CN102654117B - Air exhausting device for vacuum pump - Google Patents
Air exhausting device for vacuum pump Download PDFInfo
- Publication number
- CN102654117B CN102654117B CN201110052774.5A CN201110052774A CN102654117B CN 102654117 B CN102654117 B CN 102654117B CN 201110052774 A CN201110052774 A CN 201110052774A CN 102654117 B CN102654117 B CN 102654117B
- Authority
- CN
- China
- Prior art keywords
- outer cover
- vacuum pump
- inlet flange
- outlet pipe
- outer housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Reciprocating Pumps (AREA)
Abstract
The invention relates to vacuum pump equipment, in particular to an air exhausting device for a vacuum pump. The air exhausting device comprises an outer housing, an exhaust pipe, a conveying pipe and an air inlet flange, wherein the exhaust pipe is arranged in the outer housing, and the top end of the exhaust pipe penetrates out of the outer housing and is connected with a tail gas treatment device; the conveying pipe is arranged in the outer housing; the air inlet flange is arranged on the outer surface of the outer housing, one end of the air inlet flange is connected with the vacuum pump, and the other end of the air inlet flange is communicated with the interior of the outer housing; and a gas entering the outer housing through the air inlet valve passes through the conveying pipe, and is discharged to the tail gas treatment device through the exhaust pipe. By the air exhausting device, an exhaust gas of the vacuum pump circuitously flows in the outer housing, passes through the conveying pipe at first, and then is discharged to the tail gas treatment device through the exhaust pipe 3, so that dust contained in the gas falls to the bottom of the outer housing, the dust content in the exhaust gas is reduced, an exhaust port is prevented from being blocked by dust particles generated in a process procedure, the machine set maintenance time is prolonged, and the noise of a high-pumping-speed dry pump set is reduced.
Description
Technical field
The present invention relates to vaccum pump unit, specifically a kind of exhaust device for vacuum pump.
Background technique
Domestic vacuum pump is through vicennial fast development, and its main performance index (compressing when pressure reduction etc. as pumping speed, ultimate pressure, energy consumption, zero delivery) all reaches or approaches Foreign Advanced Lerel.This large pumping speed dry vacuum pump there is no manufacturer at home, and external product structure is complicated, price is quite expensive again; In contrast be along with the developing rapidly of the industries such as domestic photovoltaic, medicine, petrochemical industry, very urgent to the demand of large pumping speed dry vacuum pump under rugged environment.At present, domestic dry pump assembly pumping speed is single, and the dry pump assembly kind that meets large pumping speed is few, and poor-performing.In addition, existing vacuum pump is when outside exhaust, and noise is large, and dust accumulation is serious, adopts one-way valve or ball structure during to outlet pipe exhaust, owing to containing dust in gas, while directly discharging, can stop up outlet pipe, causes that maintenance period is short, energy consumption is large.Therefore, pumping equipment industry development lags behind, and has affected the development of domestic other industry.
Summary of the invention
In order to solve the problem of above-mentioned existence, the object of the present invention is to provide a kind of exhaust device for vacuum pump.This venting gas appliance utilizes the exhaust bucket roundabout mobile and vast capacity of gas can reduce the dust content of Exhaust Gas, reduces unit noise, shortens the unit maintenance cycle.
Another object of the present invention is to provide the exhaust device for vacuum pump that a kind of energy consumption is low, vacuum degree in vacuum chamber is high.
The object of the invention is to be achieved through the following technical solutions:
The present invention includes outer cover, outlet pipe, transport tube and inlet flange, wherein outlet pipe is arranged in outer cover, and the top of outlet pipe is passed, is connected with exhaust gas processing device by outer cover; Described transport tube is arranged in outer cover, at the outer surface of outer cover, is provided with inlet flange, and one end of this inlet flange is connected with vacuum pump, the internal communication of the other end and outer cover; By inlet flange, enter gas in outer cover through transport tube, be expelled to exhaust gas processing device by outlet pipe.
Wherein: in described outer cover, be respectively equipped with upper backup pad and lower supporting plate, outlet pipe and transport tube are arranged on respectively in upper and lower dunnage, wherein on upper backup pad, have a plurality of air holes; The bottom of described outlet pipe is positioned at the below of lower supporting plate, and the top of described transport tube is positioned at the below that the top of upper backup pad, bottom are positioned at lower supporting plate; The other end of described inlet flange and outer cover internal communication is between upper and lower dunnage; One end of described inlet flange is connected with vacuum pump by vacuum line, is parallel with diaphragm pump on vacuum line; The top of described outlet pipe is provided with the stop valve corresponding with diaphragm pump, and outlet pipe is connected with exhaust gas processing device by described stop valve; The bottom of described outer cover has clean mouthful of dust, and the clean mouth of this dust seals by anaerobic copper band; Described inlet flange is fixed on outer cover by fixing gusset.
Advantage of the present invention and good effect are:
1. the present invention makes vacuum pump Exhaust Gas roundabout flowing in outer cover, first by being expelled to exhaust gas processing device by outlet pipe 3 again after transport tube, make the dust containing in gas fall outer cover bottom, reduced the dust content in Exhaust Gas, avoid producing dust granules in manufacturing process and stop up relief opening, extend the unit maintenance time, reduced the dry pump assembly noise of large pumping speed.
2. on the vacuum line that the present invention is connected between inlet flange and vacuum pump, be parallel with diaphragm pump, correspondingly on the exhaust flange on outer cover top, connected stop valve, because the large dry pump assembly energy consumption of pumping speed is larger, be generally 40KW/h, by increasing a relief opening in parallel, introducing prime diaphragm pump, can when normal working, enter low-power mode, effectively lower energy consumption to 6～8KW, be down to originally 20%, and improve vacuum degree in vacuum chamber, there is huge economic value and social value.
3. the present invention has welded upper and lower dunnage in outer cover, and outer cover has been divided into San Ge space, upper, middle and lower, has offered air hole on upper backup pad, has increased gas flow distance, makes the dust in gas fall outer cover bottom.
4. inlet flange of the present invention is fixed by fixing gusset, welds together with outer cover, installs firmly.
5. outer cover of the present invention bottom has clean mouthful of dust, is convenient to the dust in clean outer cover.
Accompanying drawing explanation
Fig. 1 is the structural representation of vacuum pump unit of the present invention;
Fig. 2 is structural representation of the present invention;
Fig. 3 is the left view of Fig. 2;
Fig. 4 is the A-A sectional view in Fig. 2;
Wherein: 1 is exhaust flange, 2 is upper backup pad, and 3 is outlet pipe, 4 is transport tube, and 5 is outer cover, and 6 is lower supporting plate, 7 is fixing gusset, and 8 be inlet flange, and 9 is that dust cleans mouth, 10 is stop valve, 11 is vacuum line, and 12 is diaphragm pump, and A is venting gas appliance, B is suction booster, and C is the dry pump of large pumping speed.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Fig. 2～4, the present invention includes outer cover 5, outlet pipe 3, transport tube 4, upper backup pad 2, lower supporting plate 6 and inlet flange 8, outer cover 5 inner hollow wherein, inner radial cross section be circle; In outer cover 5, be provided with successively upper backup pad 2 and lower supporting plate 6 from top to bottom, upper and lower dunnage 2,6 is discoid, wherein on upper backup pad 2, have a plurality of air holes, the external peripheral surface of upper and lower dunnage 2,6 is welded on respectively on the inwall of outer cover 5, and upper and lower dunnage 2,6 is divided into upper, middle, and lower part by the inside of outer cover 5.Outlet pipe 3 is positioned at outer cover 5, is welded in upper and lower dunnage 2,6, the bottom of outlet pipe 3 is positioned at the bottom of outer cover 5, the below of lower supporting plate 6, the top of outlet pipe 3 passes and is provided with exhaust flange 1 by outer cover 5, and the top of outlet pipe 3 is connected with exhaust gas processing device by exhaust flange 1.Transport tube 4 is positioned at outer cover 5, is welded in upper and lower dunnage 2,6, and the top of transport tube 4 is positioned at the top of outer cover 5, the top of upper backup pad 2, and bottom is positioned at the bottom of outer cover 5, the below of lower supporting plate 6.At the outer surface of outer cover 5, between upper and lower dunnage 2,6, be provided with inlet flange 8, this inlet flange 8 is welded on outer cover 5 by fixing gusset 7.One end of inlet flange 8 is connected with vacuum pump by vacuum line 11, and the other end is communicated with the middle part in outer cover 5; By inlet flange 8, enter gas in outer cover 5 through transport tube 4, be expelled to exhaust gas processing device by outlet pipe 3.The bottom of outer cover 5 has clean mouthful 9, dust, and this dust seals by anaerobic copper band for clean mouthful 9, and this anaerobic copper band is heat-resisting to be reached more than 150 ℃.
On the vacuum line 11 being connected with vacuum pump at inlet flange 8, be parallel with diaphragm pump 12, correspondingly, the exhaust flange 1 on outlet pipe 3 tops is connected with stop valve 10, and outlet pipe 3 is connected with exhaust gas processing device by described stop valve 10.
Working principle of the present invention is:
As shown in Figure 1, the vacuum pump of the present embodiment is comprised of the suction booster B and the large dry pump C of pumping speed that increase pumping speed, and the inlet flange 8 on venting gas appliance A is connected with the dry pump C of large pumping speed by vacuum line 11, diaphragm pump 12 in parallel on vacuum line 11; The exhaust flange 1 on outer cover 5 tops in venting gas appliance A first connects stop valve 10 and then the Flash Gas Compression Skid System that truncates is connected.First the outer surface of outlet pipe 3 and transport tube 4 and upper and lower dunnage 2,6 are welded together, then the external peripheral surface of upper and lower dunnage 2,6 is welded on respectively on the inwall of outer cover 5, finally outer cover 5 is welded into the cavity of sealing.
The gas that vacuum pump is discharged is introduced in outer cover 5, between two dunnages by vacuum line 11 by inlet flange 8; Then, by the air hole on upper backup pad 2, enter the top of transport tube 4, then by transport tube 4, enter the lower space of lower supporting plate 6; Finally, by outlet pipe 3, exhaust flange 1, stop valve 10, be expelled to exhaust gas processing device.
When the pressure of relief opening is during lower than barometric pressure, technique is carried out middle while discharging without a large amount of gas, enter low-power mode, now stop valve 10 is closed, gas in vacuum pump is discharged by diaphragm pump 12, the power of the assembling unit will be reduced to 20% of rated power, and when energy efficient, process chamber degree of vacuum can also be improved accordingly greatly.
Venting gas appliance of the present invention makes the roundabout exhaust gas processing device that is expelled to of vacuum pump Exhaust Gas, and the dust in gas drops on the lower space of outer cover 5, and these dust can be cleared up by clean mouth 9 by the dust of outer cover bottom.
The present invention is applicable to the industries such as semiconductor, solar energy, petrochemical industry, metallurgy, food, medicine, electronics, packing, printing.
Claims (6)
1. an exhaust device for vacuum pump, it is characterized in that: comprise outer cover (5), outlet pipe (3), transport tube (4) and inlet flange (8), wherein outlet pipe (3) is arranged in outer cover (5), and the top of outlet pipe (3) is passed, is connected with exhaust gas processing device by outer cover (5); Described transport tube (4) is arranged in outer cover (5), at the outer surface of outer cover (5), is provided with inlet flange (8), and one end of this inlet flange (8) is connected with vacuum pump, the internal communication of the other end and outer cover (5); By inlet flange (8), enter gas in outer cover (5) through transport tube (4), be expelled to exhaust gas processing device by outlet pipe (3);
One end of described inlet flange (8) is connected with vacuum pump by vacuum line (11), is parallel with diaphragm pump (12) on vacuum line (11); The top of described outlet pipe (3) is provided with the stop valve (10) corresponding with diaphragm pump (12), and outlet pipe (3) is connected with exhaust gas processing device by described stop valve (10).
2. by exhaust device for vacuum pump claimed in claim 1, it is characterized in that: in described outer cover (5), be respectively equipped with upper backup pad (2) and lower supporting plate (6), it is upper that outlet pipe (3) and transport tube (4) are arranged on respectively upper and lower dunnage (2,6), wherein on upper backup pad (2), has a plurality of air holes.
3. by exhaust device for vacuum pump claimed in claim 2, it is characterized in that: the bottom of described outlet pipe (3) is positioned at the below of lower supporting plate (6), top, the bottom that the top of described transport tube (4) is positioned at upper backup pad (2) is positioned at the below of lower supporting plate (6).
4. by exhaust device for vacuum pump claimed in claim 2, it is characterized in that: the other end of described inlet flange (8) and outer cover (5) internal communication is positioned between upper and lower dunnage (2,6).
5. by exhaust device for vacuum pump claimed in claim 1, it is characterized in that: the bottom of described outer cover (5) has dust clean mouthful (9), this dust clean mouthful (9) seals by anaerobic copper band.
6. by exhaust device for vacuum pump claimed in claim 1, it is characterized in that: described inlet flange (8) is fixed on outer cover (5) by fixing gusset (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110052774.5A CN102654117B (en) | 2011-03-04 | 2011-03-04 | Air exhausting device for vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110052774.5A CN102654117B (en) | 2011-03-04 | 2011-03-04 | Air exhausting device for vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102654117A CN102654117A (en) | 2012-09-05 |
| CN102654117B true CN102654117B (en) | 2014-10-22 |
Family
ID=46729812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110052774.5A Active CN102654117B (en) | 2011-03-04 | 2011-03-04 | Air exhausting device for vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102654117B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2076204U (en) * | 1990-02-10 | 1991-05-01 | 单国良 | Enclosed dual-cyclone high-efficiency dust-collector |
| JPH11307456A (en) * | 1998-04-20 | 1999-11-05 | Rohm Co Ltd | Exhauster in semiconductor substrate surface treatment equipment |
| CN201934278U (en) * | 2011-03-04 | 2011-08-17 | 中国科学院沈阳科学仪器研制中心有限公司 | Exhaust device for vacuum pump |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3816034A (en) * | 1971-03-12 | 1974-06-11 | Dorr Oliver Inc | Diaphragm pumps and actuating system therefor |
| JPH09243145A (en) * | 1996-03-01 | 1997-09-16 | Tomoko Uchiyama | Drain discharge pump for air conditioner |
| FR2822200B1 (en) * | 2001-03-19 | 2003-09-26 | Cit Alcatel | PUMPING SYSTEM FOR LOW THERMAL CONDUCTIVITY GASES |
| US7189066B2 (en) * | 2004-05-14 | 2007-03-13 | Varian, Inc. | Light gas vacuum pumping system |
-
2011
- 2011-03-04 CN CN201110052774.5A patent/CN102654117B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2076204U (en) * | 1990-02-10 | 1991-05-01 | 单国良 | Enclosed dual-cyclone high-efficiency dust-collector |
| JPH11307456A (en) * | 1998-04-20 | 1999-11-05 | Rohm Co Ltd | Exhauster in semiconductor substrate surface treatment equipment |
| CN201934278U (en) * | 2011-03-04 | 2011-08-17 | 中国科学院沈阳科学仪器研制中心有限公司 | Exhaust device for vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102654117A (en) | 2012-09-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201871310U (en) | Washing type dust collector | |
| CN102654117B (en) | Air exhausting device for vacuum pump | |
| CN201934278U (en) | Exhaust device for vacuum pump | |
| CN201588782U (en) | Small-sized single-stage rotary vane type vacuum pump | |
| CN210565090U (en) | Vacuum pumping device | |
| CN203867830U (en) | Novel closed cycle vacuum unit | |
| CN104005954A (en) | Vertical type Roots dry vacuum pump | |
| CN104612968A (en) | A two-stage vortex dry vacuum pump | |
| CN203430810U (en) | Two-stage water-ring vacuum pump | |
| CN203892187U (en) | Vertical Roots dry vacuum pump | |
| CN105626480B (en) | The vacuum system of grease device | |
| CN201763565U (en) | Vacuum pump system | |
| CN208546317U (en) | A kind of labyrinth seal centrifugal pump | |
| CN105736384A (en) | Transporting and shifting pump for ultraclean gas | |
| CN102606487A (en) | Full-automatic ground sewage lift pump unit | |
| CN207728511U (en) | A kind of 20 four station type vacuum degassing machines | |
| CN216198975U (en) | Pump cover of ultra-large air extraction rate high-efficiency water ring vacuum pump | |
| CN202301019U (en) | Vortex compressor with muffling hole | |
| CN105782118B (en) | Two-way variable cross-section exhaust volute chamber structure built in centrifugal compressor | |
| CN201474974U (en) | Water-ring vacuum pump | |
| CN203308785U (en) | Steel middle case for multi-stage blower | |
| CN214324511U (en) | Vacuum-pumping system of solar battery component laminating machine | |
| CN205013398U (en) | Electronic intake system of dentistry | |
| CN203867829U (en) | Novel closed cycle vacuum set | |
| CN209917841U (en) | Environment-friendly catalyst unloading device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
|
| CP01 | Change in the name or title of a patent holder |