CN102775054A - Etching device - Google Patents
Etching device Download PDFInfo
- Publication number
- CN102775054A CN102775054A CN2012101042233A CN201210104223A CN102775054A CN 102775054 A CN102775054 A CN 102775054A CN 2012101042233 A CN2012101042233 A CN 2012101042233A CN 201210104223 A CN201210104223 A CN 201210104223A CN 102775054 A CN102775054 A CN 102775054A
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- China
- Prior art keywords
- aforementioned
- delineation
- installation component
- blow
- cutter installation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000005530 etching Methods 0.000 title abstract 7
- 238000009434 installation Methods 0.000 claims abstract description 65
- 239000002699 waste material Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims description 32
- 239000002023 wood Substances 0.000 claims description 31
- 238000011010 flushing procedure Methods 0.000 claims description 20
- 238000012423 maintenance Methods 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 3
- 238000007664 blowing Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 48
- 239000000843 powder Substances 0.000 description 19
- 238000005520 cutting process Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 241000255925 Diptera Species 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 241000920471 Lucilia caesar Species 0.000 description 1
- 235000004443 Ricinus communis Nutrition 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000006063 cullet Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/225—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Provided is an etching device which can eliminate disadvantages generated by flying of chips or waste material in process of forming etching grooves. The etching device can arrange a cuter installation member 10 for keeping a cutter wheel 11 and an etching head 7 for keeping a supporting shaft of the cuter installation member 10 as a rotating device 9 through a bearing 13 to move in a leading part arranged along a leading rod 3 of the etching device. The characteristics are that the etching head 7 is provided with an air blowing export 16 which blows to a blade leading edge part of the cutter wheel 11 in a mode of forming the leading rod 3 as upper reaches.
Description
Technical field
The invention relates to the delineation device that is used in brittle substrates such as glass substrate, semiconductor substrate formation scored groove (grooving).
Background technology
In the process of the glass substrate of disjunction brittle substrate, be generally known by break bar (being also referred to as scribe wheel) being pressed on substrate surface and making the method that moves to form scored groove, for example, at patent documentation 1, patent documentation 2 also to disclose.
Consult Fig. 8, the summary of the delineation device of patent documentation 1 is described.
The delineation 22 that possesses break bar 21 in the lower end is made as and can moves at directions X along the guidance part of the guide rod 23 that extends in directions X 24.Guide rod 23 with about supporting pillar 25,25 support, form and can move in the Y direction along guide rails 26.But below delineation 22, be configured in the platform 27 of turn in the horizontal plane, upload at this platform 27 and put substrate W.
Above-mentioned break bar 21 is that as shown in Figure 9 being installed on through cutter installation component (keeping the tool joint) 29 keeps tool 28.But delineation 22 a maintenance tool 28 are retained as oscilaltion, and cutter installation component (keeping the tool joint) 29 has vertical supporting axis 30, but this supporting axis 30 is held in maintenance tool 28 through bearing 31 turn twelve Earthly Branches.The position of the turning axle of break bar 21 is from online the departing from that supporting axis 30 is vertically prolonged toward the below it to be had and the same action of back rake angle (cas ter), so that when delineation 22 straight line are moved, keep the rectilinear propagation (utilizing so-called back rake angle effect) of the turning direction of break bar 21.This break bar 21 is descended so that become the state that the sword leading edge is pressed on the substrate W on the platform 27, by making delineation 22 move the processing of substrate W being carried out scored groove at directions X along guidance part 24.
Cut powder or little waste wood for the cullet that will take place man-hour in adding of scored groove etc. and blow and fly, opening has the air blow-off outlet 32 that pressurized air is blown out downwards in the inside of cutter installation component (keeping the tool joint) 29 (for 21 of break bars are rotatable internal space) at the oblique upper of break bar 21.This air blow-off outlet 32 is to be communicated in the outer compressed-air actuated supply source of diagram through the stream 33 with cutter installation component (keeping the tool joint) 29 and supporting axis 30 perforations; With when the scored groove processing, will cut powder or waste wood from air blow-off outlet 32 to break bar 21 compressed-air blows and blow and fly.
Patent documentation 1: TOHKEMY 2000-247667 communique
Patent documentation 2: TOHKEMY 2004-189556 communique
Summary of the invention
[problem that the invention desire solves]
As shown in Figure 9; If the air blow-off outlet that forms from the inside at cutter installation component (keeping the tool joint) 29 at the oblique upper of break bar 21 32 blows out pressurized air; Though pressurized air can be toward the below; Surface toward the substrate W of subtend blows, but pressurized air can disperse and blow to fly or fly up toward the top once again toward foreign side with cut powder radially afterwards, becomes uncontrollable its direction of dispersing.Its result has the situation of cutting powder or waste wood intrusion bearing 31 or other running gear and becoming the bad reason of action.Particularly if the powder of cutting that disperses is attached to and delineates the linear scale S that the parallel delineation position of being located at the bottom of guide rod 23 of a direct of travel of 22 (break bars 21) detects usefulness, have the problems such as error in measurement or read error generation of linear scale S.
In addition, press generation that the worker requires when patterned large-area mother substrate cuts out the discrete goods, to suppress waste wood as far as possible at goods effectively to utilize the roughly comprehensive of substrate, so the size of the waste wood of generation is thinner than in the past at nearest substrate-cutting.The occasion of dispersing at the thin waste wood of this kind gets into the little gap portion of the mechanical type mechanism of delineation 22 (break bars 21) easily, and is therefore former thereby also have waste wood to get into to unquestioned position in the past, bothers easily.
For example; Though push the occasion (for example consulting patent documentation 2) that the purpose that prevents etc. has the maintenance tool that is used near the position configuration guide roller the cutter installation component with the over-drastic toward substrate of the purpose of carrying out stabile delineation or break bar owing to the concavo-convex influence of lowering substrate surface at nearest delineation device; In this kind occasion; Thin waste wood gets into the gap of the installation component of cutter installation component and guide roller, and the trouble that the spinning movement of tool setting installation component exerts an influence takes place easily.
To this point, the present invention is to be purpose because of the delineation device of cutting the trouble that dispersing of powder or waste wood produce so that the formation that can eliminate in scored groove to be provided.
[solving the means of problem]
The delineation device of the present invention that is in order to solve above-mentioned problem is a kind of delineation device; Have possess with break bar remain rotating cutter installation component, but the supporting axis that will be formed at aforementioned cutter installation component is through the delineation head of bearing support for the maintenance tool of turn; Aforementioned delineation head is held in and is provided with in order to make guidance part that this delineation head moves and the position for the position that detects this delineation detect the guide rod of mechanism; By being rotated, aforementioned break bar forms scored groove on the substrate of processing subtend; It is characterized in that: become from the side of aforementioned break bar to blow out the gas blow-out mouth of flushing at aforementioned delineation capitiform, become recently with aforementioned guide rod and more lean on the mode at upper reaches to blow with gas flow to the sword leading edge portion from the flushing of aforementioned gas blow-out mouth with gas.
At this, the position that the position detects on the guide rod that mechanism is a delineation head can measurement person, for example can use by what linear scale and the optical pickup device of observing this linear scale constituted and detect mechanism.
Though flushing with gas be pressurized air at a low price and more satisfactory, blow and fly as long as ability will be cut powder, so be that drying nitrogen etc. also can.
[invention effect]
Utilize the present invention; By above-mentioned formation; When forming scored groove; The sword leading edge portion of break bar take place cut powder or waste wood be with by the mode of leaving from the guide rod side of upstream side with gas from the flushing of the gas blow-out mouth ejection of break bar side outward direction blow and fly, can not be attached to guide rod so cut powder etc., can not detect mechanism and give detrimentally affect the position.In addition, fly,, can and cause that whereby moving bad situation prevents trouble before it happens the bearing of cutting intrusions delineation head inside such as powder so can suppress to fly upward toward the top of break bar owing to blow from the side of break bar.
In addition; Another delineation device of the present invention that is in order to solve above-mentioned problem is a kind of delineation device; Have possess with break bar remain rotating cutter installation component, but the supporting axis that will be formed at aforementioned cutter installation component is through the delineation head of bearing support for the maintenance tool of turn; Aforementioned delineation head props up the guide rod that is held in for this delineation head is moved along real estate; By being rotated, aforementioned break bar forms scored groove on the substrate of processing subtend; It is characterized in that: establish from the side direction break bar of aforementioned cutter installation component at aforementioned delineation head and blow the gas blow-out mouth of flushing with gas, and further between aforementioned gas blow-out mouth and aforementioned cutter installation component formation be used for stoping the partition wall of the intrusion of waste wood, and installation is provided with the outer cover that makes the opening that passes through along the aforesaid base plate face with gas towards the flushing of aforementioned break bar.
Utilize this invention; From the gas blow-out mouth of the side that is positioned at aforementioned cutter installation component to break bar blow flushing with gas after; Owing between aforementioned gas blow-out mouth and aforementioned cutter installation component, be provided with the partition wall of outer cover as the intrusion that is used for stoping waste wood; Though so flushing can be to the outer cover conflict with the part of gas, a part can move toward break bar through the opening of outer cover.By this flushing through opening with gas blow fly when break bar rotates on substrate, to take place cut powder or waste wood.In addition, by the existence of outer cover,, also outer cover can not be surpassed and wide scope is dispersed to the gas blow-out oral-lateral even blow collision cutter installation component when flying and rebound at cut powder or the waste wood that take place.
In addition,, can make that the crack is a narrow space between aforementioned gas blow-out mouth and the aforementioned cutter installation component, be difficult to get into this narrow space so elongated waste wood becomes by being to be provided with outer cover between aforementioned gas blow-out mouth and the aforementioned cutter installation component.Therefore, waste wood can disperse toward the downstream side (is to press from both sides cutter installation component opposition side with outer cover) of cutter installation component, is to blow toward foreign side simply to fly than cutter installation component toward the dirty waste wood that disperses.
Therefore, can make elongated waste wood is sharp the subtracting of problem that action former thereby the tool setting installation component exerts an influence.
In addition, in foregoing invention, the opening of aforementioned gas blow-out mouth and aforementioned outer cover slenderly forms at transverse direction along the real estate of processing also can.
Whereby, flushing is zonally flowed and is blowed and can make and cut powder or waste wood is removed effectively toward the sword leading edge periphery of break bar with what gas became transverse direction.
In addition, in foregoing invention, be to support the aforementioned cutter installation component of folder to be arranged as a pair of guide roller of linearity rotationally by the guide roller installation component respectively at the aforementioned maintenance tool of delineating head,
Aforementioned outer cover is fixed in the one-sided side of aforementioned guide roller installation component and is installed as round the one-sided side of cutter installation component also can.
Whereby, by outer cover, can make elongated waste wood be difficult to get into the space in crack between guide roller installation component and the cutter installation component.
Description of drawings
Fig. 1 is the stereographic map that shows an example of delineation device of the present invention.
Fig. 2 is the stereographic map of the delineation head of Fig. 1.
Fig. 3 is the expansion stereographic map that the delineation head of Fig. 1 is observed from downside.
Fig. 4 is the fragmentary cross-sectional view of the delineation head of Fig. 1.
Fig. 5 is the stereographic map that other the embodiment with delineation head observes from downside.
Fig. 6 is the stereographic map that an other again embodiment who delineates head is observed from downside.
Fig. 7 is presented at the figure that the occasion waste wood that outer cover is not installed gets into the state in gap.
Fig. 8 is the stereographic map that is used for explaining the formation of delineation device in the past.
Fig. 9 is the sectional view of wanting portion that shows delineation head in the past.
A: delineation device W: brittle substrate (glass substrate)
1: platform 2: platform
3: guide rod 6: guidance part
7: delineation 9: keep tool
10: cutter installation component 11: break bar
12: supporting axis 13: bearing
14: guide roller 15: the gas blow-out nozzle
16: gas blow-out mouth 17: outer cover
Embodiment
Specify delineation device of the present invention following based on Fig. 1～Fig. 4.
Fig. 1 shows the stereographic map of an example of delineation device of the present invention.Fig. 2 is the stereographic map of the delineation head of Fig. 1.Fig. 3 observes the delineation head of Fig. 1 from downside expansion stereographic map.Fig. 4 is the fragmentary cross-sectional view of the delineation head of Fig. 1.This delineation device A possesses glass substrate W is carried the platform of putting 1 in the above.Platform 1 can be by rotary drive mechanism (outside the icon) and in horizontal plane left rotation and right rotation.
Constitute bridge part 4 by the supporting pillar 2,2 of the both sides that folder platform 1 is configured to cross over and at the guide rod 3 that directions X extends.Supporting pillar 2 is to move with the sliding part 5 of Y axle driving mechanism (icon is outer) along the guidance part that becomes the Y direction.At bridge part 4 delineation 7 is installed, can moves at directions X along guidance part 6 by the X axle driving mechanism of the supporting pillar 2 that is held in a side.
In addition, the position as the directions X of delineation 7 detects mechanism and is provided with linear scale S in the bottom of guidance part 6.S shows scale at this linear scale, and by reading this scale with the optics detecting element (icon outside) in delineation 7 equipments, position or the miles of relative movement of delineating a directions X of 7 are for detecting.
In delineation 7 like Fig. 2～maintenance tool 9 that moves up and down by up-down driving part 8 that is provided with shown in Figure 4.Bottom keeping tool 9 carefully is equipped with bearing 13, through this bearing 13, props up the vertical supporting axis 12 on the top of being located at cutter installation component (keeping the tool joint) 10 by axle, makes cutter installation component (keeping the tool joint) 10 turns.
Cutter installation component (keeping the tool joint) the 10th is by break bar 11 being pressed from both sides from both sides and supporting the block of its turning axle to constitute.With the cutter installation component (keeping the tool joint) the 29th with Fig. 9 explanation, the part of not establishing air blow-off outlet 32, stream 33 is same shape in addition; Therefore, the position of the turning axle of break bar 11 is to make with castor from online departing from that supporting axis 30 is vertically prolonged toward the below to do same action.
At present embodiment is that front-back direction guide roller 14,14 at break bar 11 is disposed at online always and remains in and keeps tool 9.This guide roller 14,14 is configured to idler wheel surface and comes the height location of retreating toward the top a little than the sword leading edge of break bar 11, suppresses to be pressed in the over-drastic to substrate W with the sword leading edge of the border break bar 11 of scored groove processing.In addition, break bar is descended when, set the top of ora terminalis part that guide roller 14 that above falling then be positioned at substrate-side can contact substrate W and suppress further to fall if having.Whereby, lower the careless situation of damaging of sword leading edge of break bar 11.
The turning direction of break bar 11 is along the direction of guide roller 14,14, that is along the direction (directions X) of the guidance part 6 of guide rod 3 (Fig. 1).
In addition, in delineation 7 the gas blow-out nozzle 15 that is provided with gas blow-out mouth 16 in the position of the side of break bar 11 (cutter installation component 10) is installed.Gas blow-out nozzle 15 is to be linked to compressed air-feed source (diagram is outer) through managing 18, supplies with flushing with gas (purge gas).In addition, flushing is to be not limited to pressurized air with gas, and use drying nitrogen etc. replaces also can.
Gas blow-out mouth 16 is to blow out flushing to break bar 11 to use gas.At present embodiment is that the substrate W face that aforementioned gas blow-out mouth 16 is parallel to processing slenderly forms in transverse direction.
In addition, the guide rod 3 that is provided with linear scale S forms to become recently from the flushing of aforementioned gas blow-out mouth 16 and more leans on the mode at upper reaches with gas flow, and the sword leading edge portion to break bar 11 blows out with gas not blow flushing to guide rod 3.By way like this, prevent to cut that powder is attached to linear scale S and the position detects the problem that can't carry out.
At present embodiment is that the substrate W face that aforementioned gas blow-out mouth 16 is parallel to processing slenderly forms in transverse direction.
In addition, between cutter installation component (keeping the tool joint) 10 and gas blow-out mouth 16, be provided with outer cover 17 near the cutter installation component (keeping the tool joint) 10.This outer cover 17 is that the sheet material of ㄈ word shape constitutes by overlooking roughly, with the one-sided side of cutter installation component (keep tool joint) 10 round, become on substrate W gas blow-out mouth 16 sides and cutter installation component (maintenance tool joint) the isolating partition wall of 10 sides.
The side (support) of guide roller installation component 14a, 14a is fixed at the two ends of outer cover 17.Be provided with the 17a of excision portion (opening) in order to avoid hinder the air that blows out from gas blow-out mouth 16 and blow at the following ora terminalis of outer cover 17 toward the sword leading edge portion of break bar 11.Replace the excision 17a of portion and also can to form opening at outer cover 17 machining holes.
In addition, Fig. 4 be for the convenience of explaining on and guide roller installation component 14a is omitted and illustrates, the position that is installed on the outer cover 17 of this guide roller installation component 14a is represented with 2 refining lines.
In addition, even the wallboard 19 that the inside that is provided with the midfield part of delineation 7 as shown in Figure 2 hides for to cut the occasion that powder flies upward, also makes not get into the mechanical running gear of delineating 7 inside.
After delineation device A descends break bar 11, making becomes the state that its sword leading edge is crimped on the substrate W on the platform 1, by making delineation 7 move and form scored groove at substrate W at directions X along guidance part 6.
At the moment when the processing of paddle-tumble, follow break bar 11 rotation and the sword leading edge portion take place cut powder or waste wood is to blow toward break bar 11 through the 17a of excision portion from the compressed-air actuated part that gas blow-out mouth 16 blows out, fly toward dirty side-blown.Rebound even cut powder collision cutter installation component (keeping the tool joint) 10 or guide roller installation component 14a this moment, also cut powder and surmount outer cover 17 and disperse toward gas blow-out mouth 16 sides (guide rod 3 sides) because of the existence of outer cover 17 can stop fully.
In addition; In the occasion that has elongated waste wood (the for example waste wood of width 2mm* length 50mm) to take place because of delineation; Because the waste wood of this length can't get into the gap (for example making the widest gap is below the 10mm) of cutter installation component (keeping the tool joint) 10 and outer cover 17; So otherwise waste wood is toward being side shifting mutually with the side that outer cover 17 is installed, and then flies with the past dirty side-blown of gas with flushing, so can not get near the of cutter installation component (maintenance tool joint) 10 and rest on this place.
Whereby, can prevent waste wood invade delineation 7 inside bearing or running gear part and cause the situation that action is bad.
Fig. 7 is shown in that waste wood gets into guide roller installation component 14a and cutter installation component (the maintenance tool joint) figure of the state in crack between 10 (from the figure of beneath) when not establishing outer cover 17 as comparative example.Because outer cover 17 does not exist,, harm the for example spinning movement of bearing 13 so elongated waste wood H gets into crack between cutter installation component (keeping the tool joint) 10 and the guide roller installation component 14a.Become for this kind state can make the rotation of bearing to become difficulty, delineation is impacted.With respect to this, outer cover 17 is installed is made waste wood get into the trouble between cutter installation component (keeping the tool joint) 10 and the guide roller installation component 14a.
In addition, the face that aforementioned gas blow-out mouth 16 is parallel to the substrate W of processing slenderly forms in transverse direction, blows so the pressurized air that blows out becomes the zonal sword leading edge periphery that flows also past break bar 11 of transverse direction, can make removings neatly such as cutting powder whereby.
In addition, gas blow-out nozzle 15 can as shown in Figure 5ly make into the piped form and with its blow-off outlet 16 and form with circle.
In addition, though at the foregoing description the break bar 11 of delineation 7 is rotated at directions X along guide rod 3, the break bar 11 that forms as shown in Figure 6 also can rotating with guide rod 3 orthogonal Y directions.In this occasion is when the processing scored groove, to make the bridge part 4 that shows at Fig. 1 move or establish and can platform 1 be carried out at the driving mechanism that the Y direction moves in the Y direction.In addition; Owing between guide rod 3 and break bar 11, become the position relation that a side guide roller 14 exists; So it is for example shown in Figure 6; Position configuration gas blow-out mouth 16 in guide rod 3 and the oblique side of cutter installation component (keeping the tool joint) between 10 becomes recently guide rod 3 and more leans on the upper reaches from the flushing of gas blow-out mouth 16 with gas flow, and 17a blows out to excision portion.In addition, as long as the position of the 17a of excision portion is also near gas blow-out mouth 16.
More than, though to exemplary embodiment explanation of the present invention, the present invention is not only specific for the above embodiments constructor.For example, guide roller 14,14 can omit and form, and outer cover 17 also can omit and form.The shape of outer cover 17 also can replace making overlooking ㄈ word shape and is semicircle shape.In addition, can in reach the scope of scope that its purpose do not break away from request, suitably revise, change in the present invention.
[utilizability on the industry]
The present invention is applicable to the delineation device that is used in brittle substrates such as glass substrate, semiconductor substrate formation scored groove (grooving).
Claims (4)
1. a delineation device is characterized in that it has the delineation head, but this delineation head possesses supporting axis that break bar is remained rotating cutter installation component and will be formed at aforementioned cutter installation component through the maintenance tool of bearing support for turn,
Aforementioned delineation head is held in and is provided with in order to make guidance part that this delineation head moves and the position for the position that detects this delineation detect the guide rod of mechanism, by aforementioned break bar is rotated on the substrate of processing object with the formation scored groove, it is characterized in that:
Be formed with from the side of aforementioned cutter installation component at aforementioned delineation head and blow out the gas blow-out mouth of flushing, blow to the sword leading edge portion with the mode of gas flow by the upper reaches from the flushing of aforementioned gas blow-out mouth with aforementioned guide rod with gas.
2. delineation device as claimed in claim 1; It is characterized in that wherein; Between aforementioned gas blow-out mouth and aforementioned cutter installation component, outer cover is installed; This outer cover is as the partition wall that is used for stoping waste wood to be invaded, and is provided with and makes the opening that passes through along the aforesaid base plate face with gas towards the flushing of aforementioned break bar.
3. delineation device as claimed in claim 2 is characterized in that wherein the opening of aforementioned gas blow-out mouth and aforementioned outer cover forms at transverse direction elongated along processed real estate.
4. like the described delineation device of arbitrary claim in claim 2 or 3; It is characterized in that wherein; At the maintenance tool of aforementioned delineation head, support the aforementioned cutter installation component of folder to be arranged as a pair of guide roller of linearity rotationally by the guide roller installation component respectively
Aforementioned outer cover is fixed in the one-sided side of aforementioned guide roller installation component and is installed as the one-sided side round the cutter installation component.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-104631 | 2011-05-09 | ||
| JP2011104631A JP5346984B2 (en) | 2011-05-09 | 2011-05-09 | Scribing equipment |
| JP2011104632A JP5285740B2 (en) | 2011-05-09 | 2011-05-09 | Scribing equipment |
| JP2011-104632 | 2011-05-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102775054A true CN102775054A (en) | 2012-11-14 |
| CN102775054B CN102775054B (en) | 2015-09-02 |
Family
ID=47120194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210104223.3A Expired - Fee Related CN102775054B (en) | 2011-05-09 | 2012-04-09 | Scoring device |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101345614B1 (en) |
| CN (1) | CN102775054B (en) |
| TW (1) | TWI456647B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103641297A (en) * | 2013-12-11 | 2014-03-19 | 中国电子科技集团公司第二研究所 | Glass marking device capable of accurately controlling pressure of cutter head |
| CN105690579A (en) * | 2014-12-12 | 2016-06-22 | 三星钻石工业股份有限公司 | Retaining tool, retaining unit, and etching device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102078666B1 (en) * | 2019-09-27 | 2020-02-19 | 권순일 | Vinyl Cutting Head |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6090841A (en) * | 1983-10-25 | 1985-05-22 | Amagasaki Kosakusho:Kk | Apparatus for positioning cutter in plate glass cutting machine |
| JP2000247667A (en) * | 1999-03-03 | 2000-09-12 | Mitsuboshi Diamond Kogyo Kk | Tip holder |
| JP2001311819A (en) * | 2000-04-28 | 2001-11-09 | Shin Sti Technology Kk | Method for preventing deposition of minute foreign matter on color filter surface, scribing device and breaking device |
| CN101909818A (en) * | 2007-12-25 | 2010-12-08 | 日本电气硝子株式会社 | Glass plate face grinding device and method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4843180B2 (en) * | 2002-12-12 | 2011-12-21 | 三星ダイヤモンド工業株式会社 | Chip holder, scribing head, scribing device and scribing method |
| TWM246795U (en) * | 2003-12-02 | 2004-10-11 | Chipmos Technologies Inc | Cutting tool of semiconductor sawing blade |
| WO2008010303A1 (en) * | 2006-07-20 | 2008-01-24 | Takita Research & Development Co., Ltd. | Cutting device |
| TW200906746A (en) * | 2007-08-10 | 2009-02-16 | Mitsuboshi Diamond Ind Co Ltd | Scribing head, scribing device, and scribing method |
-
2012
- 2012-01-20 TW TW101102475A patent/TWI456647B/en active
- 2012-03-07 KR KR1020120023224A patent/KR101345614B1/en active IP Right Grant
- 2012-04-09 CN CN201210104223.3A patent/CN102775054B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6090841A (en) * | 1983-10-25 | 1985-05-22 | Amagasaki Kosakusho:Kk | Apparatus for positioning cutter in plate glass cutting machine |
| JP2000247667A (en) * | 1999-03-03 | 2000-09-12 | Mitsuboshi Diamond Kogyo Kk | Tip holder |
| JP2001311819A (en) * | 2000-04-28 | 2001-11-09 | Shin Sti Technology Kk | Method for preventing deposition of minute foreign matter on color filter surface, scribing device and breaking device |
| CN101909818A (en) * | 2007-12-25 | 2010-12-08 | 日本电气硝子株式会社 | Glass plate face grinding device and method |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103641297A (en) * | 2013-12-11 | 2014-03-19 | 中国电子科技集团公司第二研究所 | Glass marking device capable of accurately controlling pressure of cutter head |
| CN105690579A (en) * | 2014-12-12 | 2016-06-22 | 三星钻石工业股份有限公司 | Retaining tool, retaining unit, and etching device |
| CN105690579B (en) * | 2014-12-12 | 2019-08-20 | 三星钻石工业股份有限公司 | It keeps tool, keep tool unit and scoring device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102775054B (en) | 2015-09-02 |
| KR101345614B1 (en) | 2013-12-27 |
| TWI456647B (en) | 2014-10-11 |
| TW201246345A (en) | 2012-11-16 |
| KR20120125947A (en) | 2012-11-19 |
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