CN102800563B - Wafer feeding method and wafer feeding device - Google Patents
Wafer feeding method and wafer feeding device Download PDFInfo
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- CN102800563B CN102800563B CN201110139479.3A CN201110139479A CN102800563B CN 102800563 B CN102800563 B CN 102800563B CN 201110139479 A CN201110139479 A CN 201110139479A CN 102800563 B CN102800563 B CN 102800563B
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Abstract
The invention provides a wafer feeding method, which comprises the following steps of: acquiring information of the current available reaction chamber; grouping all the available reaction chambers subjected to the same processing step to obtain at least one reaction chamber group corresponding to the processing step; obtaining all possible process lots according to the processing steps in a process and at least one reaction chamber group corresponding to each processing step; calculating the reaction chamber utilization rate corresponding to each process lot; and feeding a wafer to be treated according to the process lot with the high reaction chamber utilization rate. The invention also provides a wafer feeding device. By the wafer feeding method and the wafer feeding device, the reaction camber utilization rate can be increased.
Description
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to a kind of wafer and throw sheet method and wafer throwing sheet devices.
Background technology
In semiconductor industry, a silicon wafer will be processed into semiconductor device, the above handling procedure in hundreds of roads at least must be passed through in centre, in these handling procedures, need to use the board of various different purposes, for example etching or deposition machine, and in each board, conventionally have several reative cells (Chamber).
In field of semiconductor manufacture, the process that a collection of same wafer completes certain technique is called a processing procedure scheme (Lot).At present in the industry, production management personnel rule of thumb estimate the production cycle of product, determine that artificially wafer drops into (being called for short " throwing sheet ") time and throws sheet quantity.But the operating state of each board on production line changes at any time, the actual operating state of production line changes at any time.And, if the semiconductor type of required processing is more various, the production technology difference of the device of each type, processing sequence is not identical yet, the cycle difference of processing, delivery date difference, thereby only artificially with estimation operation, be difficult to make the decision-making of rational throwing sheet with the delivery just-in-time of guaranteeing both quality and quantity.
In order to address the above problem, also there is at present correlation technique to be suggested, the one of for example, mentioning in the United States Patent (USP) of the patent No.: US6470231B1 is thrown sheet method, comprising:
List each nature parameters of each pending wafer, each nature parameters of described pending wafer is all different;
Obtain the matching relationship of pending wafer and each reative cell;
Press matching relationship, pending wafer is dropped in the reative cell of coupling.
In the matching relationship step of obtaining pending wafer and each reative cell, consider to estimate process time, the factors such as time of delivery, but, in practical semiconductor manufacturing process, pending wafer is dropped in the reative cell of coupling by described matching relationship, caused partial reaction chamber idle, the mode of this throwing sheet makes the utilance of reative cell not high.
In view of this, be necessary to propose in fact a kind of new wafer and throw sheet mode, improve reative cell utilance.
Summary of the invention
The problem that the present invention solves is to propose a kind of new wafer to throw sheet method and wafer throwing sheet devices, improves reative cell utilance.
For addressing the above problem, the invention provides a kind of wafer and throw sheet method, comprising:
Obtain the current information that uses reative cell;
All used reative cells that complete same process step are divided into groups, to obtain at least one reative cell group that should processing step;
At least one reative cell group that the processing step comprising according to processing procedure and each processing step are corresponding, obtains all possible processing procedure scheme;
Calculate reative cell utilance corresponding to each processing procedure scheme, the reative cell number that described reative cell utilance has been processing procedure scheme and the ratio of all numbers that use reative cell;
Pending wafer is thrown to sheet by the high processing procedure scheme of reative cell utilance.
Alternatively, after reative cell utilance step corresponding to the each processing procedure scheme of described calculating, described pending wafer is thrown before sheet step by the high processing procedure scheme of reative cell utilance, described throwing sheet method also comprises: arrange from high to low processing procedure scheme by reative cell utilance.
Alternatively, all used reative cells that complete same process step are divided into groups, to obtain after should at least one reative cell group step of processing step, at least one reative cell group that the processing step comprising according to processing procedure and each processing step are corresponding, obtain before all possible processing procedure scheme step, described throwing sheet method also comprises: reject the reative cell group that the pre-estimation deadline is greater than the time of delivery.
Alternatively, in the processing step comprising according to processing procedure and at least one reative cell group corresponding to each processing step, obtain after all possible processing procedure scheme step, calculate before reative cell utilance step corresponding to each processing procedure scheme, described throwing sheet method also comprises: reject the described possible processing procedure scheme that the pre-estimation deadline is greater than the time of delivery.
Alternatively, at least two of described processing steps.
Alternatively, in the processing step comprising according to processing procedure and at least one reative cell group corresponding to each processing step, obtain after all possible processing procedure scheme step, calculate before reative cell utilance step corresponding to each processing procedure scheme, described throwing sheet method also comprises: the production capacity of reative cell group corresponding to processing step of carrying out after rejecting is greater than the described possible processing procedure scheme of the production capacity of the reative cell group that the processing step first carried out is corresponding.
The present invention also provides a kind of wafer to throw sheet devices, comprising:
Acquisition of information module, for obtaining the current information that uses reative cell;
Grouping module, for all used reative cells that complete same process step are divided into groups, to obtain at least one reative cell group that should processing step;
Processing procedure scheme acquisition module, for processing step and at least one reative cell group corresponding to each processing step of comprising according to processing procedure, obtains all possible processing procedure scheme;
Reative cell utilance computing module, for calculating reative cell utilance corresponding to each processing procedure scheme, the reative cell number that described reative cell utilance has been processing procedure scheme and the ratio of all numbers that use reative cell;
Throw sheet control device, for pending wafer is thrown to sheet by the high processing procedure scheme of reative cell utilance.
Alternatively, described wafer throwing sheet devices also comprises:
The first comparator, for relatively whether the pre-estimation deadline of each possible processing procedure scheme is greater than the time of delivery;
Reject module, rejecting described the first comparator, to obtain result be possible processing procedure scheme corresponding while being.
Alternatively, at least two of described processing steps, described wafer is thrown sheet devices and is also comprised:
Whether the second comparator, be greater than for the production capacity of reative cell group corresponding to the rear execution processing step of each processing procedure scheme of comparison the production capacity of first carrying out the reative cell group that processing step is corresponding;
Reject module, rejecting described the second comparator, to obtain result be possible processing procedure scheme corresponding while being.
Alternatively, described wafer is thrown sheet devices and is also comprised order module, for arranging from high to low processing procedure scheme by reative cell utilance.
Alternatively, described wafer is thrown sheet devices and is also comprised display module, for showing the utilance of all possible processing procedure scheme and described reative cell.
Alternatively, described acquisition of information module comprises power measurement module, uses state, to obtain the current information that uses reative cell for detection of the power of all reative cells.
Compared with prior art, the present invention has the following advantages: utilize all used reative cells that complete same process step are divided into groups, to obtain at least one reative cell group that should processing step; At least one reative cell group that the processing step comprising according to processing procedure and each processing step are corresponding, obtains all possible processing procedure scheme; Calculate reative cell utilance corresponding to each processing procedure scheme; Pending wafer is thrown to sheet by the high processing procedure scheme of reative cell utilance; Improve the utilance of reative cell, and then improve the treatment effeciency of wafer.
Brief description of the drawings
Fig. 1 is that the wafer of the embodiment of the present invention one is thrown sheet method flow diagram;
Fig. 2 is that the wafer of the embodiment of the present invention one is thrown wafer throwing sheet devices schematic diagram corresponding to sheet method;
Fig. 3 is that the wafer of the embodiment of the present invention two is thrown sheet method flow diagram;
Fig. 4 is that the wafer of the embodiment of the present invention two is thrown wafer throwing sheet devices schematic diagram corresponding to sheet method.
Embodiment
All used reative cells that complete same process step are divided into groups in utilization of the present invention, to obtain at least one reative cell group that should processing step; At least one reative cell group that the processing step comprising according to processing procedure and each processing step are corresponding, obtains all possible processing procedure scheme; Calculate reative cell utilance corresponding to each processing procedure scheme; Pending wafer is thrown to sheet by the high processing procedure scheme of reative cell utilance; Improve the utilance of reative cell, and then improve the treatment effeciency of wafer.
For above-mentioned purpose of the present invention, feature and advantage can more be become apparent, below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail, owing to focusing on illustrating principle of the present invention, so needn't draw to scale.
Embodiment mono-
The present embodiment one is taking A, B, C and tetra-reative cells of F as example, and described four reative cells can complete identical technique, and described technique is for example depositing operation; The wafer that below telling about the embodiment of the present invention one provides is thrown sheet method, as shown in Figure 1.
Execution step S11, obtains the current information that uses reative cell.
Suppose that F reative cell is just occupied, the current reative cell that uses is for A, B and C.
Execution step S12, divides into groups all used reative cells that complete same process step, to obtain at least one reative cell group that should processing step.
One of the present embodiment carries out a processing step, so tri-reative cells of A, B and C can be classified as A, B, C, AB, AC, BC, seven reative cell groups of ABC.
Execution step S13, at least one reative cell group that the processing step comprising according to processing procedure and each processing step are corresponding, obtains all possible processing procedure scheme.
In order to describe object of the present invention, the present embodiment one supposes that A, B and C reative cell once all process a wafer only, show that all possible processing procedure scheme is as shown in table 1, wherein, the Y that A reative cell corresponding to Lot11 processing procedure scheme marks represents that processing procedure scheme Lot11 utilizes reative cell A to process a collection of wafer, single treatment a slice; Y corresponding to AB reative cell in Lot14 processing procedure scheme represents that processing procedure scheme Lot14 utilizes reative cell A and reative cell B to process this batch of wafer simultaneously, two of single treatments.
Table 1
Execution step S14, rejects the described possible processing procedure scheme that the pre-estimation deadline is greater than the time of delivery.
The described pre-evaluation time that completes processing procedure scheme generally obtains by completing the identical required time of processing technology step in statistics, analysis of history record.
In order to describe object of the present invention, the present embodiment one hypothesis utilizes A, B and tri-reative cells of C to process separately, or two or three process simultaneously, and the deadline of estimating is all before delivery date.
Embodiment mono-is generating after various possible processing procedure schemes, by rejecting the processing procedure scheme that the time of delivery does not meet the demands, obtains the processing procedure scheme of realistic production requirement.But this is also nonessential, for example, can be after the grouping step described in step S12, reject the step that the pre-estimation deadline is greater than the reative cell group of time of delivery, the processing procedure scheme generating in subsequent step S13 so has just been got rid of the scheme that does not much meet the time of delivery naturally.
Execution step S15, calculates reative cell utilance corresponding to each processing procedure scheme.
The reative cell number that described reative cell utilance has been processing procedure scheme and the ratio of all numbers that use reative cell.
In the present embodiment, calculate reative cell utilance corresponding to processing procedure scheme as shown in table 2:
Table 2
Execution step S16, arranges processing procedure scheme from high to low by reative cell utilance, obtains table 3.
Table 3
Execution step S17, throws sheet by pending wafer by the high processing procedure scheme of reative cell utilance.In the present embodiment, throw sheet by processing procedure scheme Lot17.
It should be noted that, in this application, although inventor has artificially defined " the reative cell utilance of processing procedure scheme be the reative cell number that uses of processing procedure scheme and the ratio of all numbers that use reative cell ", and finally according to the selected scheme of throwing sheet of the size of reative cell utilance, but the final result obtaining remains and meets the natural law.This be because, the reative cell number using is more, the wafer process speed of processing procedure scheme is faster, this is the objective law that inventor finds, also stands production practices inspections; Based on this objective law, inventor has proposed above-mentioned throwing sheet method just.
Throwing sheet devices 2 corresponding to throwing sheet method that the present embodiment one provides, as shown in Figure 2, comprising:
Acquisition of information module 21, for obtaining the current information that uses reative cell;
Grouping module 22, for all used reative cells that complete same process step are divided into groups, to obtain at least one reative cell group that should processing step;
Processing procedure scheme acquisition module 23, for processing step and at least one reative cell group corresponding to each processing step of comprising according to processing procedure, obtains all possible processing procedure scheme;
Reative cell utilance computing module 24, for calculating reative cell utilance corresponding to each processing procedure scheme, the reative cell number that described reative cell utilance has been processing procedure scheme and the ratio of all numbers that use reative cell;
Throw sheet control device 25, for pending wafer is thrown to sheet by the high processing procedure scheme of reative cell utilance.
The first comparator 26, for relatively whether the pre-estimation deadline of each possible processing procedure scheme is greater than the time of delivery;
Reject module 27, rejecting described the first comparator, to obtain result be possible processing procedure scheme corresponding while being;
Order module 28, for arranging from high to low processing procedure scheme by reative cell utilance;
Display module 29, for showing the utilance of all possible processing procedure scheme and described reative cell.
In specific implementation process, described acquisition of information module 21 comprises power measurement module 211, uses state, to obtain the current information that uses reative cell for detection of the power of all reative cells.
Embodiment bis-
A, B, C and tetra-reative cells of F that the present embodiment two uses except embodiment mono-, also comprise D, two reative cells of E, described A, B, tetra-reative cells of C and F can complete identical processing step, it is for example depositing operation, two reative cells of described D and E can complete identical processing step, for example, be etching technics.A, B, C, D, E and reative cell are all single treatment a slice; In the present embodiment, described a collection of wafer need first carry out etching technics, after carry out depositing operation.The wafer that below telling about the embodiment of the present invention two provides is thrown sheet method, as shown in Figure 3.
Execution step S21, obtains the current information that uses reative cell.
Suppose that F reative cell is just occupied, the current reative cell that uses is for A, B, C, D and E.
Execution step S22, divides into groups all used reative cells that complete same process step, to obtain at least one reative cell group that should processing step.
In the present embodiment, tri-reative cells of A, B and C can complete identical processing step, so tri-reative cells of A, B and C can be classified as A, B, C, AB, AC, BC, seven reative cell groups of ABC, two reative cells of D and E are classified as D, E, tri-reative cell groups of DE.
Execution step S23, at least one reative cell group that the processing step comprising according to processing procedure and each processing step are corresponding, obtains all possible processing procedure scheme.
Show that all possible processing procedure scheme is as shown in table 4.Wherein, the Y of the A reative cell that Lot18 processing procedure scheme is corresponding and D reative cell mark represents that processing procedure scheme Lot18 utilizes reative cell D to process a collection of wafer, single treatment a slice, and a slice of handling is put into the processing of A reative cell again; The A reative cell Y corresponding with DE reative cell in Lot32 processing procedure scheme represents that processing procedure scheme Lot32 utilizes reative cell D and reative cell E to process this batch of wafer simultaneously, two of single treatments, and two of handling put into the processing of A reative cell at twice again; The AB reative cell Y corresponding with DE reative cell in Lot35 processing procedure scheme represents that processing procedure scheme Lot35 utilizes reative cell D and reative cell E to process this batch of wafer simultaneously, two of single treatments, handle two put into respectively A reative cell again and B reative cell is processed simultaneously, two of single treatments.
Table 4
Execution step S24, rejects the described possible processing procedure scheme that the pre-estimation deadline is greater than the time of delivery.
The described pre-evaluation time that completes processing procedure scheme is generally by artificially obtaining by processing empirical estimating.
Same hypothesis utilizes A, B and tri-reative cells of C to process separately, or two or three process simultaneously, utilize two reative cells of D and E to process separately, or two deadlines that processing is estimated is simultaneously all before delivery date.
Execution step S25, the production capacity of reative cell group corresponding to processing step of carrying out after rejecting is greater than the described possible processing procedure scheme of the production capacity of the reative cell group that the processing step first carried out is corresponding.
For example Lot21, the etching technics step of first carrying out adopts D reative cell to process a slice, and the depositing operation of rear execution adopts two of AB reative cell group single treatments, and such processing procedure is obviously unreasonable, so reject such task in this step.
The production capacity of reative cell group corresponding to processing step of carrying out after rejecting obtains table 5 after being greater than the described possible processing procedure scheme of production capacity of the reative cell group that the processing step first carried out is corresponding.
Table 5
Execution step S26, calculates reative cell utilance corresponding to each processing procedure scheme.
The reative cell number that described reative cell utilance has been processing procedure scheme and the ratio of all numbers that use reative cell.
In the present embodiment, calculate reative cell utilance corresponding to processing procedure scheme as shown in table 6.
Table 6
Execution step S27, arranges processing procedure scheme from high to low by reative cell utilance, obtains table 7.
Table 7
Execution step S28, throws sheet by pending wafer by the high processing procedure scheme of reative cell utilance.In the present embodiment, throw sheet by processing procedure scheme Lot35-37.
It should be noted that, the height of reative cell utilance has objectively responded the efficiency of processing a collection of wafer.
The wafer that the present embodiment two provides is thrown throwing sheet devices corresponding to sheet method on the basis of the throwing sheet devices of embodiment mono-, also comprises:
Whether the second comparator 30, be greater than for the production capacity of reative cell group corresponding to the rear execution processing step of each processing procedure scheme of comparison the production capacity of first carrying out the reative cell group that processing step is corresponding.Described rejecting module 27, also for rejecting described the second comparator 30, to obtain result be possible processing procedure scheme corresponding while being.
Although the present invention with preferred embodiment openly as above; but it is not for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can utilize method and the technology contents of above-mentioned announcement to make possible variation and amendment to technical solution of the present invention; therefore; every content that does not depart from technical solution of the present invention; any simple modification, equivalent variations and the modification above embodiment done according to technical spirit of the present invention, all belong to the protection range of technical solution of the present invention.
Claims (12)
1. wafer is thrown a sheet method, comprising:
Obtain the current information that uses reative cell, the described information that uses reative cell comprises the type of processing step and the use state of reative cell that reative cell can carry out;
All used reative cells that complete same process step are divided into groups, to obtain at least one reative cell group that should processing step;
At least one reative cell group that the processing step comprising according to processing procedure and each processing step are corresponding, obtains all possible processing procedure scheme;
Calculate reative cell utilance corresponding to each processing procedure scheme, the reative cell number that described reative cell utilance has been processing procedure scheme and the ratio of all numbers that use reative cell;
Pending wafer is thrown to sheet by the high processing procedure scheme of reative cell utilance.
2. wafer according to claim 1 is thrown sheet method, it is characterized in that, after reative cell utilance step corresponding to the each processing procedure scheme of described calculating, described pending wafer is thrown before sheet step by the high processing procedure scheme of reative cell utilance, described throwing sheet method also comprises: arrange from high to low processing procedure scheme by reative cell utilance.
3. wafer according to claim 1 and 2 is thrown sheet method, it is characterized in that, all used reative cells that complete same process step are divided into groups, to obtain after should at least one reative cell group step of processing step, at least one reative cell group that the processing step comprising according to processing procedure and each processing step are corresponding, obtain before all possible processing procedure scheme step, described throwing sheet method also comprises: reject the reative cell group that the pre-estimation deadline is greater than the time of delivery.
4. wafer according to claim 1 and 2 is thrown sheet method, it is characterized in that, in the processing step comprising according to processing procedure and at least one reative cell group corresponding to each processing step, obtain after all possible processing procedure scheme step, calculate before reative cell utilance step corresponding to each processing procedure scheme, described throwing sheet method also comprises: reject the described possible processing procedure scheme that the pre-estimation deadline is greater than the time of delivery.
5. wafer according to claim 1 is thrown sheet method, it is characterized in that at least two of described processing steps.
6. wafer according to claim 5 is thrown sheet method, it is characterized in that, in the processing step comprising according to processing procedure and at least one reative cell group corresponding to each processing step, obtain after all possible processing procedure scheme step, calculate before reative cell utilance step corresponding to each processing procedure scheme, described throwing sheet method also comprises: the production capacity of reative cell group corresponding to processing step of carrying out after rejecting is greater than the described possible processing procedure scheme of the production capacity of the reative cell group that the processing step first carried out is corresponding.
7. wafer is thrown a sheet devices, comprising:
Acquisition of information module, for obtaining the current information that uses reative cell, the described information that uses reative cell comprises the type of processing step and the use state of reative cell that reative cell can carry out;
Grouping module, for all used reative cells that complete same process step are divided into groups, to obtain at least one reative cell group that should processing step;
Processing procedure scheme acquisition module, for processing step and at least one reative cell group corresponding to each processing step of comprising according to processing procedure, obtains all possible processing procedure scheme;
Reative cell utilance computing module, for calculating reative cell utilance corresponding to each processing procedure scheme, the reative cell number that described reative cell utilance has been processing procedure scheme and the ratio of all numbers that use reative cell;
Throw sheet control device, for pending wafer is thrown to sheet by the high processing procedure scheme of reative cell utilance.
8. wafer according to claim 7 is thrown sheet devices, it is characterized in that, described wafer is thrown sheet devices and also comprised:
The first comparator, for relatively whether the pre-estimation deadline of each possible processing procedure scheme is greater than the time of delivery;
Reject module, rejecting described the first comparator, to obtain result be possible processing procedure scheme corresponding while being.
9. wafer according to claim 7 is thrown sheet devices, it is characterized in that, and at least two of described processing steps, described wafer is thrown sheet devices and is also comprised:
Whether the second comparator, be greater than for the production capacity of reative cell group corresponding to the rear execution processing step of each processing procedure scheme of comparison the production capacity of first carrying out the reative cell group that processing step is corresponding;
Reject module, rejecting described the second comparator, to obtain result be possible processing procedure scheme corresponding while being.
10. wafer according to claim 7 is thrown sheet devices, it is characterized in that, described wafer is thrown sheet devices and also comprised order module, for arranging from high to low processing procedure scheme by reative cell utilance.
11. wafers according to claim 7 are thrown sheet devices, it is characterized in that, described wafer is thrown sheet devices and also comprised display module, for showing the utilance of all possible processing procedure scheme and described reative cell.
12. wafers according to claim 7 are thrown sheet devices, it is characterized in that, described acquisition of information module comprises power measurement module, use state, to obtain the current information that uses reative cell for detection of the power of all reative cells.
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| CN103996644A (en) * | 2014-06-09 | 2014-08-20 | 上海华力微电子有限公司 | Process management method for multi-cavity equipment |
| CN105470102B (en) * | 2014-09-04 | 2018-08-14 | 中芯国际集成电路制造(上海)有限公司 | A method of improving reative cell service efficiency |
| CN109934551A (en) * | 2017-12-19 | 2019-06-25 | 江苏金风科技有限公司 | Offshore wind turbine delivery system |
| CN115438883A (en) * | 2021-06-01 | 2022-12-06 | 长鑫存储技术有限公司 | Wafer scheduling method and device of etching equipment |
| CN113780892B (en) * | 2021-09-29 | 2024-06-21 | 上海华力微电子有限公司 | Method for making product production plan based on integer programming |
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| US6915177B2 (en) * | 2002-09-30 | 2005-07-05 | Advanced Micro Devices, Inc. | Comprehensive integrated lithographic process control system based on product design and yield feedback system |
| CN100527378C (en) * | 2006-11-10 | 2009-08-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Scheduling method in silicon chip working process |
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