CN102680402B - Quartz tuning fork strengthened photoacoustic spectrum gas cell - Google Patents
Quartz tuning fork strengthened photoacoustic spectrum gas cell Download PDFInfo
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- CN102680402B CN102680402B CN201110362043.0A CN201110362043A CN102680402B CN 102680402 B CN102680402 B CN 102680402B CN 201110362043 A CN201110362043 A CN 201110362043A CN 102680402 B CN102680402 B CN 102680402B
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Abstract
The invention discloses a kind of quartz tuning fork strengthened photoacoustic spectrum gas cell, comprise a c-lens collimation lens (4), the 2nd c-lens collimation lens (1), the first resonatron (3), the second resonatron (2), quartz tuning-fork (7), double V-shaped groove holder (8) and pedestal (9), the light path sent from the 2nd c-lens collimation lens (1) arrives a c-lens collimation lens (4) afterwards through the second resonatron (2), quartz tuning-fork (7) interdigital gap and the first resonatron (3).Adopt c-lens collimation lens in gas cell of the present invention, light beam all by resonatron and quartz tuning-fork, can be avoided loss during light beam incidence, improve the sensitivity of gas cell.Meanwhile, adopt c-lens collimation lens to make not need collimation focusing between light source and gas cell, reduce the volume of optoacoustic spectroscopy gas-detecting device.
Description
Technical field
The invention belongs to gas detection technology field, particularly a kind of gas cell for photoacoustic spectroscopy gas detecting system.
Background technology
Optoacoustic spectroscopy detects the detection of low concentration (trace) material in main learning gas with quantitative.Optoacoustic spectroscopy can not be subject to the shape of tested sample and the restriction of form, and do not need special pre-treatment, measure under can remaining on virgin state, sample dosage is few.Optoacoustic spectroscopy gas-detecting device is primarily of compositions such as light source, light-source control system, photoacoustic cell, acoustic sensor, amplifying circuit, signal processing systems.
As the gas cell of photoacoustic cell and acoustic sensor combination, be the sensitive element of optoacoustic spectroscopy gas detect, generally adopt microphone (microphone) to utter a word quick detecting element, the size of its gas cell is large, and resonance frequency is low, and quality factor are low.Existing employing tuning fork gas cell is generally based on quartz tuning fork strengthened structure, mention a kind of quartz enhanced photoacoustic spectroscopy device in such as U.S. patent Nos US2005/0117155A1 and US2007/7245380B2, it provides a kind of composition or the concentration that adopt the optoacoustic spectroscopy device of quartz tuning-fork to carry out probe gas material.Its formation is that laser instrument and light path are placed with condenser lens, tubulose resonator cavity and quartz tuning-fork, tubulose resonator cavity is placed in, and two length on quartz tuning-fork both sides are 2.45mm, interior diameter is the tubule of 0.3 ~ 0.5mm, all and light path coaxial, the focus of condenser lens is positioned at the tuning fork incision of quartz tuning-fork for the tubular axis heart of two tubules.This device uses condenser lens to assemble, and therefore the beam diameter of its light path is comparatively large, for making light enter resonator cavity completely, needs lens distance quartz tuning-fork far away, is unfavorable for miniaturization like this and linear loss is large, and the length of resonator cavity can only be decided to be the half-wavelength of sound wave.Its Problems existing is that sensitivity is low, not easily integrated volume is large.
Summary of the invention
Technology of the present invention is dealt with problems and is, solves the deficiencies in the prior art, provides the quartz tuning fork strengthened photoacoustic spectrum gas cell that a kind of high sensitivity, volume are little, easy of integration.
Technical solution of the present invention is: quartz tuning fork strengthened photoacoustic spectrum gas cell, comprises a c-lens collimation lens, the 2nd c-lens collimation lens, the first resonatron, the second resonatron, quartz tuning-fork, double V-shaped groove holder and pedestal; Double V-shaped groove holder, a c-lens collimation lens and the 2nd c-lens collimation lens are fixedly mounted on pedestal; First resonatron, the second resonatron and quartz tuning-fork are fixed on double V-shaped groove holder; First resonatron, the second resonatron symmetry are arranged on quartz tuning-fork both sides; Quartz tuning-fork is positioned at the beam waist position of a c-lens collimation lens and the 2nd c-lens collimation lens; The axle center of the first resonatron, the second resonatron and the axis coaxle of a c-lens collimation lens and the 2nd c-lens collimation lens; The light path sent from the 2nd c-lens collimation lens arrives a c-lens collimation lens through after the second resonatron, the interdigital gap of quartz tuning-fork and the first resonatron.
Pt temperature sensor is housed above described quartz tuning-fork, for measuring the environment temperature near quartz tuning-fork.
Described first resonatron and the second resonatron arrange buffer zone in the side near c-lens collimation lens.
The length of described buffer zone equals the length of resonatron, and the area of section of buffer zone is 50-100 times of resonatron sectional area.
The collimation operating distance of a described c-lens collimation lens and the 2nd c-lens collimation lens is 20-30mm, and spot diameter is 0.5 ~ 0.8mm, beam waist diameter 100 ~ 220 μm.
Described quartz tuning-fork quality factor are at ambient pressure greater than 10000, half high full peak width 3 ~ 5Hz.
The surface spacing that described resonatron is adjacent with quartz tuning-fork is 30 ~ 50 μm.
Described first resonatron and the second resonatron adopt 316 stainless steels.
The present invention's beneficial effect is compared with prior art:
1. adopt c-lens collimation lens in gas cell of the present invention, light beam all by resonatron and quartz tuning-fork, can be avoided loss during light beam incidence, improve the sensitivity of gas cell.Meanwhile, the employing of c-lens collimation lens makes not need collimation focusing between light source and gas cell, reduces volume.
2. the present invention is according to micro-optics passive alignment method, adopts double V-shaped groove to carry out autoregistration to resonatron, is easy to integrated when gas cell and photoacoustic spectroscopy gas detecting system are assembled.
3. pt temperature sensor is equipped with in the present invention above quartz tuning-fork, for measuring the environment temperature near quartz tuning-fork, accordingly for the wave length shift that compensation temperature causes, improves the precision of measurement.
4. the present invention is arranging buffer zone at resonatron near the side of c-lens collimation lens, carries out preferably simultaneously, effectively inhibit the noise that optical noise and gas flow and causes to the length of buffer zone, sectional dimension.
5. the quartz tuning-fork in the present invention adopts the quartz crystal of high quality factor, narrow bandwidth, can improve the sensitivity of photoacoustic spectrum gas cell.
6. the resonatron in the present invention adopts 316 stainless steels, and resistance to corrosion is strong and heat-conduction coefficient is high, inside surface electrochemical polish, reduces gas absorption effect.
Accompanying drawing explanation
Fig. 1 is the structural representation of gas cell of the present invention;
Fig. 2 is schematic three dimensional views of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
As shown in Figure 1, be the structural representation of the quartz tuning fork strengthened photoacoustic spectrum gas cell of the present invention.Quartz tuning fork strengthened photoacoustic spectrum gas cell, comprises a c-lens collimation lens 4, the 2nd c-lens collimation lens 1, first resonatron 3, second resonatron 2, quartz tuning-fork 7, double V-shaped groove holder 8 and pedestal 9.Double V-shaped groove holder 8, a c-lens collimation lens 4 and the 2nd c-lens collimation lens 1 are fixedly mounted on pedestal 9; First resonatron 3, second resonatron 2 and quartz tuning-fork 7 are fixed on double V-shaped groove holder 8; First resonatron 3, second resonatron 2 symmetry is arranged on quartz tuning-fork 7 both sides; Quartz tuning-fork 7 is positioned at the beam waist position of a c-lens collimation lens 4 and the 2nd c-lens collimation lens 1.
Two resonatron axle center and two collimation lens axis coaxles, the light path sent from the 2nd c-lens collimation lens 1 arrives a c-lens collimation lens 4 through after the second resonatron 2, the interdigital gap of quartz tuning-fork 7 and the first resonatron 3.
Near the side of a c-lens collimation lens 4 and the second resonatron 2, buffer zone is set at the first resonatron 3 near the side of the 2nd c-lens collimation lens 1, for the noise suppressing optical noise and gas to flow and cause.In the present invention, the length of buffer zone equals the length of resonatron, and the area of section of buffer zone is 50-100 times of resonatron sectional area.
First resonatron 3, second resonatron 2 of the present invention is identical pipe, internal diameter 0.5 ~ 0.8mm, length 4.9 ~ 5.1mm.In the present embodiment, the internal diameter 0.5mm of the first resonatron 3 and the second resonatron 2, length 5.1mm; The length 5.1mm of buffer zone, the sectional dimension 80mm2 of buffer zone.
Material preferably 316 stainless steels of the first resonatron 3 and the second resonatron 2; Double V-shaped groove holder 8 is 416 magnetic stainless steel processing preferably; Quartz tuning-fork 7 is high quality factor cylindrical quartz crystal preferably, adopts R38-32.768kHz quartz crystal in the present embodiment, installs after removing shell.Double V-shaped groove holder 8 is positioned over the middle position of pedestal 9, and V-type groove center axis aligns with the center of placing a c-lens collimation lens 4 and the 2nd c-lens collimation lens 1.First resonatron 3 and the second resonatron 2 are positioned on two V-shaped groove, quartz tuning-fork 7 is positioned in the circular hole on V-type groove holder 8, ensure that the otch of quartz tuning-fork 7 aligns with the first resonatron 3 and the second resonatron 2 central axis by design size tolerance, it is 0.7mm that resonatron axial line distance is stretched out in otch upper end, first resonatron 3 and the second resonatron 2 are respectively 30 μm with the spacing of quartz tuning-fork 7, are fixed after the first resonatron 3 is vertical with quartz tuning-fork 7 surface with the second resonatron 2 central axis by two component optical cement.
C-lens collimation lens spot diameter 0.5mm of the present invention, beam waist diameter 200 μm, operating distance 30mm, gold-plated sleeve pipe, insertion loss is less than 0.4dB.Light beam is after a c-lens collimation lens 4, and the longitudinal axis along the first resonatron 3 passes gassiness buffer zone directive resonatron, and beam waist position is quartz tuning-fork open center, then through the second resonatron, by injection after the 2nd c-lens collimation lens 1.Carried out the active aligning of collimation lens by luminous power equation of light injection power, after adjusting the position of collimation lens, adopt optical epoxy glue fixing seal.Pt temperature sensor 6 is installed above quartz tuning-fork 7 to compensate the impact that wave length shift brings temperature.Quartz tuning-fork 7 is connected with peripheral testing circuit with pt temperature sensor 6.After each parts assembling, the upper cover of base 9 is adopted the welding of laser parallel seam welding, close and form photoacoustic spectrum gas cell.
Adopt optoacoustic spectroscopy measurement device gas, gas to be measured is incorporated in photoacoustic spectrum gas cell by air inlet pipe 5, discharged by gas outlet tube 10, flowing gas is formed in photoacoustic cell, modulated beam of light incides in photoacoustic cell by a c-lens collimation lens 4, radiation sample gas, after gas absorption light modulated, cause ground state to the transition of excited state, then pass through molecular collision, from excited state by radiationless transition Heat of Formation, produce pressure wave, i.e. sound wave, sound wave strengthens signal in resonatron, acoustical signal is converted to electric signal by the quartz tuning-fork 7 of high quality factor, be connected with peripheral amplifying circuit.
Connect pump and valve by outside, the pressure in photoacoustic cell can be controlled, form flowing gas in gas cell simultaneously, get rid of waste gas in pond, ensure gas purity, reduce the absorption of gas, improve precision and the accuracy of measurement.The pt temperature sensor 6 built-in by acousimeter and the external tensimeter of gas outlet tube 10, can revise the pressure broadening of measurement data and wave length shift.
This quartzy enhanced photo acoustic spectrum gas cell, has that volume is little, the high and low ground unrest of sensitivity, can detect the advantages such as multicomponent gas, be applicable to the optoacoustic spectroscopy monitoring system of environmental gas.
The non-detailed description of the present invention is known to the skilled person technology.
Claims (5)
1. quartz tuning fork strengthened photoacoustic spectrum gas cell, is characterized in that: comprise a c-lens collimation lens (4), the 2nd c-lens collimation lens (1), the first resonatron (3), the second resonatron (2), quartz tuning-fork (7), double V-shaped groove holder (8) and pedestal (9); Double V-shaped groove holder (8), a c-lens collimation lens (4) and the 2nd c-lens collimation lens (1) are fixedly mounted on pedestal (9); First resonatron (3), the second resonatron (2) and quartz tuning-fork (7) are fixed on double V-shaped groove holder (8); First resonatron (3), the second resonatron (2) symmetry are arranged on quartz tuning-fork (7) both sides; Quartz tuning-fork (7) is positioned at the beam waist position of a c-lens collimation lens (4) and the 2nd c-lens collimation lens (1); The axle center of the first resonatron (3), the second resonatron (2) and the axis coaxle of a c-lens collimation lens (4) and the 2nd c-lens collimation lens (1); The light path sent from the 2nd c-lens collimation lens (1) arrives a c-lens collimation lens (4) afterwards through the second resonatron (2), quartz tuning-fork (7) interdigital gap and the first resonatron (3);
Pt temperature sensor (6) is housed, for measuring the environment temperature near quartz tuning-fork (7) in described quartz tuning-fork (7) top;
Described first resonatron (3) and the second resonatron (2) arrange buffer zone in the side near c-lens collimation lens;
The length of described buffer zone equals the length of resonatron, and the area of section of buffer zone is 50-100 times of resonatron sectional area.
2. quartz tuning fork strengthened photoacoustic spectrum gas cell according to claim 1, it is characterized in that: the collimation operating distance of a described c-lens collimation lens (4) and the 2nd c-lens collimation lens (1) is 20-30mm, spot diameter is 0.5 ~ 0.8mm, beam waist diameter 100 ~ 220 μm.
3. quartz tuning fork strengthened photoacoustic spectrum gas cell according to claim 1, is characterized in that: described quartz tuning-fork (7) quality factor are at ambient pressure greater than 10000, half high full peak width 3 ~ 5Hz.
4. quartz tuning fork strengthened photoacoustic spectrum gas cell according to claim 1, is characterized in that: the surface spacing of described resonatron and quartz tuning-fork (7) is 30 ~ 50 μm.
5. quartz tuning fork strengthened photoacoustic spectrum gas cell according to claim 1, is characterized in that: described first resonatron (3) and the second resonatron (2) adopt 316 stainless steels.
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103795367B (en) * | 2014-01-14 | 2016-06-01 | 北京航天时代光电科技有限公司 | The encapsulation device of a kind of enhancement type quartz tuning-fork |
| CN103954560B (en) * | 2014-04-29 | 2017-02-08 | 北京遥测技术研究所 | Space beam coupling device for photoacoustic multi-component gas detection |
| CN104215587B (en) * | 2014-10-08 | 2016-08-17 | 山西大学 | Quartz enhanced photoacoustic spectroscopy acousimeter and assisted group assembling device thereof and method |
| CN104280345A (en) * | 2014-10-20 | 2015-01-14 | 高椿明 | Tunable-laser-based quartz tuning fork enhancement type photo-acoustic spectrum distributed optical fiber gas sensor |
| CN104237135B (en) * | 2014-10-22 | 2017-11-03 | 东北林业大学 | CO gas detecting systems and method based on quartz tuning fork strengthened optoacoustic spectroscopy |
| CN104914049B (en) * | 2015-05-28 | 2017-07-28 | 北京航天控制仪器研究所 | A kind of quartz enhanced photoacoustic spectroscopy gas package detection device |
| US9638552B2 (en) * | 2015-08-07 | 2017-05-02 | Cooper Technologies Company | Gas sensor housing with micro-resonators |
| US9719812B2 (en) * | 2015-08-07 | 2017-08-01 | Cooper Technologies Company | Gas sensor housing |
| CN108593763B (en) * | 2018-03-26 | 2021-03-30 | 山东大学 | Real-time detection device for multi-component gas based on quartz tuning fork frequency division demodulation |
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| CN101960290A (en) * | 2008-03-07 | 2011-01-26 | 皇家飞利浦电子股份有限公司 | Photo acoustic sample detector with background compensation |
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| US7245380B2 (en) * | 2002-06-10 | 2007-07-17 | William Marsh Rice University | Quartz-enhanced photoacoustic spectroscopy |
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| CN101813621A (en) * | 2009-02-19 | 2010-08-25 | 中国科学院安徽光学精密机械研究所 | Quartz tuning fork strengthened photoacoustic spectroscopy gas sensor based on acoustic resonator |
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