CN102799064A - 一种金属图形直接压印转移掩模板基板静电场力分离装置 - Google Patents
一种金属图形直接压印转移掩模板基板静电场力分离装置 Download PDFInfo
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- CN102799064A CN102799064A CN2012102981506A CN201210298150A CN102799064A CN 102799064 A CN102799064 A CN 102799064A CN 2012102981506 A CN2012102981506 A CN 2012102981506A CN 201210298150 A CN201210298150 A CN 201210298150A CN 102799064 A CN102799064 A CN 102799064A
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CN201210298150.6A CN102799064B (zh) | 2012-08-21 | 2012-08-21 | 一种金属图形直接压印转移掩模板基板静电场力分离装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103151288A (zh) * | 2013-03-05 | 2013-06-12 | 铜陵三佳山田科技有限公司 | 一种变步距塑封产品拨爪机构 |
CN109168319A (zh) * | 2016-03-29 | 2019-01-08 | 鸿海精密工业股份有限公司 | 蒸镀掩膜、蒸镀掩膜的制造方法、蒸镀方法及有机el显示装置的制造方法 |
CN110391166A (zh) * | 2018-04-19 | 2019-10-29 | 苏州固锝电子股份有限公司 | 用于集成电路的芯片传输装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07193117A (ja) * | 1993-12-27 | 1995-07-28 | Dainippon Screen Mfg Co Ltd | 基板保持装置 |
KR100755395B1 (ko) * | 2006-08-31 | 2007-09-04 | 삼성전자주식회사 | 반사 마스크, 반사 마스크 고정 장치 및 방법 |
WO2010082606A1 (ja) * | 2009-01-14 | 2010-07-22 | Toto株式会社 | 静電チャックおよび静電チャックの製造方法 |
CN101930182A (zh) * | 2009-06-23 | 2010-12-29 | 丰和工业株式会社 | 内层基板用曝光装置以及基板和掩膜的剥离方法 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07193117A (ja) * | 1993-12-27 | 1995-07-28 | Dainippon Screen Mfg Co Ltd | 基板保持装置 |
KR100755395B1 (ko) * | 2006-08-31 | 2007-09-04 | 삼성전자주식회사 | 반사 마스크, 반사 마스크 고정 장치 및 방법 |
WO2010082606A1 (ja) * | 2009-01-14 | 2010-07-22 | Toto株式会社 | 静電チャックおよび静電チャックの製造方法 |
CN101930182A (zh) * | 2009-06-23 | 2010-12-29 | 丰和工业株式会社 | 内层基板用曝光装置以及基板和掩膜的剥离方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103151288A (zh) * | 2013-03-05 | 2013-06-12 | 铜陵三佳山田科技有限公司 | 一种变步距塑封产品拨爪机构 |
CN103151288B (zh) * | 2013-03-05 | 2016-05-18 | 铜陵三佳山田科技有限公司 | 一种变步距塑封产品拨爪机构 |
CN109168319A (zh) * | 2016-03-29 | 2019-01-08 | 鸿海精密工业股份有限公司 | 蒸镀掩膜、蒸镀掩膜的制造方法、蒸镀方法及有机el显示装置的制造方法 |
CN109168319B (zh) * | 2016-03-29 | 2020-06-09 | 鸿海精密工业股份有限公司 | 蒸镀掩膜、蒸镀掩膜的制造方法、蒸镀方法及有机el显示装置的制造方法 |
CN110391166A (zh) * | 2018-04-19 | 2019-10-29 | 苏州固锝电子股份有限公司 | 用于集成电路的芯片传输装置 |
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Inventor after: Duan Zhiyong Inventor after: Li Tianhao Inventor after: Li Dongxue Inventor after: Zheng Guoheng Inventor after: Su Yufeng Inventor after: Gong Qiaoxia Inventor before: Duan Zhiyong Inventor before: Li Tianhao Inventor before: Zheng Guoheng Inventor before: Su Yufeng Inventor before: Gong Qiaoxia |
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Free format text: CORRECT: INVENTOR; FROM: DUAN ZHIYONG LI TIANHAO ZHENG GUOHENG SU YUFENG GONG QIAOXIA TO: DUAN ZHIYONG LI TIANHAO LI DONGXUE ZHENG GUOHENG SU YUFENG GONG QIAOXIA |
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Granted publication date: 20140326 Termination date: 20200821 |