CN202915968U - Polycrystalline silicon reducing furnace air inflow measuring device - Google Patents
Polycrystalline silicon reducing furnace air inflow measuring device Download PDFInfo
- Publication number
- CN202915968U CN202915968U CN 201220640168 CN201220640168U CN202915968U CN 202915968 U CN202915968 U CN 202915968U CN 201220640168 CN201220640168 CN 201220640168 CN 201220640168 U CN201220640168 U CN 201220640168U CN 202915968 U CN202915968 U CN 202915968U
- Authority
- CN
- China
- Prior art keywords
- pressure
- differential
- flow
- small
- pressure transmitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Measuring Volume Flow (AREA)
Abstract
The utility model relates to a polycrystalline silicon reducing furnace air inflow measuring device. The polycrystalline silicon reducing furnace air inflow measuring device comprises a large-differential-pressure pressure transmitter, a small-differential-pressure pressure transmitter, a tri-valve set, a temperature sensor, a flow sensor, and a set of programmable logic controller (PLC) system. After passing the tri-valve set, positive side pressures and negative side pressures of the large-differential-pressure pressure transmitter and the small-differential-pressure pressure transmitter are in direct connection with a pressure leading mouth of the flow sensor, the connections are all in a negative mode, and two output lines of the temperature sensor are respectively connected to temperature compensation terminals of the large-differential-pressure pressure transmitter and the small-differential-pressure pressure transmitter. Segmental measurement is adopted, two multi-parameter micro differential pressure transmitters are assembled, wherein a small-measuring-range differential-pressure transmitter measures differential pressure when flow is small and a large-measuring-range differential-pressure transmitter measures differential pressure when flow is large, and a measuring-range ratio can reach 100 : 1 and even be higher than 100 : 1. Due to the fact that measuring ranges of the two transmitters are different, precise measurement of the small flow when material feed starts and the large flow in production tail can be achieved, the problem that the same measuring device measuring different conditions and different media is difficult is resolved, hydrogen flow is directly measured, and after parameters are rectified, the measuring device measures nitrogen flow in an auxiliary mode.
Description
One, technical field
The utility model relates to a kind of polycrystalline silicon reducing furnace charge flow rate measurement mechanism, is specifically related to the device that Siemens Method is produced polysilicon.
Two, background technology
At present, producing in the world polysilicon is main flow mainly with Siemens Method, in process of production according to a certain ratio SiHCl3 and hydrogen is passed in the reduction furnace, with 5SiHCl
3+ H
2← → 2Si+2SiCl
4+ 5HCl+SiH
2Cl
2Be key reaction.Generate polysilicon and be deposited on red-hot silicon wicking surface, form silicon rod.Yet still face following problem in the actual production:
In a production cycle of polysilicon, the charging of hydrogen initial stage only has a few mark sides, and the later stage charging can reach several thousand mark sides, and traditional flowmeter range ratio under the prerequisite that guarantees precision does not reach, and therefore can not carry out Measurement accuracy to the low discharge at initial stage and the large flow in later stage.The proportioning of hydrogen and SiHCl3 affects conversion ratio and the silicon actual output of SiHCl3 as can be seen from the above equation.
Because that produces need to will carry out respectively nitrogen and hydrogen exchange to reduction furnace and pipeline in first, the latter stage of reaction, replacement result is judged according to flow and time, and same traditional flowmeter is to carry out Measurement accuracy to the flow of the two media under two kinds of operating modes.
Three, the content of utility model
The purpose of this utility model is to measure the problem that exists for present polycrystalline silicon reducing furnace charge flow rate, and a kind of polycrystalline silicon reducing furnace charge flow rate measurement mechanism is provided.It solves emphatically following problem: one, range extension ratio, realize the Measurement accuracy to low discharge and large flow.Two, solve the same measurement mechanism of use is difficult to Measurement accuracy to different operating mode different mediums problem.
The utility model is achieved like this: a kind of polycrystalline silicon reducing furnace charge flow rate measurement mechanism, it comprises that large differential pressure pressure unit, little differential pressure pressure unit, three valve groups, temperature sensor, flow sensor and a cover PLC system consist of, its large differential pressure pressure unit be connected the positive/negative-pressure side of differential pressure pressure unit by directly being connected with the impulse mouth of flow sensor after the three valve groups, all be just to connect, the two-way output of temperature sensor is connected respectively to the temperature compensation terminal of large differential pressure pressure unit and little differential pressure pressure unit.
The positive/negative-pressure side of differential pressure transmitter of the present utility model is connected with the impulse mouth of flow sensor, all be just to connect, hydrogen flowing quantity under the standard state after the upper PLC system of data processing compensates through pressure and temperature by the data sectional collection, realize the measurement of wide range unit rate of flow with this, realize subsidiary to nitrogen flow by the parameter correction simultaneously, and export to host computer.
Characteristics of the present utility model are:
1, takes areal survey, are furnished with two many reference amounts differential pressure transmitters, differential pressure when the small-range differential pressure transmitter is measured low discharge, differential pressure when the wide range differential pressure transmitter is measured large flow, the range specific energy reaches 100: 1 even is higher, because the range of two transmitters is different, guaranteed that low discharge can both be measured accurately with production large flow of later stage when just beginning charging.
2, solve same measurement mechanism to the problem that different operating mode different medium flows are difficult to measure, directly measured hydrogen flowing quantity, by subsidiary nitrogen flow after the parameter correction.
Four, description of drawings
Accompanying drawing 1 is mechanical part sectional view of the present utility model (not containing the electric parts such as PLC).
Among the figure: the large differential pressure pressure unit of 1----, the little differential pressure pressure unit of 2----, 3----three valve groups, 4----temperature sensor, 5----flow sensor.
Five, embodiment
Come the utility model done below in conjunction with drawings and Examples and describe in further detail.
With reference to accompanying drawing, the utility model polycrystalline silicon reducing furnace charge flow rate measurement mechanism, it comprises large differential pressure pressure unit 1, little differential pressure pressure unit 2, three valve groups 3, temperature sensor 4, flow sensor 5 and a cover PLC system (comprise AI, AO, fastener and the PLC power supplys such as CPU) consist of, its large differential pressure pressure unit 1 be connected the positive/negative-pressure side of differential pressure pressure unit 2 and directly be connected with the impulse mouth of flow sensor 5 by three valve groups 3 are rear, all be just to connect, the two-way output of temperature sensor 4 is connected respectively to the temperature compensation terminal of large differential pressure pressure unit 1 and little differential pressure pressure unit 2.
Calculate formula Q v=C ε A/sqr (2 Δ P/ (ρ) according to differential flow
The C coefficient of flow;
The inflatable coefficient of ε
A throttling element perforate sectional area
The differential pressure of Δ P restriction device output
The density of P detected fluid
The Qv volumetric flow rate, m3/h
In conjunction with actual condition, can be calculated differential pressure scope 0 to n KPa corresponding actual hydrogen airshed 0 to b mark side, corresponding actual nitrogen flow 0 is to c mark side.Select two many reference amounts differential pressure transmitters with corresponding differential pressure scope difference, guarantee measuring accuracy greater than 0.25%, difference value is a1 KPa, simultaneously the output of the fault alarm of using differential pressure transmitter all is set as high electric current output.
1. little differential pressure pressure unit:
Measuring accuracy＞± 0.25%, range 0～a1 KPa, corresponding hydrogen flowing quantity is: 0～b1 NM3/h, corresponding nitrogen flow 0～c1 NM3/h, output token is FT-1.
2. large differential pressure pressure unit:
Measuring accuracy＞± 0.25%, range a1～n KPa, corresponding hydrogen flowing quantity is: b1～b NM3/h, corresponding nitrogen flow c1～c NM3/h, output token is FT-1.
3. in the PLC system, these several signals are done following configuration:
FT-1 is 4～20mA signal, and corresponding measurement range is 0～b1 NM3/h;
FT-2 is 4～20mA signal, and corresponding measurement range is b1～b NM3/h;
If: when FT-1 output 4～20mA, instantaneous delivery=FT-1;
When FT-2 output 4～20mA, instantaneous delivery=FT-2;
In-situ transducer output is defaulted as the hydrogen flowing quantity mark side value under the mark condition, and the instruction that the PLC system issues according to host computer judges that the medium that this moment, needs were measured is hydrogen or nitrogen.If what measured this moment is that hydrogen PLC system directly exports flow value 0～bNM3/h; Calculating formula by above-mentioned differential flow can get, hydrogen and nitrogen correction factor b/c, if measurement is nitrogen, and the output 0～c1 NM3/h PLC system is revised flow value 0～b1 NM3/h according to correction factor b/c after.
Claims (1)
1. polycrystalline silicon reducing furnace charge flow rate measurement mechanism, it comprises large differential pressure pressure unit (1), little differential pressure pressure unit (2), three valve groups (3), temperature sensor (4), flow sensor (5) and a cover PLC system consist of, it is characterized in that: large differential pressure pressure unit (1) and the positive/negative-pressure side of differential pressure pressure unit (2) of being connected directly are connected with the impulse mouth of flow sensor (5) afterwards by three valve groups (3), all be just to connect, the two-way output of temperature sensor (4) is connected respectively to the temperature compensation terminal of large differential pressure pressure unit (1) and little differential pressure pressure unit (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220640168 CN202915968U (en) | 2012-11-06 | 2012-11-06 | Polycrystalline silicon reducing furnace air inflow measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220640168 CN202915968U (en) | 2012-11-06 | 2012-11-06 | Polycrystalline silicon reducing furnace air inflow measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202915968U true CN202915968U (en) | 2013-05-01 |
Family
ID=48164274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220640168 Expired - Fee Related CN202915968U (en) | 2012-11-06 | 2012-11-06 | Polycrystalline silicon reducing furnace air inflow measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202915968U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103791960A (en) * | 2013-12-20 | 2014-05-14 | 内蒙古神舟硅业有限责任公司 | Method for accurate flow measurement of reduction furnace |
| CN106248159A (en) * | 2016-08-08 | 2016-12-21 | 广州七喜医疗设备有限公司 | A kind of device and method improving flow measurement precision |
| CN106525154A (en) * | 2016-09-30 | 2017-03-22 | 张英志 | Measurement device for tail gas flow exhausted by car under actual driving condition |
-
2012
- 2012-11-06 CN CN 201220640168 patent/CN202915968U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103791960A (en) * | 2013-12-20 | 2014-05-14 | 内蒙古神舟硅业有限责任公司 | Method for accurate flow measurement of reduction furnace |
| CN103791960B (en) * | 2013-12-20 | 2017-04-05 | 内蒙古神舟硅业有限责任公司 | A kind of method of reduction furnace flow accurate measurement |
| CN106248159A (en) * | 2016-08-08 | 2016-12-21 | 广州七喜医疗设备有限公司 | A kind of device and method improving flow measurement precision |
| CN106525154A (en) * | 2016-09-30 | 2017-03-22 | 张英志 | Measurement device for tail gas flow exhausted by car under actual driving condition |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202994396U (en) | Air tightness detection device for air-tight door of nuclear power station under constant pressure | |
| CN202915968U (en) | Polycrystalline silicon reducing furnace air inflow measuring device | |
| CN104005977B (en) | The integral measuring method of general fan operation parameter | |
| CN110455363A (en) | Gas mass flow meter and gas mass flow measuring method | |
| CN203414381U (en) | Device for detecting differential pressure density of dense medium suspension liquid on line | |
| CN203224283U (en) | Liquid flow field calibration device | |
| CN102564912B (en) | Dust concentration detecting method and detector with gas velocity compensation | |
| CN102628702B (en) | Oil-water phase flow part separating and online measuring device and application method thereof | |
| CN204594516U (en) | Pipeline section type mass flowmeter | |
| CN202814638U (en) | Gas micro differential pressure generation device | |
| CN206291942U (en) | A kind of blowing type liquid level meter | |
| CN202583025U (en) | Double-elbow-pipe steam dryness on-line measurement meter | |
| CN202018309U (en) | L-shaped Pitot tube flow meter | |
| CN203745049U (en) | Calibration device of gas precision flow meter | |
| CN208012684U (en) | Multiphase flow test device based on flowmeter and water-containing machine | |
| CN204439149U (en) | Concentrated phase fine coal mass flowmeter | |
| CN203772325U (en) | Integral pore plate flowmeter | |
| CN207366386U (en) | A kind of device that shale air content is accurately measured based on pressure differential method | |
| CN203216542U (en) | Novel plug-in type vortex street flowmeter | |
| CN207990210U (en) | Underground natural gas storage individual well note adopts same pipe bidirectional measuring device | |
| CN202735020U (en) | Pressure measuring device | |
| CN109238381A (en) | A kind of monitoring method of user's gas equipment flow | |
| CN210268772U (en) | Gas mass flowmeter | |
| CN207662476U (en) | A kind of micro- gas mass flow gauge for photovoltaic industry | |
| CN205246146U (en) | Steady voltage flow detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130501 Termination date: 20191106 |