CN104965243B - It is a kind of that the flat-plate lens that plane wave is focused on are realized using super structure surface - Google Patents
It is a kind of that the flat-plate lens that plane wave is focused on are realized using super structure surface Download PDFInfo
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Abstract
The flat-plate lens that plane wave is focused on are realized using super structure surface, the flat-plate lens that plane wave perfection is focused on are realized using super structure surface, periodic arrangement is carried out by the radial direction to 8 kinds of V-shape focusing structures in the circle of plane, it is evenly distributed on the annulus of every group of V-shape focusing structure, it is respectively 0, π/4, pi/2,3 π/4, π, 5 π/4,3 pi/2s and 7 π/4, linear interval π/4 in the phase of round radial direction 8 groups of V-shape focusing structures of periodic arrangement from the inside to the outside；The phase distribution focused on according to perfection, calculates the arrangement mode in radial direction V-shaped structure, then by the position r where the corresponding every kind of focusing structure of determination, that is, obtains needing the structure number n=L/a of etching on the annulus；The different micro-structural group of design obtains the flat-plate lens of different focal.Because the present invention only need to etch hole on 50nm silverskin, therefore the thickness of flat-plate lens accomplishes very thin, is expected to be applied in optics integration field.
Description
Technical field
The invention belongs to optical imaging field, it is related to a kind of applied to Novel meta-material flat-plate lens in integrated optics.
Background technology
Traditional optical lens are typically made by optical glass, are completed by corase grind, fine grinding and the big process of polishing three.At present compared with
The lens of common and production technology more maturation are generally spherical mirror, but can not be directly obtained well due to the spherical aberration of its own
Focal imaging effect, often will rear end introduce spherical aberration correction system.Secondly, the thickness of traditional optical lens is far longer than light
Ripple wavelength, with the increase of lens diameter, is exponentially increased for the difficulty for taking traditional optical materials to be processed shaping, it is difficult to
Meet the design requirement of optical parametric, and volume and weight also increases therewith, causes mechanical support structure complexity heavy, these because
Element strongly limit development and the space application of heavy caliber or even super large caliber optical camera.In addition, the spirit of traditional optical lens
Activity is very poor, if necessary to change focal length, can only rely on the change of lens shape so that its portability is very poor.
Although the design of aspherical mirror and process it is ripe day by day, its to surface figure accuracy superelevation requirement so that its process
High cost, detects and debugs and be extremely difficult.
Under the situation of scientific and technical fast development, the functional requirement to lens is also more and more, such as abnormal refraction, super
High-resolution etc., these are that conventional lenses can not be met.
The content of the invention
The purpose of the present invention is to design flat-plate lens using super structure surface, especially realize and wavelength is put down for 1550nm
Face ripple realizes almost ideal focal imaging, solves the difficult processing of conventional lenses in background technology, as the problems such as matter difference.This hair
Bright involved method for designing has higher flexibility, and the phase compensation that can provide various line styles obtains different focusing effects
Really, and lithographic process technologies can be utilized to carry out high-volume duplication and production.
The present invention includes following technical scheme：The flat-plate lens that plane wave perfection is focused on are realized using super structure surface, passed through
Radial direction to 8 kinds of (group) V-shape focusing structures in the circle of plane is carried out on periodic arrangement, the annulus of every group of V-shape focusing structure
It is evenly distributed, the phase (delay) of round radial direction 8 groups of V-shape focusing structures of periodic arrangement from the inside to the outside be respectively 0, π/4,
Pi/2,3 π/4, π, 5 π/4,3 pi/2s and 7 π/4, linear interval π/4；
The phase distribution formula focused on according to plane wave:
Wherein f is focal length, and λ is optical wavelength, and r is the distance apart from planar lens center；The phase focused on according to perfection
Distribution, calculates the arrangement mode in radial direction V-shaped structure, then by the position r where the corresponding every kind of focusing structure of determination,
Calculate corresponding circumference L=2 π r.Because the length of side of each V-shaped structure is a (0.55um), you can obtain in the annulus
The upper structure number n=L/a for needing to etch.
By similar approach, every kind of structure distribution on each annulus is calculated with this.When a branch of Y plane waves polarized hang down
Directly incide on the flat-plate lens, the polarizer of X-direction is added in flat-plate lens rear end, you can the focal position specified in design
Obtain focal beam spot (Fig. 3).
Perfect focus on is realized for 1550nm plane waves.It is evenly distributed on the annulus of every group of V-shape focusing structure；Round
Radially the phase of 8 groups of V-shape focusing structures of periodic arrangement is respectively 0, π/4, pi/2,3 π/4, π, 5 π/4,3 pi/2s from the inside to the outside
With 7 π/4, linear interval π/4；The size (length of side of V-shape two and × hem width) of 8 groups of V-shape focusing structures be respectively 510nm ×
80nm、430nm×80nm、390nm×80nm、320nm×80nm、510nm×80nm、430nm×80nm、390nm×80nm、
320nm×80nm。
When Y planes of polarization ripple incides its surface, X polarised lights are excited, phase transition is realized, realization is modulated to wavefront
Focusing function.And X polarised lights are filtered with X polarizers.
The silverskin of 50nm thickness is sputtered first in silicon dioxide substrates, is then existed using FIB (focused-ion-beam lithography)
The V-shape pores array of design is etched on silverskin.Incide the V words on silverskin by Z axis for the plane wave of Y-direction when a branch of polarization
Type hole hole, due to exciting V-shape hole locally resonant, can produce polarization for X-direction light wave, and its amplitude and phase then by
The shape of V-shaped hole is determined (see Fig. 1).The present invention devises 8 kinds of V-shape holes of different shapes altogether so that phase is by 0
To 360 degree of equidistantly changes, and the amplitude of X polarizations is kept near 0.55.According to design of Simulation result, each V-shape
Region shared by hole is 0.55um*0.55um, and the size (length of side of V-shape two and × hem width) of 8 kinds of V-shape holes is respectively
510nm×80nm、430nm×80nm、390nm×80nm、320nm×80nm、510nm×80nm、430nm×80nm、390nm
× 80nm, 320nm × 80nm are as shown in Figure 2.
Compared with the prior art, the invention has the advantages that：
(1) with the development of photoelectric technology, the requirement more and more higher to optical lens.The present invention is realizing almost ideal gather
While burnt, the volume of lens can be substantially reduced, wait integrated to optics provides great convenience.
(2) present invention etches micro-nano structure to prepare flat-plate lens using FIB on silverskin, and machining accuracy is high and has
Preferable controllability.
(3) present invention controls light wave wavefront using V-shape hole.Make in this way, any wavefront can be constructed
Phase distribution, with very big flexibility.
Brief description of the drawings
Fig. 1 be Y polarized incident lights of the present invention by V-shape structure to exciting the schematic diagrames of X polarised lights.
Fig. 2 is the V-shape hole schematic diagram of 8 kinds of outs of phase of the invention.
Fig. 3 is flat-plate lens focal imaging schematic diagram of the present invention.
Fig. 4 be 8 kinds of outs of phase of flat-plate lens of the present invention V-shape hole distribution minimum unit and be bosom list
First schematic diagram.
Embodiment
The V-shape structural parameters of out of phase are obtained by theoretical modeling first.For flat-plate lens, its space
The higher the better for resolution ratio, it is therefore desirable to by the smaller the better of the region regulation shared by single V-shape structure.By adjusting V-shape
The subtended angle of structure, long width, phase and transformation efficiency to adjust orthogonal polarized light etc..Fig. 4 is 8 kinds of flat-plate lens of the present invention
The minimum unit schematic diagram of the V-shape hole distribution of out of phase.
It is 1550nm for incident plane wave wavelength in the present invention, 8 kinds of V-shaped construction units of design are square (see figure
1), the length of side is 550nm, about 1/3rd of wavelength, therefore with preferable spatial resolution.
By the subtended angle and length that adjust V-shaped structure so that when a branch of Y planes of polarization ripple incides its surface,
The phase of the X polarised lights excited is respectively 0, π/4, pi/2,3 π/4, π, 5 π/4,3 pi/2s and 7 π/4, by suitably adjusting structure, is made
The amplitude that X must be excited to polarize is maintained at 0.55 or so, and size (the V-shape both sides of 8 kinds of V-shaped structures are obtained according to method for designing
Long and × hem width) be respectively 510nm × 80nm, 430nm × 80nm, 390nm × 80nm, 320nm × 80nm, 510nm × 80nm,
430nm×80nm、390nm×80nm、320nm×80nm.Parabolic phase distribution is needed according to preferable perfect focus on
8 kinds of V-shaped structures are arranged, corresponding structure is etched using FIB on 50nm silverskin, that is, obtains flat-plate lens.This
Invention design for circular flat-plate lens, therefore with rotational symmetry.The phase distribution focused on according to perfection, is calculated in footpath
To the arrangement mode of V-shaped structure, then by determining the position r where each structure, corresponding circumference L=2* is calculated
Pi*r.Because the length of side of each V-shaped structure is a (0.55um), you can obtain needing the structure number n=of etching on the annulus
L/a.By similar approach, the structure distribution on each ring is calculated with this, final realize being capable of the perfect flat-plate lens focused on.
The content not being described in detail in description of the invention belongs to the known technology of those skilled in the art.
Claims (2)
1. a kind of realize the flat-plate lens that plane wave is focused on using super structure surface, it is characterised in that realizes plane using super structure surface
The flat-plate lens that ripple perfection is focused on, periodic arrangement, every group of V are carried out by the radial direction to 8 kinds of V-shape focusing structures in the circle of plane
It is evenly distributed on the annulus of font focusing structure, in the phase of round radial direction 8 groups of V-shape focusing structures of periodic arrangement from the inside to the outside
Position is respectively 0, π/4, pi/2,3 π/4, π, 5 π/4,3 pi/2s and 7 π/4, linear interval π/4；
The phase distribution formula focused on according to plane wave:
Wherein f is focal length, and λ is optical wavelength, and r is the distance apart from planar lens center；The phase distribution focused on according to perfection,
The arrangement mode in radial direction V-shaped structure is calculated, then by the position r where the corresponding every kind of focusing structure of determination, is calculated
Go out corresponding circumference L=2 π r；Because the length of side of each V-shaped structure is a=0.55um, that is, obtain needing on the annulus
The structure number n=L/a of etching；
Calculate every kind of structure distribution on each annulus；When a branch of Y polarize plane wave impinge perpendicularly on the flat-plate lens,
The polarizer of X-direction is added in flat-plate lens rear end, i.e., obtains focal beam spot in the focal position that design is specified；
Realize and focus on for 1550nm plane waves, it is evenly distributed on the annulus of every group of V-shape focusing structure；In round radial direction from interior
The phase of the 8 groups of V-shape focusing structures arranged to External Periodic is respectively 0, π/4, pi/2,3 π/4, π, 5 π/4,3 pi/2s and 7 π/4, line
Property interval π/4；Size, the length of side of V-shape two and the × hem width of 8 groups of V-shape focusing structures be respectively 510nm × 80nm, 430nm ×
80nm、390nm×80nm、320nm×80nm、510nm×80nm、430nm×80nm、390nm×80nm、320nm×80nm；
When Y planes of polarization ripple incides its surface, X polarised lights are excited, phase transition is realized, realization is modulated to wavefront poly-
Burnt function；And X polarised lights are filtered with X polarizers.
2. the preparation method according to claim 1 that the flat-plate lens that plane wave is focused on are realized using super structure surface, it is special
It is the silverskin that 40-100nm thickness is sputtered first in silicon dioxide substrates to levy, and is then existed using focused-ion-beam lithography method
The different V-shape pores arrays of described 8 kinds are etched on silverskin and constitute corresponding 8 groups of V-shape focusing structures；8 kinds of V of different shapes
Font hole so that the phase of focusing structure is by the equidistantly change of 0 to 360 degree, and the amplitude for keeping X to polarize is attached 0.55
Closely.
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| CN105487145B (en) * | 2016-01-20 | 2017-12-29 | 浙江大学 | A kind of method for surpassing surface structure ultra thin optical lens based on artificial micro-structure |
| CN106597578B (en) * | 2016-12-27 | 2018-10-26 | 南开大学 | The windmill-shaped superstructure surface of crescent |
| CN107315206B (en) * | 2017-06-23 | 2019-03-22 | 南京大学 | Surpass the efficient infrared optics lens and preparation method thereof of surface texture based on all dielectric |
| CN111722392B (en) * | 2020-07-22 | 2021-06-08 | 南京大学 | Large-view-field integrated microscopic imaging device based on super-structured lens array |
| CN113484939A (en) * | 2021-06-08 | 2021-10-08 | 南京大学 | Wide-view-angle imaging method based on planar lens |
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| CN103094701B (en) * | 2011-10-28 | 2015-12-16 | 深圳光启高等理工研究院 | A kind of flat-plate lens and there is the lens antenna of these lens |
| CN104157945B (en) * | 2014-08-14 | 2016-06-01 | 东南大学 | A kind of refractive index gradient based on Meta Materials flat board focuses on lens |
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