CN201364396Y - Holographic concave-grating exposure diffraction efficiency real-time monitoring system - Google Patents
Holographic concave-grating exposure diffraction efficiency real-time monitoring system Download PDFInfo
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- CN201364396Y CN201364396Y CNU2009200685338U CN200920068533U CN201364396Y CN 201364396 Y CN201364396 Y CN 201364396Y CN U2009200685338 U CNU2009200685338 U CN U2009200685338U CN 200920068533 U CN200920068533 U CN 200920068533U CN 201364396 Y CN201364396 Y CN 201364396Y
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Abstract
The utility model relates to a holographic concave-grating exposure diffraction efficiency real-time monitoring system, which comprises a He-Ne laser device, a holographic concave grating, a convex lens, an optical power meter with serial connection, a computer and He-Cd laser. The system can control the optimum exposure energy of exposure in the manufacturing process of the holographic concave grating by monitoring the diffraction light intensity of a negative first order in real time when the holographic concave grating exposes, thereby achieving the aim that the manufactured holographic concave grating has the optimum negative first order diffraction efficiency. The system has the advantages of high utilization ratio of light intensity, simple device, easy disassembly and no complex light path adjustment.
Description
Technical field
The utility model relates to a kind of holographic optics field, particularly a kind of holographic concave grating exposure diffraction efficiency real-time monitoring system.
Background technology
Grating also claims diffraction grating, is to utilize many seam diffraction principle to make the optical element of light generation chromatic dispersion (being decomposed into spectrum).Holographic concave grating is the grating of making on concave surface of the holographic exposure technology.It has the characteristic of beam split and concentrating element simultaneously, can be used as the unique optical element of spectral instrument and need not collimating mirror and condensing lens, make that apparatus structure is simple, miniaturization, and then lowering apparatus cost greatly, and can design and produce out the holographic concave grating of various groove numbers according to the needs of spectral analysis.Compare with the machine engraving grating, it has many advantages of general holographic grating again, and is even as groove, no ghost line, and the delineation area is big, incisure density height or the like.Holographic concave grating is widely used in wavelength division multiplexer in spectrograph, scanning monochromator, direct-reading spectrometer, spectro chemical analysis of isotopes instrument and the fiber optic communication network or the like at present.
A vital step is exactly exposure in the manufacturing process of holographic concave grating, and the control of time shutter, the size of laser intensity directly have influence on the quality of final hologram concave grating.The negative first-order diffraction efficient of holographic concave grating directly influences the spectral analysis capabilities of spectrometric instrument, overexposure and the under-exposed decline that all can cause the negative first-order diffraction efficient of holographic concave grating.At present, domestic grasp and control for negative first-order diffraction light diffraction efficiency in the holographic concave grating exposure process also rests on the aspect of dependence experience, does not have instrument to monitor in real time.
Summary of the invention
The utility model is the problem that can not monitor seizure in real time at negative first-order diffraction light diffraction efficiency in the existing holographic concave grating exposure process, a kind of holographic concave grating exposure diffraction efficiency real-time monitoring system has been proposed, can accurately monitor the optimum exposure point of holographic concave grating negative first-order diffraction light of when exposure, reach the purpose that holographic concave grating after completing has the highest negative first-order diffraction efficient.
The technical solution of the utility model is: a kind of holographic concave grating exposure diffraction efficiency real-time monitoring system, comprise the He-Ne laser instrument, convex lens, the light power meter that the band serial ports connects, computing machine, He-Cd laser, one by the exposure light path of He-Cd laser as the holographic concave grating light source in, with He-Ne laser monitoring light source, convex lens, place point-blank at the holographic concave grating center, and be parallel to surface level, the light power meter that the band serial ports connects receives the light intensity that monitoring light source He-Ne laser planoconvex lens expands the negative first-order diffraction light of bundle back after the holographic concave grating diffraction focuses on, and light intensity signal sent into Computer Processing, draw the change curve of diffraction efficiency.
The plane light wave that described monitoring light source He-Ne laser sends becomes the θ angle between zero degree and 20 degree with the holographic concave grating central shaft, and parallel with surface level.
The spherical light wave that described monitoring light source He-Ne laser planoconvex lens expands behind the bundle covers the holographic concave grating plane of exposure and only covers the holographic concave grating plane of exposure.
Described monitoring light source He-Ne laser vertical incides on the convex lens.
The receiving plane of the light power meter that the band serial ports connects is placed on the negative first-order diffraction focus point of holographic concave grating.
The beneficial effects of the utility model are: the diffraction light light intensity of the negative one-level when the utility model holographic concave grating exposure diffraction efficiency real-time monitoring system exposes by real-time monitoring holographic concave grating is controlled the optimum exposure of exposing in the holographic concave grating manufacturing process, and the holographic concave grating that reaches after completing has the best purpose of bearing first-order diffraction efficient.Have light intensity utilization factor height, device is simple, dismounting easily, the advantage that does not have complicated light path to regulate.
Description of drawings
Fig. 1 is the utility model holographic concave grating exposure diffraction efficiency real-time monitoring system one-piece construction synoptic diagram;
Fig. 2 is a synoptic diagram before the exposure of the utility model holographic concave grating exposure diffraction efficiency real-time monitoring system holographic concave grating;
Fig. 3 is that the utility model holographic concave grating exposure diffraction efficiency real-time monitoring system holographic concave grating exposure back photoresist molecule changes synoptic diagram;
Fig. 4 is the negative first-order diffraction light light intensity curve of the utility model holographic concave grating exposure diffraction efficiency real-time monitoring system;
Fig. 5 is that the utility model holographic concave grating exposure diffraction efficiency real-time monitoring system holographic concave grating is made index path.
Embodiment
Photoresist claims photoresist again, the photosensitive mixing material of being made up of photosensitive resin, sensitizer and three kinds of principal ingredients of solvent.Photosensitive resin is after illumination, and the exposure region molecular structure changes.According to its chemical reaction mechanism and development principle, can divide negative photoresist and positive photoresist two classes.What form insoluble material after the illumination is negative photoresist; Otherwise, be insoluble to some solvent, after illumination, become the positive photoresist that is of soluble substance.The photoresist that we use is AR-P3120, is positive photoresist, and its response to light wave is near ultraviolet and ultraviolet band, so it has response preferably to He-Cd laser (441.6nm), and for He-Ne laser (632.8nm) not response substantially.We use He-Cd laser as making light source, and He-Ne laser is as testing light source.
In the holographic concave grating exposure process, bright fringe place light intensity is far above the dark fringe place.Because the light intensity difference, bright fringe place photoresist molecular changes speed is far longer than the dark fringe place, at this moment, can ignore dark fringe punishment and change speed.Because molecular structure changes, its refractive index also diminishes thereupon.Therefore, we can be equivalent to it grating that flute profile height is lower.When exposure arrived the photoresist bottom, the light intensity of negative first-order diffraction light slowly reduced.The curve that therefore negative one-level light intensity changes is: at first slowly increase, slowly reduce then.
He-Ne laser becomes θ angle (0 °＜θ＜20 °) as the monitoring light source with the holographic concave grating central shaft in manufacturing process just, planoconvex lens expands the plane of exposure that bundle covered and only covered whole holographic concave grating, through holographic concave grating diffraction and focusing, its negative first-order diffraction light focuses on a bit on the light power meter receiving plane of being with the serial ports connection, monitoring this point intensity variations, machine is handled the change curve that draws diffraction efficiency as calculated, its diffraction efficiency peak, corresponding, the holographic concave grating after completing also has the highest negative first-order diffraction efficient.
Holographic concave grating exposure diffraction efficiency real-time monitoring system comprises: He-Ne laser instrument 1, convex lens 2,16,17, concave lens focus 3,18,19, holographic concave grating substrate 4, light power meter 5, computing machine 6 (subsidiary curve display software), He-Cd laser 7,8, photoresist 9 before the exposure, exposure back photoresist 10, He-Cd laser instrument 11, catoptron 12,13,15, prism 14.
As shown in Figure 1, He-Ne laser instrument 1 is as the testing light source of holographic concave grating exposure real-time detecting system, with the He-Ne LASER Light Source, convex lens 2, place point-blank at holographic concave grating substrate 4 centers, and be parallel to surface level, and its plane light wave that sends becomes the θ angle with the holographic concave grating central shaft, planoconvex lens 2 converges to focus 3 and forms the spherical divergence light wave, and spherical light wave covers and only cover the plane of exposure on the whole holographic concave grating substrate 4.
He-Cd laser 7,8 is for making the holographic concave grating light source, and two light sources converge at 18,19 respectively through two convex lens 16,17 and form pointolite, interfere on the holographic concave grating substrate, form light and dark striped.Wherein, bright fringe place light intensity intensity is much larger than the dark fringe place, and bright fringe place photoresist molecular changes speed is also much larger than the dark fringe place.Photoresist 10 after the change as shown in Figure 3, refractive index is compared unaltered photoresist 9 (as Fig. 2) and is reduced, therefore the increase bright fringe place photoresist refractive index with the time shutter also slowly descends.According to this point, the photoresist thickness equivalence at bright fringe place was the photoresist at the dark fringe place of a low thickness after we will expose, and along with the increase of time shutter, the equivalence of bright fringe thickness comes to rise low for the thickness of dark fringe more.Further, we can be a holographic concave grating finished product that increases the continuous reduction of grating groove with the time shutter with the holographic concave grating substrate equivalence that is exposing.On the plane of exposure of the holographic concave grating substrate that spherical light wave 2 irradiations are exposing, its negative first-order diffraction light is gathered on the light power meter 5 through the focussing force of holographic concave grating self.The holographic concave grating groove is dark more, negative first-order diffraction light light intensity is strong more, increase with the time shutter, holographic concave grating groove after the equivalence is more and more darker, the light intensity of negative first-order diffraction light is also increasing, when bright fringe place photoresist molecule no longer changed, this moment, negative first-order diffraction light light intensity was the highest, and exposure is finished.If continue exposure, along with the slowly change of increase dark fringe place photoresist molecule continuation of time, but this moment, bright fringe place photoresist molecule no longer changed, and the equivalence of bright fringe place can slowly uprise for dark fringe place photoresist thickness, negative first-order diffraction light intensity can slowly reduce, as shown in Figure 4.
As shown in Figure 5, He-Cd laser instrument 11 sends a branch of He-Cd laser and reflexes to through catoptron 12 and be divided into the strong close coherent light beam of two-beam on the prism 14, reflex to two convex lens 16,17 through catoptron 13,15 respectively again and expand bundle, on the plane of exposure of holographic concave grating substrate, expose.
Claims (5)
1, a kind of holographic concave grating exposure diffraction efficiency real-time monitoring system, comprise the He-Ne laser instrument, convex lens, the light power meter that the band serial ports connects, computing machine, He-Cd laser, it is characterized in that, one by the exposure light path of He-Cd laser as the holographic concave grating light source in, with He-Ne laser monitoring light source, convex lens, place point-blank at the holographic concave grating center, and be parallel to surface level, the light power meter that the band serial ports connects receives the light intensity that monitoring light source He-Ne laser planoconvex lens expands the negative first-order diffraction light of bundle back after the holographic concave grating diffraction focuses on, and light intensity signal sent into Computer Processing, draw the change curve of diffraction efficiency.
2, holographic concave grating exposure diffraction efficiency real-time monitoring system according to claim 1, it is characterized in that, the plane light wave that described monitoring light source He-Ne laser sends becomes the θ angle between zero degree and 20 degree with the holographic concave grating central shaft, and parallel with surface level.
3, holographic concave grating exposure diffraction efficiency real-time monitoring system according to claim 1, it is characterized in that the spherical light wave that described monitoring light source He-Ne laser planoconvex lens expands behind the bundle covers the holographic concave grating plane of exposure and only covers the holographic concave grating plane of exposure.
4, holographic concave grating exposure diffraction efficiency real-time monitoring system according to claim 1 is characterized in that described monitoring light source He-Ne laser vertical incides on the convex lens.
5, holographic concave grating exposure diffraction efficiency real-time monitoring system according to claim 1 is characterized in that the receiving plane of the light power meter that the band serial ports connects is placed on the negative first-order diffraction focus point of holographic concave grating.
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| CNU2009200685338U CN201364396Y (en) | 2009-03-06 | 2009-03-06 | Holographic concave-grating exposure diffraction efficiency real-time monitoring system |
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| CNU2009200685338U CN201364396Y (en) | 2009-03-06 | 2009-03-06 | Holographic concave-grating exposure diffraction efficiency real-time monitoring system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101807013A (en) * | 2010-04-01 | 2010-08-18 | 上海理工大学 | System for monitoring minus one-level photoresist of holographic concave grating |
| CN101957257A (en) * | 2010-09-10 | 2011-01-26 | 中国科学院长春光学精密机械与物理研究所 | Measurement method of diffraction efficiency of concave grating |
| CN101995327A (en) * | 2010-09-10 | 2011-03-30 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure for concave grating diffraction efficiency tester |
| CN102445271A (en) * | 2010-10-15 | 2012-05-09 | 致茂电子(苏州)有限公司 | Light-splitting spectrum type measurement system |
| CN112513689A (en) * | 2018-08-03 | 2021-03-16 | 脸谱科技有限责任公司 | System for monitoring grating formation |
-
2009
- 2009-03-06 CN CNU2009200685338U patent/CN201364396Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101807013A (en) * | 2010-04-01 | 2010-08-18 | 上海理工大学 | System for monitoring minus one-level photoresist of holographic concave grating |
| CN101957257A (en) * | 2010-09-10 | 2011-01-26 | 中国科学院长春光学精密机械与物理研究所 | Measurement method of diffraction efficiency of concave grating |
| CN101995327A (en) * | 2010-09-10 | 2011-03-30 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure for concave grating diffraction efficiency tester |
| CN101995327B (en) * | 2010-09-10 | 2012-04-11 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure for concave grating diffraction efficiency tester |
| CN102445271A (en) * | 2010-10-15 | 2012-05-09 | 致茂电子(苏州)有限公司 | Light-splitting spectrum type measurement system |
| CN112513689A (en) * | 2018-08-03 | 2021-03-16 | 脸谱科技有限责任公司 | System for monitoring grating formation |
| CN112513689B (en) * | 2018-08-03 | 2022-12-06 | 元平台技术有限公司 | System for monitoring grating formation |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091216 Termination date: 20110306 |