CN102792135A - 具有杂散光滤除构造的微型光谱仪 - Google Patents
具有杂散光滤除构造的微型光谱仪 Download PDFInfo
- Publication number
- CN102792135A CN102792135A CN2010800643326A CN201080064332A CN102792135A CN 102792135 A CN102792135 A CN 102792135A CN 2010800643326 A CN2010800643326 A CN 2010800643326A CN 201080064332 A CN201080064332 A CN 201080064332A CN 102792135 A CN102792135 A CN 102792135A
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- CN
- China
- Prior art keywords
- micro spectrometer
- optical signal
- dentalation
- spectrometer
- veiling glare
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- 238000001914 filtration Methods 0.000 title claims abstract description 46
- 230000003287 optical effect Effects 0.000 claims abstract description 85
- 230000003595 spectral effect Effects 0.000 claims abstract description 20
- 230000004313 glare Effects 0.000 claims description 48
- 238000010276 construction Methods 0.000 claims description 34
- 206010052128 Glare Diseases 0.000 description 42
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004568 cement Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0018—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for preventing ghost images
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
- G02B27/4244—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in wavelength selecting devices
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
一种具有杂散光滤除构造(20)的微型光谱仪,包括输入部(10),杂散光滤除构造(20)和微型绕射光栅(30)。输入部(10)接收处于预设角度内的第一光信号(S1)和处于预设角度外的第二光信号(S2)。杂散光滤除构造(20)用于滤除第二光信号(S2),并且包括第一过滤区段(22)和第二过滤区段(24)。第一过滤区段(22)和第二过滤区段(24)具有相对设置的齿状结构(22T,24T),两个齿状结构(22T,24T)之间限定出一光通道(26)以使第一光信号(S1)通过,滤除第二光信号(S2)。微型绕射光栅(30)接收通过杂散光滤除构造(20)的第一光信号(S1),并将第一光信号(S1)分离成多个光谱分量。
Description
PCT国内申请,说明书已公开。
Claims (1)
- PCT国内申请,权利要求书已公开。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410035882.5A CN103759826B (zh) | 2010-04-19 | 2010-04-19 | 具有杂散光滤除构造的微型光谱仪 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2010/071873 WO2011130899A1 (zh) | 2010-04-19 | 2010-04-19 | 具有杂散光滤除构造的微型光谱仪 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410035882.5A Division CN103759826B (zh) | 2010-04-19 | 2010-04-19 | 具有杂散光滤除构造的微型光谱仪 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN102792135A true CN102792135A (zh) | 2012-11-21 |
Family
ID=44833626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010800643326A Pending CN102792135A (zh) | 2010-04-19 | 2010-04-19 | 具有杂散光滤除构造的微型光谱仪 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8717561B2 (zh) |
CN (1) | CN102792135A (zh) |
WO (1) | WO2011130899A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3335019A2 (en) | 2015-09-29 | 2018-06-20 | Chromation Inc. | Nanostructure based article, optical sensor and analytical instrument and method of forming same |
TWI644135B (zh) * | 2017-11-30 | 2018-12-11 | 柯正浩 | Optical demultiplexing device and method of manufacturing same |
KR20210151525A (ko) * | 2020-06-05 | 2021-12-14 | 삼성전자주식회사 | 생체정보 추정 장치 및 방법 |
DE102021130228A1 (de) | 2021-11-18 | 2023-05-25 | Deere & Company | Sensoranordnung |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5020910A (en) * | 1990-03-05 | 1991-06-04 | Motorola, Inc. | Monolithic diffraction spectrometer |
JPH04262282A (ja) * | 1991-02-18 | 1992-09-17 | Nec Corp | レーザ光入射方向検出装置 |
US5550375A (en) * | 1994-09-29 | 1996-08-27 | Microparts | Infrared-spectrometric sensor for gases |
JPH09318802A (ja) * | 1996-05-28 | 1997-12-12 | Nikon Corp | 開口部を有するミラー |
JP2008185525A (ja) * | 2007-01-31 | 2008-08-14 | Shimadzu Corp | 分光器 |
CN101295050A (zh) * | 2007-04-27 | 2008-10-29 | 柯正浩 | 光学系统 |
TWM370071U (en) * | 2009-06-05 | 2009-12-01 | Chang Yu Technology Co Ltd | Miniature spectroscope |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0883000A1 (en) * | 1997-06-02 | 1998-12-09 | Akzo Nobel N.V. | Optical planar waveguide structure comprising of a stray light capture region and method of manufacture of the same |
JP2008053466A (ja) * | 2006-08-24 | 2008-03-06 | Nec Electronics Corp | 光送信モジュール |
TWI345050B (en) | 2007-08-03 | 2011-07-11 | Oto Photonics Inc | Optical system and method of manufacturing the same |
JP4905193B2 (ja) * | 2007-03-16 | 2012-03-28 | コニカミノルタセンシング株式会社 | 凹面回折ミラー及びこれを用いた分光装置 |
-
2010
- 2010-04-19 CN CN2010800643326A patent/CN102792135A/zh active Pending
- 2010-04-19 US US13/642,222 patent/US8717561B2/en not_active Expired - Fee Related
- 2010-04-19 WO PCT/CN2010/071873 patent/WO2011130899A1/zh active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5020910A (en) * | 1990-03-05 | 1991-06-04 | Motorola, Inc. | Monolithic diffraction spectrometer |
JPH04262282A (ja) * | 1991-02-18 | 1992-09-17 | Nec Corp | レーザ光入射方向検出装置 |
US5550375A (en) * | 1994-09-29 | 1996-08-27 | Microparts | Infrared-spectrometric sensor for gases |
JPH09318802A (ja) * | 1996-05-28 | 1997-12-12 | Nikon Corp | 開口部を有するミラー |
JP2008185525A (ja) * | 2007-01-31 | 2008-08-14 | Shimadzu Corp | 分光器 |
CN101295050A (zh) * | 2007-04-27 | 2008-10-29 | 柯正浩 | 光学系统 |
TWM370071U (en) * | 2009-06-05 | 2009-12-01 | Chang Yu Technology Co Ltd | Miniature spectroscope |
Also Published As
Publication number | Publication date |
---|---|
WO2011130899A1 (zh) | 2011-10-27 |
US8717561B2 (en) | 2014-05-06 |
US20130314704A1 (en) | 2013-11-28 |
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Application publication date: 20121121 |