CN102773493A - Device and method for preparing metal microballoons by using ultrasonic surface standing waves - Google Patents
Device and method for preparing metal microballoons by using ultrasonic surface standing waves Download PDFInfo
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- CN102773493A CN102773493A CN2012103052371A CN201210305237A CN102773493A CN 102773493 A CN102773493 A CN 102773493A CN 2012103052371 A CN2012103052371 A CN 2012103052371A CN 201210305237 A CN201210305237 A CN 201210305237A CN 102773493 A CN102773493 A CN 102773493A
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Abstract
The invention discloses a device and method for preparing metal microballoons by using ultrasonic surface standing waves, relates to a device and a method for preparing the metal microballoons, and aims to solve the problems that the conventional device for preparing the metal microballoons is complicated, and the size cannot be controlled flexibly. The device consists of an air storehouse and a titanium alloy casting die, a heating element, a base plate, two ultrasonic surface wave emission devices and a droplet flow control device which are positioned in the air storehouse. The method comprises the following steps of: 1, completely dissolving a metal material to obtain a metal solution, gradually dropping the metal solution on the surface of the base plate, and forming spherical metal droplets with the same size under the action of ultrasonic waves; and 2, cooling the metal microballoons by an air-cooling system until the metal microballoons are cooled to be solids, and thus obtaining the metal microballoons with the same size. By the device and the method, various metal microballoons with relatively small sizes can be prepared; the preparation process takes 1 to 2 minutes at one time, so that the production efficiency is greatly improved; and the device and the method are applied to the field of preparation of the metal microballoons.
Description
Technical field
The present invention relates to prepare the apparatus and method of metallic microspheres.
Background technology
High speed development along with the semiconductor packages industry; Various multi-form and high-density packages structure are had higher requirement; Wherein microspheroidal grid encapsulation (BGA) because it is easy to operate, has plurality of advantages such as high I/O density and high yield and is widely used.The tin ball is connected with circuit board as the output of encapsulation.For improving the welding quality between packaging part and circuit board, require the tin ball that suitable and consistent size and good out of roundness are arranged.Normally at first use tin ball process units to prepare the tin ball at present, then the tin ball for preparing is placed tin ball screening plant, utilize mode of oscillation to adopt tin ball screening plant to carry out the quality screening of tin ball.Yet the tin ball that the mode that adopts vibration is screened is prone to make tin ball surface produce destruction because of each other collision; And, must screen again the tin ball of its generation size because of not possessing good dimensional uniformity; Increase production process, caused the reduction of production efficiency.Therefore how to satisfy the requirement of tin ball size and shape, and to enhance productivity be one of big event of research and development at present.
Taiwan is announced M277550 number novel patent and has been proposed a kind of tin ball screening feedway, and this kind device comprises a bucket, a supporting seat, a rotating shaft and a discharge nozzle.Said device complicacy and volume are bigger, and be not easy to operate, and have friction between tin ball and rotating shaft, is prone to make the tin ball because of friction oxidation blackening, and mantle friction simultaneously is prone to produce static and makes the tin ball of output be stained with glutinous each other.
Taiwan is announced M324547 number novel patent and has been proposed a kind of metallic microspheres makeup and put.It comprises a microballoon building mortion and a cooling device, and wherein said building mortion comprises that a vibrating device, adds hot melting furnace, a static unit and an insulation assembly.But the inconsistent fine ratio of product that reduces of size of this device Metal Ball that different phasmajectors form owing to phasmajector size difference problem possibly cause.
Chinese patent ZL200820059688.0 discloses a kind of novel metal microballoon doffer, and it comprises a base, and puts magazine, a rotation discharge nozzle and a drive division.Said drive division is located in the said base, rotates to drive said rotation discharge nozzle.In this way, said metallic microspheres can fall into said discharging opening because of the gravity effect, exports said metallic microspheres to microballoon screening plant with blanking one by one.
Chinese patent ZL200920001314.8 discloses a kind of metallic microspheres building mortion, and it comprises a feed module, a generation of static electricity module, a buffering setting module and a refrigerating module.Wherein said feed module has a heating container, a vibration unit and a support unit, and said heating container is in order to ccontaining and heat a motlten metal, and its bottom has at least two shaped holes.Said vibration unit impels said motlten metal through said shaped hole in order to produce vibration.Said generation of static electricity module is located between said shaped hole and the support unit, and has at least two phasmajectors, a lead and at least two insulating sleeves.Said phasmajector is to interconnect through said lead, and said insulation tube then is sheathed on outside the said phasmajector, and is positioned on the said support unit.Said buffering setting module and refrigerating module are in order to guarantee through nodularization curing fully of the metallic microspheres in it.
It is the preparation method of the light metallic microspheres of core skeleton with the natural pollen that Chinese patent 01113644.8 discloses a kind of.It is a kind of be the preparation method of the light metallic microspheres of core skeleton with the nonmetallic substance.
Visible by above material, the preparation method of current metallic microspheres sieves and adopts nonmetallic substance skeleton chemical plating coating back screening after mainly containing mechanical oscillation.Wherein the mechanical oscillation method is the most traditional and the general method for preparing metallic microspheres; But the size of its preparation metallic microspheres mainly relies on the size Control in moulding hole; Because the manufacturing restriction and the bigger viscosity of metal in moulding hole; Make the size of preparation metallic microspheres have restriction, be difficult for the less metallic microspheres of preparation size, and there is difficulty in the size Control of metallic microspheres.And chemical plating coats method and can't prepare the simple metal ball, and it need prepare core skeleton in earlier stage, and the preparation method is comparatively complicated, and it need carry out purifying to Metal Ball and handle with screening, has reduced production efficiency.
Summary of the invention
The present invention will solve existing preparation metallic microspheres device complicacy, the inflexible problem of size Control, and a kind of apparatus and method of utilizing ultrasonic standing surface wave to prepare metallic microspheres are proposed.
A kind of device that utilizes ultrasonic standing surface wave to prepare metallic microspheres; Form by gas storehouse and the titanium alloy mold, the heating element heater that are positioned at the gas storehouse, substrate, two ultrasonic surface wave emitters and drop flow control device; Said heating element heater is arranged on titanium alloy mold outer surface; The bottom of said titanium alloy mold is provided with the drop flow control device, and the two ends of the upper surface of said substrate are provided with the ultrasonic surface wave emitter respectively, said substrate be positioned at the titanium alloy mold under; A sidewall upper in said gas storehouse is provided with air inlet, sets out gas port in the side wall lower ends relative with air inlet.
The method of utilizing the above-mentioned device that utilizes ultrasonic standing surface wave to prepare metallic microspheres to prepare metallic microspheres realizes according to the following steps:
One, metal material is positioned in the titanium alloy mold in the gas storehouse, feeds inert gas shielding simultaneously; Start heating element heater then, metal material be heated to more than the fusing point be incubated 10 ~ 30min after 20 ℃ ~ 100 ℃, treat that metal material melts fully after; Obtain the metal material liquation; Restart the ultrasonic surface wave emitter, open the drop flow control device simultaneously the metal material liquation is dropwise dripped to substrate surface, under the ultrasonic wave effect, form measure-alike spherical metal drop;
Two, stop ultrasonic surface wave emitter and heating element heater; Begin to cool down with the cooling velocity of air cooling system with 5 ℃ ~ 20 ℃/min; Be cooled to 25 ℃ of room temperatures; Continue in the cooling procedure to protect to avoid the oxidation of metallic microspheres, be cooled to solid, promptly obtain the metallic microspheres of consistent size until the molten metal ball with inert gas;
Wherein metal material described in the step 1 is a Sn base, Zn is basic or the basic alloy of Al in any one;
Inert gas described in the step 1 is the mixture of one or more gases in nitrogen, argon gas or the helium;
Substrate described in the step 1 is Ti alloy, Al
2O
3In pottery or the SiC pottery any one;
The vibration frequency of ultrasonic surface wave described in the step 1 is 1MHz ~ 50MHz, and amplitude is 10nm ~ 500nm.
Mechanism of the present invention is that the ultrasonic surface wave emitter that the substrate surface specific distance is placed produces two row frequencies and the identical two row row ripples of amplitude simultaneously, and the stack back forms ultrasonic standing wave.Metal liquid drips to substrate surface and spreads out rapidly, produces strong spraying effect and makes the molten drop atomizing fly away from substrate in standing wave antinode zone, and surperficial drop keeps and the standing wave nodal region is owing to friction makes.Because above-mentioned selection substrate and metal liquid are nonwetting system, so the liquid that keeps on the substrate forms spherical under capillary effect.The size of Metal Ball is by the wavelength control that applies surface wave.
Characteristics of the present invention and effect:
1, the effect of ultrasonic standing surface wave can make metal liquid sprawl in substrate surface fast, and has the range of atomization field selectivity, can prepare multiple metallic microspheres at a large amount of metallic microspheres of the disposable formation of substrate surface, and the material system that is fit to preparation is extensive;
2, the size of metallic microspheres directly by the decision of standing wave wavelength, change the volume that wavelength can change metallic microspheres, and dimensional uniformity is good;
3, the preparation overall process adopts inert gas shielding, has avoided the problems such as oxidation and internal porosity of metallic microspheres, and has had certain distance between microballoon, has avoided the glutinous problem of being stained with between microballoon;
4, once preparing process only needs 1 ~ 2min, improved production efficiency and production efficiency greatly and be traditional blanking method 2 ~ 3 times.
Description of drawings
Fig. 1 utilizes ultrasonic standing surface wave to prepare the device sketch map of metallic microspheres.
The specific embodiment
The specific embodiment one: combine Fig. 1 that this specific embodiment is described; A kind of device that utilizes ultrasonic standing surface wave to prepare metallic microspheres of this embodiment; Form by gas storehouse 1 and the titanium alloy mold 2 that is positioned at the gas storehouse, heating element heater 3, substrate 4, two ultrasonic surface wave emitters 5 and drop flow control device 6; Said heating element heater 3 is arranged on titanium alloy mold 2 outer surfaces; The bottom of said titanium alloy mold 2 is provided with drop flow control device 6, and the two ends of the upper surface of said substrate 4 are provided with ultrasonic surface wave emitter 5 respectively, said substrate 4 be positioned at titanium alloy mold 2 under; A sidewall upper in said gas storehouse 1 is provided with air inlet 7, sets out gas port 8 in the side wall lower ends relative with air inlet.
The specific embodiment two: what this embodiment and the specific embodiment one were different is: described heating element heater 3 is induction or stratie.Other step and parameter are identical with the specific embodiment one.
The specific embodiment three: a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres realizes according to the following steps in this embodiment:
One, metal material is positioned in the titanium alloy mold 2 in gas storehouse 1, feeds inert gas shielding simultaneously; Start heating element heater 3 then, metal material be heated to more than the fusing point be incubated 10 ~ 30min after 20 ℃ ~ 100 ℃, treat that metal material melts fully after; Obtain the metal material liquation; Restart ultrasonic surface wave emitter 5, open drop flow control device 6 simultaneously the metal material liquation is dropwise dripped to substrate 4 surfaces, under the ultrasonic wave effect, form measure-alike spherical metal drop;
Two, stop ultrasonic surface wave emitter 5 and heating element heater 3; Begin to cool down with the cooling velocity of air cooling system with 5 ℃ ~ 20 ℃/min; Be cooled to 25 ℃ of room temperatures; Continue in the cooling procedure to protect to avoid the oxidation of metallic microspheres, be cooled to solid, promptly obtain the metallic microspheres of consistent size until the molten metal ball with inert gas;
Wherein metal material described in the step 1 is a Sn base, Zn is basic or the basic alloy of Al in any one;
Inert gas described in the step 1 is the mixture of one or more gases in nitrogen, argon gas or the helium;
Substrate described in the step 1 is Ti alloy, Al
2O
3In pottery or the SiC pottery any one;
The vibration frequency of ultrasonic surface wave described in the step 1 is 1MHz ~ 50MHz, and amplitude is 10nm ~ 500nm.
When inert gas is mixture in this embodiment step 1 and two, presses arbitrary proportion between each component and mix.
Characteristics of the present invention and effect:
1, the effect of ultrasonic standing surface wave can make metal liquid sprawl in substrate surface fast, and has the range of atomization field selectivity, can prepare multiple metallic microspheres at a large amount of metallic microspheres of the disposable formation of substrate surface, and the material system that is fit to preparation is extensive;
2, the size of metallic microspheres directly by the decision of standing wave wavelength, change the volume that wavelength can change metallic microspheres, and dimensional uniformity is good;
3, the preparation overall process adopts inert gas shielding, has avoided the problems such as oxidation and internal porosity of metallic microspheres, and has had certain distance between microballoon, has avoided the glutinous problem of being stained with between microballoon;
4, once preparing process only needs 1 ~ 2min, improved production efficiency and production efficiency greatly and be traditional blanking method 2 ~ 3 times.
The specific embodiment four: what this embodiment and the specific embodiment three were different is: in the step 1 metal material is heated to more than the fusing point and is incubated 15 ~ 25min after 50 ℃ ~ 70 ℃.Other step and parameter are identical with the specific embodiment three.
The specific embodiment five: what this embodiment was different with the specific embodiment three or four is: in the step 1 metal material is heated to more than the fusing point and is incubated 20min after 60 ℃.Other step and parameter are identical with the specific embodiment three or four.
The specific embodiment six: what this embodiment was different with one of specific embodiment three to five is: begin to cool down with the cooling velocity of air cooling system with 8 ℃ ~ 17 ℃/min in the step 2.Other step and parameter are identical with one of specific embodiment three to five.
The specific embodiment seven: what this embodiment was different with one of specific embodiment three to six is: begin to cool down with the cooling velocity of air cooling system with 13 ℃/min in the step 2.Other step and parameter are identical with one of specific embodiment three to six.
The specific embodiment eight: what this embodiment was different with one of specific embodiment three to seven is: the vibration frequency of ultrasonic surface wave described in the step 1 is 10MHz ~ 40MHz, and amplitude is 100nm ~ 300nm.Other step and parameter are identical with one of specific embodiment three to seven.
The specific embodiment nine: what this embodiment was different with one of specific embodiment three to eight is: the vibration frequency of ultrasonic surface wave described in the step 1 is 30MHz, and amplitude is 200nm.Other step and parameter are identical with one of specific embodiment three to eight.
Through following verification experimental verification beneficial effect of the present invention:
Test one: a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres of this test realizes according to the following steps:
Adopting metal material is pure Sn base alloy; Fusing point is 231.96 ℃; The substrate that is adopted is a titanium alloy, and the quality percentage composition of its composition is that Al:5.5 ~ 6.8%, V:3.5 ~ 4.5%, Fe:0.3, Si:0.15%, C:0.1, N:0.05, H:0.015%, O:0.2%, surplus are Ti;
One, pure Sn base alloy is positioned in the titanium alloy mold 2; In argon gas storehouse 1, feed lazy argon gas body protection simultaneously, start induction or stratie 3, the pure Sn base of metal material alloy is heated to 25min after 280 ℃ of insulations of fusing point; Treat to obtain pure Sn base alloy liquid after pure Sn base alloy melts fully; Restart ultrasonic surface wave emitter 5, supersonic frequency is 10MHz, and amplitude is 100nm; Utilize the gravity effect that the drop flow control device 6 of pure Sn base alloy liquid through the mold bottom dropwise dripped to substrate 4 surfaces, under the ultrasonic wave effect, forming diameter is the spherical pure Sn base alloy liquid droplet of 20 ± 1 μ m;
Two, stop ultrasonic surface wave emitter 5 and heating element heater 3; Begin to cool down with the cooling velocity of air cooling system with 10 ℃/min; Be cooled to 25 ℃ of room temperatures; Continue under the air cooling condition to protect to avoid the oxidation of pure Sn base alloying metal microballoon, be cooled to solid spherical metal, promptly accomplished the preparation of metallic microspheres until pure Sn base alloying metal liquid ball with lazy argon gas body.
Test two: a kind of method following steps of utilizing ultrasonic standing surface wave to prepare metallic microspheres of this test realize:
Adopting metal material is pure Al base alloy, and fusing point is 660 ℃.The substrate that is adopted is the SiC pottery;
One, pure Al base alloy is positioned in the titanium alloy mold 2; In argon gas storehouse 1, feed lazy argon gas body protection simultaneously, start induction or stratie 3, be incubated 25min after the pure Al base of metal material alloy is heated to 700 ℃ of fusing points; Treat to obtain pure Al base alloy liquid after pure Al base alloy melts fully; Restart ultrasonic surface wave emitter 5, supersonic frequency is 10MHz, and amplitude is 100nm; Utilize the gravity effect that the drop flow control device 6 of pure Al base alloy liquid through the mold bottom dropwise dripped to substrate 4 surfaces, under the ultrasonic wave effect, forming diameter is the spherical pure Al base alloy liquid droplet of 20 ± 1 μ m;
Two, stop ultrasonic surface wave emitter 5 and heating element heater 3; Begin to cool down with the cooling velocity of air cooling system with 10 ℃/min; Be cooled to 25 ℃ of room temperatures; Continue under the air cooling condition to protect to avoid the oxidation of pure Al base alloying metal microballoon, be cooled to solid spherical metal, promptly accomplished the preparation of metallic microspheres until the molten metal ball with lazy argon gas body.
Claims (9)
1. device that utilizes ultrasonic standing surface wave to prepare metallic microspheres; The device that it is characterized in that utilizing ultrasonic standing surface wave to prepare metallic microspheres is made up of gas storehouse (1) and the titanium alloy mold (2), heating element heater (3), substrate (4), two ultrasonic surface wave emitters (5) and the drop flow control device (6) that are positioned at the gas storehouse; Said heating element heater (3) is arranged on titanium alloy mold (2) outer surface; The bottom of said titanium alloy mold (2) is provided with drop flow control device (6); The two ends of the upper surface of said substrate (4) are provided with ultrasonic surface wave emitter (5) respectively; Said substrate (4) be positioned at titanium alloy mold (2) under, a sidewall upper in said gas storehouse (1) is provided with air inlet (7), sets out gas port (8) in the side wall lower ends relative with air inlet.
2. a kind of device that utilizes ultrasonic standing surface wave to prepare metallic microspheres according to claim 1 is characterized in that described heating element heater (3) is induction or stratie.
3. utilize the described device of claim 1 to prepare the method for metallic microspheres, it is characterized in that a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres realizes according to the following steps:
One, metal material is positioned over feeding inert gas shielding in gas storehouse (1) simultaneously in the titanium alloy mold (2); Start heating element heater (3) then; Metal material is heated to more than the fusing point is incubated 10 ~ 30min after 20 ℃ ~ 100 ℃; After treating that metal material melts fully, obtain the metal material liquation, restart ultrasonic surface wave emitter (5); Open drop flow control device (6) simultaneously the metal material liquation is dropwise dripped to substrate (4) surface, under the ultrasonic wave effect, form measure-alike spherical metal drop;
Two, stop ultrasonic surface wave emitter (5) and heating element heater (3); Begin to cool down with the cooling velocity of air cooling system with 5 ℃ ~ 20 ℃/min; Be cooled to 25 ℃ of room temperatures; Continue in the cooling procedure to protect to avoid the oxidation of metallic microspheres, be cooled to solid, promptly obtain the metallic microspheres of consistent size until the molten metal ball with inert gas;
Wherein metal material described in the step 1 is a Sn base, Zn is basic or the basic alloy of Al in any one;
Inert gas described in the step 1 is the mixture of one or more gases in nitrogen, argon gas or the helium;
Substrate described in the step 1 is Ti alloy, Al
2O
3In pottery or the SiC pottery any one;
The vibration frequency of ultrasonic surface wave described in the step 1 is 1MHz ~ 50MHz, and amplitude is 10nm ~ 500nm.
4. a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres according to claim 3 is characterized in that in the step 1 metal material is heated to more than the fusing point and is incubated 15 ~ 25min after 50 ℃ ~ 70 ℃.
5. a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres according to claim 3 is characterized in that in the step 1 metal material is heated to more than the fusing point and is incubated 20min after 60 ℃.
6. a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres according to claim 3 is characterized in that beginning to cool down with the cooling velocity of air cooling system with 8 ℃ ~ 17 ℃ in the step 2.
7. a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres according to claim 3 is characterized in that beginning to cool down with the cooling velocity of air cooling system with 13 ℃ in the step 2.
8. a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres according to claim 3 is characterized in that the vibration frequency of ultrasonic surface wave described in the step 1 is 10MHz ~ 40MHz, and amplitude is 100nm ~ 300nm.
9. a kind of method of utilizing ultrasonic standing surface wave to prepare metallic microspheres according to claim 3 is characterized in that the vibration frequency of ultrasonic surface wave described in the step 1 is 30MHz, and amplitude is 200nm.
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| CN106694894A (en) * | 2016-12-27 | 2017-05-24 | 深圳微纳增材技术有限公司 | High-activity metal superfine powder preparation device and method |
| CN107321999A (en) * | 2017-08-15 | 2017-11-07 | 清远先导材料有限公司 | The preparation facilities of high-purity powder |
| CN107824793A (en) * | 2017-10-31 | 2018-03-23 | 中国科学院过程工程研究所 | A kind of device and method for preparing ultra-fine single dispersion metal microballoon |
| CN109622980A (en) * | 2019-01-28 | 2019-04-16 | 哈尔滨工业大学 | A kind of contactless powder by atomization device and method of molten metal ultrasonic standing wave |
| CN110000385A (en) * | 2019-05-22 | 2019-07-12 | 上海交通大学 | A kind of direct 3D printing device of the liquid bimetallic of ultrasonic wave added and Method of printing |
| CN110076346A (en) * | 2019-04-22 | 2019-08-02 | 中科音瀚声学技术(上海)有限公司 | A kind of ultrasonic standing wave atomization device suitable for manufacturing lemel |
| CN110355376A (en) * | 2019-08-12 | 2019-10-22 | 齐鲁工业大学 | A kind of method that ultrasonic excitation aluminium-salt blend melt prepares aluminum or aluminum alloy powder |
| CN111315513A (en) * | 2017-11-09 | 2020-06-19 | 3D实验室股份有限公司 | Device for producing spherical metal powder by means of ultrasonic atomization |
| CN111545765A (en) * | 2020-04-17 | 2020-08-18 | 太极半导体（苏州）有限公司 | Method for preparing tin ball with uniform ball diameter and good sphericity |
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| CN106694894A (en) * | 2016-12-27 | 2017-05-24 | 深圳微纳增材技术有限公司 | High-activity metal superfine powder preparation device and method |
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| CN107824793A (en) * | 2017-10-31 | 2018-03-23 | 中国科学院过程工程研究所 | A kind of device and method for preparing ultra-fine single dispersion metal microballoon |
| CN111315513A (en) * | 2017-11-09 | 2020-06-19 | 3D实验室股份有限公司 | Device for producing spherical metal powder by means of ultrasonic atomization |
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| CN110355376A (en) * | 2019-08-12 | 2019-10-22 | 齐鲁工业大学 | A kind of method that ultrasonic excitation aluminium-salt blend melt prepares aluminum or aluminum alloy powder |
| CN110355376B (en) * | 2019-08-12 | 2022-06-14 | 齐鲁工业大学 | Method for preparing aluminum or aluminum alloy powder by exciting aluminum-salt mixed melt through ultrasonic waves |
| CN111545765A (en) * | 2020-04-17 | 2020-08-18 | 太极半导体（苏州）有限公司 | Method for preparing tin ball with uniform ball diameter and good sphericity |
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| CN102773493B (en) | 2014-02-26 |
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