CN102721830B - Dual-axis accelerometer - Google Patents
Dual-axis accelerometer Download PDFInfo
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- CN102721830B CN102721830B CN201210008599.4A CN201210008599A CN102721830B CN 102721830 B CN102721830 B CN 102721830B CN 201210008599 A CN201210008599 A CN 201210008599A CN 102721830 B CN102721830 B CN 102721830B
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Abstract
The invention provides a dual-axis accelerometer. The accelerometer comprises a base and a detection sensing unit fixed on the base. The detection sensing unit comprises a mass block, a first moving electrode which is in a comb tooth shape and is extended from the mass block and a second moving electrode portion. The second moving electrode portion comprises an electrode wall and a second moving electrode which is in the comb tooth shape and is extended from the electrode wall. The mass block comprises a main body portion, a first beam-type elastic arm and a frame wall. The frame wall is fixedly connected with the main body portion through the first beam-type elastic arm. The mass block also comprises a second beam-type elastic arm. The detection sensing unit is also provided with a first fixed electrode and a second fixed electrode. The first fixed electrode is interlacedly arranged with the first moving electrode and does not contact with the first moving electrode. The second fixed electrode is interlacedly arranged with the second moving electrode and does not contact with the second moving electrode. Compared to a related technology, by using the dual-axis accelerometer of the invention, measurement precision is high and sensitivity performance is better.
Description
[technical field]
The present invention relates to a kind of acceleration transducer, relate in particular to a kind of double-axel acceleration sensor of differential type.
[background technology]
Micromechanical Inertial Instruments based on micro-electromechanical system (MEMS) is little with its volume, cost is low, can advantage has a wide range of applications with interface circuit is integrated etc., acceleration transducer is one of Typical Representative wherein.Along with the development of acceleration transducer, people recognize that differential capacitance type acceleration sensor has the advantages such as dynamic range is large, power consumption is little gradually.
At present, use the differential capacitance type acceleration sensor element of MEMS structure to comprise the structure that is similar to standard acceler: the housing that the damping of mass, restoring spring, displacement transducer, certain form and all elements depend on.The basic functional principle of capacitance acceleration transducer is to treat that the inertial force of measuring acceleration generation causes pole plate gap or the overlapping area change of pole plate of sensitization capacitance, make the proportional relation of capacitance variations and acceleration magnitude, the variation of obtaining sensitization capacitance by signal processing circuit can obtain the size of acceleration.And this interior product mostly is the double-axel acceleration sensor of (X-Y) twin shaft integrative-structure in the market, the second elastic supporting member for supporting optical member (Y direction) that it first elastic supporting member for supporting optical member (X-direction) that comprises that mass, both sides relative to described mass are fixedly connected with is fixedly connected with the both sides other relative with described mass.
But, its first elastic supporting member for supporting optical member of the double-axel acceleration sensor of correlation technique and the second elastic supporting member for supporting optical member relevance on X, Y biaxially oriented is large, in the time only having X (Y) direction to have acceleration, described the first (two) elastic supporting member for supporting optical member generation deformation, but the second (one) elastic supporting member for supporting optical member also can have small deformation thereupon simultaneously, form phase mutual interference, thereby the measuring accuracy of the double-axel acceleration sensor of correlation technique is reduced.
Therefore, being necessary to propose a kind of new double-axel acceleration sensor overcomes upper art problem in fact.
[summary of the invention]
It is high that the technical matters that the present invention need solve is to provide a kind of measuring accuracy, the double-axel acceleration sensor that performance is more excellent.
According to above-mentioned technical matters, design a kind of double-axel acceleration sensor, its objective is such realization: a kind of double-axel acceleration sensor, wherein, described acceleration transducer comprises substrate and is fixed on described suprabasil detection sensing unit, described detection sensing unit comprises mass, distinguish the first moving electrode of extended comb teeth-shaped and distinguish extended the second moving electrode portion by the in addition relative both sides of described mass by the relative both sides of described mass, described the second moving electrode portion comprise electrode wall and by described electrode wall to the second moving electrode away from the extended comb teeth-shaped of described mass direction.Described mass comprises main part, be embedded in described main part respectively and two the first beam type elastic arms vertical with described the first moving electrode and be separately positioned on described main part and two described the second moving electrode portions between a pair of frame wall, described the first beam type elastic arm is fixedly linked described frame wall and described main part respectively.Described detection sensing unit also comprises respectively two connecting portions that described frame wall and described electrode wall are fixedly linked.Described mass also comprises and lays respectively at two between described frame wall and described electrode wall and parallel with described the first moving electrode the second beam type elastic arms, and described the second beam type elastic arm two ends are separately fixed on described substrate and connecting portion.Described detection sensing unit is also provided with and is fixed on described suprabasil two group of first fixed electrode and two group of second fixed electrode, described the first fixed electrode is interlaced setting and does not contact mutually with described the first moving electrode, and described the second fixed electrode is with the interlaced setting of described the second moving electrode and do not contact mutually.
Preferably, the two ends of described the first fixed electrode and the second fixed electrode are respectively equipped with stopper section, and described substrate is provided with stop block, and described stop block is fastened in described stopper section.
Preferably, on described mass, be also provided with some damping holes that run through on it.
Preferably, described the first beam type elastic arm is provided with four, and every two is one group, and every group is fixedly linked two described frame walls and described main part respectively.
Preferably, described the second beam type elastic arm is provided with four, and every two is one group, and every group lays respectively at the relative both sides of described main part.
Compared with correlation technique, double-axel acceleration sensor measuring accuracy of the present invention is high, and performance is more excellent.
[brief description of the drawings]
Fig. 1 is the three-dimensional structure diagram of double-axel acceleration sensor of the present invention.
Fig. 2 is that Fig. 1 is along A-A line cut-open view (having concealed pedestal, the first fixed electrode and the second fixed electrode).
Fig. 3 is B part enlarged drawing in Fig. 2.
Fig. 4 is the part spatial structure exploded view of double-axel acceleration sensor of the present invention.
[embodiment]
Below in conjunction with drawings and embodiments, the invention will be further described.
As Figure 1-4, a kind of double-axel acceleration sensor 1, it comprises substrate 2 and is fixed on the detection sensing unit 3 in substrate 2.Detect sensing unit 3 comprise mass 31, by the relative both sides of mass 31 respectively extended comb teeth-shaped the first moving electrode 32 with distinguished by the in addition relative both sides of mass 31 that extended the second 33, the second moving electrode portions 33 of moving electrode portion comprise electrode wall 331 and by electrode wall 331 to the second moving electrode 332 away from the extended comb teeth-shaped of mass 31 direction.Mass 31 comprises main part 311, be embedded in main part 311 respectively and two first beam type elastic arm 312a, the 312bs vertical with the first moving electrode 32 and be separately positioned on main part 311 and two the second moving electrode portions 33 between a pair of frame wall 313, the first beam type elastic arm 312a, 312b are fixedly linked frame wall 313 and main part 311 respectively, detect sensing unit 3 and also comprise two connecting portion 3131a, 3131b respectively frame wall 313 and electrode wall 331 being fixedly linked.Mass 31 also comprises and lays respectively between frame wall 313 and electrode wall 331 and parallel with the first moving electrode 32 two the second beam type elastic arm 314a, 314b, and two the second beam type elastic arm 314a, 314b two ends are separately fixed on substrate 2 and connecting portion 3131a, 3131b.Detect sensing unit 3 and be also provided with two group of first fixed electrode 34 and two group of second fixed electrode 35 that are fixed in substrate 2, the first fixed electrode 34 is interlaced setting and does not contact mutually with the first moving electrode 32, the second fixed electrode 35 is with the interlaced setting of the second moving electrode 332 and do not contact mutually, in present embodiment, the first fixed electrode 34, the first moving electrode 32, the second fixed electrode 35 and the second moving electrode 332 are several electrode slice compositions equidistantly distributing, it is the electrode slice that is provided with first moving electrode 32 (the second moving electrode 332) between the electrode slice of adjacent two the first fixed electrodes 34 (the second fixed electrode 35), between the electrode slice of adjacent two the first moving electrodes 32 (the second moving electrode 332), be provided with the electrode slice of first fixed electrode 34 (the second fixed electrode 35), the structure of this interlaced setting makes the first fixed electrode 34 and the first moving electrode 32 form the first capacitance group, the second fixed electrode 35 and the second moving electrode 332 form the second capacitance group.
More excellent, the first beam type elastic arm 312a, 312b are provided with four, and every two is one group, and every group of the first beam type elastic arm 312a, 312b2 are fixedly linked two frame walls 313 and main part 311 respectively; The second beam type elastic arm 314a, 314b are provided with four, and every two is one group, and every group of the second beam type elastic arm 314a, 314b lay respectively at the relative both sides of main part 311.The first beam type elastic arm 312a, 312b2 and the second beam type elastic arm 314a, 314b establish and are all set as two groups of symmetrical structures, can make like this sensitivity of double-axel acceleration sensor 1 of the present invention and resolution higher.Certainly, the quantity of the first beam type elastic arm 312a, 312b2 and the second beam type elastic arm 314a, 314b is also not limited to this, but need to be two one group of settings, its principle is the same, also can adjust the resolution of double-axel acceleration sensor 1 of the present invention by changing its position, quantity and size.
In present embodiment, the first capacitance group is in order to the acceleration of perception X-direction, the power of X-direction makes mass 31 produce displacement in X-direction, thereby makes two electrode right opposites of the first capacitance group amass the variation changing and produce electric capacity, and then measures X-direction acceleration; In like manner, the second capacitance group, in order to the acceleration of perception Y-direction, is amassed two electrode right opposites of the second capacitance group by mass 31 in Y direction generation displacement and is changed, and then produce capacitance variations, and then measure the acceleration of Y direction, also form the sensing of X-Y twin shaft acceleration.
In present embodiment, the two ends of the first fixed electrode 34 and the second fixed electrode 35 are respectively equipped with stopper section (not label), and substrate 2 is provided with stop block 4, and stop block 4 is embedded in stopper section.The setting of stop block 4 is used for preventing that mass 2 from significantly moving excessively, thereby double-axel acceleration sensor 1 of the present invention is formed to protection, has improved its reliability.On more excellent mass 31, be also provided with some damping holes 315 that run through on it, damping hole 315 plays the effect of revealing damping.
Compared with correlation technique, first, second beam type elastic arm of its X-Y axle of double-axel acceleration sensor of the present invention forms linkage structure, reduce influencing each other between first, second beam type elastic arm by frame wall, further improve the measuring accuracy of double-axel acceleration sensor of the present invention, and first, second beam type elastic arm is embedded in mass, increase to greatest extent the volume of mass, thereby improved the sensitivity of double-axel acceleration sensor.
Above-described is only embodiments of the present invention, it should be pointed out that for the person of ordinary skill of the art at this, without departing from the concept of the premise of the invention, can also make improvement, but these all belongs to protection scope of the present invention.
Claims (5)
1. a double-axel acceleration sensor, it is characterized in that: described acceleration transducer comprises substrate and is fixed on described suprabasil detection sensing unit, described detection sensing unit comprises mass, distinguish the first moving electrode of extended comb teeth-shaped and distinguish extended the second moving electrode portion by the in addition relative both sides of described mass by the relative both sides of described mass, described the second moving electrode portion comprise electrode wall and by described electrode wall to the second moving electrode away from the extended comb teeth-shaped of described mass direction, described mass comprises main part, be embedded respectively in described main part and at least one group first beam type elastic arm vertical with described the first moving electrode, wherein every group has two the first beam type elastic arms, and be separately positioned on a pair of frame wall between described main part and two described the second moving electrode portions, described the first beam type elastic arm is fixedly linked described frame wall and described main part respectively, described detection sensing unit also comprises respectively two connecting portions that described frame wall and described electrode wall are fixedly linked, described mass also comprises and lays respectively at least one group of between described frame wall and described electrode wall and parallel with described the first moving electrode the second beam type elastic arm, wherein every group has two the second beam type elastic arms, described the second beam type elastic arm two ends are separately fixed on described substrate and connecting portion, described detection sensing unit is also provided with and is fixed on described suprabasil two group of first fixed electrode and two group of second fixed electrode, described the first fixed electrode is interlaced setting and does not contact mutually with described the first moving electrode, described the second fixed electrode is with the interlaced setting of described the second moving electrode and do not contact mutually.
2. double-axel acceleration sensor according to claim 1, is characterized in that: the two ends of described the first fixed electrode and the second fixed electrode are respectively equipped with stopper section, and described substrate is provided with stop block, and described stop block is fastened in described stopper section.
3. double-axel acceleration sensor according to claim 2, is characterized in that: on described mass, be also provided with some damping holes that run through on it.
4. double-axel acceleration sensor according to claim 3, is characterized in that: described the first beam type elastic arm has two groups, and every group is fixedly linked two described frame walls and described main part respectively.
5. double-axel acceleration sensor according to claim 4, is characterized in that: described the second beam type elastic arm has two groups, and every group lays respectively at the relative both sides of described main part.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210008599.4A CN102721830B (en) | 2012-01-03 | 2012-01-03 | Dual-axis accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210008599.4A CN102721830B (en) | 2012-01-03 | 2012-01-03 | Dual-axis accelerometer |
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| CN102721830A CN102721830A (en) | 2012-10-10 |
| CN102721830B true CN102721830B (en) | 2014-08-13 |
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| CN201210008599.4A Active CN102721830B (en) | 2012-01-03 | 2012-01-03 | Dual-axis accelerometer |
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| CN109374917B (en) * | 2018-11-15 | 2020-07-31 | 中国兵器工业集团第二一四研究所苏州研发中心 | Design method of honeycomb micro stop structure |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1598597A (en) * | 2004-07-19 | 2005-03-23 | 西北工业大学 | Single mass plate triaxial micro-mechanical accelerometer |
| CN101386400A (en) * | 2007-09-13 | 2009-03-18 | 李刚 | Capacitance single mass three-shaft acceleration transducer and preparation method |
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2012
- 2012-01-03 CN CN201210008599.4A patent/CN102721830B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1598597A (en) * | 2004-07-19 | 2005-03-23 | 西北工业大学 | Single mass plate triaxial micro-mechanical accelerometer |
| CN101386400A (en) * | 2007-09-13 | 2009-03-18 | 李刚 | Capacitance single mass three-shaft acceleration transducer and preparation method |
Non-Patent Citations (2)
| Title |
|---|
| 三自由度水平轴硅微机械陀螺结构设计与仿真;熊敏敏等;《纳米技术与精密工程》;20040930;第2卷(第3期);第226页，图1 * |
| 熊敏敏等.三自由度水平轴硅微机械陀螺结构设计与仿真.《纳米技术与精密工程》.2004,第2卷(第3期),第226页，图1. |
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Effective date of registration: 20170515 Address after: Singapore Ang Mo Kio 65 Street No. 10 techpoint Building 1 floor, No. 8 Patentee after: AAC Technologies (Singapore) Co., Ltd. Address before: 518057 Nanshan District hi tech Industrial Park, Shenzhen, North West New West Road, No. Rui sound technology building, No. 18 Co-patentee before: AAC Technologies (Singapore) Co., Ltd. Patentee before: AAC Acoustic Technologies (Shenzhen) Co., Ltd. |