CN102773493B - Device and method for preparing metal microballoons by using ultrasonic surface standing waves - Google Patents
Device and method for preparing metal microballoons by using ultrasonic surface standing waves Download PDFInfo
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- CN102773493B CN102773493B CN201210305237.1A CN201210305237A CN102773493B CN 102773493 B CN102773493 B CN 102773493B CN 201210305237 A CN201210305237 A CN 201210305237A CN 102773493 B CN102773493 B CN 102773493B
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Abstract
The invention discloses a device and method for preparing metal microballoons by using ultrasonic surface standing waves, relates to a device and a method for preparing the metal microballoons, and aims to solve the problems that the conventional device for preparing the metal microballoons is complicated, and the size cannot be controlled flexibly. The device consists of an air storehouse and a titanium alloy casting die, a heating element, a base plate, two ultrasonic surface wave emission devices and a droplet flow control device which are positioned in the air storehouse. The method comprises the following steps of: 1, completely dissolving a metal material to obtain a metal solution, gradually dropping the metal solution on the surface of the base plate, and forming spherical metal droplets with the same size under the action of ultrasonic waves; and 2, cooling the metal microballoons by an air-cooling system until the metal microballoons are cooled to be solids, and thus obtaining the metal microballoons with the same size. By the device and the method, various metal microballoons with relatively small sizes can be prepared; the preparation process takes 1 to 2 minutes at one time, so that the production efficiency is greatly improved; and the device and the method are applied to the field of preparation of the metal microballoons.
Description
Technical field
The present invention relates to prepare the apparatus and method of metallic microspheres.
Background technology
High speed development along with semiconductor packages industry, various multi-form and high-density packages structure are had higher requirement, wherein microspheroidal grid encapsulation (BGA), because it is easy to operate, has the plurality of advantages such as high I/O density and high yield and is widely used.Tin ball is connected with circuit board as the output of encapsulation.For improving the welding quality between packaging part and circuit board, require tin ball to have suitable and consistent size and good out of roundness.Normally first use at present tin ball process units to prepare tin ball, then the tin ball preparing is placed in to tin ball screening plant, utilize mode of oscillation to adopt tin ball screening plant to carry out the quality screening of tin ball.Yet the tin ball that the mode that adopts vibration is screened is easily because collision each other makes tin ball surface produce destruction, and because not possessing good dimensional uniformity, must again screen size by the tin ball of its generation, increase production process, caused the reduction of production efficiency.Therefore how to meet the requirement of tin ball size and shape, and to enhance productivity be one of big event of research and development at present.
Taiwan is announced M277550 new patent and has been proposed a kind of tin ball screening feedway, and this kind of device comprises a bucket, a supporting seat, a rotating shaft and a discharge nozzle.Described device complexity and volume are larger, not easy to operate, and between tin ball and rotating shaft, have friction, easily make tin ball be oxidized blackening because of friction, and mantle friction simultaneously easily produces static and makes the tin ball of output mutually be stained with glutinous.
Taiwan is announced M324547 new patent and has been proposed a kind of metallic microspheres gasifying device.It comprises a microballoon building mortion and a cooling device, and wherein said building mortion comprises that a vibrating device, adds hot melting furnace, a static unit and an insulation assembly.But the inconsistent fine ratio of product that reduces of size of this device metal ball that different phasmajectors form because phasmajector size difference problem may cause.
Chinese patent ZL200820059688.0 discloses a kind of novel metal microballoon doffer, and it comprises a base, and puts magazine, a rotating discharge pipe and a drive division.Described drive division is located in described base, to drive described rotating discharge pipe to rotate.In this way, described metallic microspheres can fall into described discharging opening because of Action of Gravity Field, with blanking one by one, exports described metallic microspheres to microballoon screening plant.
Chinese patent ZL200920001314.8 discloses a kind of metal microsphere formation device, and it comprises a feed module, a generation of static electricity module, buffering setting module and a refrigerating module.Wherein said feed module has a heating container, a vibration unit and a support unit, and described heating container is in order to accommodating and heat a motlten metal, and its bottom has at least two shaped holes.Described vibration unit, in order to produce vibration, impels described motlten metal by described shaped hole.Described generation of static electricity module is located between described shaped hole and support unit, and has at least two phasmajectors, a wire and at least two insulating sleeves.Described phasmajector is to interconnect by described wire, and described insulation tube is sheathed on outside described phasmajector, and is positioned on described support unit.Described buffering setting module and refrigerating module are in order to guarantee that nodularization is curing completely by the metallic microspheres in it.
Chinese patent 01113644.8 discloses a kind of preparation method of take the light metallic microspheres that natural pollen is core skeleton.It is a kind of preparation method of take the light metallic microspheres that nonmetallic substance is core skeleton.
From above material, the preparation method of current metallic microspheres sieves and adopts the coated rear screening of nonmetallic substance skeleton chemical plating after mainly containing mechanical oscillation.Wherein mechanical oscillation method is the most traditional and the general method of preparing metallic microspheres, but its size of preparing metallic microspheres mainly relies on the size Control of forming hole, manufacture restriction and the larger viscosity of metal due to forming hole, make the size of preparing metallic microspheres have restriction, be difficult for the metallic microspheres that preparation size is less, and there is difficulty in the size Control of metallic microspheres.And the coated method of chemical plating cannot be prepared simple metal ball, it need prepare core skeleton in earlier stage, and preparation method is comparatively complicated, and it need to carry out purifying and screening is processed to metal ball, has reduced production efficiency.
Summary of the invention
The present invention will solve the existing metallic microspheres device complexity of preparing, the inflexible problem of size Control, and a kind of apparatus and method of utilizing ultrasonic standing surface wave to prepare metallic microspheres are proposed.
A kind of device that utilizes ultrasonic standing surface wave to prepare metallic microspheres, by gas storehouse and the titanium alloy mold that is positioned at gas storehouse, heating element heater, substrate, two ultrasonic surface wave emitters and drop flow control device form, described heating element heater is arranged on titanium alloy mold outer surface, the bottom of described titanium alloy mold is provided with drop flow control device, the two ends of the upper surface of described substrate arrange respectively ultrasonic surface wave emitter, described substrate be positioned at titanium alloy mold under, a sidewall upper in described gas storehouse arranges air inlet, in the side wall lower ends relative with air inlet, set out gas port.
The method of utilizing the above-mentioned device that utilizes ultrasonic standing surface wave to prepare metallic microspheres to prepare metallic microspheres realizes according to the following steps:
One, metal material is positioned in titanium alloy mold and in gas storehouse, passes into inert gas shielding simultaneously, then start heating element heater, metal material is heated to more than fusing point after 20 ℃ ~ 100 ℃, be incubated 10 ~ 30min, after metal material melts completely, obtain metal material liquation, restart ultrasonic surface wave emitter, open drop flow control device simultaneously and make metal material liquation dropwise drop to substrate surface, under ul-trasonic irradiation, form measure-alike spherical metal drop;
Two, stop ultrasonic surface wave emitter and heating element heater, cooling velocity with air cooling system with 5 ℃ ~ 20 ℃/min begins to cool down, be cooled to 25 ℃ of room temperatures, in cooling procedure, continue to avoid with inert gas protection the oxidation of metallic microspheres, until molten metal ball is cooled to solid, obtain the metallic microspheres of consistent size;
Wherein metal material described in step 1 is any one in Sn base, Zn base or Al base alloy;
Inert gas described in step 1 is the mixture of one or more gases in nitrogen, argon gas or helium;
Substrate described in step 1 is Ti alloy, Al
2o
3any one in pottery or SiC pottery;
The vibration frequency of ultrasonic surface wave described in step 1 is 1MHz ~ 50MHz, and amplitude is 10nm ~ 500nm.
Mechanism of the present invention is that the ultrasonic surface wave emitter that substrate surface specific distance is placed produces two row frequencies and the capable ripple of identical two row of amplitude simultaneously, forms ultrasonic standing wave after stack.Metal liquid spreads out rapidly after dropping to substrate surface, produce strong spraying effect and make molten drop atomization fly away from substrate, and standing wave nodal region retains because friction makes surperficial drop in standing wave antinode region.Because above-mentioned selection substrate and metal liquid are nonwetting system, so the liquid retaining on substrate forms spherical under capillary effect.The size of metal ball is by the wavelength control that applies surface wave.
Feature of the present invention and effect:
1, the effect of ultrasonic standing surface wave, can make metal liquid spread in fast substrate surface, and has range of atomization field selectivity, can prepare various metals microballoon at a large amount of metallic microspheres of the disposable formation of substrate surface, and the material system that is applicable to preparation is extensive;
2, the size of metallic microspheres is directly determined by standing wave wavelength, change the volume that wavelength can change metallic microspheres, and dimensional uniformity is good;
3, preparation overall process adopts inert gas shielding, has avoided the problems such as the oxidation of metallic microspheres and internal porosity, and between microballoon, has had certain distance, has avoided the glutinous problem of being stained with between microballoon;
4, a preparation process only needs 1 ~ 2min, greatly improved production efficiency and production efficiency and be traditional blanking method 2 ~ 3 times.
Accompanying drawing explanation
Fig. 1 utilizes ultrasonic standing surface wave to prepare the device schematic diagram of metallic microspheres.
The specific embodiment
The specific embodiment one: this specific embodiment is described in conjunction with Fig. 1, a kind of device that utilizes ultrasonic standing surface wave to prepare metallic microspheres of present embodiment, by gas storehouse 1 and the titanium alloy mold 2 that is positioned at gas storehouse, heating element heater 3, substrate 4, two ultrasonic surface wave emitters 5 and drop flow control device 6 form, described heating element heater 3 is arranged on titanium alloy mold 2 outer surfaces, the bottom of described titanium alloy mold 2 is provided with drop flow control device 6, the two ends of the upper surface of described substrate 4 arrange respectively ultrasonic surface wave emitter 5, described substrate 4 be positioned at titanium alloy mold 2 under, a sidewall upper in described gas storehouse 1 arranges air inlet 7, in the side wall lower ends relative with air inlet, set out gas port 8.
The specific embodiment two: present embodiment is different from the specific embodiment one: described heating element heater 3 is induction or stratie.Other step and parameter are identical with the specific embodiment one.
The specific embodiment three: in present embodiment, a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres realizes according to the following steps:
One, metal material is positioned in titanium alloy mold 2 and in gas storehouse 1, passes into inert gas shielding simultaneously, then start heating element heater 3, metal material is heated to more than fusing point after 20 ℃ ~ 100 ℃, be incubated 10 ~ 30min, after metal material melts completely, obtain metal material liquation, restart ultrasonic surface wave emitter 5, open drop flow control device 6 simultaneously and make metal material liquation dropwise drop to substrate 4 surfaces, under ul-trasonic irradiation, form measure-alike spherical metal drop;
Two, stop ultrasonic surface wave emitter 5 and heating element heater 3, cooling velocity with air cooling system with 5 ℃ ~ 20 ℃/min begins to cool down, be cooled to 25 ℃ of room temperatures, in cooling procedure, continue to avoid with inert gas protection the oxidation of metallic microspheres, until molten metal ball is cooled to solid, obtain the metallic microspheres of consistent size;
Wherein metal material described in step 1 is any one in Sn base, Zn base or Al base alloy;
Inert gas described in step 1 is the mixture of one or more gases in nitrogen, argon gas or helium;
Substrate described in step 1 is Ti alloy, Al
2o
3any one in pottery or SiC pottery;
The vibration frequency of ultrasonic surface wave described in step 1 is 1MHz ~ 50MHz, and amplitude is 10nm ~ 500nm.
When in present embodiment step 1 and two, inert gas is mixture, between each component, mix in any proportion.
Feature of the present invention and effect:
1, the effect of ultrasonic standing surface wave, can make metal liquid spread in fast substrate surface, and has range of atomization field selectivity, can prepare various metals microballoon at a large amount of metallic microspheres of the disposable formation of substrate surface, and the material system that is applicable to preparation is extensive;
2, the size of metallic microspheres is directly determined by standing wave wavelength, change the volume that wavelength can change metallic microspheres, and dimensional uniformity is good;
3, preparation overall process adopts inert gas shielding, has avoided the problems such as the oxidation of metallic microspheres and internal porosity, and between microballoon, has had certain distance, has avoided the glutinous problem of being stained with between microballoon;
4, a preparation process only needs 1 ~ 2min, greatly improved production efficiency and production efficiency and be traditional blanking method 2 ~ 3 times.
The specific embodiment four: present embodiment is different from the specific embodiment three: in step 1, metal material is heated to more than fusing point be incubated 15 ~ 25min after 50 ℃ ~ 70 ℃.Other step and parameter are identical with the specific embodiment three.
The specific embodiment five: present embodiment is different from the specific embodiment three or four: in step 1, metal material is heated to more than fusing point be incubated 20min after 60 ℃.Other step and parameter are identical with the specific embodiment three or four.
The specific embodiment six: present embodiment is different from one of specific embodiment three to five: in step 2, the cooling velocity with 8 ℃ ~ 17 ℃/min begins to cool down with air cooling system.Other step and parameter are identical with one of specific embodiment three to five.
The specific embodiment seven: present embodiment is different from one of specific embodiment three to six: in step 2, the cooling velocity with 13 ℃/min begins to cool down with air cooling system.Other step and parameter are identical with one of specific embodiment three to six.
The specific embodiment eight: present embodiment is different from one of specific embodiment three to seven: the vibration frequency of ultrasonic surface wave described in step 1 is 10MHz ~ 40MHz, and amplitude is 100nm ~ 300nm.Other step and parameter are identical with one of specific embodiment three to seven.
The specific embodiment nine: present embodiment is different from one of specific embodiment three to eight: the vibration frequency of ultrasonic surface wave described in step 1 is 30MHz, and amplitude is 200nm.Other step and parameter are identical with one of specific embodiment three to eight.
By following verification experimental verification beneficial effect of the present invention:
Test one: a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres of this test realizes according to the following steps:
Adopting metal material is pure Sn base alloy, fusing point is 231.96 ℃, the substrate adopting is titanium alloy, and the quality percentage composition of its composition is that Al:5.5 ~ 6.8%, V:3.5 ~ 4.5%, Fe:0.3, Si:0.15%, C:0.1, N:0.05, H:0.015%, O:0.2%, surplus are Ti;
One, pure Sn base alloy is positioned in titanium alloy mold 2, in argon gas storehouse 1, pass into lazy argon gas protection simultaneously, start induction or stratie 3, the pure Sn base of metal material alloy is heated to 25min after 280 ℃ of insulations of fusing point, after melting completely, pure Sn base alloy obtains pure Sn base alloy liquid, restart ultrasonic surface wave emitter 5, supersonic frequency is 10MHz, amplitude is 100nm, utilize Action of Gravity Field that pure Sn base alloy liquid is dropwise dropped to substrate 4 surfaces by the drop flow control device 6 bottom mold, under ul-trasonic irradiation, forming diameter is the spherical pure Sn base alloy liquid droplet of 20 ± 1 μ m,
Two, stop ultrasonic surface wave emitter 5 and heating element heater 3; cooling velocity with air cooling system with 10 ℃/min begins to cool down; be cooled to 25 ℃ of room temperatures; under air cooling condition, continue to avoid with lazy argon gas protection the oxidation of pure Sn base alloying metal microballoon; until pure Sn base alloying metal liquid ball is cooled to solid spherical metal, completed the preparation of metallic microspheres.
Test two: a kind of of this test utilizes the method following steps that ultrasonic standing surface wave is prepared metallic microspheres to realize:
Adopting metal material is pure Al base alloy, and fusing point is 660 ℃.The substrate adopting is SiC pottery;
One, pure Al base alloy is positioned in titanium alloy mold 2, in argon gas storehouse 1, pass into lazy argon gas protection simultaneously, start induction or stratie 3, the pure Al base of metal material alloy is heated to be incubated 25min after 700 ℃ of fusing points, after melting completely, pure Al base alloy obtains pure Al base alloy liquid, restart ultrasonic surface wave emitter 5, supersonic frequency is 10MHz, amplitude is 100nm, utilize Action of Gravity Field that pure Al base alloy liquid is dropwise dropped to substrate 4 surfaces by the drop flow control device 6 bottom mold, under ul-trasonic irradiation, forming diameter is the spherical pure Al base alloy liquid droplet of 20 ± 1 μ m,
Two, stop ultrasonic surface wave emitter 5 and heating element heater 3; cooling velocity with air cooling system with 10 ℃/min begins to cool down; be cooled to 25 ℃ of room temperatures; under air cooling condition, continue to avoid with lazy argon gas protection the oxidation of pure Al base alloying metal microballoon; until molten metal ball is cooled to solid spherical metal, completed the preparation of metallic microspheres.
Claims (9)
1. a device that utilizes ultrasonic standing surface wave to prepare metallic microspheres, the device that it is characterized in that utilizing ultrasonic standing surface wave to prepare metallic microspheres is by gas storehouse (1) and be positioned at the titanium alloy mold (2) in gas storehouse, heating element heater (3), substrate (4), two ultrasonic surface wave emitters (5) and drop flow control device (6) form, described heating element heater (3) is arranged on titanium alloy mold (2) outer surface, the bottom of described titanium alloy mold (2) is provided with drop flow control device (6), the two ends of the upper surface of described substrate (4) arrange respectively ultrasonic surface wave emitter (5), described substrate (4) be positioned at titanium alloy mold (2) under, a sidewall upper in described gas storehouse (1) arranges air inlet (7), in the side wall lower ends relative with air inlet, set out gas port (8).
2. a kind of device that utilizes ultrasonic standing surface wave to prepare metallic microspheres according to claim 1, is characterized in that described heating element heater (3) is for induction or stratie.
3. utilize device described in claim 1 to prepare the method for metallic microspheres, it is characterized in that a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres realizes according to the following steps:
One, metal material is positioned in titanium alloy mold (2) and in gas storehouse (1), passes into inert gas shielding simultaneously, then start heating element heater (3), metal material is heated to more than fusing point after 20 ℃～100 ℃, be incubated 10～30min, after metal material melts completely, obtain metal material liquation, restart ultrasonic surface wave emitter (5), open drop flow control device (6) simultaneously and make metal material liquation dropwise drop to substrate (4) surface, under ul-trasonic irradiation, form measure-alike spherical metal drop;
Two, stop ultrasonic surface wave emitter (5) and heating element heater (3), cooling velocity with air cooling system with 5 ℃～20 ℃/min begins to cool down, be cooled to 25 ℃ of room temperatures, in cooling procedure, continue to avoid with inert gas protection the oxidation of metallic microspheres, until molten metal ball is cooled to solid, obtain the metallic microspheres of consistent size;
Wherein metal material described in step 1 is any one in Sn base, Zn base or Al base alloy;
Inert gas described in step 1 is the mixture of one or more gases in nitrogen, argon gas or helium;
Substrate described in step 1 is Ti alloy, Al
2o
3any one in pottery or SiC pottery;
The vibration frequency of ultrasonic surface wave described in step 1 is 1MHz～50MHz, and amplitude is 10nm～500nm.
4. the method for preparing metallic microspheres according to claim 3, is characterized in that metal material being heated to more than fusing point after 50 ℃～70 ℃, be incubated 15～25min in step 1.
5. the method for preparing metallic microspheres according to claim 3, is characterized in that metal material being heated to more than fusing point after 60 ℃, be incubated 20min in step 1.
6. the method for preparing metallic microspheres according to claim 3, is characterized in that in step 2 that the cooling velocity with 8 ℃/min～17 ℃/min begins to cool down with air cooling system.
7. the method for preparing metallic microspheres according to claim 3, is characterized in that in step 2, the cooling velocity with 13 ℃/min begins to cool down with air cooling system.
8. the method for preparing metallic microspheres according to claim 3, is characterized in that the vibration frequency of ultrasonic surface wave described in step 1 is 10MHz～40MHz, and amplitude is 100nm～300nm.
9. the method for preparing metallic microspheres according to claim 3, is characterized in that the vibration frequency of ultrasonic surface wave described in step 1 is 30MHz, and amplitude is 200nm.
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| CN106694894A (en) * | 2016-12-27 | 2017-05-24 | 深圳微纳增材技术有限公司 | High-activity metal superfine powder preparation device and method |
| CN107321999B (en) * | 2017-08-15 | 2023-07-28 | 先导薄膜材料（广东）有限公司 | Preparation facilities of high-purity powder |
| CN107824793B (en) * | 2017-10-31 | 2020-12-15 | 中国科学院过程工程研究所 | Device and method for preparing superfine monodisperse metal microspheres |
| JP7228274B2 (en) * | 2017-11-09 | 2023-02-24 | スリーディー ラブ スプウカ ズ オグラニチョノン オトポヴィエヂャルノシチョン | Device for producing spherical metal powder by ultrasonic atomization method |
| CN109622980A (en) * | 2019-01-28 | 2019-04-16 | 哈尔滨工业大学 | A kind of contactless powder by atomization device and method of molten metal ultrasonic standing wave |
| CN110076346A (en) * | 2019-04-22 | 2019-08-02 | 中科音瀚声学技术(上海)有限公司 | A kind of ultrasonic standing wave atomization device suitable for manufacturing lemel |
| CN110000385A (en) * | 2019-05-22 | 2019-07-12 | 上海交通大学 | A kind of direct 3D printing device of the liquid bimetallic of ultrasonic wave added and Method of printing |
| CN110355376B (en) * | 2019-08-12 | 2022-06-14 | 齐鲁工业大学 | Method for preparing aluminum or aluminum alloy powder by exciting aluminum-salt mixed melt through ultrasonic waves |
| CN111545765A (en) * | 2020-04-17 | 2020-08-18 | 太极半导体（苏州）有限公司 | Method for preparing tin ball with uniform ball diameter and good sphericity |
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| US6461403B1 (en) * | 1999-02-23 | 2002-10-08 | Alberta Research Council Inc. | Apparatus and method for the formation of uniform spherical particles |
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