CN102832902B - 一种石英晶体谐振器及其加工方法 - Google Patents
一种石英晶体谐振器及其加工方法 Download PDFInfo
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- CN102832902B CN102832902B CN201210353655.8A CN201210353655A CN102832902B CN 102832902 B CN102832902 B CN 102832902B CN 201210353655 A CN201210353655 A CN 201210353655A CN 102832902 B CN102832902 B CN 102832902B
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- wafer
- quartz
- electrode
- chromium coating
- crystal resonator
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- 239000013078 crystal Substances 0.000 title claims abstract description 31
- 238000003672 processing method Methods 0.000 title claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims abstract description 38
- 238000000576 coating method Methods 0.000 claims abstract description 38
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 30
- 239000011651 chromium Substances 0.000 claims abstract description 30
- 238000009966 trimming Methods 0.000 claims abstract description 14
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052709 silver Inorganic materials 0.000 claims abstract description 9
- 239000004332 silver Substances 0.000 claims abstract description 9
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 9
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 238000005260 corrosion Methods 0.000 claims description 6
- 230000007797 corrosion Effects 0.000 claims description 6
- 230000032683 aging Effects 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 230000007306 turnover Effects 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000004044 response Effects 0.000 abstract description 6
- 235000012431 wafers Nutrition 0.000 description 23
- 230000003071 parasitic effect Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210353655.8A CN102832902B (zh) | 2012-09-21 | 2012-09-21 | 一种石英晶体谐振器及其加工方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210353655.8A CN102832902B (zh) | 2012-09-21 | 2012-09-21 | 一种石英晶体谐振器及其加工方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102832902A CN102832902A (zh) | 2012-12-19 |
| CN102832902B true CN102832902B (zh) | 2016-04-06 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210353655.8A Active CN102832902B (zh) | 2012-09-21 | 2012-09-21 | 一种石英晶体谐振器及其加工方法 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102832902B (zh) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104506154A (zh) * | 2014-12-11 | 2015-04-08 | 廊坊中电熊猫晶体科技有限公司 | 改善石英晶体谐振器频率稳定性的导电胶固化设计方法 |
| CN107634733A (zh) * | 2017-09-27 | 2018-01-26 | 合肥晶威特电子有限责任公司 | 一种石英晶体谐振器及其加工方法 |
| CN109936340A (zh) * | 2017-12-19 | 2019-06-25 | 成都晶宝时频技术股份有限公司 | 一种石英谐振器连续微调系统及方法 |
| CN110957985A (zh) * | 2018-09-27 | 2020-04-03 | 湖南嘉业达电子有限公司 | 一种低电阻圆柱晶振的加工方法 |
| CN109639254B (zh) * | 2018-11-28 | 2023-05-09 | 江苏浩都频率科技有限公司 | 一种smd3225晶片的谐振器制造工艺 |
| CN111074227A (zh) * | 2019-11-21 | 2020-04-28 | 南京中电熊猫晶体科技有限公司 | 一种用于弥补单面刻蚀不对称性的镀膜方法 |
| CN112117981A (zh) * | 2020-09-23 | 2020-12-22 | 河北博威集成电路有限公司 | 石英晶体谐振器及其制备方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4638536A (en) * | 1986-01-17 | 1987-01-27 | The United States Of America As Represented By The Secretary Of The Army | Method of making a resonator having a desired frequency from a quartz crystal resonator plate |
| CN201122937Y (zh) * | 2007-12-04 | 2008-09-24 | 成都奔月科技有限公司 | 一种微型石英晶体谐振器 |
| CN201490982U (zh) * | 2009-09-09 | 2010-05-26 | 安徽铜峰电子股份有限公司 | SMD5032-12MHz型晶体谐振器用晶片 |
| CN101841314A (zh) * | 2010-05-21 | 2010-09-22 | 金华市创捷电子有限公司 | 石英晶体谐振器及其制作方法 |
| CN202872745U (zh) * | 2012-09-21 | 2013-04-10 | 成都晶宝时频技术股份有限公司 | 一种石英晶体谐振器 |
-
2012
- 2012-09-21 CN CN201210353655.8A patent/CN102832902B/zh active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4638536A (en) * | 1986-01-17 | 1987-01-27 | The United States Of America As Represented By The Secretary Of The Army | Method of making a resonator having a desired frequency from a quartz crystal resonator plate |
| CN201122937Y (zh) * | 2007-12-04 | 2008-09-24 | 成都奔月科技有限公司 | 一种微型石英晶体谐振器 |
| CN201490982U (zh) * | 2009-09-09 | 2010-05-26 | 安徽铜峰电子股份有限公司 | SMD5032-12MHz型晶体谐振器用晶片 |
| CN101841314A (zh) * | 2010-05-21 | 2010-09-22 | 金华市创捷电子有限公司 | 石英晶体谐振器及其制作方法 |
| CN202872745U (zh) * | 2012-09-21 | 2013-04-10 | 成都晶宝时频技术股份有限公司 | 一种石英晶体谐振器 |
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| Publication number | Publication date |
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| CN102832902A (zh) | 2012-12-19 |
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Denomination of invention: Quartz crystal resonator and processing method thereof Effective date of registration: 20180122 Granted publication date: 20160406 Pledgee: Chengdu SME financing Company Limited by Guarantee Pledgor: Chengdu Kingbri Frequency Technology Co.,Ltd. Registration number: 2018510000006 |
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