CN102818497B - Wave plate displacement-feed measuring device applied to vacuum laser alignment monitoring system - Google Patents
Wave plate displacement-feed measuring device applied to vacuum laser alignment monitoring system Download PDFInfo
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- CN102818497B CN102818497B CN201110134482.6A CN201110134482A CN102818497B CN 102818497 B CN102818497 B CN 102818497B CN 201110134482 A CN201110134482 A CN 201110134482A CN 102818497 B CN102818497 B CN 102818497B
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 35
- 238000006073 displacement reaction Methods 0.000 claims abstract description 48
- 230000008878 coupling Effects 0.000 claims abstract description 16
- 238000010168 coupling process Methods 0.000 claims abstract description 16
- 238000005859 coupling reaction Methods 0.000 claims abstract description 16
- 230000001681 protective effect Effects 0.000 claims abstract description 13
- 238000005259 measurement Methods 0.000 claims description 32
- 238000012546 transfer Methods 0.000 claims description 23
- 238000007789 sealing Methods 0.000 claims description 20
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 14
- 238000003466 welding Methods 0.000 claims description 13
- 238000010276 construction Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012806 monitoring device Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 230000009897 systematic effect Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Abstract
The invention discloses a wave plate displacement-feed measuring device applied to a vacuum laser alignment monitoring system. The wave plate displacement-feed measuring device comprises a horizontal displacement mechanism, a wave plate, a turning device, a vernier, a graduated scale, a graduated roller, a coupling, a measuring point box, a seal flange, a welded flange, a driving shaft, a rocker, a protective cover, a seal structure and the like. The horizontal displacement mechanism is composed of a ball screw pair and a linear guide rail pair. The rocker can be externally connected with the horizontal displacement mechanism inside the measuring point box through the driving shaft. The horizontal displacement mechanism is capable of moving the wave plate horizontally. The wave plate displacement-feed measuring device has the advantages that linear displacement of the wave plate in the measuring point box can be given accurately from outside of the measuring point box, complex operations such as repeatedly opening and closing the measuring point box and repeatedly switching between inner vacuum and atmospheric state of a measuring pipe in the accuracy testing process for the vacuum laser alignment monitoring system can be avoided, the wave plate displacement-feed measuring device is simple to operate and accurate in giving displacement and enables testing of the vacuum laser alignment monitoring system to be more convenient and reliable.
Description
Technical field
The present invention relates to a kind of monitoring device, be specifically related to a kind of zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system.
Background technology
At present, laser collimation in vacuum line monitoring system has been widely used in the automatic Observation of dam or heavy construction composition deformation, and its measurement accuracy is an important technology index of evaluation system performance.The method that the inspection of existing systematic survey accuracy generally adopts is: the measurement accuracy by comparison system, the difference between the measurement displacement of measuring point and the displacement of artificial given measuring point being carried out to checking system.Adopt said method to the process that laser collimation in vacuum line monitoring system measurement accuracy is checked, details are as follows: system record under vacuum conditions zone plate move before position coordinates; Moved by hand measuring point zone plate under atmospheric environment, given zone plate level or perpendicular displacement; System record under vacuum conditions zone plate move after position coordinates; By the position coordinates that zone plate records in mobile front and back system, calculate the displacement of zone plate, the difference between the displacement of the zone plate recorded by comparison system and the displacement of artificial given zone plate, carry out the accuracy that checking system is measured.Adopt and check the shortcoming of laser collimation in vacuum line monitoring system measurement accuracy to be in this way: the operation of a certain displacement of artificial given measuring point zone plate must be carried out under atmospheric environment, and system must be carried out under vacuum conditions to the measurement of measuring point displacement, this just requires that measuring box must be opened and sealing repeatedly, the switching repeatedly of vacuum state and atmospheric condition in measuring channel, make checkout procedure very complicated, waste time and energy; The displacement of measuring point zone plate must be measured with dial gauge or displacement meter, by the space constraint in measuring box, the installation difficulty of dial gauge, even cannot correctly install, effectively can not ensure the accuracy of artificial given displacement, thus effectively can not check the accuracy of systematic survey.
Summary of the invention
For solving the deficiencies in the prior art, the object of the present invention is to provide a kind of zone plate displacement feeding measurement mechanism being conveniently applicable to laser collimation in vacuum line monitoring system.
To achieve these goals, the present invention adopts following technical scheme:
Be applicable to the zone plate displacement feeding measurement mechanism of laser collimation in vacuum line monitoring system, comprise: the measuring box of sealing, arrange above-mentioned measuring box inside for monitor zone plate, for overturning the turning device of above-mentioned zone plate, it is characterized in that, also comprise: be fixed on the pedestal of above-mentioned measuring box inner bottom part, be fixed on horizontal shift mechanism above said base, transfer table, shaft coupling, driving shaft, rocking handle, protective cover; Above-mentioned measuring box tank wall is provided with welding flange, and the inner side being positioned at above-mentioned measuring box of above-mentioned welding flange is fixedly connected with the seal flange of its central through hole of embedding, outside is provided with detachable protective cover; Above-mentioned zone plate and turning device are fixedly connected on the upside of above-mentioned transfer table;
Above-mentioned horizontal shift mechanism comprises: ball wire bar pair, be fixedly connected with said base and the support being arranged on above-mentioned ball wire bar pair two ends, the line slide rail that above-mentioned transfer table and pedestal formed be slidably connected are secondary, above-mentioned transfer table is fixedly connected with the feed screw nut of above-mentioned ball wire bar pair, and the ball-screw of above-mentioned ball screw assembly, is connected with above-mentioned holder pivots; The moving direction of the feed screw nut of above-mentioned ball screw assembly, and the glide direction of above-mentioned line slide rail pair are parallel to each other;
Above-mentioned shaft coupling is arranged on the inside of above-mentioned measuring box, and its one end is connected with the ball screw of above-mentioned ball wire bar pair, and the other end is connected with above-mentioned driving shaft; Above-mentioned driving shaft is connected with rocking handle with above-mentioned shaft coupling respectively through the central through hole of above-mentioned seal flange, two ends, and above-mentioned rocking handle is arranged on the outside of above-mentioned welding flange, the inside of protective cover; Be provided with in the central through hole of above-mentioned seal flange: be sleeved on the hermetically-sealed construction above-mentioned driving shaft being formed sealing;
Be provided with the rule that position is fixing above said base, above-mentioned transfer table is fixedly connected with the vernier pointing to above-mentioned rule; The ball screw of above-mentioned ball wire bar pair is provided with scale roller away from one end of above-mentioned shaft coupling;
Above-mentioned measuring box be provided with for observe above-mentioned vernier, rule, scale roller by the view window there is bubble-tight material making, the tank wall of above-mentioned view window and measuring box is tightly connected.
The aforesaid zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system, is characterized in that, the number of above-mentioned line slide rail pair is two, and above-mentioned line slide rail pair is parallel to each other.
The aforesaid zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system, it is characterized in that, above-mentioned ball screw assembly, is arranged between above-mentioned line slide rail pair.
The aforesaid zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system, it is characterized in that, above-mentioned hermetically-sealed construction comprises: seal assembly and sealing nut, above-mentioned seal assembly is arranged on the inside of above-mentioned sealing flange center through hole, and above-mentioned sealing nut is arranged on the side being positioned at above-mentioned rocking handle in above-mentioned sealing flange center through hole.
The aforesaid zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system, is characterized in that, be provided with O-ring seal between above-mentioned welding flange and seal flange.
The aforesaid zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system, is characterized in that, above-mentioned seal assembly comprises many group O-ring seals and gasket seal.
The aforesaid zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system, it is characterized in that, above-mentioned view window is positioned at the top of measuring box.
Usefulness of the present invention is: can from zone plate straight-line displacement accurately in the outside given measuring box of measuring box, avoid measuring box in the checkout procedure of laser collimation in vacuum line monitoring system measurement accuracy repeatedly to open and numerous and diverse operations such as the switching repeatedly of vacuum in airtight, measuring channel and atmospheric condition, it is easy and simple to handle, time saving and energy saving, given displacement is accurate, and the present invention makes the inspection of laser collimation in vacuum line monitoring system measurement accuracy more convenient and reliable.
Accompanying drawing explanation
Fig. 1 is the structural representation being applicable to a preferred embodiment of the zone plate displacement feeding measurement mechanism of laser collimation in vacuum line monitoring system of the present invention;
Fig. 2 is the preferred embodiment plan structure schematic diagram being applicable to the horizontal shift mechanism of the zone plate displacement feeding measurement mechanism of laser collimation in vacuum line monitoring system of the present invention;
Fig. 3 is the plan structure schematic diagram after the horizontal shift mechanism shown in Fig. 2 is fixed with transfer table;
Fig. 4 is that the preferred embodiment side, sectional structure being applicable to the horizontal shift mechanism of the zone plate displacement feeding measurement mechanism of laser collimation in vacuum line monitoring system of the present invention is shown.
The implication of Reference numeral in figure:
1, scale roller, 2, rule, 4, vernier, 5, pedestal; 6, ball screw assembly, 6-1, ball screw, 6-2, feed screw nut, 7, support; 8, driving shaft, 9, seal assembly, 10, sealing nut, 11, protective cover; 12, rocking handle, 13, seal flange, 14, welding flange, 15, shaft coupling; 16, line slideway auxiliary, 17, transfer table, 21, turning device; 22, zone plate, 31, measuring box, 32, view window.
Embodiment
Below in conjunction with the drawings and specific embodiments, concrete introduction is done to the present invention.
Fig. 1 is the structural representation being applicable to a preferred embodiment of the zone plate displacement feeding measurement mechanism of laser collimation in vacuum line monitoring system of the present invention; Fig. 2 is the preferred embodiment plan structure schematic diagram being applicable to the horizontal shift mechanism of the zone plate displacement feeding measurement mechanism of laser collimation in vacuum line monitoring system of the present invention; Fig. 3 is the plan structure schematic diagram after the horizontal shift mechanism shown in Fig. 2 is fixed with transfer table; Fig. 4 is that the preferred embodiment side, sectional structure being applicable to the horizontal shift mechanism of the zone plate displacement feeding measurement mechanism of laser collimation in vacuum line monitoring system of the present invention is shown.
Shown in a preferred embodiment of the invention in Fig. 1, the zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system of the present invention comprises: measuring box 31, zone plate 22, turning device 21, pedestal 5, horizontal shift mechanism, transfer table 17, shaft coupling 15, driving shaft 8, rocking handle 12, protective cover 11.
As shown in Figures 1 to 4, wherein, measuring box 31 is for holding zone plate 22 in monitoring device, turning device 21, pedestal 5, horizontal shift mechanism, transfer table 17, shaft coupling 15, and the monitoring in order to zone plate 22 provides the environment of a vacuum.In order to realize rectilinear movement and the upset of zone plate 22, pedestal 5 is fixed on the tank wall of measuring box 31, the horizontal shift mechanism realizing rectilinear movement is fixedly connected on above pedestal 5, transfer table 17 consists of horizontal shift mechanism and pedestal 5 and is slidably connected, and is all fixed on the top of transfer table 17 for the zone plate 22 of monitoring and the turning device for overturning zone plate 22.
As shown in Fig. 2, Fig. 3, Fig. 4, horizontal shift mechanism comprises: ball wire bar pair 6, line slide rail secondary 16 and support 7, its medium-height trestle 7 is arranged on the two ends of ball wire bar pair 6 and is fixedly connected with pedestal 5, for ball screw assembly, 6 provides support, line slide rail pair 16 makes to form between transfer table 17 and pedestal 5 to be slidably connected.Ball screw assembly, 6 comprises ball screw 6-1 and feed screw nut 6-2, wherein the two ends of ball screw 6-1 and support 7 are rotationally connected, specifically, be provided with accordingly with the through hole of rolling bearing in support 7, ball screw 6-1 is socketed in rolling bearing, thus can rotate, and the feed screw nut 6-2 being socketed in ball screw 6-1 is fixedly connected with movable plate 17, thus when ball screw 6-1 rotating band movable wire stem nut 6-2 moves horizontally, transfer table 17 is also along with feed screw nut 6-2 moves horizontally along line slide rail pair 16, so the moving direction of the feed screw nut 6-2 of ball screw assembly, 6 and the glide direction of line slide rail pair 16 are parallel to each other.So, be fixed on zone plate 22 on transfer table 17 and turning device 21 also thereupon together with move.
In order at the horizontal displacement of the external control wave band plate 22 of the vacuum environment of measuring box 31, the tank wall of measuring box 31 be provided with the welding flange 14 with central through hole, preferably, welding flange 14 is welded on the tank wall of measuring box 31.The inner side being positioned at measuring box 31 of welding flange 14 is fixedly connected with the seal flange 13, the outside that embed its central through hole and is provided with detachable protective cover 11; driving shaft 8 is through the central through hole of seal flange 13; one end is connected with rocking handle 12 in protective cover 11; one end is connected with the shaft coupling 15 be arranged in measuring box 31, and shaft coupling 15 is for connecting driving shaft 8 and ball screw 6-1.So, when shaking rocking handle 12, driving shaft 8 drives ball screw 6-1 by shaft coupling 15, thus makes the displacement of zone plate 22 occurred level.
Conveniently using, when operating rocking handle 12, needing protective cover 11 to disassemble, again protective cover 11 is installed after end of operation and go back.
Because the inside of measuring box 31 will ensure vacuum, so be provided with the hermetically-sealed construction being sleeved on and driving shaft 8 being formed sealing at the central through hole of seal flange 13.As a kind of preferred version, sealing structure comprises: seal assembly 9 and sealing nut 10, and seal assembly 9 is arranged on the inside of seal flange 13 central through hole, and sealing nut 10 is arranged on the side being positioned at rocking handle 12 in seal flange 13 central through hole.So, just can ensure that measuring box 31 inside can not be communicated with the external world with gap between driving shaft 8 by the hole wall of seal flange 13 central through hole, destroy vacuum environment.In addition, in order to better reach the object of sealing, being provided with O-ring seal between welding flange 14 and seal flange 13, can be specifically O-ring seals, and seal assembly 9 comprises many group O-ring seals and gasket seal.So can fully ensure, measuring box 31 completely cuts off with extraneous sealing.
As shown in Figure 2, Figure 3 and Figure 4, in order to measure the concrete displacement of zone plate 22, be provided with the rule 2 that position is fixing above pedestal 5, transfer table 17 is fixedly connected with the vernier 4 pointing to rule 2; The ball screw 6-1 of ball wire bar pair 6 is provided with scale roller 1 away from one end of above-mentioned shaft coupling.As a kind of preferred version, as shown in Figure 4, rule 2 can be fixedly connected with line slide rail pair 6; Can certainly be fixedly connected with pedestal 5.When transfer table 17 moves horizontally, vernier 4 will point to scale certain on rule 2, thus read concrete displacement, same scale roller 1 also can reading cycles changes along with the rotation of ball screw 6-1, wherein vernier 4 and rule 2 are for reading larger reading, when vernier 4 rests between rule 2 least unit scale two readings, just less reading can be read by scale roller 1.
As shown in Figure 4, steady in order to ensure that transfer table 17 moves horizontally, as preferably, horizontal shift mechanism is provided with two line slide rail pairs 6 be parallel to each other, and ball wire bar pair 6 is arranged between which.
In order to observe concrete displacement readings, measuring box 31 is provided with view window 32, and in addition, view window 32 is made by having bubble-tight material, and view window 32 is tightly connected with the tank wall of measuring box, to ensure the impermeability of whole measuring box 31 inside.As a kind of preferred version, view window 32 is glass window, and is arranged on the top of measuring box 31.
Above-described embodiment does not limit the present invention in any form, the technical scheme that the mode that all employings are equal to replacement or equivalent transformation obtains, and all drops in protection scope of the present invention.
Claims (7)
1. be applicable to the zone plate displacement feeding measurement mechanism of laser collimation in vacuum line monitoring system, comprise: the measuring box of sealing, it is characterized in that, also comprise: arrange above-mentioned measuring box inside for monitor zone plate, for overturning the turning device of above-mentioned zone plate, being fixed on the pedestal of above-mentioned measuring box inner bottom part, being fixed on horizontal shift mechanism above said base, transfer table, shaft coupling, driving shaft, rocking handle, protective cover; Above-mentioned measuring box tank wall is provided with welding flange, and the inner side being positioned at above-mentioned measuring box of above-mentioned welding flange is fixedly connected with the seal flange of its central through hole of embedding, outside is provided with detachable protective cover; Above-mentioned zone plate and turning device are fixedly connected on the upside of above-mentioned transfer table;
Above-mentioned horizontal shift mechanism comprises: ball wire bar pair, be fixedly connected with said base and the support being arranged on above-mentioned ball wire bar pair two ends, the line slide rail that above-mentioned transfer table and pedestal formed be slidably connected are secondary, above-mentioned transfer table is fixedly connected with the feed screw nut of above-mentioned ball wire bar pair, and the ball-screw of above-mentioned ball screw assembly, is connected with above-mentioned holder pivots; The moving direction of the feed screw nut of above-mentioned ball screw assembly, and the glide direction of above-mentioned line slide rail pair are parallel to each other;
Above-mentioned shaft coupling is arranged on the inside of above-mentioned measuring box, and its one end is connected with the ball screw of above-mentioned ball wire bar pair, and the other end is connected with above-mentioned driving shaft; Above-mentioned driving shaft is connected with rocking handle with above-mentioned shaft coupling respectively through the central through hole of above-mentioned seal flange, two ends, and above-mentioned rocking handle is arranged on the outside of above-mentioned welding flange, the inside of protective cover; Be provided with in the central through hole of above-mentioned seal flange: be sleeved on the hermetically-sealed construction above-mentioned driving shaft being formed sealing;
Be provided with the rule that position is fixing above said base, above-mentioned transfer table is fixedly connected with the vernier pointing to above-mentioned rule; The ball screw of above-mentioned ball wire bar pair is provided with scale roller away from one end of above-mentioned shaft coupling;
Above-mentioned measuring box is provided with the view window for observing above-mentioned vernier, rule, scale roller.
2. the zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system according to claim 1, is characterized in that, the number of above-mentioned line slide rail pair is two, and above-mentioned line slide rail pair is parallel to each other.
3. the zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system according to claim 2, it is characterized in that, above-mentioned ball screw assembly, is arranged between above-mentioned line slide rail pair.
4. according to the zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system in claims 1 to 3 described in any one claim, it is characterized in that, above-mentioned hermetically-sealed construction comprises: seal assembly and sealing nut, above-mentioned seal assembly is arranged on the inside of above-mentioned sealing flange center through hole, and above-mentioned sealing nut is arranged on the side being positioned at above-mentioned rocking handle in above-mentioned sealing flange center through hole.
5. the zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system according to claim 4, is characterized in that, be provided with O-ring seal between above-mentioned welding flange and seal flange.
6. the zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system according to claim 5, is characterized in that, above-mentioned seal assembly comprises many group O-ring seals and gasket seal.
7. the zone plate displacement feeding measurement mechanism being applicable to laser collimation in vacuum line monitoring system according to claim 4, it is characterized in that, above-mentioned view window is positioned at the top of measuring box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110134482.6A CN102818497B (en) | 2011-05-24 | 2011-05-24 | Wave plate displacement-feed measuring device applied to vacuum laser alignment monitoring system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110134482.6A CN102818497B (en) | 2011-05-24 | 2011-05-24 | Wave plate displacement-feed measuring device applied to vacuum laser alignment monitoring system |
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| CN102818497A CN102818497A (en) | 2012-12-12 |
| CN102818497B true CN102818497B (en) | 2015-04-22 |
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| CN201110134482.6A Active CN102818497B (en) | 2011-05-24 | 2011-05-24 | Wave plate displacement-feed measuring device applied to vacuum laser alignment monitoring system |
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| CN104111031B (en) * | 2014-07-22 | 2016-07-06 | 中国电建集团北京勘测设计研究院有限公司 | Protection of goal device and monitoring system and method are sighted in areal deformation optical measurement |
| CN107860325B (en) * | 2017-09-18 | 2023-04-07 | 国家电网公司 | Dam deformation behavior analysis method based on vacuum laser collimation observation system |
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| CN201184465Y (en) * | 2007-12-04 | 2009-01-21 | 北京卫星环境工程研究所 | Insulated vacuum seal flange for high pressure transmission and matching electrode thereof |
| CN201266175Y (en) * | 2008-08-22 | 2009-07-01 | 重庆大学 | Three-dimensional displacement micro observation device |
| CN201417137Y (en) * | 2009-03-20 | 2010-03-03 | 吕良飞 | Electromechanical type pressure dimension measuring device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4810251B2 (en) * | 2006-02-16 | 2011-11-09 | キヤノン株式会社 | Atomic force microscope |
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- 2011-05-24 CN CN201110134482.6A patent/CN102818497B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201184465Y (en) * | 2007-12-04 | 2009-01-21 | 北京卫星环境工程研究所 | Insulated vacuum seal flange for high pressure transmission and matching electrode thereof |
| CN201266175Y (en) * | 2008-08-22 | 2009-07-01 | 重庆大学 | Three-dimensional displacement micro observation device |
| CN201417137Y (en) * | 2009-03-20 | 2010-03-03 | 吕良飞 | Electromechanical type pressure dimension measuring device |
Non-Patent Citations (1)
| Title |
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| 中国博士学位论文全文数据库工程科技Ⅱ辑;王晓旭;《全自动真空激光大坝变形测量系统的研制》;20060415(第4期);正文39页、47－49页，图3.1、图3.12 * |
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Effective date of registration: 20171117 Address after: Nan Shui Road Gulou District of Nanjing city of Jiangsu Province, No. 8 210003 Co-patentee after: NARI Technology Development Co., Ltd. Patentee after: State Grid Electric Power Research Insititute Co-patentee after: State Grid Corporation of China Address before: Nan Shui Road Gulou District of Nanjing city of Jiangsu Province, No. 8 210003 Co-patentee before: Nanjing Nari Co., Ltd. Patentee before: State Grid Electric Power Research Insititute Co-patentee before: State Grid Corporation of China |
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