CN102776062B - Treatment method of silicon wafer cutting liquid waste - Google Patents
Treatment method of silicon wafer cutting liquid waste Download PDFInfo
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- CN102776062B CN102776062B CN201210246470.7A CN201210246470A CN102776062B CN 102776062 B CN102776062 B CN 102776062B CN 201210246470 A CN201210246470 A CN 201210246470A CN 102776062 B CN102776062 B CN 102776062B
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Abstract
The invention discloses a treatment method of silicon wafer cutting liquid waste. Superfine silicon carbide and silicon powder can be recycled by the treatment method. The treatment method includes the steps of A, subjecting the cutting liquid waste to solid-liquid separation to separate polyethylene glycol liquid, silicon carbide particles and silicon powder particles from the cutting waste; B, classifying the silicon carbide in which the silicon powder is mixed to remove superfine silicon carbide more than 1300 meshes; and C, separating the silicon powder and the superfine silicon carbide from the mixture of the superfine silicon carbide and the silicon powder by heavy liquid separation and electrophoresis. By the treatment method of silicon wafer cutting liquid waste, the polyethylene glycol and the silicon carbide can be recycled, the superfine silicon carbide and the silicon powder can also be recycled and cyclically introduced into a production line, resources are effectively utilized, consumption of the raw materials is reduced, the cost of silicon wafers can be reduced, and environmental pollution can also be reduced greatly. The treatment method of silicon wafer cutting liquid waste is applicable to the field of liquid waste treatment.
Description
Technical field
The present invention relates to the liquid waste disposal field, especially a kind for the treatment of process of silicon chip cutting waste liquor.
Background technology
Silicon chip is the main production material in semi-conductor and photovoltaic field, the Multi-wire wafer cutting technique is current more advanced silicon chip processing technology in the world, it is different from traditional knife saw sheet, the cutting modes such as grinding wheel, also be different from advanced laser cutting and inner circle cutting, its principle is that the steel wire by a high-speed motion drives the cutting liquid be attached on steel wire silicon rod is rubbed, thereby reach cutting effect, in whole process, steel wire is by the guiding of line roller, form a bracing cable net on online roller, and workpiece to be processed is realized the feeding of workpiece by the decline of worktable.The Multi-wire wafer cutting technique compares with other technologies that to have efficiency high, and production capacity is high, the precision advantages of higher, and therefore, the multi-wire saw technology is silicon chip cutting technique the most widely at present.
In the multi-wire saw technology; the cutting liquid used is normally formulated according to a certain percentage by the silicon-carbide particle of polyoxyethylene glycol and 1200 orders left and right; cutting liquid inevitable meeting in the process of cutting silicon rod mixes with the silica flour under cutting; form a large amount of cutting waste liquors; and in cutting liquid, the part silicon-carbide particle can breakage occur because of cutting action; make the order number of partially carbonized silicon increase, therefore, cutting waste liquor can't directly reuse.Contain a lot of resources in cutting waste liquor, such as silicon carbide, silica flour etc., if directly emit, not only cause the waste resource, also pollute the environment simultaneously, therefore, be the difficult problem of photovoltaic industry for the processing of cutting waste liquor always.
At present, treatment process for cutting waste liquor adopts following mode usually: at first, cutting waste liquor is carried out to solid-liquid separation, the polyoxyethylene glycol liquid be about in cutting waste liquor separates with silicon-carbide particle, silicon powder particle, obtain polyoxyethylene glycol liquid and the silicon carbide solid that is mixed with silica flour, isolated polyoxyethylene glycol liquid can again become the cutting liquid recycling as preparation of raw material after further processing; Then, the silicon carbide that is mixed with silica flour of separating is carried out to stage treatment, remove the order number and be greater than 1300 purpose superfine silicon carbides, the silicon carbide that remaining order number is less can be made into new cutting liquid to be continued to use, because the density of silicon carbide and silica flour is more or less the same, therefore, all contain silica flour no matter be in remaining silicon carbide or the superfine silicon carbide of separating; Finally, the larger superfine silicon carbide that is mixed with silica flour of number of separating is emitted after chemical treatment.Existing cutting waste liquor processing mode only can be recycled polyoxyethylene glycol and a part of silicon carbide, for the superfine silicon carbide in cutting waste liquor and silica flour, generally can't effectively recycle.
At present, for polyoxyethylene glycol liquid and the silicon carbide in cutting waste liquor, silicon grain separates the main mode that adopts centrifugal separation, , first in cutting waste liquor, add a certain amount of water, make polyoxyethylene glycol be dissolved in water fully, then aforesaid liquid is passed into to horizontal spiral centrifuge, by multistage centrifugal, process, realize polyoxyethylene glycol liquid and silicon carbide, silicon grain separates, then polyoxyethylene glycol is distilled process and can obtain polyoxyethylene glycol, this mode needs special centrifugation apparatus and the distillation plant bought, the cost dropped into is larger, and, these two kinds of equipment need to consume a large amount of electric energy when work, further increased production cost.
At present, mainly adopt the mode of pneumatic classification for the stage treatment of the silicon carbide that is mixed with silica flour, utilize high pressure gas to wash away the silicon carbide that is mixed with silica flour, because the silicon-carbide particle weight of different meshes is different, therefore, under same wind effect, the silicon carbide of different meshes can be deposited in different positions, realize the classification of silicon carbide, although this mode also can realize the classification of silicon carbide, but, because the weight of the silicon-carbide particle of different meshes is more or less the same, under the washing away of high velocity air, the silicon-carbide particle of different meshes still can mix, grading effect is poor.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of silicon chip cutting waste liquor treatment process that can reclaim superfine silicon carbide and silica flour.
The technical solution adopted for the present invention to solve the technical problems is: this silicon chip cutting waste liquor treatment process comprises the following steps:
A, cutting waste liquor is carried out to solid-liquid separation, the polyoxyethylene glycol liquid in cutting waste liquor is separated with silicon-carbide particle, silicon powder particle, obtain polyoxyethylene glycol liquid and be mixed with the silicon carbide solid of silica flour;
B, the silicon carbide that is mixed with silica flour of separating is carried out to stage treatment, remove the order number and be greater than 1300 purpose superfine silicon carbides;
C, adopt heavy-fluid to separate the method combined with electrophoresis the superfine silicon carbide that is mixed with silica flour of separating and separate silica flour and superfine silicon carbide wherein, concrete grammar is as follows: first the superfine silicon carbide that the is mixed with silica flour melting equipment of packing into, be heated to more than 2500 ℃, superfine silicon carbide and silica flour are all melted, then the liquid after it being melted injects in quartz crucible, under action of gravity, superfine silicon carbide liquid and silicon liquid are divided into two-layer in quartz crucible, superfine silicon carbide liquid is positioned at the upper strata of quartz crucible, silicon liquid is positioned at quartz crucible lower floor, after temperature is cooling, rear solid be will solidify and silicon ingot and superfine silicon carbide ingot obtained from taking out and cut in quartz crucible.
Further, in step C, the superfine silicon carbide after melting and silicon liquid first are preheating to quartz crucible 1200 ℃ before injecting quartz crucible.
Further, in step C, the quartz crucible bottom of using is provided with heating unit.
Be further, in steps A, adopt equipment for separating liquid from solid as described below to carry out solid-liquid separation to cutting waste liquor, described equipment for separating liquid from solid comprises the separation conically shaped, the bigger diameter end that separates conically shaped upward and be provided with the cutting waste liquor import, the miner diameter end of described separation conically shaped is provided with dismountable plugging structure, and described separation conically shaped top is provided with the polyoxyethylene glycol liquid outlet, and the inwall of described separation conically shaped and the angle of gravity direction are 5 °～45 °.
Be further, be provided with the assistant depositing cone in described separation conically shaped, described assistant depositing cone is positioned at the miner diameter end that separates conically shaped, and, there is gap in the cone point of assistant depositing cone between the bottom margin of assistant depositing cone and the inwall that separates conically shaped upward.
Be further, be provided with the auxiliary cone cylinder of wriggling in described separation conically shaped, described auxiliary wriggling cone cylinder is arranged on assistant depositing cone below, down, there is gap in auxiliary the wriggling between the bottom margin of cone cylinder and the inwall that separates conically shaped to the bigger diameter end of the both ends open of the auxiliary cone cylinder of wriggling and the auxiliary cone cylinder of wriggling.
Be further, in step B, adopt hydraulic grading device to carry out stage treatment to the silicon carbide that is mixed with silica flour, described hydraulic grading device comprises the classification conically shaped, the bigger diameter end of classification conically shaped upward and be provided with opening for feed, the miner diameter end of described classification conically shaped is provided with dismountable plugging part, described classification conically shaped top is provided with the superfine silicon carbide liquid outlet, described classification conically shaped bottom is provided with water-in, and the inwall of described classification conically shaped and the angle of gravity direction are 5 °～45 °.
Further, described superfine silicon carbide liquid outlet below is provided with collecting tank, is connected with the liquid pipe on described water-in, and the liquid pipe the other end is communicated with collecting tank, on described liquid pipe, is provided with water pump.
Further, on described liquid pipe, be connected with return line, the termination of return line is stretched in collecting tank, on described return line, is provided with stopping valve, on described liquid pipe, is provided with tensimeter.
Further, be provided with liquid storage cylinder on described liquid pipe.
The invention has the beneficial effects as follows: this treatment process adopts heavy-fluid to separate the method combined with electrophoresis the superfine silicon carbide that is mixed with silica flour of separating is processed, can therefrom isolate silica flour and superfine silicon carbide, the silica flour obtained and superfine silicon carbide can further be processed into the silicon product, realize the recycling of superfine silicon carbide and silica flour, therefore, this cutting waste liquor treatment process not only can be recycled polyoxyethylene glycol and silicon carbide, can also recycle superfine silicon carbide and silica flour simultaneously, its circulation is entered in production line, realize effective utilization of resource, reduce the usage quantity of raw material, not only can reduce the cost of silicon chip, and can also reduce to a great extent environmental pollution.
The accompanying drawing explanation
Fig. 1 is equipment for separating liquid from solid structural representation of the present invention;
Fig. 2 is hydraulic grading device structural representation of the present invention;
In figure, be labeled as: separate conically shaped 201, cutting waste liquor import 202, plugging structure 203, polyoxyethylene glycol liquid outlet 204, assistant depositing cone 205, auxiliary cone cylinder 206, overflow port 207, classification conically shaped 301, opening for feed 302, plugging part 303, superfine silicon carbide liquid outlet 304, water-in 305, collecting tank 306, liquid pipe 307, water pump 308, return line 309, stopping valve 310, tensimeter 311, the liquid storage cylinder 312 of wriggling.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described.
This silicon chip cutting waste liquor treatment process comprises the following steps:
A, cutting waste liquor is carried out to solid-liquid separation, polyoxyethylene glycol liquid in cutting waste liquor is separated with silicon-carbide particle, silicon powder particle, obtain polyoxyethylene glycol liquid and the silicon carbide solid that is mixed with silica flour, isolated polyoxyethylene glycol liquid can again become the cutting liquid recycling as preparation of raw material after further processing, realizes the recycling of polyoxyethylene glycol;
B, the silicon carbide that is mixed with silica flour of separating is carried out to stage treatment, remove the order number and be greater than 1300 purpose superfine silicon carbides, the silicon carbide that remaining order number is less can be made into new cutting liquid to be continued to use, realize the recycling of silicon carbide, because the density of silicon carbide and silica flour is more or less the same, therefore, all contain silica flour no matter be in remaining silicon carbide or the superfine silicon carbide of separating;
The method that C, the superfine silicon carbide that is mixed with silica flour that will separate adopt the heavy-fluid separation to combine with electrophoresis is separated silica flour and superfine silicon carbide wherein, concrete grammar is as follows: first the superfine silicon carbide that the is mixed with silica flour melting equipment of packing into, be heated to more than 2500 ℃, superfine silicon carbide and silica flour are all melted, then the liquid after it being melted injects in quartz crucible, because the density of solid-state lower superfine silicon carbide is 2.3g/cm
3, the density of silicon is 2.32g/cm
3yet,, after the two all melts, the density of superfine silicon carbide remains unchanged substantially, but the density of silicon is but by original 2.32g/cm
3be changed to 2.43g/cm
3due to density difference, under action of gravity, superfine silicon carbide liquid and silicon liquid are divided into two-layer in quartz crucible, superfine silicon carbide liquid is positioned at the upper strata of quartz crucible, silicon liquid is positioned at quartz crucible lower floor, after temperature is cooling, will solidifies rear solid and obtain silicon ingot and superfine silicon carbide ingot from taking out and cut in quartz crucible.By aforesaid method, the superfine silicon carbide that is mixed with silica flour of separating is processed, can therefrom isolate silica flour and superfine silicon carbide, the silica flour obtained and superfine silicon carbide can further be processed into the silicon product, realize the recycling of superfine silicon carbide and silica flour, therefore, this cutting waste liquor treatment process not only can be recycled polyoxyethylene glycol and silicon carbide, can also reclaim superfine silicon carbide and silica flour simultaneously, its circulation is entered in production line, realize effective utilization of resource, reduce the usage quantity of raw material, not only can reduce the cost of silicon chip, and can also reduce to a great extent environmental pollution.
In above-mentioned steps C, after superfine silicon carbide after melting and silicon liquid inject in quartz crucible, if the temperature of quartz crucible is lower, will cause superfine silicon carbide and the quick cooled and solidified of silicon liquid, make superfine silicon carbide liquid and the silicon liquid can't layering, therefore for fear of the generation of above-mentioned situation, the superfine silicon carbide after melting and silicon liquid first are preheating to quartz crucible 1200 ℃ before injecting quartz crucible.
Be further, in step C, in order to make superfine silicon carbide liquid and silicon liquid that sufficient time layering can be arranged, it is separated fully, guarantee the purity of silica flour and the purity of superfine silicon carbide, be provided with heating unit in the quartz crucible bottom, the temperature in quartz crucible is reduced gradually slowly, guarantee that superfine silicon carbide liquid can separate fully with silicon liquid.Described heating unit can be Infrared heaters, quartz tube heater etc., and as preferred mode, be: described heating unit is resistance heater, and the resistance heater rate of heating is fast, and is convenient to control its Heating temperature.
In step C, the melting equipment used is for being existing various heating installation, and as preferred mode, be: described melting equipment is the Medium frequency induction melting equipment, and this Medium frequency induction melting equipment rate of heating is fast, and energy consumption is low, can greatly reduce production costs.
In steps A, cutting waste liquor is carried out to solid-liquid separation and can adopt numerous embodiments, for example, can adopt the mode of centrifugal separation, , first in cutting waste liquor, add a certain amount of water, make polyoxyethylene glycol be dissolved in water fully, then aforesaid liquid is passed into to horizontal spiral centrifuge, by multistage centrifugal, process, realize polyoxyethylene glycol liquid and silicon carbide, silicon grain separates, then polyoxyethylene glycol is distilled process and can obtain polyoxyethylene glycol, as preferred mode, be: adopt equipment for separating liquid from solid as described below to carry out solid-liquid separation to cutting waste liquor, as shown in Figure 1, described equipment for separating liquid from solid comprises separation conically shaped 201, the bigger diameter end that separates conically shaped 201 upward and be provided with cutting waste liquor import 202, the miner diameter end of described separation conically shaped 201 is provided with dismountable plugging structure 203, described separation conically shaped 201 tops are provided with polyoxyethylene glycol liquid outlet 204, the inwall of described separation conically shaped 201 and the angle of gravity direction are 5 °～45 °.The equipment for separating liquid from solid of this structure, simple in structure, only cutting waste liquor need be injected and separates in conically shaped 201 by cutting waste liquor import 202, under action of gravity, silicon-carbide particle can be deposited on silica flour the inwall that separates conically shaped 201 gradually, and pile up along the bottom that slides to separation cone shape cylinder 201 under the inwall tilted is wriggled gradually, Deng being stacked into to a certain degree, plugging structure 203 is removed, the silicon carbide that is mixed with silica flour is discharged from the miner diameter end that separates conically shaped 201, the polyoxyethylene glycol liquid separated in conically shaped 201 is discharged from polyoxyethylene glycol liquid outlet 204, realize solid-liquid separation, whole apparatus structure is simple, processing and fabricating is very convenient, cost that only need be very low can complete cutting waste liquor is carried out to solid-liquid separation, greatly reduce production cost.
In order better to make to be deposited on silicon carbide on the inwall that separates conically shaped 201 and silica flour, along the bottom that slides to separation cone shape cylinder 201 under the inwall that separates conically shaped 201 tilted is wriggled gradually, pile up smoothly, the inwall of described separation conically shaped 201 and the angle of gravity direction are preferably 25 °.
In order to accelerate the deposition process of silicon-carbide particle and silica flour, be provided with assistant depositing cone 205 within separating conically shaped 201, described assistant depositing cone 205 is positioned at the miner diameter end that separates conically shaped 201, the cone point of assistant depositing cone 205 upward, there is gap between the bottom margin of assistant depositing cone 205 and the inwall that separates conically shaped 201, by assistant depositing cone 205 is set, can make the middle silicon carbide of separation cone shape cylinder 201 and silicon powder deposit on the conical surface of assistant depositing cone 205, then glide and fall and be stacked into the bottom of separating conically shaped 201 from the bottom margin of assistant depositing cone 205 and gap between the inwall that separates conically shaped 201 along the conical surface, greatly accelerated the deposition process of silicon-carbide particle and silica flour, shortened the needed time of deposition of silicon-carbide particle and silica flour, improved efficiency.
In order further to make to be deposited on silicon carbide on the inwall that separates conically shaped 201 and silica flour, along the bottom that slides to separation cone shape cylinder 201 under the inwall that separates conically shaped 201 tilted is wriggled gradually, pile up smoothly, be provided with the auxiliary cone cylinder 206 of wriggling within separating conically shaped 201, described auxiliary wriggling cone cylinder 206 is arranged on assistant depositing cone 205 belows, the bigger diameter end of the both ends open of the auxiliary cone cylinder 206 of wriggling and the auxiliary cone cylinder 206 of wriggling down, there is gap between auxiliary the wriggle bottom margin of boring cylinder 206 and the inwall that separates conically shaped 201, should assist the working process of the cone cylinder 206 of wriggling as follows: the liquid of auxiliary wriggling cone cylinder 206 belows gets more and more and upwards flows along with separating silicon carbide and the silica flour piled up conically shaped 201 bottoms, this partially liq move upward encounter assistant depositing cone 205 bottom then along assistant depositing cone 205 and auxiliary gap of wriggling between cone cylinder 206 flows downward and flow to auxiliary wriggling cone below by auxiliary cone cylinder 206 bottom margins of wriggling with the gap of separating between conically shaped 201 inwalls, this partially liq can drive the silicon carbide and the silica flour that are deposited on separation conically shaped 201 inwalls and move downward in flow process, play auxiliary purpose of wriggling.
For fear of injecting, the cutting waste liquor separated in conically shaped 201 is too much, causing cutting waste liquor to scatter overflows, be provided with overflow port 207 on the top of separating conically shaped 201, by overflow port 207, unnecessary cutting waste liquor is overflowed to the position of appointment, avoid scattering overflowing to production process and cause unnecessary trouble.
Described plugging structure 203 can adopt the modes such as plug, stopper to realize, as preferred mode, be: at the miner diameter end that separates conically shaped 201, valve is set and forms described plugging structure 203, this plugging structure 203 does not need it is removed and can realize discharging the fixing purpose of silicon carbide that is mixed with silica flour, and operation is very easy.
In step B, the silicon carbide that is mixed with silica flour is carried out to stage treatment and can adopt numerous embodiments, for example, can adopt the mode of pneumatic classification, utilize high pressure gas to wash away the silicon carbide that is mixed with silica flour, because the silicon-carbide particle weight of different meshes is different, therefore, under same wind effect, the silicon carbide of different meshes can be deposited in different positions, realize the classification of silicon carbide, as preferred mode, be: adopt hydraulic grading device to carry out stage treatment to the silicon carbide that is mixed with silica flour, as shown in Figure 2, described hydraulic grading device comprises classification conically shaped 301, the bigger diameter end of classification conically shaped 301 upward and be provided with opening for feed 302, the miner diameter end of described classification conically shaped 301 is provided with dismountable plugging part 303, described classification conically shaped 301 tops are provided with superfine silicon carbide liquid outlet 304, described classification conically shaped 301 bottoms are provided with water-in 305, the inwall of described classification conically shaped 301 and the angle of gravity direction are 5 °～45 °, the use procedure of this hydraulic grading device is as follows: at first, the silicon carbide that is mixed with silica flour of separating is dropped in classification conically shaped 301, then by water-in 305, water is injected in classification conically shaped 301, because the silicon-carbide particle of different meshes varies in weight, the silicon-carbide particle weight that the order number is larger is lighter, the silicon-carbide particle weight that the order number is less is heavier, the current that inject in classification conically shaped 301 from water-in 305 have certain pressure, under the impact of current, the lighter silicon-carbide particle of weight is on the top that is flushed to classification conically shaped 301, and then discharge from superfine silicon carbide liquid outlet 304, then carry out drying and processing and can obtain being mixed with the superfine silicon carbide solid of silica flour, the silicon-carbide particle that the order number is less and silica flour be suspended in classification conically shaped 301 bottoms so that deposit on the inwall of classification conically shaped 301 and wriggle gradually under slide to classfied cone shape cylinder 301 bottom pile up, Deng being stacked into to a certain degree, plugging part 303 is removed, the silicon carbide that is mixed with silica flour is discharged from the miner diameter end of classification conically shaped 301, and then be mixed with cutting liquid and reuse, the stage treatment of realization to the silicon carbide that is mixed with silica flour, this hydraulic grading device goes out according to the large I clean cut separation of adjusting water-in 305 hydraulic pressure the silicon carbide that the order number is larger, grading effect is better, and simple in structure, processing and fabricating is very convenient, can greatly reduce production costs.
For the silicon carbide on the inwall that better makes to be deposited on classification conically shaped 301 and silica flour, along the bottom that slides to classfied cone shape cylinder 301 under the inwall of the classification conically shaped 301 tilted is wriggled gradually, pile up smoothly, the inwall of described classification conically shaped 301 and the angle of gravity direction are preferably 25 °.
For the convenient superfine silicon carbide of collecting, be provided with collecting tank 306 below superfine silicon carbide liquid outlet 304.
In order to economize on resources, avoid causing waste, be connected with liquid pipe 307 on described water-in 305, liquid pipe 307 the other ends are communicated with collecting tank 306, on described liquid pipe 307, are provided with water pump 308, the water circulation use in collecting tank 306 is got up, thereby reduce production costs.
In order to adjust the hydraulic pressure of water-in 305, be connected with return line 309 on liquid pipe 307, the termination of return line 309 is stretched in collecting tank 306, on described return line 309, is provided with stopping valve, can control the water yield in liquid pipe 307 by the switch stopping valve, thereby adjust the hydraulic pressure of water-in 305.
For the ease of understanding the hydraulic pressure of water-in 305, on liquid pipe 307, be provided with tensimeter.
For the water pressure invariableness that guarantees water-in 305 and can uninterruptedly spray water, be provided with liquid storage cylinder 312 as a buffering on liquid pipe 307, avoid in collecting tank 306 not having water to cause water-in 305 to spray water and carry out hydraulic classification.
Described plugging part 303 can adopt the modes such as plug, stopper to realize, as preferred mode, be: at the miner diameter end of classification conically shaped 301, valve is set and forms described plugging part 303, this plugging part 303 does not need it is removed and can realize discharging the fixing purpose of silicon carbide that is mixed with silica flour, and operation is very easy.
Claims (8)
1. silicon chip cutting waste liquor treatment process is characterized in that comprising the following steps:
A, cutting waste liquor is carried out to solid-liquid separation, the polyoxyethylene glycol liquid in cutting waste liquor is separated with silicon-carbide particle, silicon powder particle, obtain polyoxyethylene glycol liquid and be mixed with the silicon carbide solid of silica flour;
B, the silicon carbide that is mixed with silica flour of separating is carried out to stage treatment, remove the order number and be greater than 1300 purpose superfine silicon carbides;
C, adopt the method that heavy-fluid is separated to separate silica flour and superfine silicon carbide wherein the superfine silicon carbide that is mixed with silica flour of separating, concrete grammar is as follows: first the superfine silicon carbide that the is mixed with silica flour melting equipment of packing into, be heated to more than 2500 ℃, superfine silicon carbide and silica flour are all melted, then the liquid after its fusing is injected in quartz crucible, under action of gravity, superfine silicon carbide liquid and silicon liquid are divided into two-layer in quartz crucible, superfine silicon carbide liquid is positioned at the upper strata of quartz crucible, silicon liquid is positioned at quartz crucible lower floor, after temperature is cooling, rear solid be will solidify and silicon ingot and superfine silicon carbide ingot obtained from taking out and cut in quartz crucible,
In step C, the superfine silicon carbide after melting and silicon liquid first are preheating to quartz crucible 1200 ℃ before injecting quartz crucible;
In step C, the quartz crucible bottom of using is provided with heating unit.
2. silicon chip cutting waste liquor treatment process as claimed in claim 1, it is characterized in that: in steps A, adopt equipment for separating liquid from solid as described below to carry out solid-liquid separation to cutting waste liquor, described equipment for separating liquid from solid comprises separation conically shaped (201), the bigger diameter end that separates conically shaped (201) upward and be provided with cutting waste liquor import (202), the miner diameter end of described separation conically shaped (201) is provided with dismountable plugging structure (203), described separation conically shaped (201) top is provided with polyoxyethylene glycol liquid outlet (204), the inwall of described separation conically shaped (201) and the angle of gravity direction are 5 °～45 °.
3. silicon chip cutting waste liquor treatment process as claimed in claim 2, it is characterized in that: be provided with assistant depositing cone (205) in described separation conically shaped (201), described assistant depositing cone (205) is positioned at the miner diameter end that separates conically shaped (201),, there is gap in the cone point of assistant depositing cone (205) between the bottom margin of assistant depositing cone (205) and the inwall that separates conically shaped (201) upward.
4. silicon chip cutting waste liquor treatment process as claimed in claim 3, it is characterized in that: be provided with the auxiliary cone cylinder (206) of wriggling in described separation conically shaped (201), described auxiliary wriggling cone cylinder (206) is arranged on assistant depositing cone (205) below, down, there is gap in auxiliary the wriggling between the bottom margin of boring cylinder (206) and the inwall that separates conically shaped (201) to the bigger diameter end of the both ends open that assisting wriggles bores cylinder (206) and auxiliary wriggling cone tin (206).
5. according to the described silicon chip cutting waste liquor of any one claim treatment process in claim 1 to 4, it is characterized in that: in step B, adopt hydraulic grading device to carry out stage treatment to the silicon carbide that is mixed with silica flour, described hydraulic grading device comprises classification conically shaped (301), the bigger diameter end of classification conically shaped (301) upward and be provided with opening for feed (302), the miner diameter end of described classification conically shaped (301) is provided with dismountable plugging part (303), described classification conically shaped (301) top is provided with superfine silicon carbide liquid outlet (304), described classification conically shaped (301) bottom is provided with water-in (305), the inwall of described classification conically shaped (301) and the angle of gravity direction are 5 °～45 °.
6. silicon chip cutting waste liquor treatment process as claimed in claim 5, it is characterized in that: described superfine silicon carbide liquid outlet (304) below is provided with collecting tank (306), be connected with liquid pipe (307) on described water-in (305), liquid pipe (307) the other end is communicated with collecting tank (306), is provided with water pump (308) on described liquid pipe (307).
7. silicon chip cutting waste liquor treatment process as claimed in claim 6, it is characterized in that: be connected with return line (309) on described liquid pipe (307), the termination of return line (309) is stretched in collecting tank (306), be provided with stopping valve (310) on described return line (309), be provided with tensimeter (311) on described liquid pipe (307).
8. silicon chip cutting waste liquor treatment process as claimed in claim 7, is characterized in that: be provided with liquid storage cylinder (312) on described liquid pipe (307).
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| CN105152438B (en) * | 2015-07-28 | 2017-10-24 | 江西申山能源科技有限公司 | Silicon chip cuts sewage water treatment method |
| CN109110766B (en) * | 2018-10-16 | 2023-09-01 | 青岛蓝光晶科新材料有限公司 | Method and device for efficiently purifying silicon material after medium smelting |
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