CN102830491A - Dual-ring phase type pupil filter for gauss light beam focusing - Google Patents
Dual-ring phase type pupil filter for gauss light beam focusing Download PDFInfo
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- CN102830491A CN102830491A CN2012103371894A CN201210337189A CN102830491A CN 102830491 A CN102830491 A CN 102830491A CN 2012103371894 A CN2012103371894 A CN 2012103371894A CN 201210337189 A CN201210337189 A CN 201210337189A CN 102830491 A CN102830491 A CN 102830491A
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Abstract
The invention discloses a dual-ring phase type pupil filter for gauss light beam focusing. The dual-ring phase type pupil filter is characterized in that the pupil filter is in a dual-ring structure, wherein the normalization radius of an inner ring is r1, the normalization radius r2 of an outer ring equals to 1, and the phase modulation depth is 0, Phi or Phi, 0. The values of r1 and Phi are as follows: (1) the r1 equals to 0.16, and the Phi equal to 0.53 Pi; (2) the r1 equals to 0.15, and the Phi is more than or equals to 0.58 Pi and is less than or equals to 0.59 Pi; (3) the r1 equals to 0.14, and the Phi is more than or equals to 0.63 Pi and is less than or equals to 0.66 Pi; (4) the r1 equals to 0.13, and the Phi is more than or equals to 0.71 Pi and is less than or equals to 0.78 Pi; and (5) the r1 equals to 0.12, and the Phi is more than or equals to 0.83 Pi and is less than or equals to 1.0 Pi. With the dual-ring phase type pupil filter, gauss light beam focusing spots are enabled to realize transverse super resolution, the maximum side lobe ratio M is less than 1.5%, the transverse first zero compression ratio G can reach 92%, and the starr ratio S is more than 91%. The rectangular etched dual-ring phase pupil filter can be machined through the techniques of photo-etching, etching and duplicating, and has the advantages that the structure is simple, the cost is low, and large batch production is realized.
Description
Technical field:
Super-resolution optical device when this patent relates to a kind of Gaussian beam focal imaging is 0.85 two ring phase type optical ultra-discrimination wave filters especially for numerical aperture of objective.
Background technology:
Along with the fast development of technology such as laser accurate processing, the storage of high density light, high-resolution micro-imaging, for high-resolution imaging demand in continuous rising.The method that tradition is dwindled focal beam spot raising optical resolution is through reducing operation wavelength and improving numerical aperture of objective; But improving numerical aperture all is limited with shortening optical wavelength, and the significantly increase that in practical application, can bring the complicated and cost of system architecture of these two kinds of methods.
The optical ultra-discrimination technology is to obtain the small light spot that surmounts diffraction limit through the structure that changes optical system, thereby improves the resolution of optical system.The optical ultra-discrimination technology comprises that mainly optics becomes mark art, solid immersion lens technology, aperture probes near field technique, confocal microscopy etc.Wherein utilize the phase type iris filter that the incident beam wavefront is modulated, can obtain focal beam spot, thereby improve the resolution of optical system less than Airy disk.Because this kind iris filter manufacture craft and existing microelectronic processing technology are compatible, have the advantages that volume is little, cost is low, receive people's attention day by day.Present super-resolution research all is based on the optical system of monochromatic plane wave illumination, but in high density storage, Laser Processing, confocal laser microscopy, has all used laser instrument as light source and high-NA objective.And the light beam that laser instrument sends not is desirable plane wave, and the light beam that laser instrument commonly used sends can equivalence be fundamental-mode gaussian beam.Simultaneously, under the high-NA, the object lens lens system has very strong depolarization effect, needs to adopt Vector Diffraction Theory to analyze, and just can obtain correct super-resolution result.People such as Wolf have provided the focused light field characteristic analytical approach under the high-NA [Pro.R.Soc., A 253,358 (1959) for formerly technological 1:B.Richards, E.Wolf].We to the optical system of Gaussian beam illumination, have carried out optimal design to the endless belt phase structure that can realize the super-resolution effect according to Vector Diffraction Theory, obtain realizing two ring phase structures of super-resolution.As far as we know, also do not utilize Vector Diffraction Theory, to the structure of the super-resolution phase place iris filter of Gaussian beam illumination.
Summary of the invention:
The technical matters that the present invention will solve is to the object lens focusing system that Gaussian beam is thrown light on a kind of endless belt phase type iris filter that can realize transverse super-resolution to be provided; During the online polarized Gaussian optical beams incident of this wave filter; Laterally first zero ratio of compression G can reach 92%; Maximum secondary lobe is lower than 1.5% than M, this tal fibre than S greater than 91%.
Technical solution of the present invention is following:
The present invention relates to a kind of numerical aperture of objective that is used for is 0.85 two ring phase type super-resolution pupil filters, and this iris filter has two ring structures, and interior ring normalization radius is R
1, outer shroud normalization radius is r
2=1; The phase modulation (PM) of this iris filter is passed through interior ring or the realization of outer shroud rectangular etching certain depth, and its phase modulation (PM) degree of depth is respectively φ, and 0, or 0, φ.Through ring normalization radius R in changing
1With phase modulation (PM) degree of depth φ, can control first zero ratio of compression G, maximum secondary lobe compares S than M and this tal fibre.
Above-described two ring phase type iris filters, its normalization radius and the phase modulation (PM) degree of depth are respectively r
1=0.16, φ=0.53 π.
Above-described two ring phase type iris filters, its normalization radius and the phase modulation (PM) degree of depth are respectively r
1=0.15,0.58 π≤φ≤0.59 π.
Above-described two ring phase type iris filters, its normalization radius and the phase modulation (PM) degree of depth are respectively r
1=0.14,0.63 π≤φ≤0.66 π.
Above-described two ring phase type iris filters, its normalization radius and the phase modulation (PM) degree of depth are respectively r
1=0.13,0.71 π≤φ≤0.78 π.
Above-described two ring phase type iris filters, its normalization radius and the phase modulation (PM) degree of depth are respectively r
1=0.12,0.83 π≤φ≤1.0 π.
Foundation of the present invention is following:
Fig. 1 has shown the geometry of two ring phase type iris filters.r
1, r
2Be the normalization radius, φ is the phase modulation (PM) degree of depth.During use this iris filter is placed on before the object lens, linear polarization Gaussian beam vertical incidence, and should make the pupil that can be full of object lens with a tight waist of Gaussian beam.
Under two ring phase place iris filter structures as shown in Figure 1; It is near the horizontal and axial light distribution 0.85 o'clock the focus that the present invention adopts vector diffraction algorithm [formerly technology 1] to calculate numerical aperture of objective; Analyzed near the horizontal and axial light distribution the focus under the different normalization radiuses and the phase modulation (PM) degree of depth, can obtain as drawing a conclusion:
Before object lens, add two ring phase type iris filters; Through the radius of internal ring, the optimal design of the phase modulation (PM) degree of depth; Can change near the horizontal light distribution of focus; And very little to axial light intensity distribution influence, can under the constant situation of light distribution, realize horizontal super-resolution in retainer shaft.The process limitation of consider making, less at interval lines are general difficult making, and the present invention has carried out optimal design to two ring structures that normalization radius and phase modulation (PM) depth interval are respectively 0.01 and 0.01 π.The present invention obtains the numerical optimization result of two ring phase type iris filters according to Theoretical Calculation, when two ring normalization radiuses are respectively (1) r
1=0.16, φ=0.53 π; (2) r
2=0.15,0.58 π≤φ≤0.59 π; (3) r
3=0.14,0.63 π≤φ≤0.66 π; (4) r
4=0.13,0.71 π≤φ≤0.78 π; (5) r
5=0.12, during 0.83 π≤φ≤1.0 π, less than 1.5%, laterally first zero ratio of compression G is less than 92% than M for maximum secondary lobe, this tal fibre than S greater than 91%.
Description of drawings:
Fig. 1 is the geometry of the present invention's two ring phase type iris filters.
Fig. 2 is that to be applied to numerical aperture be the structural representation before 0.85 the object lens to the present invention two ring phase type iris filters.
Fig. 3 adopts near the horizontal light distribution synoptic diagram two ring phase type iris filter back focuses, the light distribution when wherein real black line is represented not add iris filter, and the some black line representes to add light distribution behind the iris filter.
Fig. 4 adopts near the axial light distribution synoptic diagram two ring phase type iris filter back focuses, the light distribution when wherein real black line is represented not add iris filter, and the some black line representes to add light distribution behind the iris filter.
Specific embodiment:
Referring to Fig. 1, the normalization radius of described two ring phase type iris filters is r
1=0.12, r
2=1, the phase modulation (PM) degree of depth is φ=0.9 π, and operation wavelength is λ, place numerical aperture to be 0.85 object lens this iris filter before, as shown in Figure 2.Analysis shows to design result, and near horizontal and the axial light distribution this iris filter focus is respectively like Fig. 3 and shown in Figure 4, and maximum secondary lobe is than M=0.014, horizontal first zero ratio of compression G=0.916, and this tal fibre compares S=0.914.
Table 1 shows this structure applications when different NA objectives (NA), and the Changing Pattern of corresponding G, S, M value can be found out from table 1; When numerical aperture of objective has minor alteration; The value of S and M does not almost change, and the value of G has small increase, but the change amount is very little.When numerical aperture was 0.9, the value of G had increased 0.76%, and when numerical aperture was 0.6, the value of G had increased 1.3%, and the value of S and M does not almost change.Can find out, this structure have suitable object lens tolerance big, use advantage flexibly.
Utilize the binary optical process technology to make this phase type iris filter, can be divided into following a few step:
1, calculates the radius of two rings according to the size of lens entrance pupil, make corresponding photo mask board then.
2, on the substrate of glass that scribbles photoresist, go the figure transfer of mask plate with the method for photoetching.
3, on substrate of glass, and the control etching depth is to the required phase modulation (PM) degree of depth with the mask plate figure transfer for the method that adopts wet method or dry etching.
4, remove photoresist, obtain two required ring phase type iris filters.
Table 1
Claims (6)
1. the rectangular etching two ring phase type iris filters when being used for the Gaussian beam focal imaging is characterized in that this iris filter has two ring structures, and ring normalization radius is r in it
1, outer shroud normalization radius is 1, the phase modulation (PM) degree of depth is φ, and 0, or 0, φ.
2. two ring phase type iris filters according to claim 1 is characterized in that the normalization radius and the phase modulation (PM) degree of depth of described two ring phase place iris filters is respectively r
1=0.16, φ=0.53 π.
3. two ring phase type iris filters according to claim 1 is characterized in that the normalization radius and the phase modulation (PM) degree of depth of described two ring phase place iris filters is respectively r
1=0.15,0.58 π≤φ≤0.59 π.
4. two ring phase type iris filters according to claim 1 is characterized in that the normalization radius and the phase modulation (PM) degree of depth of described two ring phase place iris filters is respectively r
1=0.14,0.63 π≤φ≤0.66 π.
5. two ring phase type iris filters according to claim 1 is characterized in that the normalization radius and the phase modulation (PM) degree of depth of described two ring phase place iris filters is respectively r
1=0.13,0.71 π≤φ≤0.78 π.
6. two ring phase type iris filters according to claim 1 is characterized in that the normalization radius and the phase modulation (PM) degree of depth of described two ring phase place iris filters is respectively r
1=0.12,0.83 π≤φ≤1.0 π.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106932916A (en) * | 2017-05-04 | 2017-07-07 | 鲁东大学 | A kind of dual-beam super-resolution focus method of utilization Meta Materials lens |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05313100A (en) * | 1992-05-15 | 1993-11-26 | Sharp Corp | Light beam condensing method and optical information reader |
| CN1595078A (en) * | 2004-06-30 | 2005-03-16 | 中国科学院上海光学精密机械研究所 | Optical wave front detecting unit and detecting method thereof |
| CN1641765A (en) * | 2004-12-09 | 2005-07-20 | 中国科学院上海光学精密机械研究所 | Phase transverse super-resolution confocal system |
| CN102402006A (en) * | 2011-11-15 | 2012-04-04 | 安徽工业大学 | Phase-type pupil filter for generating bottle beams |
-
2012
- 2012-09-06 CN CN2012103371894A patent/CN102830491A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05313100A (en) * | 1992-05-15 | 1993-11-26 | Sharp Corp | Light beam condensing method and optical information reader |
| CN1595078A (en) * | 2004-06-30 | 2005-03-16 | 中国科学院上海光学精密机械研究所 | Optical wave front detecting unit and detecting method thereof |
| CN1641765A (en) * | 2004-12-09 | 2005-07-20 | 中国科学院上海光学精密机械研究所 | Phase transverse super-resolution confocal system |
| CN102402006A (en) * | 2011-11-15 | 2012-04-04 | 安徽工业大学 | Phase-type pupil filter for generating bottle beams |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106932916A (en) * | 2017-05-04 | 2017-07-07 | 鲁东大学 | A kind of dual-beam super-resolution focus method of utilization Meta Materials lens |
| CN106932916B (en) * | 2017-05-04 | 2019-10-01 | 鲁东大学 | A kind of dual-beam super-resolution focus method using Meta Materials lens |
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Application publication date: 20121219 |