CN102650551B - Optical readout method of point grid beamsplitter of FPA (focal plane array)-based uncooled thermal imaging optical system - Google Patents
Optical readout method of point grid beamsplitter of FPA (focal plane array)-based uncooled thermal imaging optical system Download PDFInfo
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- CN102650551B CN102650551B CN201110180165.8A CN201110180165A CN102650551B CN 102650551 B CN102650551 B CN 102650551B CN 201110180165 A CN201110180165 A CN 201110180165A CN 102650551 B CN102650551 B CN 102650551B
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Abstract
The invention relates to an optical readout method modulated by a point grid beamsplitter of an FPA (focal plane array)-based uncooled thermal imaging optical system. According to the method, the point grid beamsplitter is used for conducting amplitude modulation on light rays reflected by the FPA so as to improve the imaging performance of the system. The point grid beamsplitter conducts energy partitioning on reflected light waves of the FPA, and the effect that imaging light rays enter a photoelectric detector in the dielectric film beam split mode is ensured. The interval size of point grid beamsplitter coating and non-coating areas is identical to the unit size of the FPA, the the point grid beamsplitter is used for conducting amplitude modulation on light rays reflected by the FPA, and the effect that image effective light amplitude is enhanced is achieved. The point grid beamsplitter is arranged at the rear end of the FPA and is as close to the FPA as possible, and the best imaging effect can be achieved. Compared with a knife edge and aperture filtering, through the method, transmission light amplitude can be enhanced, stray light amplitude is weakened, and the detection sensitivity of the system is improved.
Description
Technical field
The present invention is one of the uncooled ir thermal imaging system technology based on FPA focal plane arrays (FPA) optical read-out side
Method, this reading method can replace the edge of a knife or aperture to be filtered being imaged, and the structure for this kind of imaging system at present is excessively huge
Big and complicated problem, a kind of imaging method inventing.This kind of method effectively can be pressed down to the veiling glare in environment
System, and the light of focal plane array unit reflection is modulated, enables luminous energy that photodetector detects with being subject to
The changes in deflection of hot cantilever beam and change, improve system image quality.
Background technology
In recent years, with the continuous development of FPA technology, uncooled infrared imaging system obtained breakthrough raising and
Of great interest.New uncooled infrared imaging system is compared with traditional non-refrigeration type infrared imaging system, radiation
Detector adopts optical reading method, rather than electricity reading method is it is not necessary to refrigeration, low cost, and can be civilian.Traditional
Electricity reading method can be operated at room temperature, and focal plane arrays (FPA) is compatible with silicon technology, and does not need mechanical scanning to fill
Put, production of integrated circuits technology is more ripe, but there are still following problem：
1) electric current passing through can produce additional heat so that being difficult to accurately detect the infra-red radiation of incidence.
2) in order that detector can produce effective local heating, must realize good between probe unit and substrate
It is thermally isolated, but in order to read the change of pyroelectric effect it is necessary to will be attached by wire between detector cells and substrate,
And wire be heat good conductor, this result in traditional heat type infrared radiation detector be difficult to realize preferably be thermally isolated so as to
Detectivity reduces, and the number of pixel is difficult to increase.
3) for pixelated array, high-gain to be made to each unit on infrared focal plane array high-precision
Reading circuit, manufacture difficulty and cost are all very high.
4) need the long time because the thermal constant detecting material can make probe unit produce certain local heating,
Therefore its frame rate compare with respect to quantum type Infrared Detectorss relatively low.
Optical reading method is that infra-red radiation is converted into heat energy, and the change of temperature makes the corner of focal plane detection unit
Thermal imagery or the Temperature Distribution of tested radiating object or acoplanarity displacement changes, is obtained by optical pickup system.With electricity
Playback mode is compared, and optical reading method does not need to construct the amplification circuit of electrical signal of complexity on focal plane arrays (FPA), therefore ties
Structure simplifies a lot, and processing step also greatly simplify.Due to not needing to construct amplifying circuit, then system does not have naturally
The impact that the heat that circuit produces causes, so optical reading method has the sensitivity of lower background noise and Geng Gao.
Research to optical read-out mode has gone through more than ten years, 1997, and Stanford university S.R.Manalis exists
Applied Physics Letters delivers Two-dimensional microme-chanical bimorph arrays
For detection of thermal radiation, the same year Nikon company and 1999 U.S. Berkeley and in
University of Science and Technology of state and Beijing Institute of Technology have all one after the other carried out research so that this technology is increasingly subject to optical read-out mode
To attention.From the point of view of the experimental result of announcement, light read Infrared Focal plane Array Technologies leveled off to full-fledged, but still
Key technology problems are so had to need to be captured.
At present, adopting knife edge filtering and pin-hole filter-ing optical reading method more, but both modes are difficult in environment
Veiling glare filter out, and the requirement to working environment is higher, can't realize more preferably noise equivalent temperature difference, because
This, seeking new optical reading method, to carry out sophisticated systems imperative.The present invention uses a kind of new spectroscope, i.e. point
Lattice spectroscope.Reflection projection ratio in wide area wave spectrum for the point lattice spectroscope is constant, and its spectroscopic behaviour is compared with reference fluid spectroscope
Performance is won many.UV level vitreous silica utilizes vacuum moulding machine will to strengthen plated film in fixing clear aperture, and plated film plates with not
Film picture on surface becomes spot distribution, and incidence runs into coating film area and can reflect, and run into glass material then can transmission, this light splitting piece
Insensitive to incident angle, light can be incident in the range of 0 ° to 45 °.
Content of the invention：
The purpose of the present invention is using a spectroscopical spectroscopic behaviour of lattice, to the light reflecting through focal plane array column unit
It is modulated, then is imaged on photodetector through imaging len, obtain the information after focal plane arrays (FPA) is subject to thermal deflection.Pass through
Point lattice spectroscope printing opacity and the modulation of lightproof part, can effectively suppress background noise, so that imaging effect is improved.
The purpose of the present invention is to be realized by technical scheme below：1. build the modulation of a kind of lattice spectroscope based on FPA
Uncooled ir thermal imaging optical system, including collimated light source, Infrared Lens, focal plane arrays (FPA), point lattice spectroscope, imaging thoroughly
Mirror, photodetector and display.2. when being added without infrared radiating object in environment, each micro-cantilever list of focal plane arrays (FPA)
Unit's deflection identical angle.Collimated beam projects on focal plane arrays (FPA) at an angle, and reflexes at an angle
Emitting light path, addition point lattice spectroscope in emitting light path, light beam is irradiated on optical detector after point lattice spectroscope, and with
This is as Imaging standard.3., when there being infrared radiating object in environment, the focal plane arrays (FPA) micro-cantilever unit that is heated deflects,
Therefore can be anti-at different angles according to the deflection angle difference of micro-cantilever unit with the incident light beam of identical incident angle
Penetrate.Reflection light can pass through point lattice spectroscope at different angles, then can occur accordingly through the point spectroscopical beam distribution of lattice
Change, the luminous energy that photodetector receives can increase or reduce, and obtains radiating object afterwards with benchmark " subtracting each other " before
Thermal-induced imagery.
Beneficial effect
The existing edge of a knife can be substituted using the present invention or pin-hole filter-ing element is filtered modulating, the knot of simplified system
Structure, and the impact to system performance for the veiling glare in environment can be reduced, improve the quality of output image.
Brief description
Fig. 1 is the thermal imaging system principle schematic being arranged with focal plane array based on the present invention as core
Fig. 2 is point lattice spectroscopical dot pattern scattergram
Wherein：1- collimated light source, the infrared ray of 2- infrared target radiation, 3- Infrared Lens, 4- focal plane arrays (FPA), 5- point lattice
Spectroscope, 6- imaging len, 7- photodetector, 8- display
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described further：
Fig. 1 is optical system schematic diagram.This system includes collimated light source 1, Infrared Lens 3, focal plane arrays (FPA) 4, point lattice minute
Light microscopic 5, imaging len 6, photodetector 7 and display 8.Collimated light source 1 is launched directional light and is irradiated to focal plane arrays (FPA) 4
On, reflex in reading light path through focal plane arrays (FPA) 4.Reflection light first passes through a lattice spectroscope 5 in reading light path and carries out
Modulation, makes the light part reflection of reflection, a part of transmission.The part of transmission again through imaging len 6 by photodetector 7
Received.When not having infrared radiating object in environment, the two field picture that photodetector 7 is gathered can preserve conduct
Background.When infrared radiating object enters in detection window, incident infrared ray 2 can focus on focal plane through Infrared Lens 3
On array 4, because focal plane arrays (FPA) 3 is that bi-material microcantilevel unit is constituted, cantilever beam is heated and deflects, and reflection light is again
Through lattice spectroscope 5 light splitting.Because the light beam through a lattice spectroscope 4 there occurs change, then incide the light beam of imaging len 6
Distribution also changes therewith, eventually passes imaging len 6 and is irradiated on photodetector 7.At this moment, photodetector 6 gathers and protects
Deposit is the piece image comprising radiating object information, by diagram picture and the background image subtraction preserving before, then in display
Exported on device 8 is exactly macroscopic thermal-induced imagery.
Point lattice spectroscope 5 is to carry out plated film in dot pattern, to incident light portion reflecting part transmission and incident
Light can work between 0 ° to 45 °.After putting into infrared radiating object, the deflection angle due to micro-cantilever changes, instead
The radiation direction penetrated also changes therewith, then incide an angle of lattice spectroscope 5 and position also correspondingly there occurs change
Change, the light beam that is, each junior unit of focal plane arrays (FPA) 4 reflects passes through and is not through a ratio for lattice spectroscope 5 and changes,
So that the image receiving on photodetector after imaging len 6 changes.
Obtain infrared radiating object thermal image when, the distance of point lattice spectroscope 5 and focal plane arrays (FPA) 4 and placement angle
It is critical that.The distance placed is nearer, and the angle tilting makes focal plane arrays (FPA) 4 unit and point lattice spectroscope 5
Four junior units (i.e. anti-three is saturating) corresponding, imaging effect can be better.And adjust lattice spectroscope 5 and a focal plane array
The angle of row 4 normal, makes imaging effect more preferable.Additionally, should be by the point lattice side of a lattice spectroscope 5 parallel or perpendicular to pedestal.Full
Enough to the upper infrared imaging system of some, its imaging effect can be improved.
Claims (3)
1. a kind of point lattice beam splitter optical reading method based on FPA uncooled thermal imaging systems it is characterised in that：This system bag
Include collimated light source (1), focal plane arrays (FPA) (4), Infrared Lens (3), point lattice spectroscope (5), imaging len (6), photodetector
And display (8) (7)；Collimated light source (1) launches directional light oblique illumination to focal plane arrays (FPA) (4), through focal plane arrays (FPA)
(4) reflex in reading light path；Reflection light first passes through a lattice spectroscope (5) in reading light path and is modulated, and makes reflection
Light a part reflection, a part of transmission；The part of transmission is connect by photodetector (7) through imaging len (6) again
Receive；When not having infrared radiating object in environment, the two field picture that photodetector (7) is gathered can preserve as the back of the body
Scape；When infrared radiating object enters in detection window, incident infrared ray (2) can focus on burnt flat through Infrared Lens (3)
On face array (4), because focal plane arrays (FPA) (4) is that bi-material microcantilevel unit is constituted, cantilever beam is heated and deflects, reflection
Light is again through lattice spectroscope (5) light splitting；Because there occurs change through a light beam for lattice spectroscope (5), then incide imaging
The beam distribution of lens (6) also changes therewith, eventually passes imaging len (6) and is irradiated on photodetector (7)；At this moment, light
What electric explorer (7) gathered and preserved is the piece image comprising radiating object information, by diagram picture and the back of the body preserving before
Scape image subtraction, then exported on display (8) is exactly macroscopic thermal-induced imagery.
2. the point lattice beam splitter optical reading method based on FPA uncooled thermal imaging systems as claimed in claim 1, its feature
It is：Point lattice spectroscope (5) is to carry out plated film in matrix grid dot pattern, saturating to incident light portion reflecting part
Penetrate, and incident ray inclination angle can work between 0 ° to 45 °；After putting into infrared radiating object, due to micro-cantilever
Deflection angle changes, and the radiation direction of reflection also changes therewith, then incide the angle of lattice spectroscope (5) and a position
Correspondingly there occurs change, the light beam that is, focal plane arrays (FPA) (4) each junior unit reflects passes through and is not through a lattice spectroscope
(5) ratio changes, so that the image receiving on photodetector (7) after imaging len (6) occurs
Change.
3. the point lattice beam splitter optical reading method based on FPA uncooled thermal imaging systems as claimed in claim 1, its feature
It is：During the thermal image of acquisition infrared radiating object, point lattice spectroscope (5) is inclined with the distance of focal plane arrays (FPA) (4) and placement
Angle it is critical that；The distance placed is nearer, and the angle tilting makes focal plane arrays (FPA) (4) unit and point lattice light splitting
Four junior units that one reflector element of mirror (5) adds three transmission units compositions are corresponding, and imaging effect can be better；And will
Adjustment point lattice spectroscope (5) and the angle of focal plane arrays (FPA) (4) normal, make imaging effect more preferable；Additionally, should be by a lattice spectroscope
(5) point lattice side is parallel or perpendicular to pedestal；Meet the above infrared imaging system of some, its imaging effect can be improved.
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| CN201110180165.8A CN102650551B (en) | 2011-06-29 | 2011-06-29 | Optical readout method of point grid beamsplitter of FPA (focal plane array)-based uncooled thermal imaging optical system |
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| CN201110180165.8A CN102650551B (en) | 2011-06-29 | 2011-06-29 | Optical readout method of point grid beamsplitter of FPA (focal plane array)-based uncooled thermal imaging optical system |
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| CN108801468B (en) * | 2018-07-05 | 2020-11-24 | 南开大学 | Micro-cantilever array optical readout imaging system and method |
| CN111380829A (en) * | 2020-03-02 | 2020-07-07 | 南方科技大学 | Uncooled optical reading type infrared thermal imaging system |
Citations (4)
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|---|---|---|---|---|
| US5450240A (en) * | 1993-07-22 | 1995-09-12 | Elsag International N.V. | Device and method for light beam splitting for dual sensor flame detector |
| US7402803B1 (en) * | 2005-06-07 | 2008-07-22 | Redshift Systems Corporation | Pixel architecture for thermal imaging system |
| CN101718589A (en) * | 2009-11-14 | 2010-06-02 | 张青川 | Optical readout method for infrared thermal imagery imager |
| CN102103017A (en) * | 2010-11-05 | 2011-06-22 | 北京理工大学 | Novel un-cooled infrared focal plane imaging system |
-
2011
- 2011-06-29 CN CN201110180165.8A patent/CN102650551B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5450240A (en) * | 1993-07-22 | 1995-09-12 | Elsag International N.V. | Device and method for light beam splitting for dual sensor flame detector |
| US7402803B1 (en) * | 2005-06-07 | 2008-07-22 | Redshift Systems Corporation | Pixel architecture for thermal imaging system |
| CN101718589A (en) * | 2009-11-14 | 2010-06-02 | 张青川 | Optical readout method for infrared thermal imagery imager |
| CN102103017A (en) * | 2010-11-05 | 2011-06-22 | 北京理工大学 | Novel un-cooled infrared focal plane imaging system |
Non-Patent Citations (2)
| Title |
|---|
| Two-dimensional micromechanical bimorph arrays for detection of thermal radiation;S.R.Manalis et.al;《Appl.Phys.Lett.》;19970616;第70卷(第24期);第3311-3313页 * |
| 微悬臂梁FPA红外成像系统实时图像去噪算法研究;龚诚等;《光学技术》;20091130;第35卷(第6期);第876-878页 * |
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