CN102820241B - 氧化物介质层经时绝缘击穿可靠性测试方法 - Google Patents
氧化物介质层经时绝缘击穿可靠性测试方法 Download PDFInfo
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CN104617004A (zh) * | 2013-11-01 | 2015-05-13 | 北大方正集团有限公司 | 一种监测金属间介质层的装置和方法 |
CN104851818B (zh) * | 2014-02-14 | 2017-12-22 | 中芯国际集成电路制造(上海)有限公司 | 介质层缺陷的检测方法和检测装置 |
CN106124961A (zh) * | 2016-09-19 | 2016-11-16 | 武汉新芯集成电路制造有限公司 | 一种测试结构 |
CN108257644B (zh) * | 2016-12-29 | 2023-10-31 | 兆易创新科技集团股份有限公司 | 一种测试电路、闪存和测试系统 |
CN109307831B (zh) * | 2018-09-25 | 2020-03-31 | 长江存储科技有限责任公司 | 集成电路中栅极氧化层的tddb测试方法 |
CN113253088B (zh) * | 2021-06-25 | 2021-09-28 | 上海瞻芯电子科技有限公司 | 晶体管栅氧测试装置及系统 |
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JPH06201761A (ja) * | 1992-12-28 | 1994-07-22 | Kawasaki Steel Corp | 絶縁膜の経時絶縁破壊特性測定方法 |
CN1145477A (zh) * | 1994-12-31 | 1997-03-19 | 现代电子产业株式会社 | 用于检验介电薄膜可靠性的方法 |
US6806720B2 (en) * | 2002-11-29 | 2004-10-19 | Infineon Technologies Aktiengesellschaft | Method of reliability testing |
CN1779477A (zh) * | 2004-11-17 | 2006-05-31 | 上海华虹Nec电子有限公司 | 一种测定栅介质经时击穿寿命的方法 |
KR20100033082A (ko) * | 2008-09-19 | 2010-03-29 | 주식회사 실트론 | 절연 파괴 방법을 이용한 열 산화막의 두께 평가 방법 |
CN101995536A (zh) * | 2009-08-10 | 2011-03-30 | 索尼公司 | 栅极绝缘膜介质击穿寿命评估方法、评估装置及评估程序 |
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Patent Citations (7)
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JPH06201761A (ja) * | 1992-12-28 | 1994-07-22 | Kawasaki Steel Corp | 絶縁膜の経時絶縁破壊特性測定方法 |
CN1145477A (zh) * | 1994-12-31 | 1997-03-19 | 现代电子产业株式会社 | 用于检验介电薄膜可靠性的方法 |
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CN1779477A (zh) * | 2004-11-17 | 2006-05-31 | 上海华虹Nec电子有限公司 | 一种测定栅介质经时击穿寿命的方法 |
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CN101995536A (zh) * | 2009-08-10 | 2011-03-30 | 索尼公司 | 栅极绝缘膜介质击穿寿命评估方法、评估装置及评估程序 |
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Title |
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