CN102778295B - 在线测量发光二极管外延片光致发光光谱装置 - Google Patents
在线测量发光二极管外延片光致发光光谱装置 Download PDFInfo
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CN103526190A (zh) * | 2013-10-14 | 2014-01-22 | 中国科学院半导体研究所 | 用于mocvd系统中控制外延片发光波长及均匀性的装置与方法 |
CN104697645B (zh) * | 2013-12-05 | 2017-11-03 | 北京智朗芯光科技有限公司 | 一种在线实时检测外延片温度的装置及方法 |
CN105506733A (zh) * | 2015-12-23 | 2016-04-20 | 圆融光电科技股份有限公司 | 外延生长设备 |
CN106940303A (zh) * | 2017-03-02 | 2017-07-11 | 中国科学院半导体研究所 | 在mocvd中测量半导体薄膜杂质电离能的无损测量方法 |
CN108956550A (zh) * | 2018-06-12 | 2018-12-07 | 华灿光电(浙江)有限公司 | 一种光致发光光谱处理的方法和装置 |
CN117169173B (zh) * | 2023-10-12 | 2024-02-23 | 苏州长光华芯光电技术股份有限公司 | 外延片光致发光测试装置及其工作方法 |
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Effective date of registration: 20140314 Address after: 330047 No. seven, No. 192, hi tech Zone, Nanchang hi tech Zone, Jiangxi Applicant after: Nanchang Huanglv Lighting Co., Ltd. Applicant after: Nanchang University Address before: 330047 No. seven, No. 192, hi tech Zone, Nanchang hi tech Zone, Jiangxi Applicant before: Nanchang Huanglv Lighting Co., Ltd. |
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Address after: Annex building 2, engineering technology research center, No. 679, aixihu North Road, Nanchang high tech Industrial Development Zone, Nanchang City, Jiangxi Province Co-patentee after: Nanchang University Patentee after: NANCHANG GUIJI SEMICONDUCTOR TECHNOLOGY Co.,Ltd. Address before: 330047 No. seven, No. 192, hi tech Zone, Nanchang hi tech Zone, Jiangxi Co-patentee before: Nanchang University Patentee before: NANCHANG HUANGLYU LIGHTING Co.,Ltd. |