CN102759932A - Control device and control method for plurality of paths of gas mass flow meters - Google Patents
Control device and control method for plurality of paths of gas mass flow meters Download PDFInfo
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- CN102759932A CN102759932A CN2012102307246A CN201210230724A CN102759932A CN 102759932 A CN102759932 A CN 102759932A CN 2012102307246 A CN2012102307246 A CN 2012102307246A CN 201210230724 A CN201210230724 A CN 201210230724A CN 102759932 A CN102759932 A CN 102759932A
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Abstract
The invention discloses a control device and a control method for a plurality of paths of gas mass flow meters, which are used for controlling a mass flow of a plurality of paths of gas. The control device comprises a field bus module and a main control module, wherein the main control module and the field bus module are connected through a wired or wireless manner; the field bus module can be connected with a plurality of paths of the gas mass flow meters and receives a control instruction of the main control module; and a gas mass flow output by a plurality of paths of the gas mass flow meters can be controlled according to the control instruction. According to the control device and the control method, the communication of the main control module and the field bus module realizes the united (or signal) accurate control on a plurality of paths of the gas mass flow meters, so that the accurate confluence with any flow ratio on a plurality of paths of gas or the accurate flow distribution with any flow ratio on a single path of the gas can be realized, the control precision (which is better than 1 ml/min) of a gas flow speed is improved and a gas flow speed can be automatically increased and decreased.
Description
Technical field
The invention belongs to the control technology field of mass-flow gas meter, be specifically related to a kind of multipath gas mass rate meter control device and control method, it can accurately control the gas flow rate of multipath gas.
Background technology
Mass-flow gas meter is the device of a kind of measurement and pilot-gas mass rate, often is used to the flow output of accurate pilot-gas in chemical technology field, technical field of semiconductors.When two kinds or above gas mix use simultaneously; Perhaps fixed flow rate single planted gas when carrying out the multichannel shunting; Need to use the multipath gas mass flowmeter to come the mass rate output of pilot-gas, so that accurate control mixes or the flow proportional of shunting gas.
Current; In some equipment, disposed the mass-flow gas meter of different model as required, utilize different hardware or software to control respectively; But they all are that the single channel mass-flow gas meter is manually controlled separately, so its control accuracy and automaticity are lower.
Thus, each production field that need accurately control multipath gas or its scientific experiment chamber utmost point need a kind of can high accuracy and the multipath gas mass flow meter control device of automation and utilize this control device to control the method for multipath gas mass flow.
Summary of the invention
The technical matters that (one) will solve
Can not the invention provides a kind of multipath gas mass rate meter control device and control method to accurate simultaneously defective of controlling of multipath gas and the problem that control accuracy is poor, automaticity is lower to existing mass-flow gas meter control device.
(2) technical scheme
In order to solve the problems of the technologies described above; The present invention proposes a kind of multipath gas mass rate meter control device, is used to control the mass rate of multipath gas, comprises fieldbus module and main control module; Said main control module is connected through wired or wireless mode with fieldbus module; Said fieldbus module can be connected with a plurality of mass-flow gas meters, and accepts the steering order of said main control module, according to the gas mass flow of these these a plurality of mass-flow gas meter outputs of steering order control.
According to a kind of embodiment of the present invention; Said fieldbus module comprises fieldbus adaptation module, digital quantity output module, analog output module and analog quantity load module, transmits signal through fieldbus between said fieldbus adaptation module and other each modules; Said fieldbus adaptation module is used to receive the steering order that main control module sends, and passes to said digital quantity output module and analog output module through fieldbus; Said digital quantity output module is used for producing a make-and-break signal according to the steering order of main control module, is used for the opening and closing of the path of pilot-gas mass flowmeter; Said analog output module is used for producing a flow signal according to the steering order of main control module, is used for the gas mass flow of pilot-gas mass flowmeter; Said analog quantity load module is used for the flow feedback signal that the receiver gases mass flowmeter produces; Said fieldbus adaptation module also is used for giving said main control module through the gas mass flow data transmission that fieldbus is gathered said analog quantity load module; Except that said fieldbus adaptation module, the quantity of each included module all can be adjusted according to the gas circuit quantity of said mass-flow gas meter in the said fieldbus module.
According to a kind of embodiment of the present invention; Said main control module is used to receive user's operation; And receive said gas mass flow data, and produce steering order and send to fieldbus module according to said operation and flow feedback signal from said fieldbus module.
According to a kind of embodiment of the present invention, said fieldbus module also comprises terminal module, and the end that it is installed on said fieldbus node is used to form complete internal data loop and guarantees the correctness of data stream.
According to a kind of embodiment of the present invention, said main control module is a computing machine, and said fieldbus adaptation module is the fieldbus adapter, and the two is through the ICP/IP protocol communication of wired or wireless Ethernet.
According to a kind of embodiment of the present invention; Said digital quantity output module, analog output module, analog quantity load module and terminal module are realized by Hardware I/O module; These Hardware I/O module has the field bus communication function respectively; And can both carry out communication with the fieldbus adapter respectively, to receive or to send signal.
According to a kind of embodiment of the present invention, said fieldbus adapter and IO port are integrated in the box body, and the side of said box body is provided with the air inlet rapid-acting coupling and the rapid-acting coupling of giving vent to anger that connects said mass-flow gas meter.
According to a kind of embodiment of the present invention, also comprise a stabilized voltage supply, be used for to said fieldbus module power supply, and the bottom of said fieldbus module and this stabilized voltage supply is installed on the guide rail.
The present invention also proposes a kind of mass-flow gas meter control method, is used to control the gas mass flow of multipath gas mass flowmeter, comprises the steps: to produce the flow feedback signal according to the gas mass flow data of said multipath gas mass flowmeter; Operation and the generation of said flow feedback signal according to the user are used to control the break-make of multipath gas flowmeter or the steering order of flow; Produce a make-and-break signal according to said steering order, be used for the opening and closing of the path of pilot-gas mass flowmeter; Produce a flow signal according to said steering order, be used for the gas mass flow of pilot-gas mass flowmeter.
According to a kind of embodiment of the present invention, also comprise step: set the funtcional relationship that said flow signal changes in time, thereby be implemented in the automatic increase and decrease of mass-flow gas meter output gas flow rate in specified scope in the fixed time length.
(3) beneficial effect
The present invention through computing machine and fieldbus module Communication Realization the multipath gas mass flowmeter is united (or separately) accurately control; Realized multipath gas is carried out accurately confluxing of any flow proportional and single channel gas carried out the accurate shunting of any flow proportional; Improved control accuracy (being superior to 1ml/min), and can realize increasing and decreasing automatically gas flow rate gas flow rate.
And; Because mass-flow gas meter of the present invention is installed on the small-sized polyester protective housing inside that meets the IP65 degree of protection with other hardware; Adopt the rapid-acting coupling that meets IP67 degree of protection or German Lloyd's's authentication with the interface of external unit, the device that the present invention realizes has the characteristics of portable and suitable complex work environment.
Description of drawings
Fig. 1 is that the module of multipath gas mass rate meter control device of the present invention constitutes synoptic diagram;
Fig. 2 is that the internal module of the field summary module of multipath gas mass rate meter control device of the present invention constitutes synoptic diagram;
Fig. 3 is the structural representation of an embodiment of multipath gas mass rate meter control device of the present invention, and it is a front view;
Fig. 4 is the vertical view that is embodiment illustrated in fig. 3.
Embodiment
For making the object of the invention, technical scheme and advantage clearer,, and, the present invention is done further detailed description with reference to accompanying drawing below in conjunction with specific embodiment.
Mass-flow gas meter control device of the present invention can be used for controlling the gas mass flow of multipath gas mass flowmeter.Fig. 1 is that the module of multipath gas mass rate meter control device of the present invention constitutes synoptic diagram.As shown in Figure 1, control device 1 of the present invention comprises fieldbus module 2 and main control module 3, and main control module 3 is connected through wired or wireless mode with fieldbus module 2.Wherein, this fieldbus module 2 can be connected with a plurality of mass-flow gas meters 8, and accepts the steering order of main control module 3, according to the gas mass flow of these a plurality of mass-flow gas meter 8 outputs of steering order control.
Fig. 2 is that the internal module of the fieldbus module of multipath gas mass rate meter control device of the present invention constitutes synoptic diagram.As shown in Figure 2, fieldbus module 2 of the present invention comprises fieldbus adaptation module 9, digital quantity output module 10, analog output module 11, analog quantity load module 12 and terminal module 13.Transmit signal through fieldbus between above-mentioned each module.According to embodiment of the present invention, above-mentioned each module is installed connection with the detachable cassette guide rail on physical construction.
Wherein, Fieldbus adaptation module 9 is the fieldbus adapters with Ethernet TCP/IP or other wired or wireless communication functions; Through Ethernet TCP/IP and main control module 3 communications; Receive the steering order that main control module 3 sends; Pass to digital quantity output module 10 and analog output module 11 through fieldbus, and give main control module 3, thereby make main control module can control each mass-flow gas meter 8 in real time through the gas mass flow data transmission that fieldbus is gathered analog quantity load module 12. Module 10,11 and 12 all has the field bus communication function respectively, can carry out communication with bus adaptation module 9 respectively.
Digital quantity output module 10 produces a make-and-break signal according to the steering order of main control module 3, is used for the opening and closing of the path of pilot-gas mass flowmeter 8.This make-and-break signal is a digital signal, and for example, it provides the 0V voltage or first voltage to mass-flow gas meter 8 according to steering order, and when 0V voltage was provided, corresponding mass flowmeter 8 was closed path, does not have gas to pass through; When output first voltage, corresponding mass-flow gas meter 8 is opened path, begins to carry out flow control.First voltage for example is 24V.
The flow feedback signal that analog quantity load module 12 receiver gases mass flowmeters 8 produce; This flow feedback signal for example is the feedback voltage signal between 0V voltage to tertiary voltage; When mass flowmeter 8 work; Can current mass flow rate signal be converted into the feedback voltage signal between 0V voltage to tertiary voltage and export to analog output module 11 and main control unit 3, handle with reporting to the police so that realize the OBD of main control module 3.
In this manual, module 10,11 and 12 abbreviates input/output module as.
As previously mentioned, main control module 3 communicates with the fieldbus adaptation module 9 of fieldbus module 2, and fieldbus module 2 is carried out the steering order that main control module 3 sends, thereby the gas flow of multipath gas mass flowmeter 8 is controlled.According to embodiment of the present invention, main control module 3 communicates through existing communication protocol and fieldbus module 2, ICP/IP protocol for example, and its communication mode both can be wired mode, also can be wireless mode.
According to the present invention, the mass-flow gas meter 8 that is connected with control device 1 has a plurality of, the steering order that all can send through receiving control device 1 of each mass-flow gas meter 8 wherein, thus measure and the single mass rate of planting gas of control.Each mass rate is counted a relatively independent unit, needs the module of one group of analog input, output and numeral output corresponding with it, the quantity of the mass flowmeter that the quantity of input/output module has determined to control in the system.Mass-flow gas meter be preferably can be in the scope of 0～2000ml/min accurate pilot-gas flow velocity, but the present invention is not limited to this, the mass-flow gas meter 8 of greater amount journey scope also can use.
According to preferred implementation of the present invention, multipath gas mass rate meter control device also comprises a stabilized voltage supply 7, is used for required stabilized voltage supply to above-mentioned fieldbus module 2 being provided, for example 24V direct supply etc.
Through a specific embodiment this invention is described below.Need to prove, be example with the two-way mass-flow gas meter only among this embodiment, but the present invention is not limited to this, and those skilled in the art can expand to this embodiment the technical scheme of the control device of supporting the multipath gas mass flowmeter easily.
Fig. 3 and Fig. 4 are the structural representations of an embodiment of multipath gas mass rate meter control device of the present invention, and wherein Fig. 3 is a front view, and Fig. 4 is a vertical view.
In this embodiment; Main control module 3 is personal computers; Fieldbus module 2 is embodied as a fieldbus adapter and input/output module, and specifically, aforesaid fieldbus adaptation module 9 is a fieldbus adapter in this embodiment; Aforesaid digital quantity output module 10, analog output module 11, analog quantity load module 12 and terminal module 13 are realized by Hardware I/O module; These Hardware I/O module has the field bus communication function respectively, can be respectively and the communication of fieldbus adapter, receive or send signal.
In this embodiment; Computing machine and fieldbus adapter are through the ICP/IP protocol communication of wired ethernet network; The fieldbus adapter carries out communication through fieldbus and input/output module, and the fieldbus adapter is the communication bridge between computing machine and the input/output module.Computing machine sends steering order according to user's input or pre-set program to the fieldbus adaptor module; This steering order is transferred to corresponding input/output module through fieldbus, and this module is received this steering order of back execution, exports corresponding aanalogvoltage and digital voltage; Mass flowmeter is according to the flow of this road gas of voltage adjustment; Simultaneously this road flow is measured, be converted into aanalogvoltage output, input/output module is carried out analog-digital conversion to this voltage; Become in the register that digital signal is stored in load module; When computing machine sends the steering order that reads these data, can pass through the Ethernet sending controling instruction, and then arrive this load module through the fieldbus sending controling instruction to the fieldbus adapter; When this module receives reading command the data in the register are sent to bus adapter through fieldbus, and then send to computing machine through Ethernet and show, handle.This process is for controlling and gather the process of actual flow information to single mass flowmeter, multichannel control is identical with the single channel control principle, and each input/output module has its unique address on the bus at the scene.Through bus adapter steering order is sent to specific bus address, corresponding input/output module will receive steering order, thereby the gas with various mass flowmeter is controlled.
In the present embodiment, digital quantity output module 10, analog output module 11 and analog quantity load module 12 are the binary channels module, control thereby input/output module can connect two mass-flow gas meters 8.
Like Fig. 3 and shown in Figure 4; In this embodiment; Fieldbus adapter and aforementioned IO port are integrated in the box body, and this box body is preferably the less polyester protective housing of volume that meets the IP65 degree of protection, and for example the length and width height is respectively less than 330mm, 170mm and 100mm.Be provided with RJ45 netting twine communication interface 14 in the side of this box body, the 220V power supply inserts terminal 15 and the gas piping air inlet rapid-acting coupling 16 that is connected mass-flow gas meter, the rapid-acting coupling 17 of giving vent to anger fast, and is furnished with louvre 18 (can seal).RJ45 netting twine communication interface 14 is used for common twisted pair network cable this invention device for carrying out said fieldbus adapter of connection and computing machine communicates.The 220V power supply inserts terminal 15 fast and is used to connect outside 220V power supply and device interior voltage-stabilized power supply 7, realizes the power supply to stabilized voltage supply 7, and this terminal adopts the cage spring technology can realize the quick connection to the power supply bare wire.Air inlet rapid-acting coupling 16 is used for coupling arrangement internal soundness flowmeter air admission hole and extraneous gas supply arrangement.The rapid-acting coupling 17 of giving vent to anger is used for coupling arrangement internal soundness flowmeter venthole and outside gas equipment.The two ends of the air inlet rapid-acting coupling 16 and the rapid-acting coupling 17 of giving vent to anger can realize being connected through the gas circuit flexible pipe that directly inserts external diameter 6mm, can also be replaced by the connection that reducing rapid-acting coupling realizes the various outer diameter gas piping.Louvre is used for the heat radiation of device inner heat equipment, can use the water joint sealing that meets the IP65 degree of protection when under special rugged surroundings, using.
In this embodiment, this device also comprises a stabilized voltage supply 7, is used to provide 24V voltage to fieldbus module 2.Bottom of device installs the DIN 35 steel supporting guides 6 that meet EN 60715 standards additional, and fieldbus module 2 can firmly be quick installed on the guide rail 6 with the 35mm bayonet socket that stabilized voltage supply 7 bottoms have standard.The device volume of this embodiment is less, and box body meets the IP65 degree of protection, therefore has portable and the semitight characteristics.And because its all hardware assembly has the normal working temperature scope of broad in design, therefore device can use under 0～50 ℃ complex environment.
In other embodiments of the invention; Mass-flow gas meter 8 also possibly be more than two; At this moment; Only need to increase the quantity of digital quantity output module 10, analog output module 11 and analog quantity load module 12, in main control module 3, increase, promptly can realize control more mass flowmeter to these module controls parameters.
In this embodiment, computing machine can accurately be controlled the voltage signal of analog output module 11, thereby can obtain the accurate output flow velocity of mass-flow gas meter.For example; The magnitude of voltage sum of two passages is a definite value in the computer control analog output module 11; Just can obtain the constant gas overall flow rate value of two mass-flow gas meters 8; Change the magnitude of voltage of one of them passage, then the voltage of another passage also will be made corresponding change, thus the also corresponding increase and decrease of the gas flow rate of two mass-flow gas meters.Can obtain downstream that overall flow rate the remains unchanged gas that confluxes like this.Equally,, can accurately shunt in required any flow velocity ratio it, obtain two-way downstream shunting gas through two mass-flow gas meters for the single channel upstream gas of known flow rate.
Computing machine can be set the funtcional relationship that analog output module 11 voltages change in time, promptly can be implemented in the mass-flow gas meter 8 automatic increases and decreases of output gas flow rate in specified scope in the fixed time length.
In this embodiment, included module 9～13 has nothing to do in the flow velocity range ability of mass-flow gas meter 8 and the fieldbus module.Promptly in actual use, can dispose the mass-flow gas meter 8 of suitable range as required.The range of mass-flow gas meter 8 for example commonly used is 0～2000ml/min, and control accuracy can be superior to 1ml/min, can reach the flow velocity accuracy of 1ml/min in actual the use through computer control.Mass-flow gas meter of the present invention adopts the 1179B type mass-flow gas meter of the U.S. MKS company production that has 15 pin D type interfaces, has characteristics such as high precision and reappearance.
Module 10-12 in the fieldbus module 2 all can increase and join according to the quantity of control air-flow, thereby can control more mass-flow gas meters 8.Fieldbus module is data communication and automation field equipment commonly used.The fieldbus module 2 that is adopted among this embodiment is realized by the Ethernet TCP/IP fieldbus adapter and the I/O module of German Wago company.
Can know that through above-mentioned explanation mass-flow gas meter control method of the present invention mainly comprises the steps: to produce the flow feedback signal according to the gas mass flow data of said multipath gas mass flowmeter for mass-flow gas meter control device of the present invention; Operation and the generation of said flow feedback signal according to the user are used to control the break-make of multipath gas flowmeter or the steering order of flow; Produce a make-and-break signal according to said steering order, be used for the opening and closing of the path of pilot-gas mass flowmeter; Produce a flow signal according to said steering order, be used for the gas mass flow of pilot-gas mass flowmeter.
The control method of multipath gas mass rate meter control device of the present invention is described according to the control device of above-mentioned specific embodiment below.
1. control device is made up of computing machine 3, fieldbus module 2, stabilized voltage supply 7 and mass-flow gas meter.Fieldbus module 2 comprises fieldbus adapter 9, digital quantity output module 10, analog output module 11, analog quantity load module 12 and terminal module 13.Fieldbus module 2 provides 24V WV by stabilized voltage supply 7; And pass through ICP/IP protocol and communicate by letter with computing machine 3; Interface Terminal on the input/output module 10-12 in the fieldbus module 2 is connected communication with mass-flow gas meter 8, through receiving and sending from the steering order of computing machine 3 it is controlled.
2. the number that installs the mass-flow gas meter that can control depends on the quantity of digital quantity output module 10, analog output module 11, analog quantity load module 12 and terminal module 13 upper channels.Increase and join these modules, and change logical operation and steering order in the computing machine, just can realize the function that jointly controls the multipath gas mass flowmeter.The magnitude of voltage sum that computing machine 3 is set all passages in the analog output modules 11 is a definite value, i.e. the fixing output overall flow rate of all gas mass flowmeter.If change the magnitude of voltage of one of them passage, then the voltage of other passages of funtcional relationship through computing machine 3 appointments also will be made corresponding change, and promptly the gas flow rate of mass-flow gas meter is also made corresponding increase and decrease.Can obtain downstream that overall flow rate the remains unchanged gas that confluxes like this.Equally,, can accurately shunt in required any flow velocity ratio it, obtain multichannel downstream shunting gas through the multipath gas mass flowmeter for the single channel upstream gas of known flow rate.
3. computing machine 3 can be set the funtcional relationship that analog output module 11 voltages change in time, promptly can be implemented in the mass-flow gas meter 8 automatic increases and decreases of output gas flow rate in specified scope in the fixed time length.
4. except that computing machine 3, it is inner that other nextport hardware component NextPorts are installed on the small-sized polyester protective housing that meets the IP65 degree of protection.The side assembling RJ45 netting twine communication interface 14 of box body realizes that the communication of computing machine 3 and fieldbus adapter 9 is connected; The 220V power supply inserts terminal 15 fast power supply stabilized voltage supply 7 is provided; Air inlet rapid-acting coupling 16 coupling arrangement internal soundness flowmeter air admission hole and extraneous gas supply arrangements; Rapid-acting coupling 17 coupling arrangement internal soundness flowmeter venthole and the outside gas equipments of giving vent to anger; And is furnished with louvre 18 (can seal).The device that the present invention realizes has the characteristics of portable and suitable complex work environment.
Above-described specific embodiment; The object of the invention, technical scheme and beneficial effect have been carried out further explain, it should be understood that the above is merely specific embodiment of the present invention; Be not limited to the present invention; All within spirit of the present invention and principle, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. multipath gas mass rate meter control device; Be used to control the mass rate of multipath gas; It is characterized in that; Comprise fieldbus module (2) and main control module (3), said main control module (3) is connected through wired or wireless mode with fieldbus module (2), and said fieldbus module (2) can be connected with a plurality of mass-flow gas meters (8); And accept the steering order of said main control module (3), the gas mass flow of should a plurality of mass-flow gas meters (8) exporting according to this steering order control.
2. mass-flow gas meter control device as claimed in claim 1; It is characterized in that; Said fieldbus module (2) comprises fieldbus adaptation module (9), digital quantity output module (10), analog output module (11) and analog quantity load module (12), said fieldbus adaptation module
(9) and between other each modules transmit signal through fieldbus;
Said fieldbus adaptation module (9) is used to receive the steering order that main control module (3) sends, and passes to said digital quantity output module (10) and analog output module (11) through fieldbus;
Said digital quantity output module (10) is used for producing a make-and-break signal according to the steering order of main control module (3), is used for the opening and closing of the path of pilot-gas mass flowmeter (8);
Said analog output module (11) is used for producing a flow signal according to the steering order of main control module (3), is used for the gas mass flow of pilot-gas mass flowmeter (8);
Said analog quantity load module (12) is used for the flow feedback signal that receiver gases mass flowmeter (8) produces;
Said fieldbus adaptation module (9) also is used for giving said main control module (3) through the gas mass flow data transmission that fieldbus is gathered said analog quantity load module (12);
Except that said fieldbus adaptation module (9), the quantity of each included module all can be adjusted according to the gas circuit quantity of said mass-flow gas meter (8) in the said fieldbus module (2).
3. mass-flow gas meter control device as claimed in claim 2; It is characterized in that; Said main control module (3) is used to receive user's operation; And receive said gas mass flow data from said fieldbus module (2), and according to said operation with flow feedback signal generation steering order and send to fieldbus module (2).
4. mass-flow gas meter control device as claimed in claim 3; It is characterized in that; Said fieldbus module (2) also comprises terminal module (13), and the end that it is installed on said fieldbus node is used to form complete internal data loop and guarantees the correctness of data stream.
5. mass-flow gas meter control device as claimed in claim 4; It is characterized in that; Said main control module (3) is a computing machine, and said fieldbus adaptation module (9) is the fieldbus adapter, and the two is through the ICP/IP protocol communication of wired or wireless Ethernet.
6. mass-flow gas meter control device as claimed in claim 5; It is characterized in that; Said digital quantity output module (10), analog output module (11), analog quantity load module (12) and terminal module (13) are realized by Hardware I/O module; These Hardware I/O module has the field bus communication function respectively, and can both carry out communication with the fieldbus adapter respectively, to receive or to send signal.
7. mass-flow gas meter control device as claimed in claim 6; It is characterized in that; Said fieldbus adapter and IO port are integrated in the box body, and the side of said box body is provided with air inlet rapid-acting coupling (16) and the rapid-acting coupling of giving vent to anger (17) that connects said mass-flow gas meter (8).
8. mass-flow gas meter control device as claimed in claim 7; It is characterized in that, also comprise a stabilized voltage supply (7), be used for supplying power to said fieldbus module (2); And the bottom of said fieldbus module (2) and this stabilized voltage supply (7) is installed on the guide rail (6).
9. mass-flow gas meter control method is used to control the gas mass flow of multipath gas mass flowmeter, it is characterized in that, comprises the steps:
Gas mass flow data according to said multipath gas mass flowmeter produce the flow feedback signal;
Operation and the generation of said flow feedback signal according to the user are used to control the break-make of multipath gas flowmeter or the steering order of flow;
Produce a make-and-break signal according to said steering order, be used for the opening and closing of the path of pilot-gas mass flowmeter;
Produce a flow signal according to said steering order, be used for the gas mass flow of pilot-gas mass flowmeter.
10. mass-flow gas meter control method as claimed in claim 9; It is characterized in that; Also comprise step: set the funtcional relationship that said flow signal changes in time, thereby be implemented in the automatic increase and decrease of mass-flow gas meter output gas flow rate in specified scope in the fixed time length.
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| CN105974053A (en) * | 2015-10-29 | 2016-09-28 | 兵器工业卫生研究所 | Armoured vehicle cabin harmful gas simulation experiment system |
| CN106483909A (en) * | 2016-12-16 | 2017-03-08 | 河北雨川燃气设备有限公司 | A kind of flow meter signal analogy method, simulator and filling machine analog detecting method |
| CN106483909B (en) * | 2016-12-16 | 2019-09-13 | 河北雨川燃气设备有限公司 | A kind of dispenser analog detecting method |
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| CN102759932B (en) | 2014-05-14 |
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