CN102607923B - Silicon carbide material corrosion furnace - Google Patents
Silicon carbide material corrosion furnace Download PDFInfo
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- CN102607923B CN102607923B CN201210105183.4A CN201210105183A CN102607923B CN 102607923 B CN102607923 B CN 102607923B CN 201210105183 A CN201210105183 A CN 201210105183A CN 102607923 B CN102607923 B CN 102607923B
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- nickel
- main body
- heating furnace
- body heating
- furnace
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Abstract
The invention relates to a silicon carbide material corrosion furnace which comprises a main body heating furnace, a nickel furnace cover, a nickel crucible, a nickel basket rotating device, a nickel basket and a temperature control device, wherein the main body heating furnace is a hollow circular cylinder which is open at the upper end and made of heat-resistant ceramics, the inner wall surface is made of a thermal insulating material, the outer wall surface is made of a stainless steel material, and an electric furnace heating wire is embedded in the heat-resistant ceramics; the nickel furnace cover is positioned above the opening of the main body heating furnace; the nickel crucible is positioned in the main body heating furnace; the nickel basket rotating device is positioned above the main body heating furnace; the nickel basket is positioned in the nickel crucible, and used for bearing a sample, and the upper end of the nickel basket is connected with the nickel basket rotating device; and the temperature control device is installed outside the main body heating furnace. The invention is designed according to the silicon carbide defect corrosion technology. Compared with the traditional corrosion furnace, the invention has the advantages of simple structure, high use safety and the like, and is convenient to operate.
Description
Technical field
The present invention relates to single-crystal silicon carbide and epitaxial material defect characterization technique, particularly defect-selective etching equipment-a kind of carbofrax material corrosion stove.
Background technology
Third generation semiconductor material silit (SiC) has huge application potential in high temperature, high power device field because of advantages such as its broad stopband having, high heat conductance, high breakdown field strength, high electronic drifting rates.Single-crystal silicon carbide and epitaxial material growing technology are the committed steps of preparing silicon carbide power device, and the height of its monocrystalline and epitaxial material growth quality directly affects the performance of subsequent device.Therefore,, in order to realize silicon carbide power device compared with the unique advantage of traditional silicon device, must fully understand kind and the distribution of defect in single-crystal silicon carbide and epitaxial material and reduce its defect concentration as far as possible.
Defect-selective etching technology is to characterize single-crystal silicon carbide and the defect kind of epitaxial material and the common methods of distribution.Be different from traditional semiconductor materials such as silicon or gallium arsenide, carbofrax material has good chemical stability.Therefore, this technology requires to use molten potassium hydroxide to sample corrosion 10-30 minute conventionally under 500 ℃ of conditions, then by the etch pit at optical microphotograph Microscopic observation sample surfaces, obtains the kind of fault in material and the information of distribution.
It is low that this technology has experimental cost, and experimental procedure is simple and sample size is required to the advantages such as low.But this technology also needs higher experimental temperature and strong basicity mordant, this has not only increased it and has realized difficulty, but also easily jeopardizes operating personnel's personal safety.For example, molten potassium hydroxide at high temperature has certain volatility, can work the mischief to operating personnel's respiratory system.Current this technology is normally put into sample nickel crucible and is heated, corrodes at traditional heating stove.Yet, these traditional heating furnaces not design for this technology, thereby may have following shortcoming: 1) corrosion temperature of gained is the fire box temperature that in stove, thermopair is surveyed, but not the temperature of molten potassium hydroxide, there is certain temperature error between the two, can affect the precision of experiment.2), while using traditional heating furnace to corrode, taking out or put into sample is not all easily, and in this process, can cause the variation of temperature in stove, improper if any operating operation, also can work the mischief to operating personnel.
Summary of the invention
The object of the invention is to, a kind of carbofrax material corrosion stove is provided, it can solve the deficiencies in the prior art, has advantages of that volume is small and exquisite, simple in structure, is easy to realize, and improves experimenter's security simultaneously.
The invention provides a kind of carbofrax material corrosion stove, comprising:
One main body heating furnace, the hollow circular cylinder of the upper end open forming for heat-stable ceramic, internal face has heat-barrier material, and outside wall surface is stainless steel material, is embedded with electric furnace heating wire in heat-stable ceramic;
One nickel matter bell, is positioned at above the opening of main body heating furnace;
One nickel crucible, is positioned at main body heating furnace;
One nickel basket whirligig, is positioned at the top of main body heating furnace;
One nickel basket, is positioned at nickel crucible, and its upper end is connected with nickel basket whirligig, for carrying sample;
One attemperating unit, is arranged on outside main body heating furnace.
Wherein nickel basket whirligig comprises:
One stationary shaft, is fixed on above the sidewall of main body heating furnace;
One fixed support, one end is connected with stationary shaft, and the other end becomes 90 degree to extend into the top of main body heating furnace with stationary shaft;
One miniature explosion-proof motor, is positioned on fixed support, and aims at the center of main body heating furnace, and the axle head of this miniature explosion-proof motor is connected with nickel basket.
Wherein attemperating unit comprises: a temperature indicator, a temperature controller and a thermopair, and this thermopair extend in nickel crucible along the sidewall of main body heating furnace 1;
Wherein said nickel matter bell be level to opening structure, it is along stationary shaft folding in the horizontal direction, facilitates fetching and delivering of sample.
Wherein said nickel basket is rectangle, and its bottom has some narrow rectangular channels, is used for placing sample.
Wherein miniature explosion-proof motor is greater than 15 centimetres from the distance of the fire door of main body heating furnace.
The shell of wherein said thermopair is that nickel material is made, and can directly be put into reading temperature data in experimental liquid.
Compared with prior art, the present invention has following features in the present invention:
1. this corrosion furnace volume is small and exquisite, simple in structure, is easy to realize;
2. adopt the protection thermopair of nickel pipe can directly insert liquid and carry out thermometric, can obtain rapidly corrosion temperature accurately;
3. designed can free-open-close nickel matter bell, not only facilitated experimental implementation, also protected experimenter's safety;
4. adopt the fixed support that can make the rotation of nickel basket, improved the experiment effect of corrosion experiment.
Accompanying drawing explanation
For further illustrating technology contents of the present invention, below in conjunction with accompanying drawing, the invention will be further described, wherein:
Fig. 1 is the structural representation of carbofrax material corrosion stove.
Embodiment
Refer to shown in Fig. 1, the invention provides a kind of carbofrax material corrosion stove, comprising:
One main body heating furnace 1, the hollow circular cylinder of the upper end open forming for heat-stable ceramic 2, internal face has heat-barrier material 4, play the effect that prevents thermal loss, outside wall surface is stainless steel material, and the sidewall of heat-stable ceramic 2 and bottom are all embedded with electric furnace heating wire 3, guarantees the homogeneity of the efficiency of heating surface and heating;
One nickel matter bell 6, is positioned at the opening top of main body heating furnace 1, to prevent that the volatilization of mordant steam from jeopardizing health, described nickel matter bell 6 be level to opening structure, it is along stationary shaft 91 folding in the horizontal direction, facilitates fetching and delivering of sample 14;
One nickel crucible 5, is positioned at main body heating furnace 1, for holding potassium hydroxide mordant;
One nickel basket whirligig 9, is positioned at the top of main body heating furnace 1, and this nickel basket whirligig 9 comprises:
One stationary shaft 91, is fixed on above the sidewall of main body heating furnace 1;
One fixed support 92, one end is connected with stationary shaft 91, and 91 one-tenth 90 degree of the other end and stationary shaft extend into the top of main body heating furnace 1;
One miniature explosion-proof motor 93, be positioned on fixed support 92, and aim at the center of main body heating furnace 1, the axle head of this miniature explosion-proof motor 93 is connected with nickel basket 8, nickel basket 8 can rotate together with miniature explosion-proof motor 93, play the object that promotes sample 14 and corrosive liquid fully to react and then improve corrosive effect, this miniature explosion-proof motor 93 is greater than 15 centimetres from the distance of the fire door of main body heating furnace 1, prevents that miniature explosion-proof motor 93 is roasting bad by the heat of fire door.
One nickel basket 8, is positioned at nickel crucible 5, and its upper end is connected with nickel basket whirligig 9, and for carrying sample 14, this nickel basket 8 is rectangle, and its bottom has some narrow rectangular channels, is used for placing sample 14;
One attemperating unit 12, be arranged on outside main body heating furnace 1, this attemperating unit 12 comprises: a temperature indicator 121, a temperature controller 122 and a thermopair 123, this thermopair 123 extend in nickel crucible 5 along the sidewall of main body heating furnace 1, the shell of described thermopair 123 is that nickel material is made, and can directly be put into reading temperature data in experimental liquid.Measured temperature is read by temperature indicator 121, and temperature controller 122 is connected with temperature indicator 121, and according to the feedback signal of temperature indicator 121, temperature is maintained to required experimental temperature.
During concrete use, can carry out corrosion experiment according to following operation steps:
The nickel crucible 5 that fills appropriate mordant is put into corrosion stove, and opening power heats and set corrosion temperature on temperature controller 122.Liquid is caused to temperature fluctuation tempestuously when preventing from putting into nickel basket 8, the nickel basket 8 of n.s. 14 can be put in advance together and be heated up.Should be by nickel matter bell 6 closures, to prevent that mordant steam from jeopardizing health in temperature-rise period.After temperature reaches preset temperature and stablizes, nickel matter bell 6 is opened, take out rapidly nickel basket 8 and sample 14 is put on it, be then put back into rapidly origin-location, shut nickel matter bell 6, open miniature explosion-proof motor 93 timing.After reaching etching time, close miniature explosion-proof motor 93 and open nickel matter bell 6, nickel basket 8 and sample 14 are taken off.Powered-down, after nickel crucible 5 is cooling, takes out and cleans, and completes experiment.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (7)
1. carbofrax material corrodes a stove, comprising:
One main body heating furnace, is the hollow circular cylinder of upper end open, and the internal face of main body heating furnace has one deck heat-barrier material, and the internal face of heat-barrier material has one deck heat-stable ceramic, and the outside wall surface of main body heating furnace is stainless steel material, is embedded with electric furnace heating wire in heat-stable ceramic;
One nickel matter bell, is positioned at above the opening of main body heating furnace;
One nickel crucible, is positioned at main body heating furnace;
One nickel basket whirligig, is positioned at the top of main body heating furnace;
One nickel basket, is positioned at nickel crucible, and its upper end is connected with nickel basket whirligig, for carrying sample;
One attemperating unit, is arranged on outside main body heating furnace.
2. carbofrax material according to claim 1 corrodes stove, and wherein nickel basket whirligig comprises:
One stationary shaft, is fixed on above the sidewall of main body heating furnace;
One fixed support, one end is connected with stationary shaft, and the other end becomes 90 degree to extend into the top of main body heating furnace with stationary shaft;
One miniature explosion-proof motor, is positioned on fixed support, and aims at the center of main body heating furnace, and the axle head of this miniature explosion-proof motor is connected with nickel basket.
3. carbofrax material according to claim 1 corrodes stove, and wherein attemperating unit comprises: a temperature indicator, a temperature controller and a thermopair.
4. carbofrax material according to claim 1 corrosion stove, wherein said nickel matter bell be level to opening structure, it is along stationary shaft folding in the horizontal direction, facilitates fetching and delivering of sample.
5. carbofrax material according to claim 1 corrodes stove, and wherein said nickel basket is rectangle, and its bottom has some narrow rectangular channels, is used for placing sample.
6. carbofrax material according to claim 2 corrodes stove, and wherein miniature explosion-proof motor is greater than 15 centimetres from the distance of the fire door of main body heating furnace.
7. carbofrax material according to claim 3 corrodes stove, and the shell of wherein said thermopair is that nickel material is made, and it is to be directly put into reading temperature data in experimental liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210105183.4A CN102607923B (en) | 2012-04-11 | 2012-04-11 | Silicon carbide material corrosion furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210105183.4A CN102607923B (en) | 2012-04-11 | 2012-04-11 | Silicon carbide material corrosion furnace |
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| CN102607923A CN102607923A (en) | 2012-07-25 |
| CN102607923B true CN102607923B (en) | 2014-04-09 |
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| CN201210105183.4A Expired - Fee Related CN102607923B (en) | 2012-04-11 | 2012-04-11 | Silicon carbide material corrosion furnace |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106480508A (en) * | 2016-12-22 | 2017-03-08 | 苏州奥趋光电技术有限公司 | A kind of wet etch processor for aluminum nitride crystal |
| CN108732084B (en) * | 2018-04-27 | 2020-02-14 | 长沙理工大学 | Corrosion fatigue performance testing device |
| CN113122929A (en) * | 2020-06-05 | 2021-07-16 | 北京世纪金光半导体有限公司 | Novel semiconductor single crystal wafer dislocation density detection corrosion tool and method |
| CN112964710A (en) * | 2021-01-22 | 2021-06-15 | 威科赛乐微电子股份有限公司 | Dislocation measuring method of gallium arsenide wafer |
Citations (6)
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| CN1174895A (en) * | 1997-01-05 | 1998-03-04 | 吉林工业大学 | Aluminium-base electric power plant fly-ash compsite material and preparation method and device |
| CN2470372Y (en) * | 2001-04-06 | 2002-01-09 | 北京有色金属研究总院 | Straight-drawing crystal grower controlled by steam pressure |
| CN1685180A (en) * | 2002-11-12 | 2005-10-19 | 住友电气工业株式会社 | Gas heating method and gas heating device |
| CN1922345A (en) * | 2004-02-19 | 2007-02-28 | 松下电器产业株式会社 | Method of manufacturing compound single crystal and apparatus for manufacturing it |
| CN101357295A (en) * | 2007-07-31 | 2009-02-04 | 康肯科技股份有限公司 | Semiconductor discharged-gas processing device |
| CN101769678A (en) * | 2008-12-30 | 2010-07-07 | 中国恩菲工程技术有限公司 | Furnace body of electric furnace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000084665A (en) * | 1998-09-09 | 2000-03-28 | Nkk Corp | Vertical downward build-up welding method |
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2012
- 2012-04-11 CN CN201210105183.4A patent/CN102607923B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1174895A (en) * | 1997-01-05 | 1998-03-04 | 吉林工业大学 | Aluminium-base electric power plant fly-ash compsite material and preparation method and device |
| CN2470372Y (en) * | 2001-04-06 | 2002-01-09 | 北京有色金属研究总院 | Straight-drawing crystal grower controlled by steam pressure |
| CN1685180A (en) * | 2002-11-12 | 2005-10-19 | 住友电气工业株式会社 | Gas heating method and gas heating device |
| CN1922345A (en) * | 2004-02-19 | 2007-02-28 | 松下电器产业株式会社 | Method of manufacturing compound single crystal and apparatus for manufacturing it |
| CN101357295A (en) * | 2007-07-31 | 2009-02-04 | 康肯科技股份有限公司 | Semiconductor discharged-gas processing device |
| CN101769678A (en) * | 2008-12-30 | 2010-07-07 | 中国恩菲工程技术有限公司 | Furnace body of electric furnace |
Non-Patent Citations (1)
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| JP特开2000-84665A 2000.03.28 |
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