CN102632435B - Double-flexible-grinding-head magnetorheological polishing device - Google Patents
Double-flexible-grinding-head magnetorheological polishing device Download PDFInfo
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Abstract
The invention discloses a double-flexible-grinding-head magnetorheological polishing device. In the device, a vertical gantry of a bed body and an X-axis are both fixed on a horizontal base; a worktable is fixed on a sliding block of the X-axis; a Y-axis is fixed on a horizontal beam of the vertical gantry; and a first Z-axis and a second Z-axis are arrangedon the Y-axis in parallel. A large flexible grinding head is installed on the first Z-axis; and a small flexible grinding head is arranged on the second Z-axis. A high-flow circulation system connected with the large flexible grinding head and a low-flow circulation system connected with the small flexible grinding head are arranged on a trolley. A control cabinet is arranged at the rear part of the vertical gantry; and a circulation system cabinet and a cleaning system are arranged at the side surface of the vertical gantry. The double-flexible-grinding-head magnetorheological polishing device provided by the invention has the advantages of high accuracy, high rigidness, high stability and high dynamic property. The double-flexible-grinding-head magnetorheological polishing device not only can be used for processing of large-caliber phase elements, but also can be used for high-accuracy processing of large-caliber planar optical elements within the range of full caliber. The optimal matching of the processing efficiency and the processing accuracy can be realized.
Description
Technical field
The invention belongs to optics and manufacture field, be specifically related to a kind of double-flexibility wheel head magnetic rheology buffing device, refer in particular to a kind of for heavy caliber, high precision position phase class optical element being carried out to the double-flexibility wheel head magnetic rheology buffing device of MRF.
Background technology
The continuous phase board of heavy caliber (Continuous Phase Plate, CPP) is a kind of novel position phase class optical element with continuous corrugated high relief topological structure, is mainly used in target surface focal spot shaping and the intensity control of large scale laser instrument.With traditional random order phase-plate (Random Phase Plate, RPP), cease mutually phase board (Kinoform Phase Plate, KPP) and distribution phase plate (Distribution Phase Plate, DPP) equipotential phase class component is compared, CPP has higher capacity usage ratio, more accurate focused spot control characteristic, is considered to realize the most effective solution of large scale laser instrument beam smoothing.It is 430mm * 430mm, strict continuous and face shape error RMS≤30nm, amplitude PV≤10 μ m, the period L≤5mm in corrugated that CPP adopts quartz material, size usually.This " bottom surface shape error, large profile depth and little space periodic " embossment corrugated structure of CPP makes its accurate manufacture extremely difficult, traditional phase part manufacturing technology, the manufacture demand that for example many masks alignment, maskless are directly write, gray-tone mask and etching forming technique all can't meet heavy caliber CPP.
MRF is closely to be able to during the last ten years footpath, a kind of certainty rim of the mouth polishing technology of fast development, it mainly utilizes the controllable rheology characteristic of Magnetorheologicai polishing liquid to be processed, the intensity by controlling magnetic field with distribute control " flexible bistrique " shape with hardness, by the movement locus of control " flexible bistrique " and the material removal that the residence time parameter is controlled ad-hoc location.With traditional polishing technology, compare, Technique of Magnetorheological Finishing has the distinguishing features such as high machining accuracy, high convergence efficiency and nearly free of surface defects, can high efficiency, solve plane, sphere, particularly an aspheric Ultraprecision Machining difficult problem at low cost, being described as is " revolutionary character " technology that optics is manufactured boundary.
Adopt the critical technological point of Technique of Magnetorheological Finishing processing heavy caliber CPP to be mainly manifested in following two aspects: the one, how to remove efficiently the thick optical mirror plane quality that reaches the metamorphic layer of several microns and obtain fast degree of precision that the prefix operation produces on the CPP element; The 2nd, the embossment corrugated how with high fidelity mint-mark goes out to have " bottom surface shape error, large profile depth and little space periodic " feature again on the optical mirror plane obtained.As can be seen here, the magnetorheological processing of heavy caliber CPP has proposed very stern challenge to traditional " single flexible bistrique " MRF equipment, that the removal function form that on the one hand high efficiency processing request equipment generates is wanted is large, efficiency wants high, and the high-fidelity mint-mark but requires to remove that the form of function is little, efficiency is low on the other hand.And traditional " large flexible bistrique " can't obtain and realize the necessary small removal function of CPP high-fidelity mint-mark although the MRF technological equipment can be removed metamorphic layer and most of processing capacity efficiently; And traditional " little flexible bistrique " can't remove metamorphic layer and most of processing capacity rapidly although the MRF technological equipment can obtain small removal function.Therefore, the magnetorheological processing of heavy caliber CPP must be combined the technological ability of " large and small flexible bistrique ".In addition, CPP processing also requires the main movement shaft of MRF technological equipment should have larger speed and acceleration responsive and regulating power.
Known according to pertinent literature and patent, existing magnetorheological finishing device is mainly in order to solve the high accuracy processing problems of plane class or lens class optical element, and single flexible bistrique configuration is the common trait of these devices.The Chinese patent that denomination of invention is " for the magnetorheological finishing device of aperture aspherical optical element " (application number: 200810030898.1) document, the vertical planer-type magnetorheological polishing machine of a kind of six axle of University of Science and Technology for National Defence's exploitation is disclosed, this device has only configured a flexible bistrique of larger specification, the removal function form generated is larger, can't meet the processing request of CPP; The Chinese patent that denomination of invention is " for the magnetorheological finishing device of high-steepness optical part " (application number: 200810031898.3) document, a kind of six shaft vertical structured magneto-rheological polishing machines of University of Science and Technology for National Defence's exploitation are disclosed, this device has only configured the flexible bistrique of a small dimension, does not possess the working ability of optical elements of large caliber.Current domestic two bistrique magnetic rheological polishing methods and the device that can be used for machining position phase class component (for example heavy caliber CPP) that there is no.
Summary of the invention
The invention provides a kind of double-flexibility wheel head magnetic rheology buffing device, the present invention not only can be used for heavy caliber position phase class component, the for example high-fidelity of heavy caliber CPP, high efficiency and the processing of high resisting laser damage, and can be used for the high accuracy processing of heavy-calibre planar class optical element in unified scope.
In order to solve the problems of the technologies described above, the technical scheme that the present invention proposes is as follows:
Double-flexibility wheel head magnetic rheology buffing device of the present invention, be characterized in, described burnishing device comprises lathe bed, large flexible bistrique, little flexible bistrique, the large flow circulatory system, the low discharge circulatory system, purging system, protective cover and the TT&C system be connected with each part mentioned above; Lathe bed comprises horizontal base, vertical gantry, X-axis, Y-axis, the first Z axis and the second Z axis; Vertically gantry and X-axis are separately fixed on horizontal base, and vertically crossbeam and the column at gantry are an integral body; Frock for clamping workpiece is installed on workbench, and workbench is fixed on the slide block of X-axis; Y-axis is fixed on the crossbeam at vertical gantry; The first Z axis and the second Z axis are arranged on the planker of Y-axis side by side; Large flexible bistrique is arranged on the first ram of the first Z axis, little flexible bistrique is arranged on the second ram of the second Z axis; The large flow circulatory system and the low discharge circulatory system are arranged side by side on dolly, and the large flow circulatory system is connected with large flexible bistrique, and the low discharge circulatory system is connected with little flexible bistrique; Purging system is placed in the side at vertical gantry; Described burnishing device also is provided with protective cover, protective cover comprises lathe bed case, switch board and circulatory system cabinet, the switch board that TT&C system is housed is arranged at the back at vertical gantry, and the circulatory system cabinet of dolly and the same side that purging system is arranged at vertical gantry are housed.
Described large flexible bistrique comprises double support hitch, large polishing wheel component, bull wheel driven unit, the first electromagnetic field assembly, the first nozzle assembly, the first collector assembly and gauge head assembly; Described double support hitch is arranged on the first ram of the first Z axis; Large polishing wheel component is arranged under the wheeling support of double support hitch; The bull wheel driven unit is arranged on the side of wheeling support, and is connected with large polishing wheel component; The first electromagnetic field assembly is arranged under the magnetic bearing of double support hitch and is placed in the large polishing wheel inside of large polishing wheel component; The first nozzle assembly and the first collector assembly are set up between the wheeling support and magnetic bearing of double support hitch, and are positioned at the top of large polishing wheel; The gauge head assembly is arranged on the side of double support hitch.
Large polishing wheel component in described large flexible bistrique comprises large bearing block, large polishing wheel, angular contact ball bearing, fore bearing end cap, rear bearing end cap, inner sleeve, outer sleeve, locking nut and belt wheel; Large bearing block is arranged under the wheeling support of double support hitch; Large polishing wheel is arranged in large bearing block by two angular contact ball bearings, and its outer surface diameter is φ 250mm ~ φ 400mm; Two angular contact ball bearings back-to-back are arranged in the rotating shaft of large polishing wheel; Inner sleeve and outer sleeve are between two angular contact ball bearings; Fore bearing end cap and rear bearing end cap are contained in respectively the outer end of two angular contact ball bearings and use screw fastening on large bearing block, and locking nut and belt wheel are contained in the rotating shaft end of large polishing wheel successively.
The first electromagnetic field assembly in described large flexible bistrique comprises magnetic field support, a Π shape yoke, the first coil, the first magnetic pole, the first electricity separation piece, the first constant-current source and the first temperature sensor; The magnetic field support that non-magnetic stainless steel is made is arranged on below the magnetic bearing of described double support hitch; The first coil of hollow copper tubing coiling is arranged on the top of a Π shape yoke, and with the first constant-current source, with the radiator valve in being arranged at the large flow circulatory system, is connected respectively by the first electricity separation piece be arranged on the support of magnetic field; The first magnetic pole is arranged on the bottom of a Π shape yoke; The first temperature sensor is close to the outer surface of the first coil, and is connected with TT&C system by cable.
The first nozzle assembly in described large flexible bistrique comprises the first support bar, with the angular displacement platform of V-shaped groove and the first grip block with the open circles cylinder; The first support bar passes the open circles cylinder of the first grip block, and is set up between the wheeling support and magnetic bearing of large polishing wheel top double support hitch; Angular displacement platform with V-shaped groove is arranged on the first grip block; V-shaped groove inner clip with the angular displacement platform of V-shaped groove is held nozzle.
The first collector assembly in described large flexible bistrique comprises the second support bar, with the second grip block of V-shaped groove and open circles cylinder; The second support bar passes the open circles cylinder of the second grip block, and is set up between the wheeling support and magnetic bearing of large polishing wheel top double support hitch; The V-shaped groove inner clip of the second grip block is held collector.
Gauge head assembly in described large flexible bistrique comprises the first cylinder, gauge head support, gauge head and pedestal; The first cylinder is arranged on pedestal; The gauge head support is connected on the slide block of the first cylinder; Gauge head is arranged on the lower end of gauge head support; Pedestal is fixed on the side of double support hitch.
The described large flow circulatory system comprises dolly, the second cylinder, transfer pump, magnetic current valve, electromagnetic flowmeter, online moisture teller, nozzle, recovery pump, collector, polishing fluid storage tank, sealant supplement cylinder, micro pump, the second temperature sensor, cooling coil, process controller and radiator valve; The polishing fluid storage tank is fixed on the upper strata of dolly; Transfer pump is centrifugal pump, is arranged on the polishing fluid storage tank, is connected with nozzle by pipeline, and realizes elevating movement by the second cylinder; The recovery pump is peristaltic pump, by pipeline, with collector, is connected, and reclaims the lower floor that pump is fixed on dolly, be positioned at the polishing fluid storage tank under; Nozzle, collector are arranged on respectively on first nozzle assembly and the first collector assembly of large flexible bistrique; Online moisture teller is arranged on the pipeline between transfer pump and nozzle, with process controller, micro pump, sealant supplement cylinder, jointly forms the viscosity control loop; The magnetic current valve and the electromagnetic flowmeter that are fixed on circulatory system cabinet sidewall are serially connected on the pipeline between transfer pump and nozzle, with process controller, jointly form flow control circuit; The second temperature sensor, cooling coil are arranged in the polishing fluid storage tank, and jointly form temperature control loop with radiator valve; Process controller is placed in switch board; Radiator valve is placed in circulatory system cabinet.
Described little flexible bistrique comprises hitch, the second electromagnetic field assembly, little polishing wheel component, second nozzle assembly, the second collector assembly and steamboat driven unit; Hitch is arranged on the second ram of the second Z axis; Described the second electromagnetic field assembly comprises fixed head, the 2nd Π shape yoke, the second coil, the second magnetic pole, the second electricity separation piece, the second constant-current source and the three-temperature sensor that non-magnetic stainless steel material is made; Little polishing wheel component comprises small bearing bracket, little polishing wheel; The second electromagnetic field assembly is arranged on hitch by fixed head, two the second magnetic poles are arranged on the 2nd Π shape yoke below, and stretch in little polishing wheel from both sides, the second coil winding, on two arms of the 2nd Π shape yoke, and is connected with radiator valve with the second constant-current source respectively by the second electricity separation piece; Four the second electricity separation pieces are separately fixed at the both sides of hitch, and three-temperature sensor is close to the outer surface of the second coil, and are connected with TT&C system by cable; The small bearing bracket of little polishing wheel component is arranged on the side arm of one of them the second magnetic pole of the second electromagnetic field assembly, and little polishing wheel is through same second magnetic pole of the second electromagnetic field assembly, and is erected in the middle of the air gap of two magnetic poles; The diameter of little polishing wheel is φ 20mm ~ φ 80mm; Second nozzle assembly, the second collector assembly all are set up between two the second magnetic poles of the second electromagnetic field assembly, and are positioned at the top of little polishing wheel; Steamboat driven unit and little polishing wheel component homonymy are mounted and fixed on the side arm of the 2nd Π shape yoke of the second electromagnetic field assembly, and are connected with little polishing wheel component.
The second nozzle assembly of little flexible bistrique is identical with the first nozzle assembly structure of described large flexible bistrique; The second collector assembly of little flexible bistrique is identical with the first collector assembly structure of described large flexible bistrique; It is identical that the low discharge circulatory system and the described large flow circulatory system share a process controller and a radiator valve and both pipelines and structure.
Described purging system comprises check valve, purifier, cross valve I, cleaning sink, cross valve II, composite iron powder separator, clear water pipeline and plumbing drain; Purifier is arranged on clear water pipeline, the entrance of purifier directly is connected with outside inlet channel by check valve, and outlet is connected with the inlet pipeline of cleaning sink, the reclaim line of the large flow circulatory system and the reclaim line of the low discharge circulatory system respectively by cross valve I; The composite iron powder separator is arranged on plumbing drain, the entrance of composite iron powder separator is connected with the outlet pipeline of cleaning sink, the delivery line of the large flow circulatory system and the delivery line of the low discharge circulatory system respectively by cross valve II, and its mouthful directly is connected with outside sewer pipe.
The invention has the advantages that:
1, double-flexibility wheel head magnetic rheology buffing device of the present invention can be caliber high-precision position phase class component, and for example the high-fidelity of heavy caliber CPP, high efficiency and the processing of high resisting laser damage provide a kind of brand-new, feasible Method and kit for.
2, double-flexibility wheel head magnetic rheology buffing device of the present invention can be the face form quality amount of caliber high-precision optical element in unified scope and controls manufacture method and the instrument that a kind of optimum is provided, can realize effective coupling of working (machining) efficiency and the accuracy of manufacture, can realize that material is efficiently removed, surface figure accuracy is restrained and the effective integration of three kinds of technology patterns of superficial makings control, the engineering using value is very remarkable.
3, double-flexibility wheel head magnetic rheology buffing device of the present invention adopts the vertical gantry structure of rigidity as the lathe bed main body, the vertical crossbeam at gantry and column design is integrated and its crossbeam is rectangle step hollow structure, vertically gantry integral body is placed on base, floor installation is on a plurality of adjustable sizing blocks, this structure has that precision is high, rigidity is high, stability is high, dynamic property is high, has met the requirement of CPP processing to static and dynamic stiffness, structural stability and the precision stability of device fully.
4, the side that the Y-axis drive motors in double-flexibility wheel head magnetic rheology buffing device of the present invention and ball-screw width are arranged on crossbeam, Y-axis two linear rolling tracks are installed respectively end face and the side of vertical gantry beam, wherein, the end face guide rail mainly plays load-bearing and guide effect, side guide mainly play the guiding role, and can significantly improve the linearity of Y-axis and reduce jib-length and the tilting moment of pair polishing wheel mechanism in X-direction.
5, double-flexibility wheel head magnetic rheology buffing device of the present invention has configured fully independently Z axis (the first Z axis, the second Z axis) of two motions, and wherein, large polishing wheel mechanism is arranged on the first Z axis, little polishing wheel mechanism is arranged on the second Z axis.Large and small polishing wheel mechanism discharges side by side, and wheel shaft is vertical with Y-axis.During polishing, a polishing wheel mechanism is in working position, another polishing wheel is in the inoperative position, can not only overcome polishing wheel mechanism to element to be processed or relevant clamping tooling contingent constructive interference problem in process, and be conducive to operating personnel to monitoring and the element of site technique process debug, the operations such as nozzle and the mounting or dismounting of collector and the cleaning of pipeline are very convenient.
6, the X-axis in double-flexibility wheel head magnetic rheology buffing device of the present invention is arranged on base, for the polishing main movement shaft, its direction of motion is parallel with the wheel direction of principal axis of large and small polishing wheel mechanism, have wider speed adjustable range and acceleration responsive ability, the minimizing that can meet that CPP processing requires the dynamic property of main movement shaft and process number of times for the raising of polishing convergence efficiency and iteration provides the equipment support.
7, the large and small polishing wheel mechanism in double-flexibility wheel head magnetic rheology buffing device of the present invention only does the jog motion with Y-axis at polishing process, and do not participate in the X-axis of speed change degree motion, greatly reduce the possibility that the X-axis velocity variations causes the polishing fluid flowed fluctuation, guaranteed the stable of glossing process.
8, double-flexibility wheel head magnetic rheology buffing device of the present invention has been developed workpiece tool setting sensing detection device and workpiece position and posture monitoring system, can realize rapidly that flexible ribbon thickness and flexible ribbon immerse the Accurate Calibration of the workpiece degree of depth and the accurate adjustment of workpiece pose, greatly reduce glossing non-cutting time and improve operating efficiency.
9, the large and small polishing wheel mechanism in double-flexibility wheel head magnetic rheology buffing device of the present invention all adopts the setting of wheel shaft integral structure, has significantly improved the circular runout precision of polishing wheel; Nozzle angle is fine adjustment within the specific limits, has met the control requirement of different glossings to the flexible ribbon form of difference fully.
10, the inside and outside formula electromagnetic field assembly of putting in double-flexibility wheel head magnetic rheology buffing device of the present invention all adopts the inner-cooled air core coil as the electromagnetic conversion device, and not only cooling effect is more excellent, and magnetic field intensity is higher; All adopt temperature sensor to carry out Real-Time Monitoring to coil temperature, improved the trouble diagnosibility installed, guaranteed the safety in utilization of installing.
11, the large and small flow circulatory system in double-flexibility wheel head magnetic rheology buffing device of the present invention is worked fully independently separately, can transmit MRP-I, two kinds of dissimilar Magnetorheologicai polishing liquids of MRP-II.Wherein, the large flow circulatory system is for large polishing wheel mechanism, be mainly used to transmit MRP-I type polishing fluid, the low discharge circulatory system is for little polishing wheel mechanism, be mainly used to transmit MRP-II type polishing fluid, not only meet the processing request of the heavy caliber CPP of quartz material to high-fidelity, high efficiency and high resisting laser damage, and reduced the risk that when device is processed different kinds material, polishing fluid pollutes mutually.
12, the centrifugal pump rotating speed of the large and small flow circulatory system in double-flexibility wheel head magnetic rheology buffing device of the present invention is fixed, change the outlet pressure of centrifugal pump by the flow through polishing fluid viscosity of magnetic current valve of change, and then the output flow of change centrifugal pump, greatly reduce the uneven and pulsation that produces of centrifugal pump impeller load under High Rotation Speed, significantly improved the control accuracy of flow and removed the stability of function.
13, the large and small flow circulatory system in double-flexibility wheel head magnetic rheology buffing device of the present invention adopts online moisture teller to measure the water content in polishing fluid, calculate rate of water make-up according to special algorithm, and realize the online compensation of moisture content according to the moisturizing frequency that rate of water make-up is controlled micro pump in real time, and then maintenance polishing fluid null field viscosity is constant, can effectively solve the technical problems such as non-linear and large time delay of moisturizing process, viscosity control accuracy stability higher, that remove function is better.
Double-flexibility wheel head magnetic rheology buffing device precision of the present invention is high, rigidity is high, stability is high, dynamic property is high, not only can be used for the processing of heavy caliber position phase class component, and can be used for the high accuracy processing of heavy-calibre planar class optical element in unified scope, can realize the Optimum Matching of working (machining) efficiency and machining accuracy.
The accompanying drawing explanation
Fig. 1 is double-flexibility wheel head magnetic rheology buffing device structural representation of the present invention;
Fig. 2 is double-flexibility wheel head magnetic rheology buffing device outward appearance layout of the present invention;
Fig. 3 is the lathe bed structure schematic diagram in the present invention;
Fig. 4 is the large flexible grinding wheel head structure schematic diagram in the present invention;
The large polishing wheel component structural representation that Fig. 5 is the large flexible bistrique in the present invention;
The first electromagnetic field modular construction schematic diagram that Fig. 6 is the large flexible bistrique in the present invention;
The first nozzle assembly structural representation that Fig. 7 is the large flexible bistrique in the present invention;
The first collector assembly structural representation that Fig. 8 is the large flexible bistrique in the present invention;
The gauge head modular construction schematic diagram that Fig. 9 is the large flexible bistrique in the present invention;
Figure 10 is the large flow circulatory system and the low discharge circulating system structure front side view in the present invention;
Figure 11 is the large flow circulatory system and the low discharge circulating system structure rear side view in the present invention;
Figure 12 is large flow circulatory system cooling coil and the three-temperature sensor scheme of installation in the present invention;
Figure 13 is the little flexible grinding wheel head structure schematic diagram in the present invention;
The second electromagnetic field modular construction schematic diagram that Figure 14 is the little flexible bistrique in the present invention;
The partial enlarged drawing I that Figure 15 is Figure 13;
Figure 16 is the purging system fundamental diagram in the present invention;
In figure,1. lathe bed, , 101. horizontal base, , , 102. vertical gantry, , , 103.X axle, , 104.Y axle, , , 105. the first Z axis, , , 106. the second Z axis, , 1051. the first ram, , , 1061. the second ram, , 2. large flexible bistrique, , 201. double support hitch, , , 202. large polishing wheel component, , , 203. bull wheel driven unit, , 204. the first electromagnetic field assembly, , , 205. the first nozzle assembly, , , 206. the first collector assembly, , 207. gauge head assembly, , , 2011. wheeling support, , , 2012. magnetic bearing, , , 2021. large bearing block, , , 2022. large polishing wheel, , , 2023. angular contact ball bearing, , , 2024. fore bearing end cap, , , 2025. rear bearing end cap, , , 2026. inner sleeve, , , 2027. outer sleeve, , , 2028. locking nut, , , 2029. belt wheel, , , 2041. magnetic field support, , , a 2042. Π shape yoke, , , 2043. the first coil, , 2044. the first magnetic pole, , , 2045. the first electricity separation piece, , , 2046. the first constant-current source, , 2047. the first temperature sensor, , 2051. the first support bar, , , 2052. the angular displacement platform with V-shaped groove, , , 2053. the first grip block, , , 2061. the second support bar, , , 2062. the second grip block, , , 2071. the first cylinder, , , 2072. gauge head support, , , 2073. gauge head, , , 2074. pedestal, , 3. little flexible bistrique, , , 301. hitch, , , 302. the second electromagnetic field assembly, , , 303. little polishing wheel component, , , 304. second nozzle assembly, , , 305. the second collector assembly, , , 306. steamboat driven unit, , , 3021. fixed head, , , 3022. the 2nd Π shape yoke, , , 3023. the second coil, , , 3024. the second magnetic pole, , , 3025. the second electricity separation piece, , , 3026. the second constant-current source, , , 3027. three-temperature sensor, , , 3031. small bearing bracket, , , 3032. little polishing wheel, , , 4. the large flow circulatory system, , , 401. dolly, , , 402. the second cylinder, , , 403. transfer pump, , , 404. magnetic current valve, , , 405. electromagnetic flowmeter, , , 406. online moisture teller, , , 407. nozzle, , , 408. recovery pump, , , 409. collector, , , 410. polishing fluid storage tank, , , 411. sealant supplement cylinder, , , 412. micro-The amount pump 413. second temperature sensor 414. cooling coil 415. process controller 416. radiator valve 5. low discharge circulatory system 6. purging system 601. check valve 602. purifier 603. cross valve I 604. cleaning sink 605. cross valve II 606. composite iron powder separator 607. clear water pipeline 608. plumbing drain 7. protective cover 701. lathe bed case 702. switch board 703. circulatory system cabinet 8. workpiece 9. frock 10. workbench.
The specific embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Fig. 1 is double-flexibility wheel head magnetic rheology buffing device structural representation of the present invention, and Fig. 2 is double-flexibility wheel head magnetic rheology buffing device outward appearance layout of the present invention, and Fig. 3 is lathe bed structure schematic diagram of the present invention.As shown in Figure 1-Figure 3, double-flexibility wheel head magnetic rheology buffing device of the present invention, it comprises lathe bed 1, large flexible bistrique 2, little flexible bistrique 3, the large flow circulatory system 4, the low discharge circulatory system 5, purging system 6, protective cover 7 and the TT&C system be connected with each part mentioned above.Lathe bed 1 comprises horizontal base 101, vertical gantry 102, X-axis 103, Y-axis 104, the first Z axis 105 and the second Z axis 106.Vertically gantry 102 is fixed on horizontal base 101, X-axis 103 is fixed on horizontal base 101, workpiece 8 clampings on frock 9, frock 9 is arranged on workbench 10, workbench 10 is fixed on the slide block of X-axis 103, Y-axis 104 is fixed on the crossbeam at vertical gantry 102, and the first Z axis 105 and the second Z axis 106 are arranged on the planker of Y-axis 104 side by side.Large flexible bistrique 2 is arranged on the first ram 1051 of the first Z axis 105, little flexible bistrique 3 is arranged on the second ram 1061 of the second Z axis 106.The large flow circulatory system 4 is arranged side by side on dolly 401 with the low discharge circulatory system 5, and the large flow circulatory system 4 is connected with large flexible bistrique 2, the low discharge circulatory system 5 is connected with little flexible bistrique 3.Purging system 6 is arranged at 102 side, vertical gantry.Protective cover 7 comprises lathe bed case 701, switch board 702 and circulatory system cabinet 703, the switch board 702 that TT&C system is housed is arranged at 102 back, vertical gantry, and the circulatory system cabinet 703 that dolly 401 is housed is arranged at 102 same side, vertical gantry near purging system 6.In the present embodiment, large flexible bistrique 2 is fully independent with the work of little flexible bistrique 3, and when large flexible bistrique 2 is in running order, little flexible bistrique 3 is positioned at non-machining position, and little flexible bistrique 3 when in running order large flexible bistrique 2 in non-machining position.
X-axis 103 in the lathe bed 1 of the present embodiment, Y-axis 104, the first Z axis 105, the second Z axis 106, include AC servo motor, yielding coupling, linear rolling track, ball-screw, slide block, planker and protective cover, AC servo motor directly drives ball-screw motion, ball-screw to drive sheathed slide block movement, slide block thereon by yielding coupling and further drives planker motion fixed thereon, thereby has realized the rectilinear motion of reference axis.Two linear rolling tracks of Y-axis 104 are arranged on respectively crossbeam top and the side at vertical gantry 102, head rail mainly plays load-bearing and guide effect, side guide mainly play the guiding role, this layout is conducive to reduce each parts mounted thereto, as the deadweight of the first Z axis 105, the second Z axis 106, large flexible bistrique 2 and little flexible bistrique 3 causes the distortion of line slideway, can significantly improve the linearity of Y-axis 104.Vertically gantry 102 global designs, and its crossbeam is rectangle step hollow structure, guaranteed that device has good static and dynamic stiffness and precision stability.Vertically accurate scraping is all passed through with the composition surface of horizontal base 101 in gantry 102, has guaranteed the contact stiffness of contact-making surface.X-axis 103, Y-axis 104, the first Z axis 105 and the second Z axis 106 all adopt high-accuracy rolling linear guide rail as the motion guide system, guaranteed that device has good precision stability, each guide rails assembling face all passes through accurate scraping, has guaranteed the perpendicularity between each linear axis.
Fig. 4 is the large flexible grinding wheel head structure schematic diagram in the present invention.As shown in Figure 4, the large flexible bistrique 2 in the present invention comprises double support hitch 201, large polishing wheel component 202, bull wheel driven unit 203, the first electromagnetic field assembly 204, the first nozzle assembly 205, the first collector assembly 206 and gauge head assembly 207.Be arranged on double support hitch on the first ram 1,051 201 and adopt single-castings to make, can be assembly mounted thereto and structure a highly integrated mounting platform is provided, there is the remarkable advantages such as easy to assembly, that precision stability good and the degree of modularity is high; Large polishing wheel component 202 is arranged on the wheeling support 2011 times of double support hitch 201; Bull wheel driven unit 203 is arranged on the side of the wheeling support 2011 of double support hitch 201, and is connected with large polishing wheel component 202; The first electromagnetic field assembly 204 is arranged on the magnetic bearing 2012 times of double support hitch 201 and is placed in large polishing wheel 2022 inside of large polishing wheel component 202; The first nozzle assembly 205 is set up between the wheeling support 2011 and magnetic bearing 2012 of double support hitch 201, and is positioned at the top of large polishing wheel 2022; The first collector assembly 206 is set up between the wheeling support 2011 and magnetic bearing 2012 of double support hitch 201 equally, and is positioned at the top of large polishing wheel 2022; Gauge head assembly 207 is arranged on the side of double support hitch 201.Adopt large flexible bistrique 2 to obtain to remove efficiency high, remove the large polishing spot of form, can be used for the quick removal of optical element surface metamorphic layer material and the medium accuracy polishing process of face shape.
The large polishing wheel component structural representation that Fig. 5 is the large flexible bistrique in the present invention.As shown in Figure 5, be arranged on the large polishing wheel component 202 under the wheeling support 2011 of double support hitch 201 in the present invention, comprise large bearing block 2021, large polishing wheel 2022, angular contact ball bearing 2023, fore bearing end cap 2024, rear bearing end cap 2025, inner sleeve 2026, outer sleeve 2027, locking nut 2028 and belt wheel 2029.Large bearing block 2021 is arranged on the wheeling support 2011 times of double support hitch 201, and large polishing wheel 2022 is arranged in large bearing block 2021 by two angular contact ball bearings 2023, and in the present embodiment, the outer surface diameter of large polishing wheel 2022 is φ 250mm, profile be "
" shape; and adopting non-magnetic stainless steel material manufacture; two angular contact ball bearings 2023 back-to-back are arranged in the rotating shaft of large polishing wheel 2022; inner sleeve 2026 and outer sleeve 2027 are between two angular contact ball bearings 2023; fore bearing end cap 2024 and rear bearing end cap 2025 are arranged on respectively the outer end of two angular contact ball bearings 2023 and use screw fastening on large bearing block 2021, and locking nut 2028 and belt wheel 2029 are contained in the rotating shaft end of large polishing wheel 2022 successively.
The first electromagnetic field modular construction schematic diagram that Fig. 6 is the large flexible bistrique in the present invention.As shown in Figure 6, be arranged on the magnetic bearing 2012 times of double support hitch 201 in the present invention and be placed in the first electromagnetic field assembly 204 of large polishing wheel 2022 inside, mainly comprise magnetic field support 2041, the one Π shape yoke 2042, the first coil 2043, two the first magnetic poles 2044, two the first electricity separation pieces 2045, the first constant-current source 2046 and the first temperature sensor 2047, magnetic field support 2041 is arranged on below the magnetic bearing 2012 of hitch 201, adopt non-magnetic stainless steel material to make, be provided with X-direction and Z-direction chute, can guarantee the accurate location of the first electromagnetic field assembly 204 in large polishing wheel 2022, the magnetic line of force that the one Π shape yoke 2042 inducts out by the first coil 2043 is concentrated and is guided the first magnetic pole 2044 into, the magnetic line of force introducing polishing area as much as possible that the first magnetic pole 2044 is assembled a Π shape yoke 2042 also forms the strong peak field with nearly Gaussian Profile, the first coil 2043 that hollow copper tubing is made is arranged on the top of a Π shape yoke 2042, its solid section energising, the hollow parts water flowing, and carry out cooling water and galvanic polymerization and separate by the first electricity separation piece 2045 that is placed in magnetic field support 2041 sides, the first coil 2043 adopts the first constant-current source 2046 excitations, the first constant-current source 2046 is connected with TT&C system by cable, the large I of output current of regulating the first constant-current source 2046 realizes the magnetic field intensity adjusting of polishing area, other the first coil 2043 outer surfaces are provided with the first temperature sensor 2047, the first temperature sensor 2047 is connected with TT&C system by cable equally, and then realize the Real-Time Monitoring of the first coil 2043 temperature, whole the first electromagnetic field assembly 204 relies on the leakage magnetic flux in the certain limit of air gap below to carry out work, can guarantee that Magnetorheologicai polishing liquid forms one at the outer surface of large polishing wheel 2022 and has certain degree of hardness, single, stable flexible ribbon, met the requirement of glossing fully.
The first nozzle assembly structural representation that Fig. 7 is the large flexible bistrique in the present invention.As shown in Figure 7, the first nozzle assembly 205 in the present invention is set up between the wheeling support 2011 and magnetic bearing 2012 of double support hitch 201, and is positioned at the top of large polishing wheel 2022; The first nozzle assembly 205 comprises the first support bar 2051, with the angular displacement platform 2052 of V-shaped groove and the first grip block 2053 with the open circles cylinder; The first support bar 2051 is through the open circles cylinder of the first grip block 2053, and by screw fastening on double support hitch 201, angular displacement platform 2052 with V-shaped groove is arranged on the first grip block 2053, with the V-shaped groove inner clip of the angular displacement platform 2052 of V-shaped groove, holds nozzle 407; The first nozzle assembly 205 has the regulatory function of X, two frees degree of A, and wherein the X free degree is regulated the centering of the first nozzle assembly 205 and the first magnetic field component 204, the inclination angle that the A free degree is regulated nozzle 407.
The first collector assembly structural representation that Fig. 8 is the large flexible bistrique in the present invention.As shown in Figure 8, the first collector assembly 206 in the present invention is set up between the wheeling support 2011 and magnetic bearing 2012 of double support hitch 201 equally, and is positioned at the top of large polishing wheel 2022; The first collector assembly 206 comprises the second support bar 2061 and the second grip block 2062 with V-shaped groove and open circles cylinder; The second support bar 2061 is through the open circles cylinder of the second grip block 2062, and by screw fastening on double support hitch 201, the V-shaped groove inner clip of the second grip block 2062 is held collector 409; The first collector assembly 206 has the X-direction regulating power, for regulating the centering of the first collector assembly 206 and the first magnetic field component 204.
The gauge head modular construction schematic diagram that Fig. 9 is the large flexible bistrique in the present invention.As shown in Figure 9, be arranged on double support hitch 201 in the present invention near the gauge head assembly 207 on the side of little flexible bistrique 3, its Main Function is thickness, the height of workpiece end face and the degree of depth that flexible ribbon is immersed in workpiece of determining flexible ribbon; Gauge head assembly 207 comprises the first cylinder 2071, gauge head support 2072, gauge head 2073 and pedestal 2074, the first cylinder 2071 is arranged on pedestal 2074, gauge head support 2072 is connected on the slide block of the first cylinder 2071, gauge head 2073 is arranged on the lower end of gauge head support 2072, and pedestal 2074 is fixed on double support hitch 201 near on the side of little flexible bistrique 3.Without wheel, be that large flexible bistrique 2 or little flexible bistrique 3 are in running order, during measurement, gauge head 2073 is all first moved downward " position to be measured " that is located at large polishing wheel component 202 side-lowers fast by " measurement initial bit " with the first cylinder 2071, then move downward at leisure with workpiece 8 and contact with large flexible bistrique 2 from " position to be measured ", record this position and complete measurement, after having measured by the quick rollback of contrary flow process and reset.
Figure 10 is the large flow circulatory system and the low discharge circulating system structure front side view in the present invention, Figure 11 is the large flow circulatory system and the low discharge circulating system structure rear side view in the present invention, and Figure 12 is large flow circulatory system cooling coil and the three-temperature sensor scheme of installation in the present invention.As shown in Figure 10-Figure 12, the large flow circulatory system 4 in the present invention comprises dolly 401, the second cylinder 402, transfer pump 403, magnetic current valve 404, electromagnetic flowmeter 405, online moisture teller 406, nozzle 407, reclaims pump 408, collector 409, polishing fluid storage tank 410, sealant supplement cylinder 411, micro pump 412, the second temperature sensor 413, cooling coil 414, process controller 415 and radiator valve 416.Polishing fluid storage tank 410 is fixed on the upper strata of dolly 401.Transfer pump 403 is centrifugal pump, is arranged on polishing fluid storage tank 410 tops, with pipeline, with nozzle 407, is connected, and by the second cylinder 402, realizes lifting.Reclaiming pump 408 is peristaltic pump, be positioned at polishing fluid storage tank 410 under, be fixed on dolly 401 lower floors, by pipeline, with collector 409, be connected.Nozzle 407, collector 409 are arranged on respectively on first nozzle assembly 205 and the first collector assembly 206 of large flexible bistrique 2.Online moisture teller 406 is arranged on the pipeline between transfer pump 403 and nozzle 407, with the common viscosity control loop that forms of process controller 415, micro pump 412, sealant supplement cylinder 411 be placed in switch board 702.Be fixed in the pipeline that magnetic current valve 404 on the sidewall of circulatory system cabinet 703 and electromagnetic flowmeter 405 all be serially connected in transfer pump 403 and nozzle 407, with the common flow control circuit that forms of process controller 415.The second temperature sensor 413, cooling coil 414 are installed in 410 li of polishing fluid storage tanks, and jointly form temperature control loops with radiator valve 416.Process controller 415 is placed on 702 li of switch boards, and radiator valve 416 is placed on 703 li, circulatory system cabinet.
During the large flow circulatory system 4 work, at first by transfer pump 403, the Magnetorheologicai polishing liquid of 410 li of storage tanks is pumped in delivery line and through nozzle 407 and sprays to large polishing wheel 2022; Then, Magnetorheologicai polishing liquid is subject to magnetic fields form flexible ribbon and bring polishing area into by the large polishing wheel 2022 of rotation workpiece 8 is processed; Finally, the Magnetorheologicai polishing liquid that collector 409 will leave polishing area is recovered in pipeline and by reclaiming pump 408 and pumps into 410 li of storage tanks.At work, the water content of Magnetorheologicai polishing liquid has mainly been realized closed-loop control by the viscosity control loop, the water content that adopts online moisture teller 406 to measure in polishing fluid, calculate rate of water make-up by specific algorithm, and realize the online compensation of moisture content and then keep polishing fluid moisture content constant according to the moisturizing frequency that rate of water make-up is controlled micro pump 412 in real time; The uninterrupted of nozzle 407 has been realized closed-loop control by flow control circuit, fix the rotating speed that transmits centrifugal pump 403, change by the flow through polishing fluid viscosity of magnetic current valve 404 of change the outlet pressure that transmits centrifugal pump 403, and then change the output flow that transmits centrifugal pump 403; The temperature level of polishing fluid has mainly realized open loop control by temperature control loop.The low discharge circulatory system 5 is identical with pipeline and the structure of the large flow circulatory system 4, both share a process controller 415 and a radiator valve 416, and its difference is mainly reflected in the running parameter of relevant components and parts and the aspects such as work use state of Magnetorheologicai polishing liquid.
Figure 13 is the little flexible grinding wheel head structure schematic diagram in the present invention, the second electromagnetic field modular construction schematic diagram that Figure 14 is the little flexible bistrique in the present invention, the partial enlarged drawing I that Figure 15 is Figure 13.As shown in figure 13, little flexible bistrique 3 in the present invention comprises hitch 301, the second electromagnetic field assembly 302, little polishing wheel component 303, second nozzle assembly 304, the second collector assembly 305 and steamboat driven unit 306, and the hitch 301 of little flexible bistrique 3 is arranged on the second ram 1061 of the second Z axis 106.Adopt little flexible bistrique 3 to obtain to remove form little, remove the little polishing spot of unit, can be used for heavy caliber position phase class component, such as processes such as the face shape High Convergent Precision of the little space periodic quality control of CPP element and heavy-calibre planar class component and edge quality controls.
As shown in Figure 13-Figure 15, the second electromagnetic field assembly 302 in described little flexible bistrique 3 comprises the fixed head 3021 that non-magnetic stainless steel material is made, the 2nd Π shape yoke 3022, the second coil 3023, the second magnetic pole 3024, the second electricity separation piece 3025, the second constant-current source 3026 and three-temperature sensor 3027, the second electromagnetic field assembly 302 is arranged on hitch 301 by fixed head 3021, little polishing wheel component 303 is fixed on by small bearing bracket 3031 on the side of the second magnetic pole 3024 of the second electromagnetic field assembly 302, in the present embodiment, be provided with two the second magnetic poles, the second magnetic pole 3024 is one of them, little polishing wheel 3032 passes the second magnetic pole 3024 and is erected in the middle of the air gap of two the second magnetic poles, second nozzle assembly 304, the second collector assembly 305 is set up between two the second magnetic poles of electromagnetic field assembly 302 and is positioned at the top of little polishing wheel component 303, steamboat driven unit 306 is installed with little polishing wheel component 303 homonymies, and be fixed on the side arm of the 2nd Π shape yoke 3022 of the second electromagnetic field assembly 302.The second nozzle assembly 304 of little flexible bistrique 3, the second collector assembly 305, steamboat driven unit 306 are identical with the structure of the first nozzle assembly 205 of large flexible bistrique 2, the first collector assembly 206, bull wheel driven unit 203 respectively; In the present embodiment, the diameter of little polishing wheel 3032 be φ 20mm, its profile for "
" shape.Two the second magnetic poles stretch in little polishing wheel 3032 from both sides, be provided with two the second coils in the present embodiment, the second coil 3023 is one of them, be provided with four the second electricity separation pieces, the second electric explant 3025 is one of them, four the second electricity separation pieces are separately fixed at the both sides of hitch 301, and two the second coils are arranged on respectively on two arms of the 2nd Π shape yoke 3022, and with the second constant-current source 3026, with radiator valve 416, are connected respectively by four the second electricity separation pieces; Three-temperature sensor 3027 is close to the outer surface of the second coil 3023, and is connected with TT&C system by cable, is used for monitoring the temperature of coil.
Figure 16 is the purging system fundamental diagram in the present invention.As shown in figure 16, described purging system 6 comprises check valve 601, purifier 602, cross valve I603, cleaning sink 604, cross valve II605, composite iron powder separator 606, clear water pipeline 607 and plumbing drain 608, is mainly used in the cleaning in place of the circulatory system, the timely scouring of lathe bed structure and the prerinse of element surface.Purifier 602 is arranged on clear water pipeline 607, purifier 602 entrances directly are connected with outside inlet channel by check valve 601, outlet is connected with the inlet pipeline of cleaning sink 604, the reclaim line of the large flow circulatory system 4 and the reclaim line of the low discharge circulatory system 5 respectively by cross valve I603, and the impurity that is mainly used in filtering in running water pollutes polishing fluid with residual running water after preventing cleaning.Composite iron powder separator 606 is arranged on plumbing drain 608, composite iron powder separator 606 entrances are connected with the outlet pipeline of cleaning sink 604, the delivery line of the large flow circulatory system 4 and the delivery line of the low discharge circulatory system 5 respectively by cross valve II605, outlet directly is connected with outside sewer pipe, and the composite iron powder that is mainly used in mixing in filtered wastewater is to prevent its contaminated environment.
The cleaning process of the large flow circulatory system 4 is: reclaim the polishing fluid in storage tank 410; Dismantle nozzle 407, collector 409, clean separately; Delivery line and plumbing drain 608 and reclaim line and clear water pipeline 607 are docked, opened check valve 601, running on clear water pipeline 607 and reclaimed that pump 408 will be injected in storage tank 410 through the clear water filtered, running transfer pump 403 is discharged the sewage in storage tank 410 until totally; Discharge residual clear water in storage tank 410, delivery line and reclaim line, so far realize the cleaning in place to the whole circulatory system.
The present embodiment is identical with the basic structure of embodiment 1, and difference is, the outer surface diameter of the large polishing wheel 2022 in the present embodiment is φ 300mm, and the diameter of little polishing wheel 3032 is φ 50mm.
The present embodiment is identical with the basic structure of embodiment 1, and difference is, the outer surface diameter of the large polishing wheel 2022 in the present embodiment is φ 400mm, and the diameter of little polishing wheel 3032 is φ 80mm.
Claims (10)
1. a double-flexibility wheel head magnetic rheology buffing device is characterized in that: described burnishing device comprises lathe bed (1), large flexible bistrique (2), little flexible bistrique (3), the large flow circulatory system (4), the low discharge circulatory system (5), purging system (6), protective cover (7) and the TT&C system be connected with each part mentioned above; Lathe bed (1) comprises horizontal base (101), vertical gantry (102), X-axis (103), Y-axis (104), the first Z axis (105) and the second Z axis (106); Vertically gantry (102) and X-axis (103) are separately fixed at horizontal base (101) above, and vertically crossbeam and the column at gantry (102) are an integral body; Frock (9) for clamping workpiece (8) is installed on workbench (10), and workbench (10) is fixed on the slide block of X-axis (103); Y-axis (104) is fixed on the crossbeam of vertical gantry (102); The first Z axis (105) and the second Z axis (106) are arranged on the planker of Y-axis (104) side by side; Large flexible bistrique (2) is arranged on that first ram (1051) of the first Z axis (105) is upper, little flexible bistrique (3) is arranged on second ram (1061) of the second Z axis (106); The large flow circulatory system (4) is arranged side by side at dolly (401) above with the low discharge circulatory system (5), and the large flow circulatory system (4) is connected with large flexible bistrique (2), and the low discharge circulatory system (5) is connected with little flexible bistrique (3); Purging system (6) is placed in the side of vertical gantry (102); Described burnishing device also is provided with protective cover (7), protective cover (7) comprises lathe bed case (701), switch board (702) and circulatory system cabinet (703), the switch board (702) that TT&C system is housed is arranged at the back of vertical gantry (102), and the circulatory system cabinet (703) of dolly (401) and the same side that purging system (6) is arranged at vertical gantry (102) are housed.
2. double-flexibility wheel head magnetic rheology buffing device according to claim 1 is characterized in that: described large flexible bistrique (2) comprises double support hitch (201), large polishing wheel component (202), bull wheel driven unit (203), the first electromagnetic field assembly (204), the first nozzle assembly (205), the first collector assembly (206) and gauge head assembly (207); Described double support hitch (201) is arranged on first ram (1051) of the first Z axis (105); Large polishing wheel component (202) is arranged under the wheeling support (2011) of double support hitch (201); Bull wheel driven unit (203) is arranged on the side of wheeling support (2011), and is connected with large polishing wheel component (202); The magnetic bearing (2012) that the first electromagnetic field assembly (204) is arranged on double support hitch (201) descends and is placed in large polishing wheel (2022) inside of large polishing wheel component (202); The first nozzle assembly (205) and the first collector assembly (206) are set up between the wheeling support (2011) and magnetic bearing (2012) of double support hitch (201), and are positioned at the top of large polishing wheel (2022); Gauge head assembly (207) is arranged on the upper side near little flexible bistrique (3) of double support hitch (201).
3. double-flexibility wheel head magnetic rheology buffing device according to claim 2 is characterized in that: the large polishing wheel component (202) in described large flexible bistrique (2) comprises large bearing block (2021), large polishing wheel (2022), angular contact ball bearing, fore bearing end cap (2024), rear bearing end cap (2025), inner sleeve (2026), outer sleeve (2027), locking nut (2028) and belt wheel (2029); Large bearing block (2021) is arranged under the wheeling support (2011) of double support hitch (201); Large polishing wheel (2022) is arranged in large bearing block (2021) by two angular contact ball bearings; Two angular contact ball bearings back-to-back are arranged in the rotating shaft of large polishing wheel (2022); Inner sleeve (2026) and outer sleeve (2027) are between two angular contact ball bearings; Fore bearing end cap (2024) and rear bearing end cap (2025) are contained in respectively the outer end of two angular contact ball bearings and use screw fastening upper at large bearing block (2021), and locking nut (2028) and belt wheel (2029) are contained in the rotating shaft end of large polishing wheel (2022) successively.
4. double-flexibility wheel head magnetic rheology buffing device according to claim 2, it is characterized in that: the first electromagnetic field assembly (204) in described large flexible bistrique (2) comprises magnetic field support (2041), a Π shape yoke (2042), the first coil (2043), the first magnetic pole (2044), the first electricity separation piece (2045), the first constant-current source (2046) and the first temperature sensor (2047); The magnetic field support (2041) that non-magnetic stainless steel is made is arranged on below the magnetic bearing (2012) of described double support hitch (201); First coil (2043) of hollow copper tubing coiling is arranged on the top of a Π shape yoke (2042), and with the first constant-current source (2046), with the radiator valve (416) in being arranged at the large flow circulatory system (4), is connected respectively by the first electricity separation piece (2045) be arranged on magnetic field support (2041); The first magnetic pole (2044) is arranged on the bottom of a Π shape yoke (2042); The first temperature sensor (2047) is close to the outer surface of the first coil (2043), and is connected with TT&C system by cable.
5. double-flexibility wheel head magnetic rheology buffing device according to claim 2 is characterized in that: the first nozzle assembly (205) in described large flexible bistrique (2) comprises the first support bar (2051), with the angular displacement platform (2052) of V-shaped groove and the first grip block (2053) with the open circles cylinder; The first support bar (2051) passes the open circles cylinder of the first grip block (2053), and is set up between the wheeling support (2011) and magnetic bearing (2012) of large polishing wheel (2022) top double support hitch (201); Angular displacement platform (2052) with V-shaped groove is arranged on the first grip block (2053); V-shaped groove inner clip at the angular displacement platform (2052) with V-shaped groove is held nozzle (407).
6. double-flexibility wheel head magnetic rheology buffing device according to claim 2 is characterized in that: the first collector assembly (206) in described large flexible bistrique (2) comprises the second support bar (2061), with second grip block (2062) of V-shaped groove and open circles cylinder; The second support bar (2061) passes the open circles cylinder of the second grip block (2062), and is set up between the wheeling support (2011) and magnetic bearing (2012) of large polishing wheel (2022) top double support hitch (201); The V-shaped groove inner clip of the second grip block (2062) is held collector (409).
7. double-flexibility wheel head magnetic rheology buffing device according to claim 2, it is characterized in that: the gauge head assembly (207) in described large flexible bistrique (2) comprises the first cylinder (2071), gauge head support (2072), gauge head (2073) and pedestal (2074); The first cylinder (2071) is arranged on pedestal (2074); Gauge head support (2072) is connected on the slide block of the first cylinder (2071); Gauge head (2073) is arranged on the lower end of gauge head support (2072); Pedestal (2074) is fixed on the side of double support hitch (201).
8. double-flexibility wheel head magnetic rheology buffing device according to claim 1, it is characterized in that: the described large flow circulatory system (4) comprises dolly (401), the second cylinder (402), transfer pump (403), magnetic current valve (404), electromagnetic flowmeter (405), online moisture teller (406), nozzle (407), reclaim pump (408), collector (409), polishing fluid storage tank (410), sealant supplement cylinder (411), micro pump (412), the second temperature sensor (413), cooling coil (414), process controller (415) and radiator valve (416), polishing fluid storage tank (410) is fixed on the upper strata of dolly (401), it is upper that transfer pump (403) is arranged on polishing fluid storage tank (410), is connected with nozzle (407) by pipeline, and realizes elevating movement by the second cylinder (402), reclaim pump (408) and be connected with collector (409) by pipeline, recovery pump (408) is fixed on the lower floor of dolly (401), be positioned at polishing fluid storage tank (410) under, nozzle (407), collector (409) are arranged on respectively on first nozzle assembly (205) and the first collector assembly (206) of large flexible bistrique (2), online moisture teller (406) is arranged on the pipeline between transfer pump (403) and nozzle (407), with process controller (415), micro pump (412), sealant supplement cylinder (411), jointly forms the viscosity control loop, the magnetic current valve (404) and the electromagnetic flowmeter (405) that are fixed on circulatory system cabinet (703) sidewall are serially connected on the pipeline between transfer pump (403) and nozzle (407), with process controller (415), jointly form flow control circuit, the second temperature sensor (413), that cooling coil (414) is arranged on polishing fluid storage tank (410) is inner, and jointly forms temperature control loop with radiator valve (416), process controller (415) is placed in switch board (703), radiator valve (416) is placed in circulatory system cabinet (703).
9. double-flexibility wheel head magnetic rheology buffing device according to claim 1, it is characterized in that: described little flexible bistrique (3) comprises hitch (301), the second electromagnetic field assembly (302), little polishing wheel component (303), second nozzle assembly (304), the second collector assembly (305) and steamboat driven unit (306); Hitch (301) is arranged on second ram (1061) of the second Z axis (106); Described the second electromagnetic field assembly (302) comprises fixed head (3021), the 2nd Π shape yoke (3022), the second coil (3023), the second magnetic pole, the second electricity separation piece, the second constant-current source (3026) and the three-temperature sensor (3027) that non-magnetic stainless steel material is made; Little polishing wheel component (303) comprises small bearing bracket (3031), little polishing wheel (3032); The second electromagnetic field assembly (302) is arranged on hitch (301) by fixed head (3021), two the second magnetic poles are arranged on the 2nd Π shape yoke (3022) below, and stretch in little polishing wheel (3032) from both sides, the second coil (3023) is wound on two arms of the 2nd Π shape yoke (3022), and with the second constant-current source (3026), with radiator valve (416), is connected respectively by the second electricity separation piece; Four the second electricity separation pieces are separately fixed at the both sides of hitch (301), and three-temperature sensor (3027) is close to the outer surface of the second coil (3023), and are connected with TT&C system by cable; The small bearing bracket (3031) of little polishing wheel component (303) is arranged on the side arm of one of them the second magnetic pole of the second electromagnetic field assembly (302), little polishing wheel (3032) passes same second magnetic pole of the second electromagnetic field assembly (302), and is erected in the middle of the air gap of two magnetic poles; Second nozzle assembly (304), the second collector assembly (305) all are set up between two the second magnetic poles of the second electromagnetic field assembly (302), and are positioned at the top of little polishing wheel (3032); Steamboat driven unit (306) and little polishing wheel component (303) homonymy are mounted and fixed on the side arm of the 2nd Π shape yoke (3022) of the second electromagnetic field assembly (302), and are connected with little polishing wheel component (303).
10. double-flexibility wheel head magnetic rheology buffing device according to claim 1, it is characterized in that: described purging system (6) comprises check valve (601), purifier (602), cross valve I(603), cleaning sink (604), cross valve II(605), composite iron powder separator (606), clear water pipeline (607) and plumbing drain (608); Purifier (602) is arranged on clear water pipeline (607), the entrance of purifier (602) directly is connected with outside inlet channel by check valve (601), and outlet is by cross valve I(603) with the inlet pipeline of cleaning sink (604), the reclaim line of the large flow circulatory system (4) and the reclaim line of the low discharge circulatory system (5), be connected respectively; Composite iron powder separator (606) is arranged on plumbing drain (608), the entrance of composite iron powder separator (606) is by cross valve II(605) with the outlet pipeline of cleaning sink (604), the delivery line of the large flow circulatory system (4) and the delivery line of the low discharge circulatory system (5), be connected respectively, outlet directly is connected with outside sewer pipe.
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