CN102656444B - 具有照相机阵列和紧凑一体式照明装置的高速光学检查系统 - Google Patents

具有照相机阵列和紧凑一体式照明装置的高速光学检查系统 Download PDF

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Publication number
CN102656444B
CN102656444B CN201080042290.6A CN201080042290A CN102656444B CN 102656444 B CN102656444 B CN 102656444B CN 201080042290 A CN201080042290 A CN 201080042290A CN 102656444 B CN102656444 B CN 102656444B
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CN
China
Prior art keywords
image
camera array
photographing unit
optical checking
light
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Expired - Fee Related
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CN201080042290.6A
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English (en)
Chinese (zh)
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CN102656444A (zh
Inventor
史蒂文·K·凯斯
卡尔·E·豪干
史蒂文·A·罗斯
大卫·M·克兰兹
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Cyberoptics Corp
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Cyberoptics Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/845—Objects on a conveyor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8838—Stroboscopic illumination; synchronised illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201080042290.6A 2009-09-22 2010-09-21 具有照相机阵列和紧凑一体式照明装置的高速光学检查系统 Expired - Fee Related CN102656444B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US24467109P 2009-09-22 2009-09-22
US24461609P 2009-09-22 2009-09-22
US61/244,616 2009-09-22
US61/244,671 2009-09-22
PCT/US2010/049617 WO2011037903A1 (en) 2009-09-22 2010-09-21 High speed optical inspection system with camera array and compact, integrated illuminator

Publications (2)

Publication Number Publication Date
CN102656444A CN102656444A (zh) 2012-09-05
CN102656444B true CN102656444B (zh) 2016-08-03

Family

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Family Applications (2)

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CN201080042290.6A Expired - Fee Related CN102656444B (zh) 2009-09-22 2010-09-21 具有照相机阵列和紧凑一体式照明装置的高速光学检查系统
CN2010800418027A Pending CN102498387A (zh) 2009-09-22 2010-09-21 高速、高解析度、三维太阳能电池检查系统

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2010800418027A Pending CN102498387A (zh) 2009-09-22 2010-09-21 高速、高解析度、三维太阳能电池检查系统

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Country Link
JP (2) JP5809628B2 (https=)
KR (1) KR20120084738A (https=)
CN (2) CN102656444B (https=)
DE (1) DE112010003742T5 (https=)
WO (2) WO2011037905A1 (https=)

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CN102253051A (zh) * 2011-05-03 2011-11-23 3i系统公司 一种线扫描探测器检测太阳能电池片缺陷的系统
CN103076330A (zh) * 2013-01-05 2013-05-01 王锦峰 多面阵相机aoi设备及其拍摄图像方法
US20140198185A1 (en) * 2013-01-17 2014-07-17 Cyberoptics Corporation Multi-camera sensor for three-dimensional imaging of a circuit board
KR101351000B1 (ko) * 2013-04-10 2014-01-15 주식회사 미루시스템즈 복수 개의 검사 모드를 가지는 인라인 카메라 검사 장치
US10126252B2 (en) 2013-04-29 2018-11-13 Cyberoptics Corporation Enhanced illumination control for three-dimensional imaging
US9599572B2 (en) * 2014-04-07 2017-03-21 Orbotech Ltd. Optical inspection system and method
KR101886947B1 (ko) * 2014-05-05 2018-08-08 아르코닉 인코포레이티드 용접 측정을 위한 장치 및 방법
KR101940936B1 (ko) * 2014-09-11 2019-01-21 사이버옵틱스 코포레이션 3-차원 형상측정에서 복수 카메라 및 광원으로부터의 포인트 클라우드 병합
DE102015101252B4 (de) * 2015-01-28 2023-10-19 Chromasens Gmbh Beleuchtungsvorrichtung, optisches Analysesystem sowie Verfahren zum Abtasten einer Oberfläche
CN106706657A (zh) * 2015-11-17 2017-05-24 北大方正集团有限公司 基于喷墨印刷的在线检测系统及方法
WO2017172819A1 (en) * 2016-03-30 2017-10-05 Optical Wavefront Laboratories, Llc Multiple camera microscope imaging with patterned illumination
CN106093068A (zh) * 2016-08-10 2016-11-09 武汉科技大学 锂电池极片表面缺陷检测装置的成像系统及其使用方法
CN106501267A (zh) * 2016-10-18 2017-03-15 凌云光技术集团有限责任公司 用于表面缺陷检测的线性光源装置及系统
CN106525874A (zh) * 2016-11-01 2017-03-22 凌云光技术集团有限责任公司 一种大幅面工业品表面检测系统
KR20190112715A (ko) * 2017-02-02 2019-10-07 이스메카 세미컨덕터 홀딩 에스.아. 부품을 검사하는 방법 및 조립체
TWI647444B (zh) * 2017-05-12 2019-01-11 廣盈自動化工程股份有限公司 Battery yield automatic detecting device and method thereof
JP6584454B2 (ja) * 2017-06-14 2019-10-02 キヤノン株式会社 画像処理装置及び方法
CN109425617A (zh) * 2017-08-31 2019-03-05 菱光科技股份有限公司 光学检测系统及图像处理方法
CN107478661A (zh) * 2017-09-11 2017-12-15 深圳市中天元光学玻璃有限公司 一种玻璃屏幕在线检测装置
JPWO2019188198A1 (ja) * 2018-03-30 2021-03-25 倉敷紡績株式会社 線状物の３次元計測装置、および、線状物の３次元計測方法
CN109000566B (zh) * 2018-08-15 2020-09-11 深圳科瑞技术股份有限公司 激光扫描三维成像和ccd二维成像组合测量方法及装置
CN113287001B (zh) * 2019-01-14 2023-04-04 奥宝科技有限公司 用于光学系统的多重图像获取装置
CN111060516B (zh) * 2019-12-10 2022-03-08 中国工程物理研究院激光聚变研究中心 光学元件亚表面缺陷的多通道原位检测装置及检测方法
JP7373436B2 (ja) * 2020-03-09 2023-11-02 ファスフォードテクノロジ株式会社 ダイボンディング装置および半導体装置の製造方法
KR102856352B1 (ko) * 2020-10-16 2025-09-04 삼성전자주식회사 다채널 액체 파티클 계수기
DE102021104947B4 (de) 2021-03-02 2023-05-25 Gerhard Schubert Gesellschaft mit beschränkter Haftung Scanner, damit ausgestattete Ermittlungs-Vorrichtung sowie Verfahren für deren Betrieb
CN113075232A (zh) * 2021-03-31 2021-07-06 深圳中科飞测科技股份有限公司 一种检测设备及检测方法
US12510474B2 (en) * 2021-03-31 2025-12-30 Skyverse Technology Co., Ltd. Detection device, detection apparatus and detection method
JP2022160288A (ja) * 2021-04-06 2022-10-19 パナソニックＩｐマネジメント株式会社 検査システムおよび画像処理装置
KR102528246B1 (ko) * 2021-04-30 2023-05-03 (주)자비스 배터리 내부 전체 전극 상태 검사 시스템
CN115629076B (zh) * 2022-09-27 2025-02-18 威海华菱光电股份有限公司 一种阵列式图像检测装置
CN116500050B (zh) * 2023-06-28 2024-01-12 四川托璞勒科技有限公司 一种pcb板视觉检测系统
EP4641176A1 (en) * 2024-04-24 2025-10-29 Automatizacion y Sistemas de Inspeccion en Linea Global, S.L. Vision system for an inspection apparatus

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WO2000038494A2 (en) * 1998-12-19 2000-06-29 Cyberoptics Corporation Automatic inspection system with stereovision

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EP0994646A1 (en) * 1998-10-13 2000-04-19 Yamagata Casio Co., Ltd. Illumination for use in electronic component mounting apparatus
WO2000038494A2 (en) * 1998-12-19 2000-06-29 Cyberoptics Corporation Automatic inspection system with stereovision

Also Published As

Publication number Publication date
CN102498387A (zh) 2012-06-13
JP2013505464A (ja) 2013-02-14
JP2013505465A (ja) 2013-02-14
JP5809628B2 (ja) 2015-11-11
KR20120084738A (ko) 2012-07-30
CN102656444A (zh) 2012-09-05
WO2011037903A1 (en) 2011-03-31
DE112010003742T5 (de) 2013-06-06
WO2011037905A1 (en) 2011-03-31

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Granted publication date: 20160803