CN102655106A - Device for picking and placing paraxial decoupling direct drive chip - Google Patents

Device for picking and placing paraxial decoupling direct drive chip Download PDF

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Publication number
CN102655106A
CN102655106A CN2012101457265A CN201210145726A CN102655106A CN 102655106 A CN102655106 A CN 102655106A CN 2012101457265 A CN2012101457265 A CN 2012101457265A CN 201210145726 A CN201210145726 A CN 201210145726A CN 102655106 A CN102655106 A CN 102655106A
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CN
China
Prior art keywords
hub splines
decoupling zero
splined shaft
bearing
sleeve
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CN2012101457265A
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Chinese (zh)
Inventor
何田
刘静
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MU2 PAK (WUXI) SEMICONDUCTOR EQUIPMENT CO Ltd
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MU2 PAK (WUXI) SEMICONDUCTOR EQUIPMENT CO Ltd
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Priority to CN2012101457265A priority Critical patent/CN102655106A/en
Publication of CN102655106A publication Critical patent/CN102655106A/en
Pending legal-status Critical Current

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Abstract

The invention provides a device for picking and placing a paraxial decoupling direct drive chip, wherein a spline shaft sleeve is arranged on a base by a pair of bearings, a rotating motor fixed on the base drives the spline shaft sleeve to rotate by a synchronous pulley and a synchronous belt or directly drives the spline shaft sleeve to rotate, and a spline shaft rotates in the spline shaft sleeve together with the spline shaft sleeve and moves up and down relative to the spline shaft sleeve; a decoupling sleeve is arranged on the spline shaft by a pair of the bearings, the inner circles of the bearings in the decoupling sleeve rotate together with the spline shaft relative to the outer circles of the bearings, and a linear motor fixed on the base directly drives the spline shaft to move up and down through a linear motor connecting piece, a decoupling sleeve and the bearings in the decoupling sleeve, so that the decoupling of the rotation and up-down movement of the spline shaft can be realized; and a swing arm is fixed at the tail end of the spline shaft, and rotates and moves up and down together with the spline shaft. The load of the motor can be reduced, the moving precision can be improved, the dynamical property of the structure can be improved, and the performance and the service life of a guide way for up-down movement can be improved. The device is suitable for an LED and an integrated circuit chip bonding machine, as well as other electromechanical equipment which needs high-speed and precision picking and placing operation.

Description

The chip fetching device is directly driven in the paraxonic decoupling zero
Technical field
The present invention relates to a kind of paraxonic decoupling zero and directly drive the chip fetching device; This device has been realized the horizontally rotating high speed compound motion with the vertical lifting both direction under the motor direct-drive, is applicable to that LED and IC chip bonding machine and other have the electromechanical equipment of high speed and precision loading or unloading operation needs.
Background technology
The chip bonding machine is to produce key equipment to the microelectronic component that bare chip efficiently accurately bonds on the base plate for packaging.The chip fetching device of chip bonding machine is accomplished picking up and placing of bare chip, is the critical component of chip bonding machine.For reach pick up and placement location between high-speed motion, the chip fetching device is employed in the swing arm structure of rotation in the horizontal plane usually; In order to realize picking up and placing of chip, swing arm must be done the vertical lifting motion under the drive of its rotating shaft simultaneously.The existing chip fetching device adopts electric rotating machine to drive the swing arm rotating shaft through linkage and horizontally rotates the mode that drives swing arm rotating shaft vertical lifting with electric rotating machine through eccentric wheel; Not only too much transmission link reduces precision and increases load, and the nonlinear motion of linkage relation causes adverse effect also for the dynamic characteristic of system.Also there is at present the chip fetching device to adopt to drive swing arm and goes up and down again and to be fixed on the mover of electric rotating machine mode to linear electric motors by the electric rotating machine driven rotary by linear electric motors; Linear electric motors and respective track and slide block have increased load to electric rotating machine, are applied to performance and life-span that the big value alternate torque on the guide rail has also reduced guide rail in the swing arm high speed rotating.Existing chip fetching device scheme based on connecting rod rotation, eccentric wheel up-down and rotation and up-down unity couping (being that lifting motor is fully by the electric rotating machine load) can't satisfy the requirement to speed and precision that the chip bonding machine increases rapidly.
Summary of the invention
The purpose of this invention is to provide a kind of paraxonic decoupling zero and directly drive the chip fetching device, solve the not enough and excessive problem of load of precision of existing chip fetching device; Also solve the problem that chip fetching device dynamic characteristic is relatively poor and the life-span is short.
Technical scheme of the present invention:
This paraxonic decoupling zero is directly driven the chip fetching device and is comprised splined shaft, drives electric rotating machine, the decoupling mechanism of realizing splined shaft rotation and elevating movement decoupling zero that splined shaft rotates, is positioned at the splined shaft side and drives the linear electric machine that splined shaft goes up and down through decoupling mechanism and be fixed in splined shaft terminal and with the splined shaft rotation and the swing arm of going up and down, and it is characterized in that:
Hub splines is installed on the hub splines pedestal through pair of bearings, and the hub splines pedestal is fixed on the pedestal, and the hub splines synchronous pulley is fixed on the hub splines; Electric rotating machine is fixed on the pedestal; The electric rotating machine synchronous pulley is fixed on the electric rotating machine output shaft; Band connects hub splines synchronous pulley and electric rotating machine synchronous pulley synchronously; Electric rotating machine drives the hub splines rotation through above-mentioned two synchronous pulleys and synchronous band, splined shaft in hub splines with can it does elevating movement relatively in its rotation; The decoupling zero sleeve is installed on the splined shaft through pair of bearings, and the linear electric machine connector is fixed on the decoupling zero sleeve; The linear electric machine stator is fixed on the pedestal; The linear electric machine mover is fixed on the linear electric machine connector; The linear electric machine connector is fixed on the pedestal through slide block and guide rail; When the bearing inner race in the decoupling zero sleeve rotated with the together relative bearing outer ring of splined shaft, linear electric machine was done elevating movement through the bearing of linear electric machine connector, decoupling zero sleeve and Qi Nei to driving splined shaft; Swing arm is fixed on the splined shaft end, with splined shaft rotation with go up and down, accomplishes the transmission of chip and picks and places.
Above-mentioned hub splines and decoupling zero sleeve are installed used bearing to being back-to-back or the angular contact ball bearing of face-to-face mounted in pairing mode, provide respectively to hub splines when electric rotating machine drives rotation down, born radially, axial load and moment of flexure and decoupling zero sleeve be in the axial load that realizes that splined shaft rotates and born during the up-down decoupling zero and the supporting of moment of flexure.
Above-mentioned hub splines and decoupling zero sleeve are installed used bearing to through hold-down nut (during back-to-back installation) or bearing (ball) cover (when installing face-to-face) pretension, with eliminate between the bearing enclose the gap with obtain bearing rigidity preferably.
Above-mentioned electric rotating machine also can pass through shaft coupling and the direct coaxial installation of hub splines.
The present invention all adopts motor direct-drive on swing arm rotation and up-down both direction, alleviated the electric rotating machine load and improved the precision of rotation and elevating movement, has improved the dynamic characteristic of both direction compound motion simultaneously.The present invention has realized the full decoupled of rotation and elevating movement, has improved the performance and the life-span of the used guide rail of elevating movement.
Description of drawings
Fig. 1 is a general assembly schematic three dimensional views of the present invention;
Fig. 2 is the profile of the present invention along the splined shaft axle center;
Fig. 3 is the partial enlarged view of the present invention along the splined shaft axial sectional view;
Fig. 4 is the coaxial scheme of installation of electric rotating machine in the specific embodiment of the invention.
The 1-swing arm; 2-decoupling zero sleeve; The 3-guide rail; The 4-slide block; 5-linear electric machine connector; 6-linear electric machine mover; 7-linear electric machine stator; 8-hub splines synchronous pulley; The 9-hub splines; 10-is with synchronously; 11-electric rotating machine synchronous pulley; The 12-electric rotating machine; 13-paraxonic motor base; 14-hub splines pedestal; The 15-splined shaft; 16-decoupling zero bearing bottom end cover; 17-decoupling zero upper bearing (metal) inner ring; 18-decoupling zero upper bearing (metal) outer ring; 19-hub splines bearing fixing nut; 20-hub splines end ring; 21-hub splines bearing spacer; 22-hub splines upper bearing (metal) inner ring; 23-hub splines upper bearing (metal) outer ring; 24-hub splines bearing upper end cover; 25-hub splines lower bearing inner ring; 26-hub splines lower bearing outer ring; 27-hub splines bearing bottom end cover; 28-decoupling zero bearing upper end cover; 29-decoupling zero bearing spacer; 30-decoupling zero lower bearing outer ring; 31-decoupling zero lower bearing inner ring; 32-decoupling zero end ring; 33-decoupling zero bearing fixing nut; The 34-shaft coupling; 35-coaxial motor pedestal.
Embodiment
Embodiment is referring to Fig. 1,2,3.Structure of the present invention: hub splines 9 is installed on the hub splines pedestal 14 through pair of bearings, and hub splines pedestal 14 is fixed on the paraxonic motor base 13, and hub splines synchronous pulley 8 is fixed on the hub splines 9; Electric rotating machine 12 is fixed on the paraxonic motor base 13; Electric rotating machine synchronous pulley 11 is fixed on the output shaft of electric rotating machine 12; Be with 10 to connect hub splines synchronous pulley 8 and electric rotating machine synchronous pulley 11 synchronously; Electric rotating machine 12 is through above two synchronous pulleys 11,8 and be with 10 to drive hub splines 9 rotations synchronously, splined shaft 15 in hub splines 9 with can it does elevating movement relatively in its rotation; Decoupling zero sleeve 2 is installed on the splined shaft 15 through pair of bearings, and decoupling zero sleeve 2 is fixed on the linear electric machine connector 5; Linear electric machine stator 7 is fixed on the paraxonic motor base 13; Linear electric machine mover 6 is fixed on the linear electric machine connector 5; Slide block 4 is fixed on the linear electric machine connector 5; The guide rail 3 that cooperates with slide block 4 is fixed on the paraxonic motor base 13, and slide block 4 and guide rail 3 provide guiding and supporting for the elevating movement of interconnective linear electric machine mover 6 and linear electric machine connector 5; When the bearing inner race in the decoupling zero sleeve 2 rotated with the together relative bearing outer ring of splined shaft 15, linear electric machine (stator 7 and mover 6) was done elevating movement through the bearing of linear electric machine connector 5, decoupling zero sleeve 2 and Qi Nei to driving splined shaft 15; Swing arm 1 is fixed on splined shaft 15 ends, with splined shaft 15 rotations and up-down, accomplishes the transmission of chip and picks and places.
Hub splines 9 and decoupling zero sleeve 2 installed used bearing to being back-to-back or the angular contact ball bearing of face-to-face mounted in pairing mode.The installation shaft of hub splines 9 is honoured to be provided be delivered to the supporting of axial load of gravity and the generation of the frictional force between hub splines 9 and the splined shaft 15 of moment of flexure and hub splines 9 on the hub splines 9 synchronously through splined shaft 15 in the up-down actuating force of the radial load that produces on the hub splines 9 and moment of flexure, splined shaft side linear electric machine with 10 tensile force.The installation shaft of decoupling zero sleeve 2 is honoured the supporting that the moment of flexure that the gravity of the up-down actuating force of linear electric machine and splined shaft 15 is produced in the up-down actuating force of axial load that produces on the decoupling zero sleeve 2 and splined shaft side linear electric machine is provided on decoupling zero sleeve 2.
The back-to-back mounted in pairing mode mode that the installation shaft of hub splines 9 and decoupling zero sleeve 2 is honoured is as shown in Figure 3.Hub splines bearing fixing nut 19 is along revolving on the screw thread on the hub splines 9; Successively hub splines end ring 20, hub splines lower bearing inner ring 25, hub splines lower bearing outer ring 26, hub splines bearing spacer 21, hub splines upper bearing (metal) outer ring 23, hub splines upper bearing (metal) inner ring 22 are pressed on the step of hub splines, the pretightning force that produces like this can be eliminated the gap between the upper and lower bearing enclose of hub splines and obtain bearing rigidity preferably.Hub splines bearing bottom end cover 27 also is pressed on respectively on hub splines lower bearing outer ring 26 and the hub splines upper bearing (metal) outer ring 23 through being bolted on the hub splines pedestal 14 with hub splines bearing upper end cover 24.Frictional force between hub splines bearing fixing nut 19, hub splines end ring 20 and hub splines lower bearing inner ring 25 end faces and the frictional force between hub splines upper bearing (metal) inner ring 22 and the hub splines step guarantee that respectively hub splines lower bearing inner ring 25 and hub splines upper bearing (metal) inner ring 22 are with the together corresponding relatively bearing outer ring rotation of hub splines.Frictional force between frictional force between hub splines bearing bottom end cover 27 and hub splines lower bearing outer ring 26 end faces and hub splines bearing upper end cover 24 and hub splines upper bearing (metal) outer ring 23 end faces guarantees hub splines lower bearing outer ring 26 and hub splines upper bearing (metal) outer ring 23 relative hub splines pedestal 14 transfixions respectively.Upwards axial load on the hub splines 9 according to the sequence delivery of hub splines bearing fixing nut 19, hub splines end ring 20, hub splines lower bearing inner ring 25, hub splines lower bearing outer ring 26, hub splines bearing spacer 21, hub splines upper bearing (metal) outer ring 23, hub splines bearing upper end cover 24 to hub splines pedestal 14.Downward axial load on the hub splines 9 according to the sequence delivery of hub splines step, hub splines upper bearing (metal) inner ring 22, hub splines upper bearing (metal) outer ring 23, hub splines bearing spacer 21, hub splines lower bearing outer ring 26, hub splines bearing bottom end cover 27 to hub splines pedestal 14.
Decoupling zero bearing fixing nut 33 is along revolving on the screw thread on the splined shaft 15; Successively decoupling zero end ring 32, decoupling zero lower bearing inner ring 31, decoupling zero lower bearing outer ring 30, decoupling zero bearing spacer 29, decoupling zero upper bearing (metal) outer ring 18, decoupling zero upper bearing (metal) inner ring 17 are pressed on the step of splined shaft, the pretightning force that produces like this can be eliminated the gap between the upper and lower bearing enclose of decoupling zero sleeve and obtain bearing rigidity preferably.Decoupling zero bearing bottom end cover 16 also is pressed on respectively on decoupling zero lower bearing outer ring 30 and the decoupling zero upper bearing (metal) outer ring 18 through being bolted on the decoupling zero sleeve 2 with decoupling zero bearing upper end cover 28.Frictional force between decoupling zero bearing fixing nut 33, decoupling zero end ring 32 and decoupling zero lower bearing inner ring 31 end faces and the frictional force between decoupling zero upper bearing (metal) inner ring 17 and the splined shaft step guarantee that respectively decoupling zero lower bearing inner ring 31 and decoupling zero upper bearing (metal) inner ring 17 are with the together corresponding relatively bearing outer ring rotation of splined shaft.Frictional force between frictional force between decoupling zero bearing bottom end cover 16 and decoupling zero lower bearing outer ring 30 end faces and decoupling zero bearing upper end cover 28 and decoupling zero upper bearing (metal) outer ring 18 end faces guarantees decoupling zero lower bearing outer ring 30 and decoupling zero upper bearing (metal) outer ring 18 relative decoupling zero sleeve 2 transfixions respectively.The actuating force that makes progress of splined shaft side linear electric machine according to the sequence delivery of decoupling zero sleeve 2, decoupling zero bearing bottom end cover 16, decoupling zero lower bearing outer ring 30, decoupling zero bearing spacer 29, decoupling zero upper bearing (metal) outer ring 18, decoupling zero upper bearing (metal) inner ring 17, splined shaft step to splined shaft 15.The downward up-down actuating force of splined shaft side linear electric machine according to the sequence delivery of decoupling zero sleeve 2, decoupling zero bearing upper end cover 28, decoupling zero upper bearing (metal) outer ring 18, decoupling zero bearing spacer 29, decoupling zero lower bearing outer ring 30, decoupling zero lower bearing inner ring 31, decoupling zero end ring 32, decoupling zero bearing fixing nut 33 to splined shaft 15.
When the installation shaft of hub splines 9 and decoupling zero sleeve 2 is honoured (showing in the accompanying drawing) when adopting face-to-face mounted in pairing mode mode, with use bearing (ball) cover apply bearing pre-fastening with eliminate between the bearing enclose the gap with obtain bearing rigidity preferably.
Electric rotating machine 12 also can adopt the mounting means coaxial with hub splines 9.As shown in Figure 4, electric rotating machine 12 is fixed on the coaxial motor pedestal 35, through shaft coupling 34 directly with 9 coaxial connections of hub splines, other parts of the present invention are constant.

Claims (4)

1. the chip fetching device is directly driven in a paraxonic decoupling zero; Comprise splined shaft, drive electric rotating machine, the decoupling mechanism of realizing splined shaft rotation and elevating movement decoupling zero that splined shaft rotates, be positioned at the splined shaft side and drive the linear electric machine that splined shaft goes up and down through decoupling mechanism and be fixed in splined shaft terminal and, it is characterized in that with the splined shaft rotation and the swing arm of going up and down:
Hub splines is installed on the hub splines pedestal through pair of bearings, and the hub splines pedestal is fixed on the pedestal, and the hub splines synchronous pulley is fixed on the hub splines; Electric rotating machine is fixed on the pedestal; The electric rotating machine synchronous pulley is fixed on the electric rotating machine output shaft; Band connects hub splines synchronous pulley and electric rotating machine synchronous pulley synchronously; Electric rotating machine drives the hub splines rotation through above-mentioned two synchronous pulleys and synchronous band, splined shaft in hub splines with can it does elevating movement relatively in its rotation; The decoupling zero sleeve is installed on the splined shaft through pair of bearings, and the linear electric machine connector is fixed on the decoupling zero sleeve; The linear electric machine stator is fixed on the pedestal; The linear electric machine mover is fixed on the linear electric machine connector; The linear electric machine connector is fixed on the pedestal through slide block and guide rail; When the bearing inner race in the decoupling zero sleeve rotated with the together relative bearing outer ring of splined shaft, linear electric machine was done elevating movement through the bearing of linear electric machine connector, decoupling zero sleeve and Qi Nei to driving splined shaft; Swing arm is fixed on the splined shaft end, with splined shaft rotation with go up and down, accomplishes the transmission of chip and picks and places.
2. the chip fetching device is directly driven in paraxonic decoupling zero according to claim 1; It is characterized in that: above-mentioned hub splines and decoupling zero sleeve are installed used bearing to being back-to-back or the angular contact ball bearing of face-to-face mounted in pairing mode, provide respectively to hub splines when electric rotating machine drives rotation down, born radially, axial load and moment of flexure and decoupling zero sleeve be in the axial load that realizes that splined shaft rotates and born during the up-down decoupling zero and the supporting of moment of flexure.
3. the chip fetching device is directly driven in paraxonic decoupling zero according to claim 1; It is characterized in that: above-mentioned hub splines and decoupling zero sleeve are installed used bearing to passing through hold-down nut (during back-to-back installation) or bearing (ball) cover (back to face-to-face installation) pretension, to eliminate the gap between the bearing enclose and to obtain bearing rigidity preferably.
4. the chip fetching device is directly driven in paraxonic decoupling zero according to claim 1, it is characterized in that: above-mentioned electric rotating machine also can pass through shaft coupling and the direct coaxial installation of hub splines.
CN2012101457265A 2012-03-11 2012-05-11 Device for picking and placing paraxial decoupling direct drive chip Pending CN102655106A (en)

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CN2012101457265A CN102655106A (en) 2012-03-11 2012-05-11 Device for picking and placing paraxial decoupling direct drive chip

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CN201210061437.7 2012-03-11
CN201210061437 2012-03-11
CN2012101457265A CN102655106A (en) 2012-03-11 2012-05-11 Device for picking and placing paraxial decoupling direct drive chip

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102832159A (en) * 2012-09-14 2012-12-19 天津必利优科技发展有限公司 High-speed oscillating-bar assembly for picking and placing tiny light objects at high speed
CN102922191A (en) * 2012-11-19 2013-02-13 大连佳峰电子有限公司 Z-direction and corner movement structure of aluminum wire bonding machine
CN109302837A (en) * 2018-11-28 2019-02-01 博众精工科技股份有限公司 Integrated form mounting head
CN111673277A (en) * 2020-07-03 2020-09-18 绍兴吉田自动化设备有限公司 Laser welding machine for automatically rounding coil motor stator
CN113172180A (en) * 2021-04-14 2021-07-27 深圳市泰达智能装备有限公司 Coarse aluminum wire bonding machine
CN113628990A (en) * 2020-05-07 2021-11-09 上海微电子装备(集团)股份有限公司 Rotary lifting movement mechanism

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102832159A (en) * 2012-09-14 2012-12-19 天津必利优科技发展有限公司 High-speed oscillating-bar assembly for picking and placing tiny light objects at high speed
CN102922191A (en) * 2012-11-19 2013-02-13 大连佳峰电子有限公司 Z-direction and corner movement structure of aluminum wire bonding machine
CN109302837A (en) * 2018-11-28 2019-02-01 博众精工科技股份有限公司 Integrated form mounting head
CN109302837B (en) * 2018-11-28 2023-12-29 博众精工科技股份有限公司 Integrated mounting head
CN113628990A (en) * 2020-05-07 2021-11-09 上海微电子装备(集团)股份有限公司 Rotary lifting movement mechanism
CN113628990B (en) * 2020-05-07 2023-06-09 上海微电子装备(集团)股份有限公司 Rotary lifting motion mechanism
CN111673277A (en) * 2020-07-03 2020-09-18 绍兴吉田自动化设备有限公司 Laser welding machine for automatically rounding coil motor stator
CN111673277B (en) * 2020-07-03 2022-05-17 绍兴吉田自动化设备有限公司 Laser welding machine for automatically rounding coil motor stator
CN113172180A (en) * 2021-04-14 2021-07-27 深圳市泰达智能装备有限公司 Coarse aluminum wire bonding machine

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Application publication date: 20120905