CN102789021A - Reflection type color filter - Google Patents

Reflection type color filter Download PDF

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Publication number
CN102789021A
CN102789021A CN2012103194940A CN201210319494A CN102789021A CN 102789021 A CN102789021 A CN 102789021A CN 2012103194940 A CN2012103194940 A CN 2012103194940A CN 201210319494 A CN201210319494 A CN 201210319494A CN 102789021 A CN102789021 A CN 102789021A
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light
reflection type
grating
metal
optical filter
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周云
陈林森
叶燕
申溯
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Svg Optronics Co ltd
Suzhou University
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Svg Optronics Co ltd
Suzhou University
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Abstract

The invention relates to a reflection type color filter, comprising pixel arrays with three colors. A pixel structure with each color comprises a substrate, a metal layer positioned on the substrate, a dielectric layer positioned on the metal layer and a two-dimensional metal grating layer positioned on the dielectric layer, wherein the thickness of the metal layer is greater than the skin depth of visible light in the metal layer, and the surface plasma resonance frequency of the pixel structure is the frequency of the complementary color of the pixel color. The reflection type color filter performs optical filtering based on the subtractive theorem, and has the characteristics of high optical energy utilization rate, low angle sensitivity and insensitivity to polarization.

Description

A kind of reflection type color optical filter
Technical field
The present invention relates to a kind of optical lightscreening element, be specifically related to a kind of wide angle reflection optical filter with optical grating construction.
Background technology
People are obtained to inspire by the selection effect of occurring in nature biological epidermis structure to light, find that nanostructured can realize the three primary colors of colorized optical filtering device, and have certain spectral width and visual angle tolerance.Realize colorized optical filtering if can artificially design and prepare specific nanostructured, will detect and not have the purpose of industry realization energy-conserving and environment-protective such as ink printing at light demonstration, photovoltaic, light sensing, light.
Along with the continuous development of micro-nano manufacturing technology, the design of colorized optical filtering device and preparation become the hot research direction in micronano optical field.Existing micro-nano structure optical filter is very sensitive to incident angle mostly; Be only applicable to a certain specific incident angle scope; Optical characteristics serious degradation under wide angle incident condition has limited its application in a lot of fields, like detection of gas, imaging spectral and angle tuning optical filter etc.
More domestic and international companies and research institution; How tame research unit like Princeton university, University of Michigan, German PAPIERFABRIK LOUISENTHAL GMBH company, Osaka, Japan university, Tsing-Hua University, Shanghai University of Science and Technology, Dalian University of Technology and system of the Chinese Academy of Sciences has carried out the research of wide angle filtering device aspect, and has obtained certain progress.Utilize the modulation of high index of refraction or increase the high refractive index medium layer thickness, the visual angle tolerance can increase to about 40 degree.Wherein high-index material is selected polysilicon usually, needs to adopt low-pressure chemical vapor deposition or PRK to induce and could prepare.People such as the graduate Yeo-Taek Yoon of Korea S's Samsung have made polysilicon-silicon dioxide optical grating construction (cycle is 446nm) on quartz substrate; Realized blue light-wave transmission; But incident angle is changed to 15 when spending from 0 degree, and transmitance drops to 18% from 40%.Discover that the inherent characteristic acting in conjunction of surface that metal grating had and chromatic dispersion can improve angle sensitivity.The Hans Lochbihler of Germany proposes to adopt medium-metal grating composite structure to filter; On dielectric grating hydatogenesis the metal alum gate of " Z " shape; Designed the transmission-type optical filter, incident angle is when 0 to 30 degree range, and the transmission peaks position of TM and TE polarized light is constant basically; But the resonance peak efficiency of transmission of TM polarized light is lower, has only 20%.The Stephen Y.Chou [110] of Princeton university has processed the medium grid array on quartz substrate; Then; Through inclination electron evaporation plated metal aluminium on the medium grid array, find for non-polarized incident light, in ± 25 degree scopes; Peak is constant basically, and efficiency of transmission reduces.
The colorized optical filtering device mainly comprises transmission-type colored filter and reflection type color optical filter, and wherein the reflection type color optical filter is one type of very promising optical component, is widely used in fields such as electricity-saving type FPD, novel printing.Aspect optical property, it also requires high reflection efficiency and suitable reflection bandwidth.Korea S Samsung Institute for Research and Technology makes the silicon lattice structure on substrate of glass, utilize the big refringence between silicon and the glass, spends the reflection bandwidth that incident angle has realized about 80nm 0 ~ 40, and maximum reflection efficient can reach more than 55%.In addition, pile up the silicon dioxide bead through self assembly and form photon crystal structure, also can realize the reflection type color optical filter.The A.C.Arsenault of University of Toronto etc. utilizes this mode, utilizes the tunable characteristic of galvanochemistry of poly-ferrocene silane, has realized a kind of adjustable colorized optical filtering device, is also having a lot of needs of work to explore aspect its preparation and the material selection.
Above-mentioned reflection type color optical filter all is based on the hyperchromic principle of RGB, and both the coloured light when two or more got into human eye, and vision just can produce the effect of another kind of coloured light.For example, the ruddiness of same ratio and green glow can produce yellow in human eye.This optical filter based on hyperchromic principle; When the design optical grating construction, often make the light wave of optical grating construction reflection required color, and the light wave of other color is absorbed; Such as the optical grating construction on the Red lightscreening plate; Be merely able to the reflection Red light wave, and the light wave of other color is absorbed by optical grating construction all, with this express red.This optical filter is owing to the light wave that has absorbed most of colors, so its efficiency of light energy utilization is lower, has only about 30%, is unfavorable for energy-conserving and environment-protective.
Therefore, improve several hang-ups that application that the efficiency of light energy utilization, the susceptibility that reduces angle, reflected waveband with appropriate bandwidth just become to widen micro-nano structure reflection type color optical filter faces.
Summary of the invention
In view of this, the objective of the invention is to propose a kind of reflection optical filter based on subtractive theorem, this reflection optical filter not only has high-light-energy utilization factor, low angle sensitivity, has the characteristics to polarization insensitive simultaneously.
A kind of reflection type color optical filter according to the object of the invention proposition; This reflection type color optical filter is based on subtractive theorem; It comprises magenta, yellow and three kinds of color pixel arrays of cyan; Every kind of color pixel structure comprises substrate, be positioned at metal level on the substrate, be positioned at the dielectric layer on the metal level and be positioned at the two-dimensional metallic grating layer on the dielectric layer; Said metal layer thickness is greater than the skin depth of visible light in this metal level, and the surface plasma body resonant vibration frequency of said dot structure is the complementary color light frequency of this pixel color.
Preferably, said dielectric layer is the dielectric grating layer, and the optical grating construction of this dielectric grating layer is corresponding with the two-dimensional metallic grating layer.
Preferably, the grating cycle of said dielectric grating layer and/or metal grating layer is less than 400nm.
Preferably, said metal level is a high reflecting metal.
Preferably, the cycle of said two-dimensional metallic grating layer on directions X and Y direction with account for wide ratio and equate.
Preferably, said substrate is flexible clear materials or glass.
Preferably, said dielectric layer is quartzy or flexible clear materials.
Preferably, said flexible clear materials is a kind of in polycarbonate, PVC, polyester, polymethylmethacrylate or the polypropylene.
Above-mentioned reflection type color optical filter; According to subtractive theorem; Have the three-layer composite structure of metal level, dielectric layer (perhaps dielectric grating layer), metal grating layer, wherein metal layer thickness mainly plays similar catoptron greater than the skin depth of visible light in material.Through the plasma effect between metal level and the metal grating layer, make this structure can absorb the light wave that is coupled with its surface plasma body resonant vibration frequency, reflect the light wave of its all band, thereby realize the filter effect of different colours.Compared with prior art, technique effect of the present invention is following:
The first, the present invention utilizes subtractive theorem to realize filtering, and has improved the efficiency of light energy utilization greatly;
The second, structure of the present invention, through to cycle of metal grating with account for wide ratio and modulate, can realize the filter effect of different colours;
The 3rd, structure of the present invention has the ind characteristic of polarization, and the TM polarized light is identical with the resonant position of TE polarized light, thereby guarantees that observed color is identical to two kinds of polarized lights;
The 4th, structure of the present invention, the susceptibility of angle reduces, and can in wide range, realize filtering.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of colored filter of the present invention;
Fig. 2 is the structural representation of single pixel among Fig. 1;
Fig. 3 is second kind of structural representation of single pixel among Fig. 1;
Fig. 4 is the graph of a relation of T M reflection of light efficient and incident wavelength among the embodiment one, incident angle;
Fig. 5 is the graph of a relation of TE reflection of light efficient and incident wavelength among the embodiment one, incident angle;
Fig. 6 is the graph of a relation of TM reflection of light efficient among the embodiment two with the wide ratio of accounting for of incident wavelength, metal grating;
Fig. 7 is the graph of a relation in the cycle of TM reflection of light efficient and incident wavelength among the embodiment three, metal grating;
Fig. 8 is the graph of a relation of TM reflection of light efficient and incident wave among the embodiment four;
Fig. 9 is the graph of a relation of TM reflection of light efficient and incident wavelength among the embodiment five, incident angle;
Figure 10 is the graph of a relation of TE reflection of light efficient and incident wavelength among the embodiment five, incident angle;
Figure 11 is the graph of a relation of TM reflection of light efficient among the embodiment six with the wide ratio of accounting for of incident wavelength, metal grating;
Figure 12 is the graph of a relation in the cycle of TM reflection of light efficient and incident wavelength among the embodiment seven, metal grating.
Embodiment
Like what mention in the background technology, existing reflection optical filter mostly filter according to hyperchromic principle, so its efficiency of light energy utilization is lower.And a kind of reflection type color optical filter that the present invention proposes filters according to subtractive theorem.So-called subtractive theorem is meant, white light to optical filter the time, is absorbed a kind of light of color bands, and with the light reflection of other colors, forms mixed light, and after the green light in the white light was absorbed, the mixed light that reflects to form was a magenta.This with the colored filter of subtractive theorem as light-filtering characteristic, reflect the broadband light wave owing to absorbing the arrowband light wave, so its efficiency of light energy utilization can reach more than 50%.Usually, when realizing colored the expression with subtractive theorem, its three kinds of primary colours are magenta, yellow and cyan; Be equivalent to green, blueness and red trichromatic complementary color, promptly when the green glow in the white light partly was absorbed, the mixed light that reflection is come out was a magenta; When the blue portion in the white light is absorbed; The mixed light that reflection is come out is for yellow, and when the red light portion in the white light was absorbed, the mixed light that reflection is come out was a cyan.Certainly, except the combination of these three primary colours, other combination that meets collocation of colour also is feasible, does not do at this and gives unnecessary details.
See also Fig. 1, Fig. 1 is the structural representation of colored filter of the present invention.As shown in the figure, this colored filter surface comprises three kinds of color pixel arrays 10, and these three kinds of color pixel are respectively magenta pixel 11, yellow pixel 12 and cyan pixel 13, and each pixel all has substrate, metal level, dielectric layer and metal grating layer.These three kinds of color pixel are arranged with the lateral separation among the figure, and in other were used, these three kinds of color pixel also can be modes such as longitudinal separation arrangement or criss-cross arrangement.
Seeing also Fig. 2 is the structural representation of single pixel among a kind of Fig. 1.As shown in Figure 2, this each dot structure comprises substrate 110, be positioned in the substrate 110 metal level 120, be positioned at the dielectric layer 130 on the metal level 120 and be positioned at the two-dimensional metallic grating layer 140 on the dielectric layer 130.
Substrate 110 is glass or flexible clear materials.Flexible clear materials such as polycarbonate (PC), PVC (PVC), polyester (PET), polymethylmethacrylate (PMMA) or polypropylene (BOPP) etc., perhaps glass.In substrate 110 is under the situation of flexible material, can use based on the plated film of volume to volume mode and the mode of impression to prepare.
Dielectric layer 130 is arranged between metal level 120 and the two-dimensional metallic grating layer 140; The light wave pattern that this double layer of metal that is coupled excites; Its material can be a silicon dioxide; Also can be flexible clear materials, such as polycarbonate (PC), PVC (PVC), polyester (PET), polymethylmethacrylate (PMMA) or polypropylene (BOPP) etc.
Metal level 120 is the high reflecting metal material, and like aluminium, silver etc., its thickness need play the effect of catoptron with this greater than the skin depth of 120 visible lights in this metal level 120, improves the reflection efficiency to visible light wave range, thereby improves the utilization factor of light.
Two-dimensional metallic grating 140 is the two-dimensional grating of lattice-like, and its cycle size reaches the sub-wavelength magnitude,, promptly the cycle is less than 400nm.
See also Fig. 3, Fig. 3 is the structural representation of the single pixel of another kind of the present invention.In this dot structure; Dielectric layer between metal level 120 and two-dimensional metallic grating layer 140 also has optical grating construction; The optical grating construction of this dielectric grating layer 131 is corresponding with the optical grating construction of 140 layers on two-dimensional metallic grating, and promptly two-dimensional metallic grating layer 140 is positioned on this dielectric layer grating 131.All the other with first kind of dot structure in identical, repeat no more here.
The reflection type color optical filter of above-mentioned two kinds of dot structures; According to subtractive theorem, utilize the special construction of metal level, dielectric layer, metal grating layer, through the plasma effect between metal level and the metal grating layer; Make this dot structure can absorb the light wave that is coupled with its surface plasma body resonant vibration frequency; Promptly the surface plasma body resonant vibration frequency of this dot structure is the complementary color light frequency of this pixel color, reflects the light wave of its all band, thereby realizes the filter effect of different colours.
It is pointed out that in the reflection type color optical filter of said structure metal surface plasma resonance body frequency can be by this Several Parameters decision of cycle, dutycycle, thickness and material of thickness, dielectric grating layer and the metal grating layer of dielectric layer.Therefore through regulating above-mentioned Several Parameters, can realize the formation of different colours pixel.In the present invention, as three kinds of basic looks of colored filter, promptly three kinds of color of pixel are respectively magenta, yellow and cyan, and it is green, blue and red that the complementary color of these three kinds of colors is respectively.So when realizing the pixel color of magenta, need be with metal surface plasma resonance body frequency adjustment to 500 ~ 600 nano wavebands of whole optical grating construction; So when realizing yellow pixel color, need be with metal surface plasma resonance body frequency adjustment to 400 ~ 500 nano wavebands of whole optical grating construction; So when realizing the pixel color of cyan, need be with metal surface plasma resonance body frequency adjustment to 600 ~ 700 nano wavebands of whole optical grating construction.
To elaborate to reflection type color optical filter of the present invention with several embodiments below.
Embodiment one:
In this embodiment, be that example describes with the optical grating construction that forms magenta.
Please continue referring to Fig. 2, in the present embodiment, substrate 110 is a flexible material, is specially PET or PC.Metal level 120 is an aluminium.The material of dielectric layer 130 is PMMA.The material of metal grating layer 140 is an aluminium.Further, lattice-like metal grating 120 cycle on directions X and Y direction is px=py=p, accounts for wide ratio and is F.Design obtains following structural parameters: period p=190nm, dutycycle F=0.45 to the magenta reflection filter.Metal layer thickness h1=150nm.Thickness of dielectric layers h2=15nm.The thickness h 3=25nm of metal grating layer.
TM polarized light and the structural top incident from then on of TE polarized light.The incident angle of light is spent to 45 degree range 0.Adopt rigorous coupled wave theoretical (RCWA) that the reflection characteristic and the angle tolerance of optical filter are analyzed.Because metal level is the high reflecting metal material, its thickness causes transmitance to be almost 0 greater than the skin depth of visible light in material.Therefore this structure mainly demonstrates reflection and absorption characteristic.Because near field diffraction pattern ripple and layer on surface of metal plasma that sub-wave length grating excites are coupled, a part of light is reflected, and another part light is absorbed.
Fig. 4 is reflection efficiency and the incident wavelength of TM polarized light, the graph of a relation of incident angle.Reflection paddy position appears at the 545nm place, and reflection efficiency is near 0.Incident angle is 45 when spending, and reflection paddy position appears at the 542nm place, can think that catoptrical color changes with the change of incident angle hardly.That is to say that under TM polarized light incident condition, eye-observation is to magenta, and spend in 45 degree angulars field of view 0 and not change.
Fig. 5 is reflection efficiency and the incident wavelength of TE polarized light, the graph of a relation of incident angle.Reflection paddy position appears at the 544nm place, and reflection efficiency is near 0.Incident angle is 45 when spending, and reflection paddy position appears at the 551nm place, can think that catoptrical color changes with the change of incident angle hardly.That is to say that under TE polarized light incident condition, eye-observation is to magenta, and spend in 45 degree angulars field of view 0 and not change.
In addition, can find out that in this dot structure, catoptrical frequency range is almost with the polarisation of light orientation independent from Fig. 4 and Fig. 5.
Embodiment two:
Present embodiment is the different filtering structures that account for wide than corresponding different colours of research.In this embodiment, the wide ratio that accounts for of dot structure is got 0.33,0.44,0.55 three value respectively, and other parameter then remains unchanged, and is identical among the concrete numerical value of these parameters and the embodiment one, i.e. period p=190nm, metal layer thickness h1=150nm.Thickness of dielectric layers h2=15nm.The thickness h 3=25nm of metal grating layer.
See also Fig. 6, Fig. 6 for TM reflection of light efficient and incident wavelength, account for the graph of a relation of wide ratio.When F changed between 0.33 ~ 0.55, reflection paddy position changed.Such as when the F=0.33, be absorbed near the blue light at 450nm place, and the light of all the other wave bands is reflected, and makes this color that accounts for the light that dot structure reflected out under the wide ratio for yellow; When F=0.44, be absorbed near the green light at 550nm place, and the light of all the other wave bands is reflected, making this color that accounts for the light that dot structure reflected out under the wide ratio is magenta; When F=0.55, be absorbed near the red light at 675nm place, and the light of all the other wave bands is reflected, making this color that accounts for the light that dot structure reflected out under the wide ratio is cyan.That is to say that through controlling the different wide ratios that accounts for, under TM light incident condition, human eye will be observed various colors.According to this characteristic,, just can realize the making of colored filter as long as on the different pixels of optical filter, design the different metal grating structures that account for wide ratio.Such as the corresponding optical grating construction of magenta pixel, the absorbed zone of complementary color light green light wave band that it accounts for wide ratio should be corresponding magenta.
Embodiment three:
Present embodiment is the filtering structure of corresponding different colours of research different metallic grating cycle.In this embodiment, the cycle of the metal grating in the dot structure is respectively 0.15um, 0.19um, 0.23um, consistent among other parameters and the embodiment one.Promptly account for wide than F=0.45, metal layer thickness h1=150nm.Thickness of dielectric layers h2=15nm.The thickness h 3=25nm of metal grating layer.
See also Fig. 7, Fig. 7 is TM reflection of light efficient and incident wavelength, the graph of a relation in cycle.When p changed between 0.15 ~ 0.23um, reflection paddy position changed.Such as when the p=0.15um, be absorbed near the blue light at 450nm place, and the light of all the other wave bands is reflected, and makes this color that accounts for the light that dot structure reflected out under the wide ratio for yellow; When p=0.19um, be absorbed near the green light at 550nm place, and the light of all the other wave bands is reflected, making this color that accounts for the light that dot structure reflected out under the wide ratio is magenta; When p=0.23um, be absorbed near the red light at 630nm place, and the light of all the other wave bands is reflected, making this color that accounts for the light that dot structure reflected out under the wide ratio is cyan.That is to say that through controlling the different cycles, under TM light incident condition, human eye will be observed various colors.According to this characteristic,, just can realize the making of colored filter as long as on the different pixels of optical filter, design the metal grating structure of different cycles.Such as the corresponding optical grating construction of magenta pixel, its cycle should be the absorbed zone of complementary color light green light wave band of corresponding magenta.
Embodiment four:
Present embodiment is research when the reflected light distribution situation of the dot structure of metal layer material when silver-colored, consistent among other parameters and the embodiment one.
See also Fig. 8, Fig. 8 is TM reflection of light efficient and incident wavelength, the graph of a relation in cycle.Fig. 4 is reflection efficiency and the incident wavelength of TM polarized light, the graph of a relation of incident angle.Reflection paddy position appears at the 570nm place, and reflection efficiency is near 0.That is to say that under TM polarized light incident condition, eye-observation is to magenta.Therefore metal level plays similar catoptron, also can select other high-reflectivity metal material, and its thickness gets final product greater than the skin depth of visible light in material.
Embodiment five:
In this embodiment, be that example describes with the optical grating construction that forms magenta.
Please continue referring to Fig. 3, in the present embodiment, substrate 110 is a flexible material, is specially PET or PC.Metal level 120 is an aluminium.Dielectric grating layer 131 is a cross grating with two-dimensional metallic grating layer 140.The material of dielectric grating layer 131 is PMMA.The material of two-dimensional metallic grating layer 140 is an aluminium.Further, two-dimensional medium grating 131 is px=py=p with two-dimensional metallic grating 120 cycle on both direction, accounts for wide ratio and is F.Design obtains following structural parameters: period p=180nm, dutycycle F=0.5, metal layer thickness h1=150nm to the magenta reflection filter.Thickness of dielectric layers h2=15nm.The thickness h 3=25nm of metal grating layer.
Adopt rigorous coupled wave theoretical (RCWA) that the reflection characteristic and the angle tolerance of optical filter are analyzed.Because metal layer thickness greater than the skin depth of visible light in material, causes transmitance to be almost 0.Therefore this structure mainly demonstrates reflection and absorption characteristic.Because surface plasma resonance and the light and the surface period structure coupling of metal level, a part of light is reflected, and another part light is absorbed.TM polarized light and the structural top incident from then on of TE polarized light, the incident angle of this light is spent to 45 degree range 0.
Fig. 9 is reflection efficiency and the incident wavelength of TM polarized light, the graph of a relation of incident angle.Reflection paddy position appears at the 538nm place, and reflection efficiency is near 0.Incident angle is 45 when spending, and reflection paddy position appears at the 526nm place, can think that catoptrical color changes with the change of incident angle hardly.That is to say that under TM light incident condition, eye-observation is to magenta, and spend in 45 degree angulars field of view 0 and not change.
Figure 10 is reflection efficiency and the incident wavelength of TE polarized light, the graph of a relation of incident angle.Reflection paddy position appears at the 538nm place, and reflection efficiency is near 0.Incident angle is 45 when spending, and reflection paddy position appears at the 541nm place, can think that catoptrical color changes with the change of incident angle hardly.That is to say that under TE light incident condition, eye-observation is to magenta, and spend in 45 degree angulars field of view 0 and not change.
Embodiment six:
Present embodiment is research different filtering structures that account for wide than corresponding different colours in second kind of dot structure.In this embodiment, the wide ratio that accounts for of dot structure is got 0.4,0.5,0.6 3 value respectively, and other parameter then remains unchanged, and is identical among the concrete numerical value of these parameters and the embodiment five, i.e. period p=180nm, metal layer thickness h1=150nm.Thickness of dielectric layers h2=15nm.The thickness h 3=25nm of metal grating layer.
See also Figure 11, Figure 11 for TM reflection of light efficient and incident wavelength, account for the graph of a relation of wide ratio.When F changed between 0.4 ~ 0.6, reflection paddy position changed.Such as when the F=0.4, be absorbed near the blue light at 425nm place, and the light of all the other wave bands is reflected, and makes this color that accounts for the light that dot structure reflected out under the wide ratio for yellow; When F=0.5, be absorbed near the green light at 550nm place, and the light of all the other wave bands is reflected, making this color that accounts for the light that dot structure reflected out under the wide ratio is magenta; When F=0.6, be absorbed near the red light at 675nm place, and the light of all the other wave bands is reflected, making this color that accounts for the light that dot structure reflected out under the wide ratio is cyan.That is to say that through controlling the different wide ratios that accounts for, under TM light incident condition, human eye will be observed various colors.According to this characteristic,, just can realize the making of colored filter as long as on the different pixels of optical filter, design different dielectric grating and the metal grating structures that account for wide ratio.Such as the corresponding optical grating construction of magenta pixel, the absorbed zone of complementary color light green light wave band that it accounts for wide ratio should be corresponding magenta.
Embodiment seven:
Present embodiment is the filtering structure of corresponding different colours of research different metallic grating and dielectric grating cycle.In this embodiment, the cycle of the metal grating in the dot structure is respectively 0.14um, 0.15um, 0.22um, consistent among other parameters and the embodiment five.Promptly account for wide than F=0.5, metal layer thickness h1=150nm.Thickness of dielectric layers h2=15nm.The thickness h 3=25nm of metal grating layer.
See also Figure 12, Figure 12 is TM reflection of light efficient and incident wavelength, the graph of a relation in cycle.When p changed between 0.14 ~ 0.22um, reflection paddy position changed.Such as when the p=0.14um, be absorbed near the blue light at 450nm place, and the light of all the other wave bands is reflected, and makes this color that accounts for the light that dot structure reflected out under the wide ratio for yellow; When p=0.18um, be absorbed near the green light at 550nm place, and the light of all the other wave bands is reflected, making this color that accounts for the light that dot structure reflected out under the wide ratio is magenta; When p=0.22um, be absorbed near the red light at 630nm place, and the light of all the other wave bands is reflected, making this color that accounts for the light that dot structure reflected out under the wide ratio is cyan.That is to say that through the cycle of control different metallic grating and dielectric grating, under TM light incident condition, human eye will be observed various colors.According to this characteristic,, just can realize the making of colored filter as long as on the different pixels of optical filter, design the metal grating and the dielectric grating structure of different cycles.Such as the corresponding optical grating construction of magenta pixel, the cycle of its metal grating and dielectric grating should be the absorbed zone of complementary color light green light wave band of corresponding magenta.
In sum; A kind of reflection type color optical filter that the present invention proposes; According to subtractive theorem, the single dot structure that utilizes substrate, metal level, dielectric layer (perhaps dielectric grating layer) and metal grating layer to form makes metal level can absorb the light wave that is coupled with its surface plasma body resonant vibration frequency; Reflect the light wave of its all band, thereby realize the filter effect of different colours.Compared with prior art, technique effect of the present invention is following:
The first, the present invention utilizes subtractive theorem to realize filtering, and has improved the efficiency of light energy utilization greatly;
The second, structure of the present invention, through to cycle of metal grating with account for wide ratio and modulate, can realize the filter effect of different colours;
The 3rd, structure of the present invention has the ind characteristic of polarization, and the TM polarized light is identical with the resonant position of TE polarized light, thereby guarantees that observed color is identical to two kinds of polarized lights;
The 4th, structure of the present invention, the susceptibility of angle reduces, and can in wide range, realize filtering.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation that does not break away from the spirit or scope of the present invention in other embodiments among this paper.Therefore, the present invention will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.

Claims (8)

1. reflection type color optical filter; This reflection type color optical filter is based on subtractive theorem; It comprises magenta, yellow and three kinds of color pixel arrays of cyan; It is characterized in that: every kind of color pixel structure comprises substrate, be positioned at metal level on the substrate, be positioned at the dielectric layer on the metal level and be positioned at the two-dimensional metallic grating layer on the dielectric layer; Said metal layer thickness is greater than the skin depth of visible light in this metal level, and the surface plasma body resonant vibration frequency of said dot structure is the complementary color light frequency of this pixel color.
2. reflection type color optical filter as claimed in claim 1 is characterized in that: said dielectric layer is the dielectric grating layer, and the optical grating construction of this dielectric grating layer is corresponding with the two-dimensional metallic grating layer.
3. according to claim 1 or claim 2 reflection type color optical filter, it is characterized in that: the grating cycle of said dielectric grating layer and/or metal grating layer is less than 400nm.
4. reflection type color optical filter as claimed in claim 1 is characterized in that: said metal level is a high reflecting metal.
5. reflection type color optical filter as claimed in claim 1 is characterized in that: the cycle of said two-dimensional metallic grating layer on directions X and Y direction with account for wide ratio and equate.
6. reflection type color optical filter as claimed in claim 1 is characterized in that: said substrate is flexible clear materials or glass.
7. reflection type color optical filter as claimed in claim 1 is characterized in that: said dielectric layer is quartzy or flexible clear materials.
8. like claim 6 or 7 described reflection type color optical filters, it is characterized in that: said flexible clear materials is a kind of in polycarbonate, PVC, polyester, polymethylmethacrylate or the polypropylene.
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CN102937727A (en) * 2012-12-05 2013-02-20 苏州大学 Filtering structure
CN103245996A (en) * 2013-05-16 2013-08-14 中国科学院长春光学精密机械与物理研究所 Array multispectral optical filter and manufacturing method thereof
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CN107390418A (en) * 2017-07-31 2017-11-24 京东方科技集团股份有限公司 A kind of filtering structure, display base plate, display panel and display device
CN108761617A (en) * 2018-03-23 2018-11-06 中国科学院上海光学精密机械研究所 Cavity-enhanced high reflection wave plate of medium and preparation method thereof
CN108919404A (en) * 2018-07-03 2018-11-30 深圳市融光纳米科技有限公司 The insensitive transmission filter of angle
CN109581565A (en) * 2019-01-03 2019-04-05 京东方科技集团股份有限公司 Reflective filtering device, display panel, display device and control method
CN109932765A (en) * 2019-02-28 2019-06-25 湖北大学 A kind of light absorber and preparation method thereof based on two-dimensional grating
JP2019179717A (en) * 2018-03-30 2019-10-17 大日本印刷株式会社 Organic electroluminescent display device
CN110737039A (en) * 2019-11-04 2020-01-31 江苏集萃智能传感技术研究所有限公司 reflection type color filter and application thereof
CN111065887A (en) * 2017-09-12 2020-04-24 Asml控股股份有限公司 Beam pointing monitoring and compensation system
CN111323957A (en) * 2020-01-15 2020-06-23 武汉大学 Color flexible display module and preparation method thereof
CN112216218A (en) * 2020-09-18 2021-01-12 哈尔滨工业大学 Dynamic plasma pixel and full-color adjusting method thereof
CN112764146A (en) * 2019-10-21 2021-05-07 宁波舜宇车载光学技术有限公司 Optical device and light source and application thereof
CN113281929A (en) * 2021-03-04 2021-08-20 桂林电子科技大学 Electrotunable liquid crystal gap plasma structure color filter
CN114395153A (en) * 2021-12-28 2022-04-26 宁波信泰机械有限公司 White light transmitting composite film layer and preparation method and application thereof
CN115201953A (en) * 2022-08-22 2022-10-18 之江实验室 Double-working-band high-diffraction-efficiency composite reflection grating
CN115390175A (en) * 2022-09-20 2022-11-25 湖南工商大学 High-reflection and narrow-bandwidth all-dielectric optical filter and preparation method and application thereof

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CN102937727A (en) * 2012-12-05 2013-02-20 苏州大学 Filtering structure
WO2014117673A1 (en) * 2013-01-31 2014-08-07 东北大学 Reflective nanorod surface plasma optical filter
CN103245996B (en) * 2013-05-16 2015-11-25 中国科学院长春光学精密机械与物理研究所 A kind of array multispectral optical filter and preparation method thereof
CN103245996A (en) * 2013-05-16 2013-08-14 中国科学院长春光学精密机械与物理研究所 Array multispectral optical filter and manufacturing method thereof
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US9625627B2 (en) 2013-12-13 2017-04-18 Zhejiang University Incident angle insensitive color filter and its manufacturing method
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CN105607334A (en) * 2016-01-06 2016-05-25 京东方科技集团股份有限公司 Array substrate and preparation method thereof, display panel and display device
CN105572955A (en) * 2016-02-24 2016-05-11 京东方科技集团股份有限公司 Array substrate, making method thereof, display panel and touch panel
US10386947B2 (en) 2016-02-24 2019-08-20 Boe Technology Group Co., Ltd. Array substrate, method for manufacturing the same, display panel and touch panel
CN106680923B (en) * 2016-10-28 2018-11-16 西北工业大学 A kind of multispectral infrared filtering chip arrays based on micro-nano grating
CN106680923A (en) * 2016-10-28 2017-05-17 西北工业大学 Multispectral infrared filter array based on micro nano grating
CN106646680A (en) * 2016-11-14 2017-05-10 四川大学 One-way wave guide device based on composite structures
CN107045246A (en) * 2017-03-06 2017-08-15 东南大学 A kind of reflective super surface device and reflected light wavelength modulator approach of visible light wave range
CN107045246B (en) * 2017-03-06 2019-04-30 东南大学 A kind of reflective super surface device of visible light wave range and reflected light wavelength modulator approach
CN107390418A (en) * 2017-07-31 2017-11-24 京东方科技集团股份有限公司 A kind of filtering structure, display base plate, display panel and display device
US10976593B2 (en) 2017-07-31 2021-04-13 Boe Technology Group Co., Ltd. Filter structure, display substrate, display panel and display device
CN111065887A (en) * 2017-09-12 2020-04-24 Asml控股股份有限公司 Beam pointing monitoring and compensation system
CN108761617A (en) * 2018-03-23 2018-11-06 中国科学院上海光学精密机械研究所 Cavity-enhanced high reflection wave plate of medium and preparation method thereof
JP7031446B2 (en) 2018-03-30 2022-03-08 大日本印刷株式会社 Organic electroluminescence display device
JP2019179717A (en) * 2018-03-30 2019-10-17 大日本印刷株式会社 Organic electroluminescent display device
CN108919404A (en) * 2018-07-03 2018-11-30 深圳市融光纳米科技有限公司 The insensitive transmission filter of angle
CN109581565A (en) * 2019-01-03 2019-04-05 京东方科技集团股份有限公司 Reflective filtering device, display panel, display device and control method
US11099422B2 (en) 2019-01-03 2021-08-24 Boe Technology Group Co., Ltd. Reflective filter comprising a periodic array structure having an equivalent refractive index and display panel having the same, display device and control method thereof
WO2020140702A1 (en) * 2019-01-03 2020-07-09 京东方科技集团股份有限公司 Display panel, display apparatus, reflective filter device and control method therefor
CN109581565B (en) * 2019-01-03 2021-01-26 京东方科技集团股份有限公司 Reflective filter device, display panel, display device and control method
CN109932765A (en) * 2019-02-28 2019-06-25 湖北大学 A kind of light absorber and preparation method thereof based on two-dimensional grating
CN112764146A (en) * 2019-10-21 2021-05-07 宁波舜宇车载光学技术有限公司 Optical device and light source and application thereof
CN112764146B (en) * 2019-10-21 2023-09-29 宁波舜宇车载光学技术有限公司 Optical device and light source and application thereof
CN110737039A (en) * 2019-11-04 2020-01-31 江苏集萃智能传感技术研究所有限公司 reflection type color filter and application thereof
CN111323957A (en) * 2020-01-15 2020-06-23 武汉大学 Color flexible display module and preparation method thereof
CN112216218A (en) * 2020-09-18 2021-01-12 哈尔滨工业大学 Dynamic plasma pixel and full-color adjusting method thereof
CN112216218B (en) * 2020-09-18 2022-07-26 哈尔滨工业大学 Dynamic plasma pixel and full-color adjusting method thereof
CN113281929A (en) * 2021-03-04 2021-08-20 桂林电子科技大学 Electrotunable liquid crystal gap plasma structure color filter
CN113281929B (en) * 2021-03-04 2022-07-12 桂林电子科技大学 Electrotunable liquid crystal gap plasma structure color filter
CN114395153A (en) * 2021-12-28 2022-04-26 宁波信泰机械有限公司 White light transmitting composite film layer and preparation method and application thereof
CN115201953A (en) * 2022-08-22 2022-10-18 之江实验室 Double-working-band high-diffraction-efficiency composite reflection grating
CN115390175A (en) * 2022-09-20 2022-11-25 湖南工商大学 High-reflection and narrow-bandwidth all-dielectric optical filter and preparation method and application thereof
CN115390175B (en) * 2022-09-20 2024-04-26 湖南工商大学 High-reflection and narrow-bandwidth all-dielectric filter and preparation method and application thereof

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