CN102620814B - Mems仿生矢量水听器的桔瓣式封装结构 - Google Patents
Mems仿生矢量水听器的桔瓣式封装结构 Download PDFInfo
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- CN102620814B CN102620814B CN 201210089010 CN201210089010A CN102620814B CN 102620814 B CN102620814 B CN 102620814B CN 201210089010 CN201210089010 CN 201210089010 CN 201210089010 A CN201210089010 A CN 201210089010A CN 102620814 B CN102620814 B CN 102620814B
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一阶模态 | 二阶模态 | 三阶模态 | 四阶模态 | 五阶模态 | 六阶模态 | |
现有封装结构透声帽 | 871.44 | 871.44 | 1662.7 | 1824.7 | 1824.7 | 1877.8 |
本发明封装结构透声帽 | 2400.9 | 2824.2 | 2836.5 | 2907.8 | 3372.9 | 3431.6 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102944297B (zh) * | 2012-10-23 | 2016-03-23 | 中北大学 | 基于玻璃钢透声帽封装的宽频带矢量水听器 |
CN103030102B (zh) * | 2012-12-27 | 2015-07-15 | 苏州大学 | Mems矢量水听器纤毛自动化粘接装置及方法 |
CN103528663B (zh) * | 2013-10-26 | 2015-07-15 | 中北大学 | 具有隔振功能的mems矢量水听器封装结构 |
CN103557926B (zh) * | 2013-10-26 | 2016-04-13 | 中北大学 | 基于丁腈橡胶帽封装的高灵敏度宽量程仿生水听器 |
CN103808403B (zh) * | 2014-02-26 | 2015-10-07 | 中北大学 | 适用于深水的纳机电矢量水听器 |
CN105067100A (zh) * | 2015-07-23 | 2015-11-18 | 中北大学 | 中性浮力式mems矢量水听器 |
CN105841800B (zh) * | 2016-04-11 | 2018-12-18 | 中国计量大学 | 一种耐高压的球形水听器的制造方法 |
CN106153243B (zh) * | 2016-06-29 | 2019-03-29 | 中北大学 | Mems湍流传感器的封装方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101354283A (zh) * | 2008-09-08 | 2009-01-28 | 中北大学 | 微纳仿生矢量水声传感器的封装结构 |
CN102252747A (zh) * | 2011-06-09 | 2011-11-23 | 西北工业大学 | 一种微型仿蟋蟀纤毛结构声压传感器及其制作方法 |
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US8130986B2 (en) * | 2006-01-23 | 2012-03-06 | The Regents Of The University Of Michigan | Trapped fluid microsystems for acoustic sensing |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN101354283A (zh) * | 2008-09-08 | 2009-01-28 | 中北大学 | 微纳仿生矢量水声传感器的封装结构 |
CN102252747A (zh) * | 2011-06-09 | 2011-11-23 | 西北工业大学 | 一种微型仿蟋蟀纤毛结构声压传感器及其制作方法 |
Non-Patent Citations (2)
Title |
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仿生水听器设计、制造与测试;石归雄等;《海洋技术》;20110331;第30卷(第1期);44-47 * |
石归雄等.仿生水听器设计、制造与测试.《海洋技术》.2011,第30卷(第1期),44-47. |
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Inventor after: Zhang Guojun Inventor after: Liu Mengran Inventor after: Jian Zeming Inventor after: He Changde Inventor after: Xiong Jijun Inventor after: Xue Chenyang Inventor after: Zhang Wendong Inventor after: Bao Aida Inventor after: Liu Linxian Inventor after: Xue Nan Inventor after: Liu Hong Inventor after: Zhang Hui Inventor after: Li Zhen Inventor after: Shen Hui Inventor after: Zhao Peng Inventor before: Zhang Guojun Inventor before: He Changde Inventor before: Liu Linxian Inventor before: Zhang Hui Inventor before: Li Zhen Inventor before: Xiong Jijun Inventor before: Xue Chenyang Inventor before: Zhang Wendong |
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Free format text: CORRECT: INVENTOR; FROM: ZHANG GUOJUN HE CHANGDE LIU LINXIAN ZHANG HUI LI ZHEN XIONG JIJUN XUE CHENYANG ZHANG WENDONG TO: ZHANG GUOJUN BAO AIDA LIU LINXIAN XUE NAN LIU HONG ZHANG HUI LI ZHEN SHEN HUI ZHAO PENG LIU MENGRAN JIAN ZEMING HE CHANGDE XIONG JIJUN XUE CHENYANG ZHANG WENDONG |
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