CN102667284B - 压电驱动式阀和压电驱动式流量控制装置 - Google Patents

压电驱动式阀和压电驱动式流量控制装置 Download PDF

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Publication number
CN102667284B
CN102667284B CN201080054455.1A CN201080054455A CN102667284B CN 102667284 B CN102667284 B CN 102667284B CN 201080054455 A CN201080054455 A CN 201080054455A CN 102667284 B CN102667284 B CN 102667284B
Authority
CN
China
Prior art keywords
heat dissipation
piezoelectric actuator
valve body
piezoelectric
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080054455.1A
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English (en)
Chinese (zh)
Other versions
CN102667284A (zh
Inventor
日高敦志
平田薰
永濑正明
池田信
池田信一
土肥亮介
西野功二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to CN201510674731.9A priority Critical patent/CN105179799B/zh
Publication of CN102667284A publication Critical patent/CN102667284A/zh
Application granted granted Critical
Publication of CN102667284B publication Critical patent/CN102667284B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y10T137/776—Control by pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Details Of Valves (AREA)
  • Flow Control (AREA)
CN201080054455.1A 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置 Expired - Fee Related CN102667284B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510674731.9A CN105179799B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009274005A JP5669384B2 (ja) 2009-12-01 2009-12-01 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP2009-274005 2009-12-01
PCT/JP2010/006483 WO2011067891A1 (ja) 2009-12-01 2010-11-04 圧電駆動式バルブ及び圧電駆動式流量制御装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201510674731.9A Division CN105179799B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置

Publications (2)

Publication Number Publication Date
CN102667284A CN102667284A (zh) 2012-09-12
CN102667284B true CN102667284B (zh) 2016-10-26

Family

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CN201080054455.1A Expired - Fee Related CN102667284B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置
CN201510674731.9A Expired - Fee Related CN105179799B (zh) 2009-12-01 2010-11-04 压电驱动式阀和压电驱动式流量控制装置

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Country Status (6)

Country Link
US (1) US9163743B2 (cg-RX-API-DMAC7.html)
JP (1) JP5669384B2 (cg-RX-API-DMAC7.html)
KR (1) KR101366018B1 (cg-RX-API-DMAC7.html)
CN (2) CN102667284B (cg-RX-API-DMAC7.html)
TW (1) TWI422765B (cg-RX-API-DMAC7.html)
WO (1) WO2011067891A1 (cg-RX-API-DMAC7.html)

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US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5775110B2 (ja) * 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
WO2015035045A2 (en) * 2013-09-04 2015-03-12 Kim Ngoc Vu Interlace lifting mechanism
US9903497B2 (en) 2013-09-30 2018-02-27 Hitachi Metals, Ltd. Flow control valve and a mass flow controller using the same
DE102013111025A1 (de) * 2013-10-04 2015-04-09 Krones Ag Ventileinrichtung zum gesteuerten Einleiten eines Blasmediums
CN105144013B (zh) * 2013-10-21 2019-03-08 株式会社堀场Stec 流体控制阀
JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6475441B2 (ja) * 2014-09-01 2019-02-27 株式会社フジキン 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
CN107925368B (zh) * 2015-08-21 2019-06-18 株式会社富士金 压电式线性致动器、压电驱动阀以及流量控制装置
CN105333195A (zh) * 2015-10-26 2016-02-17 无锡市圣科不锈钢气动自控阀门厂 一种压电阀门
CN108780332B (zh) * 2016-02-29 2021-10-01 株式会社富士金 流量控制装置
US10697373B2 (en) * 2016-06-27 2020-06-30 WASK Engineering Inc. Active combustion control valve, system and method
DE102016112115B4 (de) * 2016-07-01 2025-10-23 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil
DE102016226075A1 (de) * 2016-12-22 2018-06-28 Continental Automotive Gmbh Ventil
KR102162045B1 (ko) * 2016-12-26 2020-10-06 가부시키가이샤 후지킨 압전 소자 구동식 밸브 및 유량 제어 장치
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US10323766B2 (en) 2017-11-21 2019-06-18 Vistadeltek, Llc Compact circular linkage for a pushing actuator
CN111406243A (zh) * 2017-11-30 2020-07-10 株式会社富士金 流量控制装置
JPWO2019159959A1 (ja) * 2018-02-19 2021-02-04 株式会社フジキン 圧電素子駆動式バルブおよび流量制御装置
JP6606221B2 (ja) * 2018-04-27 2019-11-13 株式会社フジキン 圧力式流量制御装置
JP7179377B2 (ja) * 2018-08-30 2022-11-29 株式会社フジキン 流体制御機器
JP7402544B2 (ja) * 2019-07-31 2023-12-21 株式会社フジキン バルブ装置、流体制御装置及びバルブ装置の製造方法
US11976748B2 (en) 2019-08-30 2024-05-07 Fujikin Incorporated Diaphragm valve
CN114364907B (zh) * 2019-09-05 2024-10-11 株式会社堀场Stec 流量控制阀和流量控制装置
JP7045738B1 (ja) * 2021-03-23 2022-04-01 株式会社リンテック 常時閉型流量制御バルブ
JP7461686B2 (ja) 2021-04-01 2024-04-04 株式会社フジキン 制御器及び気化供給装置
FR3131615A1 (fr) * 2022-01-06 2023-07-07 Pytheas Technology Valve comportant un actionneur piézoélectrique.
CN117311401B (zh) * 2022-12-13 2024-05-03 青海盐湖工业股份有限公司 控流计量装置及介质输送系统
KR20250106635A (ko) * 2024-01-03 2025-07-10 삼성전자주식회사 질량 유량 제어기, 이를 이용한 유량 제어 방법 및 이를 포함하는 기판 처리 방법

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WO2008129783A1 (ja) * 2007-03-30 2008-10-30 Fujikin Incorporated 圧電素子駆動式制御弁
CN101360941A (zh) * 2006-01-18 2009-02-04 株式会社富士金 常开型压电元件驱动式金属隔膜控制阀

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JP2003120832A (ja) * 2001-10-17 2003-04-23 Fujikin Inc 圧電素子駆動式金属ダイヤフラム型制御弁
JP2004162733A (ja) * 2002-11-08 2004-06-10 Stec Inc 高温対応バルブ
CN101360941A (zh) * 2006-01-18 2009-02-04 株式会社富士金 常开型压电元件驱动式金属隔膜控制阀
WO2008129783A1 (ja) * 2007-03-30 2008-10-30 Fujikin Incorporated 圧電素子駆動式制御弁

Also Published As

Publication number Publication date
JP5669384B2 (ja) 2015-02-12
JP2011117499A (ja) 2011-06-16
KR20120048042A (ko) 2012-05-14
WO2011067891A1 (ja) 2011-06-09
TW201139902A (en) 2011-11-16
KR101366018B1 (ko) 2014-02-21
TWI422765B (zh) 2014-01-11
US20120273061A1 (en) 2012-11-01
CN105179799A (zh) 2015-12-23
CN102667284A (zh) 2012-09-12
CN105179799B (zh) 2017-07-21
US9163743B2 (en) 2015-10-20

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