CN110361332A - A kind of photoacoustic cell for the detection of gas optoacoustic spectroscopy - Google Patents
A kind of photoacoustic cell for the detection of gas optoacoustic spectroscopy Download PDFInfo
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- CN110361332A CN110361332A CN201910615745.1A CN201910615745A CN110361332A CN 110361332 A CN110361332 A CN 110361332A CN 201910615745 A CN201910615745 A CN 201910615745A CN 110361332 A CN110361332 A CN 110361332A
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- 238000001514 detection method Methods 0.000 title claims abstract description 18
- 238000004867 photoacoustic spectroscopy Methods 0.000 title claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000011521 glass Substances 0.000 claims abstract description 12
- 239000010453 quartz Substances 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 238000012360 testing method Methods 0.000 claims abstract description 6
- 230000008859 change Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 6
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 230000003746 surface roughness Effects 0.000 abstract description 3
- 210000004027 cell Anatomy 0.000 description 42
- 230000035945 sensitivity Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 238000010895 photoacoustic effect Methods 0.000 description 5
- 229910001369 Brass Inorganic materials 0.000 description 4
- 239000010951 brass Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000013016 damping Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of photoacoustic cells for the detection of gas optoacoustic spectroscopy, including the first surge chamber and the second surge chamber, are symmetricly set on the two sides of photoacoustic cell central axis；Gas outlet for being passed through the air inlet of under test gas and under test gas to be discharged, air inlet are connected to the first surge chamber, and gas outlet is connected to the second surge chamber；For making incident light enter the light inlet of the first surge chamber from the first Brewster window and for making incident light from the light-emitting window of the second Brewster window the second surge chamber of outgoing；Resonant cavity is cylindrical quartz hollow glass tube, is connected to the first surge chamber and the second surge chamber；Microphone is arranged in resonant cavity, is used for sound detecting signal.The resonant cavity of photoacoustic cell provided by the invention replaces traditional metal with quartz glass tube, while guaranteeing resonant cavity hardness, inside surface roughness is substantially reduced, and effectively reduces gas absorption and viscosity effect, photoacoustic signal ambient noise is reduced, the Q value and signal-to-noise ratio of photoacoustic cell are promoted.
Description
Technical field
The invention belongs to gas detection technology fields, more particularly, to a kind of light for the detection of gas optoacoustic spectroscopy
Sound pond.
Background technique
Optoacoustic spectroscopy is a kind of spectral technique based on optoacoustic effect, in optoacoustic effect, gas molecules sorb certain wave
Long infrared light and be excited to upper state, the molecule in upper state by way of radiationless transition by the luminous energy of absorption turn
Lower state is returned to after becoming thermal energy, frequency modulation(PFM) is being carried out to incident light, thermal energy can show the period identical with modulating frequency
Property variation to generating sound wave, the ultimate density of gas is detected and is calculated to voice signal by microphone, very
It is suitble to trace gas measurement and the non intrusive measurement under complicated multicomponent multiple types gas background.Influence optoacoustic spectroscopy gas
The core component of body detection system sensitivity mainly includes light source, photoacoustic cell and microphone three parts, wherein photoacoustic cell conduct
The generating source of photoacoustic signal is the core of photoacoustic spectroscopy system, and whether its design rationally directly influences detection
The level of sensitivity of sound pressure signal.
Photoacoustic cell is divided into resonant and two class of non-resonant: resonant photoacoustic cell fast response time, tool according to operating mode
There are stronger resonance amplification effect, gas detection high sensitivity, but its structure is relatively complicated, resonant frequency easily occurs
Drift；Non-resonant optoacoustic pool structure is simple, low cost, but its detection sensitivity is low, and the signal strength detected is weaker, essence
Accuracy is lower.For the sensitivity and accuracy for guaranteeing this detection, optoacoustic detection is more carried out using resonant photoacoustic cell.
Summary of the invention
In view of the drawbacks of the prior art, the purpose of the present invention is to provide a kind of optoacoustics for the detection of gas optoacoustic spectroscopy
Pond, it is intended to solve the problems, such as that existing photoacoustic cell optoacoustic effect is weak, signal-to-noise ratio is limited.
To achieve the above object, the present invention provides a kind of photoacoustic cells for the detection of gas optoacoustic spectroscopy, comprising:
First surge chamber and the second surge chamber, are symmetricly set on the two sides of photoacoustic cell central axis；For being passed through gas to be measured
The air inlet of body and gas outlet under test gas to be discharged, air inlet are connected to the first surge chamber, gas outlet and the second buffering
Room connection；For making incident light enter the light inlet of the first surge chamber from the first Brewster window and for making incident light from the
Two Brewster windows are emitted the light-emitting window of the second surge chamber；
Resonant cavity is cylindrical quartz hollow glass tube, is connected to the first surge chamber and the second surge chamber；
Microphone is arranged in resonant cavity, for detecting the voice signal of resonant cavity generation.
Preferably, the length of resonant cavity be 50mm~80mm, diameter of section be 8mm~10mm, the length of resonant cavity and its
The ratio range of diameter of section is between 4:1 to 10:1.
Preferably, the width of the first surge chamber and the second surge chamber is equal, and the ratio with the diameter of section of resonant cavity is
3:1。
Traditional resonant cavity is using metal materials such as brass, through the techniques such as over mechanical processing and polishing plated film, rough surface
Ra is spent in a μm magnitude, and uses the mature drawing process of quartz glass tube, the hollow glass tube resonant cavity of high-purity silicon dioxide
Inside surface roughness can be controlled within 1nm, 3 orders of magnitude lower than metal material.And quartz material rigidity (Young's modulus)
It is about 7 times higher than metallic copper, it is ensured that the hardness of resonant cavity cavity.The ability that molecule optoacoustic effect changes in photoacoustic cell can lead to
Photoacoustic cell constant C is crossed to reflect, photoacoustic cell constant is bigger, and optoacoustic effect is better, the theoretical formula of photoacoustic cell constant C are as follows:
C=(r-1) QL/fV π2
Wherein, r is the ratio of specific heat of gas level pressure and constant volume, and Q is quality factor, and L is resonant cavity length, and V is photoacoustic cell
Volume, f are resonant frequency.The characteristic of the making material of photoacoustic cell influences the quality factor of photoacoustic cell, to reduce gas in photoacoustic cell
Body damping, sluggish and thermal losses, the general metal for selecting the coefficient of heat conduction big come protection packaging photoacoustic cell, such as brass.
Preferably, the middle position of resonant cavity is arranged in microphone, and the opening of microphone is positioned against the resonance
Lumen wall, with the sound transmission effect reached.
Preferably, photoacoustic cell further include:
Temperature sensor is arranged in the first surge chamber, for detecting the temperature of photoacoustic cell；
Pressure sensor is arranged in the second surge chamber, for detecting the pressure change of photoacoustic cell；
First acoustic filter and the second acoustic filter, are separately positioned in the first surge chamber and the second surge chamber, use
In filter background and source noise.
Contemplated above technical scheme through the invention, compared with prior art, can obtain it is following the utility model has the advantages that
1, the resonant cavity of photoacoustic cell provided by the invention replaces traditional metal with quartz glass tube, is guaranteeing that resonant cavity is hard
While spending, inside surface roughness is substantially reduced, and can effectively reduce gas absorption and viscosity effect, reduces photoacoustic signal background
Noise promotes the Q value and signal-to-noise ratio of photoacoustic cell；
2, optoacoustic pool structure design provided by the invention is simple, and various components are symmetrical, easy processing, and resonate inner cavity surface
Polishing treatment reduces sound wave damping, is conducive to accumulation of the photoacoustic signal energy in chamber to form standing wave and improves spirit
Sensitivity；
3, the resonant cavity length of photoacoustic cell provided by the invention and inner wall section diameter can be for different beam qualities
Light source is selected, and in the case where guaranteeing that ambient noise is constant, obtains maximum photoacoustic signal.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of photoacoustic cell for the detection of gas optoacoustic spectroscopy provided in an embodiment of the present invention；
Fig. 2 is the schematic cross-section of photoacoustic cell resonant cavity provided in an embodiment of the present invention；
Fig. 3 is the index path of photoacoustic cell resonant cavity provided in an embodiment of the present invention.
Attached drawing mark:
1, light inlet, 2, light-emitting window, 3, resonant cavity, the 4, first surge chamber, the 5, second surge chamber, 6, microphone, 7, temperature
Sensor, 8, pressure sensor, 9, air inlet, 10, gas outlet, the 11, first Brewster window, the 12, second Brewster window
Mouthful, 13, acoustic filter.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
As shown in Figure 1, the embodiment of the invention provides a kind of photoacoustic cells for the detection of gas optoacoustic spectroscopy, comprising:
First surge chamber 4 and the second surge chamber 5, are symmetricly set on the two sides of photoacoustic cell central axis, the first surge chamber 4 with
Air inlet 9 is connected to, and the second surge chamber 5 is connected to gas outlet 10；It is to be measured for being passed through the air inlet 9 of under test gas and for being discharged
The gas outlet 10 of gas；For making incident light enter the light inlet 1 of the first surge chamber 4 from the first Brewster window 11 and being used for
Incident light is set to be emitted the light-emitting window 2 of the second surge chamber 5 from the second Brewster window 12；
Resonant cavity 3 is cylindrical quartz hollow glass tube, is connected to the first surge chamber 4 and the second surge chamber 5；
Microphone 6 is arranged in resonant cavity 3, for detecting the voice signal of the generation of resonant cavity 3.
Specific infrared light enters from light inlet 1, from light-emitting window after the first surge chamber 4, resonant cavity 3, the second surge chamber 5
2 go out；Under test gas is discharged into from air inlet 9, and transition, radiationless generation heat occur for gas molecules sorb infrared light in photoacoustic cell
Can, under specific modulation frequency effect, the microphone 6 for generating acoustic signals, and being tightly attached on resonant cavity 3 receives acoustic signals
After carry out processing gas concentration information can be obtained；Tail gas is discharged from gas outlet 10.
First surge chamber 4 and the second surge chamber 5 are separately positioned on the both ends of photoacoustic cell；Temperature is installed in the first surge chamber 4
Sensor 7 installs pressure sensor 8 in the second surge chamber 5, for the temperature and pressure variation in real-time measurement photoacoustic cell.Light
The resonant frequency in sound pond is l KHz or more.Acoustic filter 13 is provided in the first surge chamber 4 and the second surge chamber 5 respectively,
Filter background and source noise.Gas enters in photoacoustic cell by air inlet 9, is discharged in pond from gas outlet 10, thus discharge
Exhaust gas in pond and purge of gas is carried out, has ensured the purity of pool gas, and form flowing gas, it is ensured that detection
Precision and accuracy.Mounting temperature sensor 7 in first surge chamber 4 at resonant cavity both ends, the interior installation pressure of the second surge chamber 5 pass
Sensor 8, the temperature and pressure variation in real-time measurement photoacoustic cell, reflects the actual working environment situation of photoacoustic cell.
Since the inner wall environment and photo-acoustic excitation of photoacoustic cell have decision to the sensitivity of photo-acoustic spectrometer and stability promotion
Property effect.The present invention proposes hollow quartz glass tube in the composite construction optoacoustic pond that metal organically combines, and resonant cavity 3 utilizes high-purity
The hollow structural glass pipe (hollow glass tube) for spending quartz material substitutes traditional cylindrical metal resonant cavity, using mature glass
Pipe drawing technology and cleaning method, the optoacoustic resonant cavity for obtaining nanoscale inner wall finish are compared with traditional optoacoustic pool structure,
Structure proposed by the present invention has lower gas hysteresis, lower optoacoustic acoustic pressure ambient noise and higher Q value.
Photoacoustic cell provided in an embodiment of the present invention, laser beam are Brewster angle, transmitance greater than 90% through angle
Quartz window sheet is injected wherein along the longitudinal axis of photoacoustic cell, and photoacoustic cell is made of the quartz glass tube of light quality.Circle
The photoacoustic cell of column can be well matched with axisymmetric light beam, axisymmetric excitation sound field, and easy to process, thus be designed as justifying
Cylindricality photoacoustic cell.As shown in Fig. 2, resonant cavity 3 is made of glass tube walls 31, resonant cavity hollow 32 and brass shell 33.Glass tube
Wall 31 is a length of 50mm~80mm, the annular cavity that diameter is 8mm~10mm, and internal resonant cavity hollow 32 then works in
Longitudinal resonance mode, i.e. standing wave in photoacoustic cell are axially distributed.Whole glass resonant cavity is placed in brass shell 33,
Chamber middle section opening places microphone 6 to detect sound field variation.For the noise that isolation diaphragm generates light absorption, resonant cavity two
Surge chamber is respectively set in end, as sound damper；Two surge chambers respectively mounting temperature sensor and pressure sensor, so as to reality
It applies personnel and understands operating temperature and internal pressure in photoacoustic cell in real time.The length of surge chamber is taken as 25mm, diameter 24mm.
Present apparatus resonant cavity uses hollow glass tube structure, in sidewall opening so that microphone carries out signal detection.It is intracavitary
Light distribution it is as shown in Figure 3.Light beam is squeezed into from inlet, and focus (laser beam waist) is located at resonant cavity middle section, later by exporting
It projects.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (7)
1. a kind of photoacoustic cell for the detection of gas optoacoustic spectroscopy characterized by comprising
First surge chamber and the second surge chamber are symmetricly set on the two sides of the photoacoustic cell central axis；For being passed through gas to be measured
The air inlet of body and gas outlet for the under test gas to be discharged, the air inlet is connected to first surge chamber, described
Gas outlet is connected to second surge chamber；For making incident light enter first surge chamber from the first Brewster window
Light inlet and for making incident light be emitted from the second Brewster window the light-emitting window of second surge chamber；
Resonant cavity is cylindrical quartz hollow glass tube, is connected to first surge chamber and second surge chamber；
Microphone is arranged in the resonant cavity, the voice signal generated for detecting the resonant cavity.
2. photoacoustic cell according to claim 1, which is characterized in that the length of the resonant cavity and the ratio model of diameter of section
It encloses between 4:1 to 10:1.
3. photoacoustic cell according to claim 2, which is characterized in that the resonant cavity is encapsulated using metal coating.
4. photoacoustic cell according to claim 1, which is characterized in that the width of first surge chamber and second surge chamber
Spend equal, the ratio of the diameter of section of the width and the resonant cavity is 3:1.
5. photoacoustic cell according to claim 1, which is characterized in that the interposition of the resonant cavity is arranged in the microphone
Set place.
6. photoacoustic cell according to claim 5, which is characterized in that the opening of the microphone is positioned against the resonance
Lumen wall.
7. photoacoustic cell according to claim 1, which is characterized in that further include:
Temperature sensor is arranged in first surge chamber, for detecting the temperature of the photoacoustic cell；
Pressure sensor is arranged in second surge chamber, for detecting the pressure change of the photoacoustic cell；
First acoustic filter and the second acoustic filter are separately positioned on first surge chamber and second surge chamber
It is interior, it is used for filter background noise and source noise.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910615745.1A CN110361332A (en) | 2019-07-09 | 2019-07-09 | A kind of photoacoustic cell for the detection of gas optoacoustic spectroscopy |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910615745.1A CN110361332A (en) | 2019-07-09 | 2019-07-09 | A kind of photoacoustic cell for the detection of gas optoacoustic spectroscopy |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111551502B (en) * | 2020-05-29 | 2021-06-29 | 华中科技大学 | Non-resonant photoacoustic spectroscopy system |
| CN114112924A (en) * | 2021-12-24 | 2022-03-01 | 中国科学院电工研究所 | In-situ monitoring device for dissolved gas in oil by adopting insulating material probe |
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| CN102346131A (en) * | 2010-07-30 | 2012-02-08 | 西安金和光学科技有限公司 | Novel optical fiber gas sensing apparatus |
| CN102374970A (en) * | 2010-08-17 | 2012-03-14 | 西安金和光学科技有限公司 | Corrugated-pipe-shaped optical fiber gas sensing device |
| CN102564999A (en) * | 2010-12-15 | 2012-07-11 | 西安金和光学科技有限公司 | Gas sensing device |
| CN103335946A (en) * | 2013-07-09 | 2013-10-02 | 国家电网公司 | System used for detecting gas in transformer insulating oil |
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| CN101487818A (en) * | 2009-02-20 | 2009-07-22 | 国网电力科学研究院 | On-line monitoring method and system for gas content in transformer oil |
| CN102346131A (en) * | 2010-07-30 | 2012-02-08 | 西安金和光学科技有限公司 | Novel optical fiber gas sensing apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111551502B (en) * | 2020-05-29 | 2021-06-29 | 华中科技大学 | Non-resonant photoacoustic spectroscopy system |
| CN114112924A (en) * | 2021-12-24 | 2022-03-01 | 中国科学院电工研究所 | In-situ monitoring device for dissolved gas in oil by adopting insulating material probe |
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