CN102776062A - Treatment method of silicon wafer cutting liquid waste - Google Patents
Treatment method of silicon wafer cutting liquid waste Download PDFInfo
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- CN102776062A CN102776062A CN2012102464707A CN201210246470A CN102776062A CN 102776062 A CN102776062 A CN 102776062A CN 2012102464707 A CN2012102464707 A CN 2012102464707A CN 201210246470 A CN201210246470 A CN 201210246470A CN 102776062 A CN102776062 A CN 102776062A
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Abstract
The invention discloses a treatment method of silicon wafer cutting liquid waste. Superfine silicon carbide and silicon powder can be recycled by the treatment method. The treatment method includes the steps of A, subjecting the cutting liquid waste to solid-liquid separation to separate polyethylene glycol liquid, silicon carbide particles and silicon powder particles from the cutting waste; B, classifying the silicon carbide in which the silicon powder is mixed to remove superfine silicon carbide more than 1300 meshes; and C, separating the silicon powder and the superfine silicon carbide from the mixture of the superfine silicon carbide and the silicon powder by heavy liquid separation and electrophoresis. By the treatment method of silicon wafer cutting liquid waste, the polyethylene glycol and the silicon carbide can be recycled, the superfine silicon carbide and the silicon powder can also be recycled and cyclically introduced into a production line, resources are effectively utilized, consumption of the raw materials is reduced, the cost of silicon wafers can be reduced, and environmental pollution can also be reduced greatly. The treatment method of silicon wafer cutting liquid waste is applicable to the field of liquid waste treatment.
Description
Technical field
The present invention relates to the liquid waste disposal field, especially a kind of treatment process of silicon chip cutting waste liquor.
Background technology
Silicon chip is the main production material in semi-conductor and photovoltaic field; The multi-thread cutting technique of silicon chip is present more advanced in the world silicon chip processing technology, and it is different from cutting modes such as traditional knife saw sheet, grinding wheel, also is different from advanced laser cutting and interior circle cutting; Its principle is that the steel wire through a high-speed motion drives and attached to the cutting liquid on the steel wire silicon rod rubbed; Thereby reach cutting effect, in whole process, steel wire is through the guiding of line roller; Form a bracing cable net on the online roller, and workpiece to be processed is realized the feeding of workpiece through the decline of worktable.The multi-thread cutting technique of silicon chip is compared with other technologies has the efficient height, and production capacity is high, the precision advantages of higher, and therefore, multi-thread cutting technique is a silicon chip cutting technique the most widely at present.
In multi-thread cutting technique; Employed cutting liquid is normally formulated according to a certain percentage by the silicon-carbide particle about polyoxyethylene glycol and 1200 orders, and cutting liquid inevitably can mix with the silica flour under the cutting in the process of cutting silicon rod, forms a large amount of cutting waste liquors; And the part silicon-carbide particle can breakage occur because of cutting action in the cutting liquid; Make the order number of partially carbonized silicon increase, therefore, cutting waste liquor can't directly reuse.Contain a lot of resources in the cutting waste liquor, such as silit, silica flour or the like, if directly emit, not only cause the waste resource, also pollute the environment simultaneously, therefore, be the difficult problem of photovoltaic industry for the processing of cutting waste liquor always.
At present; Treatment process for cutting waste liquor adopts following mode usually: at first; Cutting waste liquor is carried out solid-liquid separation; The polyoxyethylene glycol liquid that is about in the cutting waste liquor separates with silicon-carbide particle, silicon powder particle, obtains polyoxyethylene glycol liquid and the silit solid that is mixed with silica flour, and isolated polyoxyethylene glycol liquid is through further can become the recycling of cutting liquid as preparation of raw material after the processing once more; Then; The silit that is mixed with silica flour to separating carries out stage treatment; Remove the order number greater than 1300 purpose superfine silicon carbides, the less silit of remaining order number can be made into new cutting liquid to be continued to use, because the density of silit and silica flour is more or less the same; Therefore, all contain silica flour no matter be in remaining silit or the superfine silicon carbide of separating; At last, the number of separating is the bigger superfine silicon carbide that is mixed with silica flour emits through after the chemical treatment.Existing cutting waste liquor processing mode only can be recycled polyoxyethylene glycol and a part of silit, generally can't effectively recycle for superfine silicon carbide in the cutting waste liquor and silica flour.
At present, separate the centrifugal isolating mode of main employing with silit, silicon grain for the polyoxyethylene glycol liquid in the cutting waste liquor, promptly; In cutting waste liquor, add a certain amount of water earlier, polyoxyethylene glycol is dissolved in the water fully, then aforesaid liquid is fed horizontal spiral centrifuge; Handle through multistage centrifugal, realize that polyoxyethylene glycol liquid separates with silit, silicon grain, then polyoxyethylene glycol is distilled processing can obtain polyoxyethylene glycol; This mode needs special centrifugation apparatus and the distillation plant bought, and the cost of input is bigger, and; These two kinds of equipment need consume a large amount of electric energy when work, further increased production cost.
At present, mainly adopt the mode of pneumatic classification, promptly utilize high pressure gas to wash away the silit that is mixed with silica flour for the stage treatment of the silit that is mixed with silica flour; Because the silicon-carbide particle weight of different meshes has nothing in common with each other, therefore, the silit of different meshes can be deposited in different positions under same wind effect; Realize the classification of silit, though this mode also can realize the classification of silit; Because the weight of the silicon-carbide particle of different meshes is more or less the same; Under the washing away of high velocity air, the silicon-carbide particle of different meshes still can mix, and grading effect is relatively poor.
Summary of the invention
Technical problem to be solved by this invention provides a kind of silicon chip cutting waste liquor treatment process that can reclaim superfine silicon carbide and silica flour.
The technical solution adopted for the present invention to solve the technical problems is: this silicon chip cutting waste liquor treatment process may further comprise the steps:
A, cutting waste liquor is carried out solid-liquid separation, the polyoxyethylene glycol liquid in the cutting waste liquor is separated with silicon-carbide particle, silicon powder particle, obtain polyoxyethylene glycol liquid and the silit solid that is mixed with silica flour;
B, the silit of separating that is mixed with silica flour is carried out stage treatment, remove the order number greater than 1300 purpose superfine silicon carbides;
C, the superfine silicon carbide that is mixed with silica flour that will separate adopt the heavy-fluid separation to separate wherein silica flour and superfine silicon carbide with the method that electrophoresis combines; Concrete grammar is following: earlier the superfine silicon carbide that the is mixed with silica flour melting equipment of packing into; Be heated to more than 2500 ℃, superfine silicon carbide and silica flour are all melted, the liquid after then it being melted injects in the quartz crucible; Under action of gravity; Superfine silicon carbide liquid and silicon liquid are divided into two-layer in quartz crucible, and superfine silicon carbide liquid is positioned at the upper strata of quartz crucible, and silicon liquid is positioned at quartz crucible lower floor; After treating temperature cooling, will solidify the back solid and take out and cut in the quartz crucible and obtain silicon ingot and superfine silicon carbide ingot.
Further be that in step C, superfine silicon carbide after will melting and silicon liquid inject before the quartz crucible, earlier quartz crucible are preheating to 1200 ℃.
Further be that in step C, employed quartz crucible bottom is provided with heating unit.
Further be; In steps A, adopt the equipment for separating liquid from solid that is described below that cutting waste liquor is carried out solid-liquid separation, said equipment for separating liquid from solid comprises the separation conically shaped; The bigger diameter end that separates conically shaped up and be provided with the cutting waste liquor import; The miner diameter end of said separation conically shaped is provided with dismountable plugging structure, and said separation conically shaped top is provided with the polyoxyethylene glycol liquid outlet, and the inwall of said separation conically shaped and the angle of gravity direction are 5 °～45 °.
Further be; Be provided with the assistant depositing cone in the said separation conically shaped; Said assistant depositing cone is positioned at the miner diameter end that separates conically shaped, and there is the gap in the awl point of assistant depositing cone between the bottom margin of assistant depositing cone and the inwall that separates conically shaped up.
Further be; Be provided with auxiliary wriggling awl tube in the said separation conically shaped; Said auxiliary wriggling awl tube is arranged on assistant depositing cone below; There is the gap in the bigger diameter end of the both ends open of auxiliary wriggling awl tube and auxiliary wriggling awl tube between the bottom margin of auxiliary wriggling awl tube and the inwall that separates conically shaped down.
Further be; In step B, adopt hydraulic grading device that the silit that is mixed with silica flour is carried out stage treatment; Said hydraulic grading device comprises the classification conically shaped; The bigger diameter end of classification conically shaped up and be provided with opening for feed, the miner diameter end of said classification conically shaped is provided with dismountable plugging part, said classification conically shaped top is provided with the superfine silicon carbide liquid outlet; Said classification conically shaped bottom is provided with water-in, and the inwall of said classification conically shaped and the angle of gravity direction are 5 °～45 °.
Further be, said superfine silicon carbide liquid outlet below is provided with collecting tank, is connected with the liquid pipe on the said water-in, and the liquid pipe the other end is communicated with collecting tank, and said liquid pipe is provided with water pump.
Further be, be connected with return line on the said liquid pipe, the termination of return line is stretched in the collecting tank, and said return line is provided with stopping valve, and said liquid pipe is provided with tensimeter.
Further be that said liquid pipe is provided with liquid storage cylinder.
The invention has the beneficial effects as follows: this treatment process adopts heavy-fluid to separate the method that combines with electrophoresis the superfine silicon carbide of separating that is mixed with silica flour is handled; Can therefrom isolate silica flour and superfine silicon carbide, silica flour that obtains and superfine silicon carbide can further be processed into the silicon product, realize the recycling of superfine silicon carbide and silica flour; Therefore; This cutting waste liquor treatment process not only can be recycled polyoxyethylene glycol and silit, can also recycle superfine silicon carbide and silica flour simultaneously, and its circulation is got in the production line; The realization resources effective is utilized; Reduce the usage quantity of raw material, not only can reduce the cost of silicon chip, and can also reduce environmental pollution to a great extent.
Description of drawings
Fig. 1 is an equipment for separating liquid from solid structural representation of the present invention;
Fig. 2 is a hydraulic grading device structural representation of the present invention;
Be labeled as among the figure: separate conically shaped 201, cutting waste liquor import 202, plugging structure 203, polyoxyethylene glycol liquid outlet 204, assistant depositing cone 205, auxiliary wriggling awl tube 206, riser 207, classification conically shaped 301, opening for feed 302, plugging part 303, superfine silicon carbide liquid outlet 304, water-in 305, collecting tank 306, liquid pipe 307, water pump 308, return line 309, stopping valve 310, tensimeter 311, liquid storage cylinder 312.
Embodiment
Below in conjunction with accompanying drawing the present invention is further specified.
This silicon chip cutting waste liquor treatment process may further comprise the steps:
A, cutting waste liquor is carried out solid-liquid separation; Polyoxyethylene glycol liquid in the cutting waste liquor is separated with silicon-carbide particle, silicon powder particle; Obtain polyoxyethylene glycol liquid and the silit solid that is mixed with silica flour; Isolated polyoxyethylene glycol liquid is realized the recycling of polyoxyethylene glycol through further becoming the recycling of cutting liquid as preparation of raw material once more after the processing;
B, the silit of separating that is mixed with silica flour is carried out stage treatment; Remove the order number greater than 1300 purpose superfine silicon carbides; The less silit of remaining order number can be made into new cutting liquid to be continued to use, and realizes the recycling of silit, because the density of silit and silica flour is more or less the same; Therefore, all contain silica flour no matter be in remaining silit or the superfine silicon carbide of separating;
C, the superfine silicon carbide that is mixed with silica flour that will separate adopt the heavy-fluid separation to separate wherein silica flour and superfine silicon carbide with the method that electrophoresis combines; Concrete grammar is following: earlier the superfine silicon carbide that the is mixed with silica flour melting equipment of packing into; Be heated to more than 2500 ℃; Superfine silicon carbide and silica flour are all melted, and the liquid after then it being melted injects in the quartz crucible, because the solid-state density of superfine silicon carbide down is 2.3g/cm
3, the density of silicon is 2.32g/cm
3Yet,, after the two all melted, the density of superfine silicon carbide remained unchanged basically, but the density of silicon is but by original 2.32g/cm
3Be changed to 2.43g/cm
3Because density difference, under action of gravity, superfine silicon carbide liquid and silicon liquid are divided into two-layer in quartz crucible; Superfine silicon carbide liquid is positioned at the upper strata of quartz crucible; Silicon liquid is positioned at quartz crucible lower floor, treat temperature cooling after, will solidify the back solid and take out and cut in the quartz crucible and obtain silicon ingot and superfine silicon carbide ingot.Through aforesaid method the superfine silicon carbide of separating that is mixed with silica flour is handled, can therefrom be isolated silica flour and superfine silicon carbide, silica flour that obtains and superfine silicon carbide can further be processed into the silicon product; Realize the recycling of superfine silicon carbide and silica flour, therefore, this cutting waste liquor treatment process not only can be recycled polyoxyethylene glycol and silit; Simultaneously can also reclaim superfine silicon carbide and silica flour; Its circulation is got in the production line, realize the resources effective utilization, reduce the usage quantity of raw material; Not only can reduce the cost of silicon chip, and can also reduce environmental pollution to a great extent.
In above-mentioned steps C; Superfine silicon carbide after will melting and silicon liquid if the temperature of quartz crucible is lower, will cause superfine silicon carbide and the quick cooled and solidified of silicon liquid after injecting in the quartz crucible; Make that superfine silicon carbide liquid and silicon liquid can't layerings; Therefore for fear of the generation of above-mentioned situation, superfine silicon carbide after will melting and silicon liquid inject before the quartz crucible, earlier quartz crucible are preheating to 1200 ℃.
Further be; In step C, in order to make superfine silicon carbide liquid and silicon liquid competent time layering can be arranged, it is separated fully; Guarantee the purity of silica flour and the purity of superfine silicon carbide; Be provided with heating unit in the quartz crucible bottom, make the reduction of the temperature gradual slow in the quartz crucible, guarantee that superfine silicon carbide liquid can separate with silicon liquid fully.Said heating unit can be ir heaters, quartz tube heater etc., and as preferred mode be: said heating unit is a resistance heater, and the resistance heater rate of heating is fast, and is convenient to control its Heating temperature.
In step C; Employed melting equipment is for being existing various heating installation, and as preferred mode be: said melting equipment is the Medium frequency induction melting equipment, and this Medium frequency induction melting equipment rate of heating is fast; And energy consumption is low, can reduce production costs greatly.
In steps A, cutting waste liquor is carried out solid-liquid separation can adopt numerous embodiments, for example; Can adopt centrifugal isolating mode, that is, in cutting waste liquor, add a certain amount of water earlier; Polyoxyethylene glycol is dissolved in the water fully, then aforesaid liquid is fed horizontal spiral centrifuge, handle through multistage centrifugal; Realize that polyoxyethylene glycol liquid separates with silit, silicon grain, then polyoxyethylene glycol is distilled processing can obtain polyoxyethylene glycol, as preferred mode is: adopt the equipment for separating liquid from solid that is described below that cutting waste liquor is carried out solid-liquid separation; As shown in Figure 1; Said equipment for separating liquid from solid comprises and separates conically shaped 201, the bigger diameter end that separates conically shaped 201 up and be provided with cutting waste liquor import 202, the miner diameter end of said separation conically shaped 201 is provided with dismountable plugging structure 203; Said separation conically shaped 201 tops are provided with polyoxyethylene glycol liquid outlet 204, and the inwall of said separation conically shaped 201 and the angle of gravity direction are 5 °～45 °.The equipment for separating liquid from solid of this structure, simple in structure, only need cutting waste liquor is injected in the separation conically shaped 201 through cutting waste liquor import 202; Under action of gravity, silicon-carbide particle can be deposited on the inwall that separates conically shaped 201 gradually with silica flour, and piles up along the inwall that the tilts bottom that slides to separation cone shape tube 201 down of wriggling gradually; Deng being stacked into to a certain degree, plugging structure 203 is removed, the silit that is mixed with silica flour is discharged from the miner diameter end that separates conically shaped 201; The polyoxyethylene glycol liquid that separates in the conically shaped 201 is then discharged from polyoxyethylene glycol liquid outlet 204; Realize solid-liquid separation, whole apparatus structure is simple, and processing and fabricating is very convenient; Only need very low cost to accomplish cutting waste liquor is carried out solid-liquid separation, greatly reduce production cost.
For the silit that is deposited on the inwall that separates conically shaped 201 and silica flour are piled up along the inwall that separates conically shaped 201 that the tilts bottom that slides to separation cone shape tube 201 down of wriggling gradually smoothly, the inwall of said separation conically shaped 201 and the angle of gravity direction are preferably 25 °.
In order to accelerate the deposition process of silicon-carbide particle and silica flour; In separating conically shaped 201, be provided with assistant depositing cone 205; Said assistant depositing cone 205 is positioned at the miner diameter end that separates conically shaped 201, and there is the gap in the awl point of assistant depositing cone 205 between the bottom margin of assistant depositing cone 205 and the inwall that separates conically shaped 201 up; Through assistant depositing cone 205 is set; Can make separation cone shape tube 201 intermediary silit and silicon powder deposit on the conical surface of assistant depositing cone 205, gliding and fall from the bottom margin of assistant depositing cone 205 and gap between the inwall that separates conically shaped 201 along the conical surface then is stacked into the bottom of separating conically shaped 201, has accelerated the deposition process of silicon-carbide particle and silica flour greatly; Shorten the needed time of deposition of silicon-carbide particle and silica flour, improved efficient.
Pile up along the inwall that separates conically shaped 201 that the tilts bottom that slides to separation cone shape tube 201 down of wriggling gradually smoothly in order further to make the silit that is deposited on the inwall that separates conically shaped 201 and silica flour; In separating conically shaped 201, be provided with auxiliary wriggling awl tube 206; Said auxiliary wriggling awl tube 206 is arranged on assistant depositing cone 205 belows; The bigger diameter end of the both ends open of auxiliary wriggling awl tube 206 and auxiliary wriggling awl tube 206 down; There is the gap between auxiliary wriggle bottom margin of boring tube 206 and the inwall that separates conically shaped 201; The working process that should assist wriggles bores tube 206 is following: the auxiliary liquid of boring 206 below of wriggling gets more and more and makes progress mobile along with separating silit and the silica flour piled up conically shaped 201 bottoms; The move upward bottom of running into assistant depositing cone 205 of this partially liq flows downward along the slit between assistant depositing cone 205 and the auxiliary wriggling awl tube 206 then and flows to auxiliary wriggling cone below through auxiliary wriggling awl tube 206 bottom margins with the gap of separating between conically shaped 201 inwalls; This partially liq can drive the silit and the silica flour that are deposited on separation conically shaped 201 inwalls and move downward in flow process, play the purpose of auxiliary wriggling.
The cutting waste liquor that separates in the conically shaped 201 is too much for fear of injecting; Causing cutting waste liquor to scatter overflows; Top separating conically shaped 201 is provided with riser 207; Through riser 207 unnecessary cutting waste liquor is overflowed to appointed positions, avoid scattering overflowing and cause unnecessary trouble to production process.
Said plugging structure 203 can adopt modes such as plug, stopper to realize; As preferred mode be: at the miner diameter end that separates conically shaped 201 valve is set and forms described plugging structure 203; This plugging structure 203 need not remove it can realize discharging the silit fixed purpose that is mixed with silica flour, and operation is very easy.
In step B, the silit that is mixed with silica flour is carried out stage treatment can adopt numerous embodiments, for example; Can adopt the mode of pneumatic classification, promptly utilize high pressure gas to wash away to be mixed with the silit of silica flour, because the silicon-carbide particle weight of different meshes has nothing in common with each other; Therefore, the silit of different meshes can be deposited in different positions under same wind effect, realizes the classification of silit; As preferred mode be: adopt hydraulic grading device that the silit that is mixed with silica flour is carried out stage treatment, as shown in Figure 2, said hydraulic grading device comprises classification conically shaped 301; The bigger diameter end of classification conically shaped 301 up and be provided with opening for feed 302, the miner diameter end of said classification conically shaped 301 is provided with dismountable plugging part 303, said classification conically shaped 301 tops are provided with superfine silicon carbide liquid outlet 304; Said classification conically shaped 301 bottoms are provided with water-in 305, and the inwall of said classification conically shaped 301 and the angle of gravity direction are 5 °～45 °, and the use of this hydraulic grading device is following: at first; The silit of separating that is mixed with silica flour is dropped in the classification conically shaped 301, through water-in 305 water is injected in the classification conically shaped 301 then, because the silicon-carbide particle of different meshes varies in weight; The silicon-carbide particle weight that the order number is bigger is lighter; The less silicon-carbide particle weight of order number is heavier, and the current that inject in the classification conically shapeds 301 from water-in 305 have certain pressure, under the impact of current; The lighter silicon-carbide particle of weight is on the top that is flushed to classification conically shaped 301; And then discharge from superfine silicon carbide liquid outlet 304, dry the superfine silicon carbide solid that processing can obtain being mixed with silica flour then, the silicon-carbide particle that the order number is less and silica flour then are suspended in classification conically shaped 301 bottoms and then deposit on the inwall of classification conically shaped 301 and pile up wriggling descends to slide to classfied cone shape tube 301 gradually bottom; Deng being stacked into to a certain degree; Plugging part 303 is removed, the silit that is mixed with silica flour is discharged from the miner diameter end of classification conically shaped 301, and then be mixed with cutting liquid and reuse; Realization is to the stage treatment of the silit that is mixed with silica flour; This hydraulic grading device goes out the bigger silit of order number according to the big I clean cut separation of adjustment water-in 305 hydraulic pressure, and grading effect is better, and simple in structure; Processing and fabricating is very convenient, can reduce production costs greatly.
For silit and silica flour on the inwall that is deposited on classification conically shaped 301 are piled up along the inwall of the classification conically shaped 301 that the tilts bottom that slides to classfied cone shape tube 301 down of wriggling gradually smoothly, the inwall of said classification conically shaped 301 and the angle of gravity direction are preferably 25 °.
Collect superfine silicon carbide for ease, below superfine silicon carbide liquid outlet 304, be provided with collecting tank 306.
In order to economize on resources, avoid causing waste, be connected with liquid pipe 307 on the said water-in 305, liquid pipe 307 the other ends are communicated with collecting tank 306, and said liquid pipe 307 is provided with water pump 308, the water circulation use in the collecting tank 306 is got up, thereby reduce production costs.
In order to adjust the hydraulic pressure of water-in 305; On liquid pipe 307, be connected with return line 309, the termination of return line 309 is stretched in the collecting tank 306, and said return line 309 is provided with stopping valve; Can control the water yield in the liquid pipe 307 through the switch stopping valve, thus the hydraulic pressure of adjustment water-in 305.
For the ease of understanding the hydraulic pressure of water-in 305, liquid pipe 307 is provided with tensimeter.
For the water pressure invariableness that guarantees water-in 305 and can uninterruptedly spray water, on liquid pipe 307, be provided with liquid storage cylinder 312 as a buffering, avoid not having in the collecting tank 306 water to cause water-in 305 to spray water and carry out hydraulic classification.
Said plugging part 303 can adopt modes such as plug, stopper to realize; As preferred mode be: at the miner diameter end of classification conically shaped 301 valve is set and forms described plugging part 303; This plugging part 303 need not remove it can realize discharging the silit fixed purpose that is mixed with silica flour, and operation is very easy.
Claims (10)
1. silicon chip cutting waste liquor treatment process is characterized in that may further comprise the steps:
A, cutting waste liquor is carried out solid-liquid separation, the polyoxyethylene glycol liquid in the cutting waste liquor is separated with silicon-carbide particle, silicon powder particle, obtain polyoxyethylene glycol liquid and the silit solid that is mixed with silica flour;
B, the silit of separating that is mixed with silica flour is carried out stage treatment, remove the order number greater than 1300 purpose superfine silicon carbides;
C, the superfine silicon carbide that is mixed with silica flour that will separate adopt the heavy-fluid separation to separate wherein silica flour and superfine silicon carbide with the method that electrophoresis combines; Concrete grammar is following: earlier the superfine silicon carbide that the is mixed with silica flour melting equipment of packing into; Be heated to more than 2500 ℃, superfine silicon carbide and silica flour are all melted, the liquid after then it being melted injects in the quartz crucible; Under action of gravity; Superfine silicon carbide liquid and silicon liquid are divided into two-layer in quartz crucible, and superfine silicon carbide liquid is positioned at the upper strata of quartz crucible, and silicon liquid is positioned at quartz crucible lower floor; After treating temperature cooling, will solidify the back solid and take out and cut in the quartz crucible and obtain silicon ingot and superfine silicon carbide ingot.
2. silicon chip cutting waste liquor treatment process as claimed in claim 1 is characterized in that: in step C, superfine silicon carbide after will melting and silicon liquid inject before the quartz crucible, earlier quartz crucible are preheating to 1200 ℃.
3. silicon chip cutting waste liquor treatment process as claimed in claim 2 is characterized in that: in step C, employed quartz crucible bottom is provided with heating unit.
4. silicon chip cutting waste liquor treatment process as claimed in claim 1; It is characterized in that: in steps A; The equipment for separating liquid from solid that employing is described below carries out solid-liquid separation to cutting waste liquor; Said equipment for separating liquid from solid comprises and separates conically shaped (201), the bigger diameter end that separates conically shaped (201) up and be provided with cutting waste liquor import (202), the miner diameter end of said separation conically shaped (201) is provided with dismountable plugging structure (203); Said separation conically shaped (201) top is provided with polyoxyethylene glycol liquid outlet (204), and the inwall of said separation conically shaped (201) and the angle of gravity direction are 5 °～45 °.
5. silicon chip cutting waste liquor treatment process as claimed in claim 4; It is characterized in that: be provided with assistant depositing cone (205) in the said separation conically shaped (201); Said assistant depositing cone (205) is positioned at the miner diameter end that separates conically shaped (201); There is the gap in the awl point of assistant depositing cone (205) between the bottom margin of assistant depositing cone (205) and the inwall that separates conically shaped (201) up.
6. silicon chip cutting waste liquor treatment process as claimed in claim 5; It is characterized in that: be provided with auxiliary wriggling awl tube (206) in the said separation conically shaped (201); Said auxiliary wriggling awl tube (206) is arranged on assistant depositing cone (205) below; There is the gap in the bigger diameter end of the both ends open of auxiliary wriggling awl tube (206) and auxiliary wriggling awl tube (206) between the bottom margin of auxiliary wriggling awl tube (206) and the inwall that separates conically shaped (201) down.
7. according to any described silicon chip cutting waste liquor of claim treatment process in the claim 1 to 6, it is characterized in that:
In step B; Adopt hydraulic grading device that the silit that is mixed with silica flour is carried out stage treatment; Said hydraulic grading device comprises classification conically shaped (301); The bigger diameter end of classification conically shaped (301) up and be provided with charging (302), the miner diameter end of said classification conically shaped (301) is provided with dismountable plugging part (303), said classification conically shaped (301) top is provided with superfine silicon carbide liquid outlet (304); Said classification conically shaped (301) bottom is provided with water-in (305), and the inwall of said classification conically shaped (301) and the angle of gravity direction are 5 °～45 °.
8. silicon chip cutting waste liquor treatment process as claimed in claim 7; It is characterized in that: said superfine silicon carbide liquid outlet (304) below is provided with collecting tank (306); Be connected with liquid pipe (307) on the said water-in (305); Liquid pipe (307) the other end is communicated with collecting tank (306), and said liquid pipe (307) is provided with water pump (308).
9. silicon chip cutting waste liquor treatment process as claimed in claim 8; It is characterized in that: be connected with return line (309) on the said liquid pipe (307); The termination of return line (309) is stretched in the collecting tank (306); Said return line (309) is provided with stopping valve (310), and said liquid pipe (307) is provided with tensimeter (311).
10. silicon chip cutting waste liquor treatment process as claimed in claim 9 is characterized in that: said liquid pipe (307) is provided with liquid storage cylinder (312).
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103601191A (en) * | 2013-11-08 | 2014-02-26 | 江南大学 | Method for continuously recycling silicon powder from waste mortar in silicon chip cutting process |
| CN103601191B (en) * | 2013-11-08 | 2016-08-17 | 江南大学 | A kind of method of silica flour in continuous recycling silicon chip cutting processing waste mortar |
| CN105152438A (en) * | 2015-07-28 | 2015-12-16 | 江西申山能源科技有限公司 | Silicon wafer cutting sewage treatment method |
| CN109110766A (en) * | 2018-10-16 | 2019-01-01 | 青岛蓝光晶科新材料有限公司 | The method and apparatus that silicon material efficiently purifies after a kind of medium melting |
| CN109110766B (en) * | 2018-10-16 | 2023-09-01 | 青岛蓝光晶科新材料有限公司 | Method and device for efficiently purifying silicon material after medium smelting |
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