro, fibre optic gyroscope etc., wide model is applied to aircraft stability contorting, weapon navigational guidance always, the fields such as automotive safety, because these gyroscope volumes are large, cost is high and be not suitable for being applied to consumer electronics product.In recent years, along with the development of MEMS technology, micro-electro-mechanical gyroscope is applied to consumer electronics product just gradually, and as the image stabilization of digital camera, the joystick of game machine, cell-phone function controls, and and the micro navigation instrument etc. that forms of micro-acceleration sensor.
Micro-electro-mechanical gyroscope is primarily of drive part and sensing part composition, due to the complicacy of its Design and manufacture, what occur in the market mostly is an axle and two axle gyroscopes, the application of three-axis gyroscope is generally a multiple axle or the gyrostatic orthogonal assembling of two axles, or by a single chip integrated for multiple gyroscope, these all do not reach the object that miniaturization is pursued in consumable electronic product market.Exploitation single structure three-axis gyroscope, has become the important directions of micro-electro-mechanical gyroscope research and development.
Micro-electro-mechanical gyroscope of the present invention adopts single structure design, the drive pattern that overall shrinkage one is expanded, and condenser type electrostatic drives and electric capacity differential output, and structure is tightly urged, and reduces gyroscope volume, is applicable to producing in enormous quantities, can realizes good measuring accuracy and sensitivity.
Summary of the invention
The object of the present invention is to provide a kind of structure tightly short, with low cost, manufacture craft simple single structure three axis microelectromechanicdevice gyroscope.This single structure three axle gyroscope has the higher quality factor, and the signal coupling between its each axle can structurally be inhibited and each axle can realize driving and detecting mutual decoupling zero.
Realizing the technical scheme that above-mentioned purpose of the present invention adopts is: a kind of single structure three axis microelectromechanicdevice gyroscope, it comprises substrate, axle construction, cross connector and umbilical cord, it is characterized in that: described axle construction comprises xz axle construction and y-axis structure, described xz axle construction and y-axis structure are over the substrate, described xz axle construction is used for measuring x-axis angular velocity and z-axis angular velocity, and described xz axle construction forms along the xz axle separation structure that x-axis is symmetrical by two groups; Described y-axis structure is used for measuring y-axis angular velocity, and described y-axis structure forms along the y-axis separation structure that y-axis is symmetrical by two groups; Two groups of described xz axle separation structures are connected by cross connector with two groups of y-axis separation structure inside, and two groups of described xz axle separation structures are connected by 4 umbilical cords successively with two groups of y-axis separation structure outsides.
Further, each group xz axle separation structure in described two groups of xz axle separation structures includes xz axoplasm gauge block, xz axle drives structure, x-axis induction structure, z-axis induction structure, z-axis feedback arrangement and xz axle elastic construction, described xz axoplasm gauge block is suspended on substrate, and be connected with y-axis separation structure by umbilical cord, the distortion of umbilical cord ensure that the consistance that each axoplasm gauge block moves; Xz axle drives structure comprises xz axle driving activity comb electrodes and xz axle drives fixed fingers electrode, and xz axle driving activity comb Electrode connection is on xz axoplasm gauge block, and xz axle drives fixed fingers electrode to be fixed on substrate; Described x-axis induction structure is made up of xz axoplasm gauge block and x-axis bottom crown, and described x-axis bottom crown to be positioned at below transverse axis mass and to arrange with transverse axis masses parallel, and described x-axis bottom crown is also fixed on substrate; Described z-axis induction structure dredges tooth electrode by z-axis sensed activity and the fixing tooth electrode of dredging of z-axis induction forms, and z-axis sensed activity comb electrodes is connected on xz axoplasm gauge block, and z-axis induction fixed fingers electrode is fixed on substrate; Described z-axis feedback arrangement comprises z-axis feedback activity electrode and z-axis feedback fixed electorde, and z-axis feedback activity comb electrodes is connected on xz axoplasm gauge block, and z-axis feedback fixed fingers electrode is fixed on substrate; Described xz axle elastic construction comprises spring device totally two groups outside spring device inside spring device outside xz axle, xz axle, described xz axle, all be positioned at the outside of described xz axoplasm gauge block, outside xz axle, one end of spring device is connected on xz axoplasm gauge block, the other end is fixed on substrate by anchor point, inside described xz axle, one end of spring device is connected to the inner side of xz axoplasm gauge block, and the other end is connected with described cross connector.
Further, each group y-axis separation structure in described two groups of y-axis separation structures includes y-axis drives structure, y-axis induction structure and y-axis elastic construction, described y-axis drives structure draws together y-axis driving arm and y-axis driving comb electrode group, described y-axis driving arm is suspended on substrate, described y-axis driving comb electrode group comprises y-axis driving activity comb electrodes and y-axis drives fixed fingers electrode, y-axis driving activity comb Electrode connection is on described y-axis driving arm, and y-axis fixed fingers electrode is fixed on substrate, described y-axis induction structure is made up of step under y-axis mass and y-axis, and described y-axis mass is suspended in substrate, and is connected with described xz axoplasm gauge block by umbilical cord, described y-axis elastic construction comprises spring device outside y-axis, spring device inside y-axis, central elastic hinge and two symmetrical side flap elastic hinges, spring device totally two groups outside described y-axis, all be positioned at the outside of described y-axis driving arm, outside described y-axis, one end of spring device is connected to y-axis driving arm, the other end is fixed on substrate by anchor point, inside described y-axis, one end of spring device is connected to the inner side of y-axis mass, the other end is connected with described cross connector, described central elastic hinge is connected with y-axis driving arm with described y-axis mass respectively with the two ends of two symmetrical side flap elastic hinges.
Further, described cross connector comprises cross tie-beam and cross linking springs, described cross tie-beam is suspended on substrate, this cross tie-beam is connected with spring device inside the xz axle of two groups of xz axle separation structures in y-direction, this cross tie-beam is connected with spring device inside the y-axis of two groups of y-axis separation structures in the x direction, cross linking springs is positioned at the center of cross tie-beam, described cross linking springs is fixedly connected with cross tie-beam in the direction of the x axis, is fixed on substrate in the y-axis direction by four anchor points.
Further, described xz axoplasm gauge block and y-axis mass are provided with micropore, in order to reduce air damping.
Compared with prior art, the present invention has following remarkable advantage: the single driving that 1) can realize three axles; 2) single structure realizing three axles is integrated, and structure is tightly urged, and manufacturing process is simple, is applicable to producing in enormous quantities, cheap; 3) each axle adopts differential mode to export, and adds output signal, improves gyrostatic sensitivity, inhibit undesired signal; 4) between each axle, induced signal structurally realizes without coupling;
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
Accompanying drawing explanation
Fig. 1 is the gyrostatic stereographic map of the present invention;
Fig. 2 is the gyrostatic front view of the present invention;
Fig. 3 is the front view of xz axle separation structure in gyroscope of the present invention;
Fig. 4 is the front view of y-axis separation structure in gyroscope of the present invention;
Fig. 5 is the front view of cross connector in gyroscope of the present invention;
Fig. 6 is the front view of umbilical cord in gyroscope of the present invention;
Fig. 7 is the gyrostatic principle schematic of the present invention.
Embodiment
Single structure three axis microelectromechanicdevice gyroscope as shown in Figures 1 to 6, it comprises substrate 10, axle construction, cross connector 40 and umbilical cord 50, and described axle construction comprises xz axle construction 20 and y-axis structure 30.Described xz axle construction 20 and y-axis structure 30 are on described substrate 10, and described xz axle construction 20 is used for measuring x-axis angular velocity and z-axis angular velocity, and described xz axle construction 20 forms along the xz axle separation structure that x-axis is symmetrical by two groups; Described y-axis structure is used for measuring y-axis angular velocity, and described y-axis structure 30 forms along the y-axis separation structure that y-axis is symmetrical by two groups; Two groups of described xz axle separation structures are connected by cross connector 40 with two groups of y-axis separation structure inside, and two groups of described xz axle separation structures are connected by 4 umbilical cords 50 successively with two groups of y-axis separation structure outsides.
Each group xz axle separation structure in described two groups of xz axle separation structures includes xz axoplasm gauge block 21, xz axle drives structure, x-axis induction structure, z-axis induction structure, z-axis feedback arrangement and xz axle elastic construction.Described xz axoplasm gauge block 21 is suspended on substrate, it has micropore 22, and is connected with y-axis separation structure by umbilical cord 50; Xz drives structure comprises xz axle driving activity comb electrodes 23 and xz axle drives fixed fingers electrode 24, xz axle driving activity comb electrodes 23 to be connected on xz axoplasm gauge block 21, and xz axle drives fixed fingers electrode 24 to be fixed on substrate 10; Described x-axis induction structure is made up of xz axoplasm gauge block 21 and x-axis bottom crown 25, and described x-axis bottom crown 25 to be positioned at below xz axoplasm gauge block 21 and to be arranged in parallel with xz axoplasm gauge block 21, described x-axis bottom crown 25 also fixing over the substrate 10; Described z-axis induction structure dredges tooth electrode 26 by z-axis sensed activity and the fixing tooth electrode 27 of dredging of z-axis induction forms, and z-axis sensed activity comb electrodes 26 is connected on xz axoplasm gauge block 21, and z-axis induction fixed fingers electrode 27 is fixed on substrate 10; Described z-axis feedback arrangement comprises z-axis feedback activity electrode 28 and z-axis feedback fixed electorde 29, and z-axis feedback activity comb electrodes 28 is connected on xz axoplasm gauge block 21, and z-axis feedback fixed fingers electrode 29 is fixed on substrate 10; Described xz axle elastic construction comprises spring device 210 totally two groups outside spring device 211 inside spring device 210 outside xz axle, xz axle, described xz axle, all be positioned at the outside of described xz axoplasm gauge block 21, outside xz axle, one end of spring device 210 is connected on xz axoplasm gauge block 21, the other end is fixed on substrate 10 by anchor point, inside described xz axle, one end of spring device 211 is connected to the inner side of xz axoplasm gauge block 21, and the other end is connected with described cross connector 40.
Each group y-axis separation structure in described two groups of y-axis separation structures 30 includes y-axis drives structure, y-axis induction structure and y-axis elastic construction, described y-axis drives structure draws together y-axis driving arm 31 and y-axis driving comb electrode group, described y-axis driving arm 31 is suspended on substrate, described y-axis driving comb electrode group comprises y-axis driving activity comb electrodes 32 and y-axis drives fixed fingers electrode 33, y-axis driving activity comb electrodes 32 is connected on described y-axis driving arm 31, and y-axis fixed fingers electrode 33 is fixed on substrate 10, described y-axis induction structure is made up of step 35 under y-axis mass 34 and y-axis, and described y-axis mass 34 is suspended in substrate, it has micropore 310 and is connected with described xz axoplasm gauge block 21 by umbilical cord 50, described y-axis elastic construction comprises spring device 36 outside y-axis, spring device 37 inside y-axis, central elastic hinge 38 and two symmetrical side flap elastic hinges 39, spring device 36 totally two groups outside described y-axis, all be positioned at the outside of described y-axis driving arm 31, outside described y-axis, one end of spring device 36 is connected to y-axis driving arm 31, the other end is fixed on substrate 10 by anchor point, inside described y-axis, one end of spring device 37 is connected to the inner side of y-axis mass 34, the other end is connected with described cross connector 40, described central elastic hinge 38 is connected with y-axis driving arm 31 with described y-axis mass 34 respectively with the two ends of two symmetrical side flap elastic hinges 39.
Described cross connector 40 comprises cross tie-beam 41 and cross linking springs 42, described cross tie-beam 41 suspends over the substrate 10, this cross tie-beam 41 is connected with spring device 211 inside the xz axle of two groups of xz axle separation structures in y-direction, this cross tie-beam 41 is connected with spring device 37 inside the y-axis of two groups of y-axis separation structures in the x direction, cross linking springs 42 is positioned at the center of cross tie-beam, described cross linking springs is fixedly connected with cross tie-beam 41 in the direction of the x axis, fixing over the substrate 10 by four anchor points in the y-axis direction.
Totally four, described umbilical cord 50, for connecting xz axoplasm gauge block 21 and y-axis mass 34 successively.
Single structure three axis microelectromechanicdevice gyroscope of the present invention, adopt the single drive pattern externally expanding contraction from center, the type of drive of each like this axle is linearly coupled, and Fig. 7 is this gyrostatic principle schematic.System drives with certain frequency under the acting in conjunction of xz axle drives structure and y-axis drives structure, the motion that each axoplasm gauge block becomes expansion to shrink on the whole, the interior outside spring device of xz axle and y-axis can do corresponding distortion, the distortion of umbilical cord ensure that the consistance that each axoplasm gauge block moves, and the instantaneous velocity of each like this axoplasm gauge block is V.When system is subject to x-axis angular velocity, the mass of two pairs of xz axles is subject to taxi driver brother's formula power and is: F
x=-2m
xΩ
x× V, equal and opposite in direction, direction is contrary, and outside xz axle, inside spring device and xz axle, spring device can do corresponding distortion, and such two symmetrical masses can do the contrary seesaw movement of phase place, and cross connector ensure that the pace of movement of two masses is consistent.The inductance capacitance of such side increases, and the inductance capacitance of opposite side reduces, and can realize differential output.When system is subject to z-axis angular velocity, the coriolis force that the two pairs of xz axoplasm gauge blocks are subject to is: F
z=-2m
zΩ
z× V, equal and opposite in direction direction is contrary, corresponding deformation can do in outer elastic mechanism like this in each z-axis separation structure and inner elastic mechanism, such two Symmetric Mass blocks can do the contrary motion of phase place, thus ensure the differential output of z-axis, and z-axis feedback arrangement can stop this motion, during to ensure to detect z-axis angular velocity, the induced signal of x-axis is not had an impact.When system is subject to y-axis angular velocity, the mass of two pairs of y-axis is subject to taxi driver brother's formula power and is: F
y=-2m
xΩ
x× V equal and opposite in direction, direction is contrary, outside y-axis, inside spring device, y-axis, spring device, central elastic hinge and side flap elastic hinge can do corresponding distortion, such two symmetrical masses can do the contrary seesaw movement of phase place, and cross connector ensure that the pace of movement of two masses is consistent.The inductance capacitance of such side increases, and the inductance capacitance of opposite side reduces, and can realize differential output.
A more than just most preferred embodiment of the present invention, those skilled in the art likely makes change or variation to this design not departing from protection scope of the present invention, but these should be understood to still belong within protection scope of the present invention.
Claims (3)
1. a single structure three axis microelectromechanicdevice gyroscope, it comprises substrate, axle construction, cross connector and umbilical cord, described axle construction comprises xz axle construction and y-axis structure, described xz axle construction and y-axis structure are over the substrate, described xz axle construction is used for measuring x-axis angular velocity and z-axis angular velocity, and described xz axle construction forms along the xz axle separation structure that x-axis is symmetrical by two groups; Described y-axis structure is used for measuring y-axis angular velocity, and described y-axis structure forms along the y-axis separation structure that y-axis is symmetrical by two groups; Two groups of described xz axle separation structures are connected by cross connector with two groups of y-axis separation structure inside, and two groups of described xz axle separation structures are connected by 4 umbilical cords successively with two groups of y-axis separation structure outsides, it is characterized in that:
Each group xz axle separation structure in described two groups of xz axle separation structures includes xz axoplasm gauge block, xz axle drives structure, x-axis induction structure, z-axis induction structure, z-axis feedback arrangement and xz axle elastic construction, described xz axoplasm gauge block is suspended on substrate, and be connected with y-axis separation structure by umbilical cord, the distortion of umbilical cord ensure that the consistance that each axoplasm gauge block moves; Xz axle drives structure comprises xz axle driving activity comb electrodes and xz axle drives fixed fingers electrode, and xz axle driving activity comb Electrode connection is on xz axoplasm gauge block, and xz axle drives fixed fingers electrode to be fixed on substrate; Described x-axis induction structure is made up of xz axoplasm gauge block and x-axis bottom crown, and described x-axis bottom crown to be positioned at below transverse axis mass and to arrange with transverse axis masses parallel, and described x-axis bottom crown is also fixed on substrate; Described z-axis induction structure dredges tooth electrode by z-axis sensed activity and the fixing tooth electrode of dredging of z-axis induction forms, and z-axis sensed activity comb electrodes is connected on xz axoplasm gauge block, and z-axis induction fixed fingers electrode is fixed on substrate; Described z-axis feedback arrangement comprises z-axis feedback activity electrode and z-axis feedback fixed electorde, and z-axis feedback activity comb electrodes is connected on xz axoplasm gauge block, and z-axis feedback fixed fingers electrode is fixed on substrate; Described xz axle elastic construction comprises spring device totally two groups outside spring device inside spring device outside xz axle, xz axle, described xz axle, all be positioned at the outside of described xz axoplasm gauge block, outside xz axle, one end of spring device is connected on xz axoplasm gauge block, the other end is fixed on substrate by anchor point, inside described xz axle, one end of spring device is connected to the inner side of xz axoplasm gauge block, and the other end is connected with described cross connector;
Described xz axoplasm gauge block and y-axis mass are provided with micropore, in order to reduce air damping.
2. single structure three axis microelectromechanicdevice gyroscope according to claim 1, it is characterized in that: each the group y-axis separation structure in described two groups of y-axis separation structures includes y-axis drives structure, y-axis induction structure and y-axis elastic construction, described y-axis drives structure draws together y-axis driving arm and y-axis driving comb electrode group, described y-axis driving arm is suspended on substrate, described y-axis driving comb electrode group comprises y-axis driving activity comb electrodes and y-axis drives fixed fingers electrode, y-axis driving activity comb Electrode connection is on described y-axis driving arm, y-axis fixed fingers electrode is fixed on substrate, described y-axis induction structure is made up of step under y-axis mass and y-axis, and described y-axis mass is suspended in substrate, and is connected with described xz axoplasm gauge block by umbilical cord, described y-axis elastic construction comprises spring device outside y-axis, spring device inside y-axis, central elastic hinge and two symmetrical side flap elastic hinges, spring device totally two groups outside described y-axis, all be positioned at the outside of described y-axis driving arm, outside described y-axis, one end of spring device is connected to y-axis driving arm, the other end is fixed on substrate by anchor point, inside described y-axis, one end of spring device is connected to the inner side of y-axis mass, the other end is connected with described cross connector, described central elastic hinge is connected with y-axis driving arm with described y-axis mass respectively with the two ends of two symmetrical side flap elastic hinges.
3. single structure three axis microelectromechanicdevice gyroscope according to claim 1, it is characterized in that: it is characterized in that: described cross connector comprises cross tie-beam and cross linking springs, described cross tie-beam is suspended on substrate, this cross tie-beam is connected with spring device inside the xz axle of two groups of xz axle separation structures in y-direction, this cross tie-beam is connected with spring device inside the y-axis of two groups of y-axis separation structures in the x direction, cross linking springs is positioned at the center of cross tie-beam, described cross linking springs is fixedly connected with cross tie-beam in the direction of the x axis, be fixed on substrate by four anchor points in the y-axis direction.
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| CN201110172537.2A CN102840857B (en) | 2011-06-24 | 2011-06-24 | Single structural three-axis micro-electromechanical gyroscope |
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| CN201110172537.2A CN102840857B (en) | 2011-06-24 | 2011-06-24 | Single structural three-axis micro-electromechanical gyroscope |
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| CN106871886B (en) * | 2015-12-10 | 2020-02-18 | 上海矽睿科技有限公司 | Vibration module and gyroscope |
| CN109405819B (en) * | 2018-10-20 | 2020-04-28 | 中北大学 | Monolithic integration z-axis redundancy three-axis gyroscope structure array |
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|---|---|---|---|---|
| CN101270990A (en) * | 2008-05-06 | 2008-09-24 | 中北大学 | Testing apparatus of multi-layer nano-film tunneling micro-gyroscope |
| CN101839718A (en) * | 2009-03-17 | 2010-09-22 | 毛敏耀 | Tri-axis angular rate sensor |
| WO2010108773A1 (en) * | 2009-03-26 | 2010-09-30 | Sensordynamics Ag | Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another |
| CN202109911U (en) * | 2011-06-24 | 2012-01-11 | 鄂尔多斯市嘉美科技股份有限公司 | Single structure three-axle micro electro mechanical gyroscope |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101270990A (en) * | 2008-05-06 | 2008-09-24 | 中北大学 | Testing apparatus of multi-layer nano-film tunneling micro-gyroscope |
| CN101839718A (en) * | 2009-03-17 | 2010-09-22 | 毛敏耀 | Tri-axis angular rate sensor |
| WO2010108773A1 (en) * | 2009-03-26 | 2010-09-30 | Sensordynamics Ag | Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another |
| CN202109911U (en) * | 2011-06-24 | 2012-01-11 | 鄂尔多斯市嘉美科技股份有限公司 | Single structure three-axle micro electro mechanical gyroscope |
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