CN102680402A - Quartz tuning-fork enhanced-type photo-acoustic spectrum gas cell - Google Patents
Quartz tuning-fork enhanced-type photo-acoustic spectrum gas cell Download PDFInfo
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- CN102680402A CN102680402A CN2011103620430A CN201110362043A CN102680402A CN 102680402 A CN102680402 A CN 102680402A CN 2011103620430 A CN2011103620430 A CN 2011103620430A CN 201110362043 A CN201110362043 A CN 201110362043A CN 102680402 A CN102680402 A CN 102680402A
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Abstract
The invention discloses a quartz tuning-fork enhanced-type photo-acoustic spectrum gas cell, which comprises a first c-lens collimating lens (4), a second c-lens collimating lens (1), a first resonance tube (3), a second resonance tube (2), a quartz tuning fork (7), a dual V-shaped groove fixed seat (8) and a substrate (9), wherein a light path emitted from the second c-lens collimating lens (1) reaches the first c-lens collimating lens (4) after passing through the second resonance tube (2), the finger clearance of the quartz tuning fork (7) and the first resonance tube (3). The c-lens collimating lenses are adopted in the gas cell, so that the light beam can completely pass through the resonance tubes and the quartz tuning fork, the loss of the light beam in incidence can be avoided, and the sensitivity of the gas cell can be improved. Meanwhile, by the adoption of the c-lens collimating lenses, collimating focus is not needed between the light source and the gas cell, so that the size of the photo-acoustic spectrum gas detection device is reduced.
Description
Technical field
The invention belongs to the gas detection technology field, particularly a kind of gas cell that is used for the optoacoustic spectroscopy gas detecting system.
Background technology
Optoacoustic spectroscopy detects the detection of low concentration in the main learning gas (trace) material with quantitative.Optoacoustic spectroscopy can not receive the restriction of the shape and the form of tested sample, does not need special pre-treatment, can remain under the virgin state and measure, and sample dosage is few.The optoacoustic spectroscopy gas-detecting device mainly is made up of light source, light-source control system, photoacoustic cell, acoustic sensor, amplifying circuit, signal processing system etc.
As the gas cell of photoacoustic cell and acoustic sensor combination, be the sensitive element of optoacoustic spectroscopy gas detection, generally adopt microphone (microphone) the quick detecting element of uttering a word, the size of its gas cell is big, and resonance frequency is low, and quality factor are low.Existing employing tuning fork gas cell generally is based on quartz tuning fork strengthened structure; Such as mentioning a kind of quartz enhanced photoacoustic spectroscopy device among U.S. patent of invention US2005/0117155A1 and the US2007/7245380B2, composition or concentration that it provides a kind of optoacoustic spectroscopy device that adopts quartz tuning-fork to come the probe gas material.Constituting of it is placed with condenser lens, tubulose resonator cavity and quartz tuning-fork on laser instrument and the light path; Be placed in two length on quartz tuning-fork both sides of tubulose resonator cavity are that 2.45mm, interior diameter are the tubule of 0.3～0.5mm; Equal and the light path coaxial of the tubular axis heart of two tubules, the focus of condenser lens is positioned at the tuning fork incision of quartz tuning-fork.This device uses condenser lens to assemble, so the beam diameter of its light path is bigger, gets into resonator cavity fully for making light, needs the lens distance quartz tuning-fork far away, is unfavorable for that like this miniaturization and linear loss are big, and the length of resonator cavity can only be decided to be the half-wavelength of sound wave.The problem of its existence is that sensitivity is low, to be difficult for integrated volume big.
Summary of the invention
Technology of the present invention is dealt with problems and is, solves the deficiency of prior art, and a kind of high sensitivity, volume quartz tuning fork strengthened photoacoustic spectrum gas cell little, easy of integration are provided.
Technical solution of the present invention is: quartz tuning fork strengthened photoacoustic spectrum gas cell comprises a c-lens collimation lens, the 2nd c-lens collimation lens, first resonatron, second resonatron, quartz tuning-fork, double V-shaped groove holder and pedestal; Double V-shaped groove holder, a c-lens collimation lens and the 2nd c-lens collimation lens are fixedly mounted on the pedestal; First resonatron, second resonatron and quartz tuning-fork are fixed on the double V-shaped groove holder; First resonatron, the second resonatron symmetry are installed in the quartz tuning-fork both sides; Quartz tuning-fork is positioned at the beam waist position of a c-lens collimation lens and the 2nd c-lens collimation lens; The axis coaxle of the axle center of first resonatron, second resonatron and a c-lens collimation lens and the 2nd c-lens collimation lens; The light path of sending from the 2nd c-lens collimation lens arrives a c-lens collimation lens after passing second resonatron, the interdigital gap of quartz tuning-fork and first resonatron.
The pt temperature sensor is housed above said quartz tuning-fork, is used to measure near the environment temperature of quartz tuning-fork.
Said first resonatron and second resonatron are provided with buffer zone in the side near the c-lens collimation lens.
The length of said buffer zone equals the length of resonatron, and the area of section of buffer zone is 50-100 a times of resonatron sectional area.
The collimation operating distance of a said c-lens collimation lens and the 2nd c-lens collimation lens is 20-30mm, and spot diameter is 0.5～0.8mm, beam waist diameter 100～220 μ m.
The quality factor of said quartz tuning-fork under normal pressure are greater than 10000, and half height is peak width 3～5Hz entirely.
The surface spacing that said resonatron and quartz tuning-fork are adjacent is 30～50 μ m.
Said first resonatron and second resonatron adopt 316 stainless steels.
The present invention's beneficial effect compared with prior art is:
1. adopt the c-lens collimation lens in the gas cell of the present invention, make the light beam can be, the loss when having avoided light beam incident, the sensitivity of raising gas cell all through resonatron and quartz tuning-fork.Simultaneously, the employing of c-lens collimation lens makes does not need collimation to focus between light source and the gas cell, reduced volume.
2. the present invention adopts double V-shaped groove that resonatron is carried out autoregistration according to micro-optics packaging passive alignment method, is easy to integrated when making the assembling of gas cell and optoacoustic spectroscopy gas detecting system.
3. the pt temperature sensor is equipped with in the present invention above quartz tuning-fork, is used to measure near the environment temperature of quartz tuning-fork, is used for the wave length shift that compensation temperature causes in view of the above, has improved the precision of measuring.
4. the present invention is provided with buffer zone at resonatron in the side near the c-lens collimation lens, simultaneously length, the sectional dimension of buffer zone is carried out preferably, has effectively suppressed optical noise and gas flow and the noise that causes.
5. the quartz tuning-fork among the present invention adopts the quartz crystal of high quality factor, narrow bandwidth, the sensitivity that can improve the photoacoustic spectrum gas cell.
6. the resonatron among the present invention adopts 316 stainless steels, and resistance to corrosion is strong and heat-conduction coefficient is high, the inside surface electrochemical polish, reduces the gas absorption effect.
Description of drawings
Fig. 1 is the structural representation of gas cell of the present invention;
Fig. 2 is a schematic three dimensional views of the present invention.
Embodiment
Below in conjunction with accompanying drawing the present invention is further specified.
As shown in Figure 1, be the structural representation of the quartz tuning fork strengthened photoacoustic spectrum gas cell of the present invention.Quartz tuning fork strengthened photoacoustic spectrum gas cell comprises a c-lens collimation lens 4, the 2nd c-lens collimation lens 1, first resonatron 3, second resonatron 2, quartz tuning-fork 7, double V-shaped groove holder 8 and pedestal 9.Double V-shaped groove holder 8, a c-lens collimation lens 4 and the 2nd c-lens collimation lens 1 are fixedly mounted on the pedestal 9; First resonatron 3, second resonatron 2 and quartz tuning-fork 7 are fixed on the double V-shaped groove holder 8; First resonatron 3, second resonatron, 2 symmetries are installed in quartz tuning-fork 7 both sides; Quartz tuning-fork 7 is positioned at the beam waist position of a c-lens collimation lens 4 and the 2nd c-lens collimation lens 1.
Two resonatron axle center and two collimation lens axis coaxles, the light path of sending from the 2nd c-lens collimation lens 1 pass second resonatron 2, quartz tuning-fork 7 interdigital gaps and first resonatron, 3 backs and arrive c-lens collimation lenses 4.
Near a side of the 2nd c-lens collimation lens 1 buffer zone is set near a side of a c-lens collimation lens 4 and second resonatron 2 at first resonatron 3, is used to suppress optical noise and gas flow and the noise that causes.Among the present invention, the length of buffer zone equals the length of resonatron, and the area of section of buffer zone is 50-100 a times of resonatron sectional area.
Preferred 316 stainless steels of the material of first resonatron 3 and second resonatron 2; Double V-shaped groove holder 8 preferred 416 magnetic stainless steels processing; Quartz tuning-fork 7 preferred high quality factor cylindrical quartz crystal adopt the R38-32.768kHz quartz crystal in the present embodiment, install behind the removal shell.Double V-shaped groove holder 8 is positioned over the middle position of pedestal 9, V-type groove center axis and the center-aligned of placing a c-lens collimation lens 4 and the 2nd c-lens collimation lens 1.First resonatron 3 and second resonatron 2 are positioned on two V-shaped grooves; Quartz tuning-fork 7 is positioned in the circular hole on the V-type groove holder 8; The otch that guarantees quartz tuning-fork 7 through the design size tolerance aligns with first resonatron 3 and second resonatron, 2 central axis; It is 0.7mm that the resonatron axial line distance is stretched out in the otch upper end; First resonatron 3 and second resonatron 2 are respectively 30 μ m with the spacing of quartz tuning-fork 7, fix through two component optical cements after first resonatron 3 and second resonatron, 2 central axis and quartz tuning-fork 7 Surface Vertical.
C-lens collimation lens spot diameter 0.5mm of the present invention, beam waist diameter 200 μ m, operating distance 30mm, gold-plated sleeve pipe inserts loss less than 0.4dB.Light beam is behind a c-lens collimation lens 4, and the longitudinal axis of edge first resonatron 3 passes gassiness buffer zone directive resonatron, and beam waist position is quartz tuning-fork otch center, passes second resonatron then, penetrates through the 2nd c-lens collimation lens 1 back.Penetrate the collimate active alignment of lens of power through the luminous power equation of light, adopt optics epoxy glue fixing seal after adjusting the position of collimation lens.Pt temperature sensor 6 is installed so that temperature is compensated the influence that wave length shift brings above quartz tuning-fork 7.Quartz tuning-fork 7 links to each other with peripheral testing circuit with pt temperature sensor 6.After each parts assembled, with the loam cake employing laser parallel seam weldering welding of base 9, sealing formation photoacoustic spectrum gas cell.
Adopt optoacoustic spectroscopy measurement device gas, be incorporated into gas to be measured in the photoacoustic spectrum gas cell through air inlet inlet tube 5, discharge through gas outlet tube 10; In photoacoustic cell, form flowing gas, modulated beam of light incides in the photoacoustic cell through a c-lens collimation lens 4, radiation appearance gas; After the gas absorption light modulated, cause the transition of ground state, then pass through molecular collision to excited state; Generate heat from excited state through radiationless transition, produce pressure wave, i.e. sound wave; Sound wave is enhancing signal in resonatron, and quartz tuning-fork through high quality factor 7 converts acoustical signal to electric signal, is connected with peripheral amplifying circuit.
Connect pump and valve through the outside, can control the pressure in the photoacoustic cell, form flowing gas in the gas cell simultaneously, get rid of waste gas in the pond, ensure gas purity, reduce the absorption of gas, improved the precision and the accuracy of measuring.Through acousimeter built-in pt temperature sensor 6 and gas outlet tube 10 external tensimeters, can revise the pressure broadening and the wave length shift of measurement data.
This quartzy enhanced photo acoustic spectrum gas cell has that volume is little, the high and low ground unrest of sensitivity, can detect advantage such as multicomponent gas, is applicable to the optoacoustic spectroscopy monitoring system of environmental gas.
The present invention not detailed description is a technology as well known to those skilled in the art.
Claims (8)
1. quartz tuning fork strengthened photoacoustic spectrum gas cell is characterized in that: comprise a c-lens collimation lens (4), the 2nd c-lens collimation lens (1), first resonatron (3), second resonatron (2), quartz tuning-fork (7), double V-shaped groove holder (8) and pedestal (9); Double V-shaped groove holder (8), a c-lens collimation lens (4) and the 2nd c-lens collimation lens (1) are fixedly mounted on the pedestal (9); First resonatron (3), second resonatron (2) and quartz tuning-fork (7) are fixed on the double V-shaped groove holder (8); First resonatron (3), second resonatron (2) symmetry are installed in quartz tuning-fork (7) both sides; Quartz tuning-fork (7) is positioned at the beam waist position of a c-lens collimation lens (4) and the 2nd c-lens collimation lens (1); The axis coaxle of the axle center of first resonatron (3), second resonatron (2) and a c-lens collimation lens (4) and the 2nd c-lens collimation lens (1); Pass second resonatron (2), the interdigital gap of quartz tuning-fork (7) and first resonatron (3) back arrival the one c-lens collimation lens (4) from the light path that the 2nd c-lens collimation lens (1) sends.
2. according to the quartz tuning fork strengthened photoacoustic spectrum gas cell of claim 1, it is characterized in that: in said quartz tuning-fork (7) top pt temperature sensor (6) is housed, is used to measure near the environment temperature of quartz tuning-fork (7).
3. according to the quartz tuning fork strengthened photoacoustic spectrum gas cell of claim 1, it is characterized in that: said first resonatron (3) and second resonatron (2) are provided with buffer zone in the side near the c-lens collimation lens.
4. according to the quartz tuning fork strengthened photoacoustic spectrum gas cell of claim 3, it is characterized in that: the length of said buffer zone equals the length of resonatron, and the area of section of buffer zone is 50-100 a times of resonatron sectional area.
5. according to the quartz tuning fork strengthened photoacoustic spectrum gas cell of claim 1; It is characterized in that: the collimation operating distance of a said c-lens collimation lens (4) and the 2nd c-lens collimation lens (1) is 20-30mm; Spot diameter is 0.5～0.8mm, beam waist diameter 100～220 μ m.
6. according to the quartz tuning fork strengthened photoacoustic spectrum gas cell of claim 1, it is characterized in that: the quality factor of said quartz tuning-fork (7) under normal pressure are greater than 10000, and half height is peak width 3～5Hz entirely.
7. according to the quartz tuning fork strengthened photoacoustic spectrum gas cell of claim 1, it is characterized in that: the surface spacing of said resonatron and quartz tuning-fork (7) is 30～50 μ m.
8. according to the quartz tuning fork strengthened photoacoustic spectrum gas cell of claim 1, it is characterized in that: said first resonatron (3) and second resonatron (2) adopt 316 stainless steels.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103795367A (en) * | 2014-01-14 | 2014-05-14 | 北京航天时代光电科技有限公司 | Enhancement type quartz tuning fork encapsulating device |
| CN103954560A (en) * | 2014-04-29 | 2014-07-30 | 北京遥测技术研究所 | Space beam coupling device for photoacoustic multi-component gas detection |
| CN104215587A (en) * | 2014-10-08 | 2014-12-17 | 山西大学 | Quartz enhancing photoacoustic spectrophone and assistant assembling device and method thereof |
| CN104237135A (en) * | 2014-10-22 | 2014-12-24 | 东北林业大学 | System and method for detecting CO gas based on quartz tuning fork enhanced photoacoustic spectrometry technology |
| CN104280345A (en) * | 2014-10-20 | 2015-01-14 | 高椿明 | Tunable-laser-based quartz tuning fork enhancement type photo-acoustic spectrum distributed optical fiber gas sensor |
| CN104914049A (en) * | 2015-05-28 | 2015-09-16 | 北京航天控制仪器研究所 | Quartz enhanced photoacoustic spectroscopy gas package detection device |
| CN108027322A (en) * | 2015-08-07 | 2018-05-11 | 库珀技术公司 | Shell of gas sensor |
| CN108593763A (en) * | 2018-03-26 | 2018-09-28 | 山东大学 | A kind of multicomponent gas real-time detection apparatus based on the demodulation of quartz tuning-fork frequency division |
| EP3338076A4 (en) * | 2015-08-07 | 2019-05-15 | Eaton Intelligent Power Limited | Gas sensor housing with micro-resonators |
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Cited By (14)
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| CN103795367B (en) * | 2014-01-14 | 2016-06-01 | 北京航天时代光电科技有限公司 | The encapsulation device of a kind of enhancement type quartz tuning-fork |
| CN103795367A (en) * | 2014-01-14 | 2014-05-14 | 北京航天时代光电科技有限公司 | Enhancement type quartz tuning fork encapsulating device |
| CN103954560A (en) * | 2014-04-29 | 2014-07-30 | 北京遥测技术研究所 | Space beam coupling device for photoacoustic multi-component gas detection |
| CN104215587A (en) * | 2014-10-08 | 2014-12-17 | 山西大学 | Quartz enhancing photoacoustic spectrophone and assistant assembling device and method thereof |
| CN104215587B (en) * | 2014-10-08 | 2016-08-17 | 山西大学 | Quartz enhanced photoacoustic spectroscopy acousimeter and assisted group assembling device thereof and method |
| CN104280345A (en) * | 2014-10-20 | 2015-01-14 | 高椿明 | Tunable-laser-based quartz tuning fork enhancement type photo-acoustic spectrum distributed optical fiber gas sensor |
| CN104237135A (en) * | 2014-10-22 | 2014-12-24 | 东北林业大学 | System and method for detecting CO gas based on quartz tuning fork enhanced photoacoustic spectrometry technology |
| CN104237135B (en) * | 2014-10-22 | 2017-11-03 | 东北林业大学 | CO gas detecting systems and method based on quartz tuning fork strengthened optoacoustic spectroscopy |
| CN104914049A (en) * | 2015-05-28 | 2015-09-16 | 北京航天控制仪器研究所 | Quartz enhanced photoacoustic spectroscopy gas package detection device |
| CN104914049B (en) * | 2015-05-28 | 2017-07-28 | 北京航天控制仪器研究所 | A kind of quartz enhanced photoacoustic spectroscopy gas package detection device |
| CN108027322A (en) * | 2015-08-07 | 2018-05-11 | 库珀技术公司 | Shell of gas sensor |
| EP3338076A4 (en) * | 2015-08-07 | 2019-05-15 | Eaton Intelligent Power Limited | Gas sensor housing with micro-resonators |
| CN108593763A (en) * | 2018-03-26 | 2018-09-28 | 山东大学 | A kind of multicomponent gas real-time detection apparatus based on the demodulation of quartz tuning-fork frequency division |
| CN108593763B (en) * | 2018-03-26 | 2021-03-30 | 山东大学 | Real-time detection device for multi-component gas based on quartz tuning fork frequency division demodulation |
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