CN102607692B - Excited amplitude consistency detection system and detection method for super-large size optical platform - Google Patents
Excited amplitude consistency detection system and detection method for super-large size optical platform Download PDFInfo
- Publication number
- CN102607692B CN102607692B CN201210083220.6A CN201210083220A CN102607692B CN 102607692 B CN102607692 B CN 102607692B CN 201210083220 A CN201210083220 A CN 201210083220A CN 102607692 B CN102607692 B CN 102607692B
- Authority
- CN
- China
- Prior art keywords
- tank
- catoptron
- optical table
- water surface
- display screen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to an excited amplitude consistency detection system for a super-large size optical platform. A laser is arranged on a holder on the left end of the central line of the optical platform, a CCD (Charge Coupled Device) camera which is connected with a computer through a wire is arranged on the laser, a front water tank and a rear water tank are symmetrically arranged at both sides of the central line of the optical platform, a beam splitter is arranged on the light-emerging direction at the right side of the laser on the holder, a split beam reflector is arranged on the transmitted light direction of the beam splitter, a left front reflector is arranged on the optical platform in the reflected light direction of the beam splitter, a left rear reflector which is symmetric to the left front reflector is arranged on the optical platform in the reflected light direction of the split beam reflector, diaphragms are arranged on the upper ends of the central lines of the left sidewalls of the front water tank and the rear water tank, a right front reflector is arranged on the optical platform in the reflected light direction of the water surface in the front water tank, a right rear reflector is arranged on the optical platform in the reflected light direction of the water surface in the rear water tank, the right rear reflector and the right front reflector are symmetric to each other according to the central line of the optical platform, and a display screen is arranged on the right end of the central line of the optical platform in the reflected light directions of the right front reflector and the right rear reflector.
Description
Technical field
The invention belongs to field of optical measuring technologies, be specifically related to a kind of super large yardstick optical table and be excited amplitude uniformity pick-up unit.
Background technology
Improving constantly of experimental apparatus and production and processing precision, also more and more higher to the requirement of working environment, optical table is to provide one of basic facility of this condition.The demand of super large yardstick optical table and use are increasingly extensive in recent years, but due to its size super large, in transportation and installation process, very easily there is deformation, particularly in use due to the reasons such as uneven subsidence of ground, make super large yardstick optical table different parts unbalance stress, thereby changed the consistance of table vibration performance, produced appreciable impact to the stability of scientific experiment and production technology.
Regularly detecting optical table table top under the excitation of same vibration, equate the consistance of position amplitude apart from vibration source, is the effective ways of understanding vibration of optical table consistency of performance.Detect at present the vibration performance of optical table, the general vibration spectrum analyzer that adopts carries out multimetering, but this instrument cost is high, complicated operation and common laboratory and production unit do not have, therefore study a kind of measurement mechanism of simple in structure, easy to operate, intuitive display, realization, to the conforming detection of super large yardstick vibration of optical table characteristic, has important Technological Economy meaning.
Summary of the invention
A technical matters to be solved by this invention is to overcome above-mentioned vibration spectrum analyzer for detection of the deficiency of vibration of optical table characteristic, provide a kind of simple in structure, easy to operate, production cost is low, the super large yardstick optical table of intuitive measurement results is excited amplitude uniformity pick-up unit.
Another technical matters to be solved by this invention is to provide a kind of super large yardstick optical table that uses to be excited the detection method of amplitude uniformity pick-up unit.
Solving the problems of the technologies described above adopted technical scheme is: on the support of optical table center line left end, be provided with laser instrument, on laser instrument, be provided with the CCD camera being connected with computing machine by wire, front tank and rear tank are set to symmetria bilateralis before and after optical table center line, on support, the right side of laser instrument is along being provided with beam splitter in the light exit direction of optical table center line, on support, the transmitted light direction of beam splitter is provided with a minute beam steering mirror, on the reflected light direction optical table of beam splitter, be provided with left front catoptron, on the reflected light direction optical table of minute beam steering mirror, be provided with left front catoptron and take optical table center line as symmetrical left back catoptron, in the reflected light direction of the left front catoptron in left side wall center line upper end of front tank, be provided with diaphragm, in the reflected light direction of the left back catoptron in left side wall center line upper end of rear tank, be provided with diaphragm, in front tank, on water-reflected light direction optical table, right front catoptron is set, in rear tank, on water-reflected light direction optical table, right back catoptron is set, right back catoptron and right front catoptron be take optical table center line as symmetrical, the optical table center line right-hand member of the reflected light direction of right front catoptron and right back catoptron is provided with display screen.
Front tank of the present invention is two rectangle tanks that structure is identical with rear tank.
Front tank of the present invention is identical with the height of water level in rear tank.
Above-mentioned super large yardstick optical table is excited the detection method of amplitude uniformity pick-up unit and is comprised of following step:
1, in front tank, rear tank, inject respectively distilled water, front tank is identical with the water level height of distilled water in rear tank.
2, adjust respectively angle to the folded light beam of left front catoptron and left back catoptron of left front catoptron and left back catoptron and pass through diaphragm, respectively with front tank, the parallel sidewalls of rear tank and optical table length direction, the crossing center of tank diagonal line before the incidence point of the reflection lasering beam that makes left front catoptron on the front tank water surface is positioned at, in reflection lasering beam and front tank, the incident angle of the water surface is 88.5 °, the crossing center of tank diagonal line before the incidence point of the reflection lasering beam that makes left back catoptron on the rear tank water surface is positioned at, in reflection lasering beam and rear tank, the incident angle of the water surface is 88.5 °.
3, on the center line of front tank and rear tank right side optical table, the weight with cone Rubber end that is 350g by quality, by 5cm eminence, freely fall and click table top, the vibration of front tank and rear bottom of gullet optical table forms water surface ripple on the surface of front tank and rear water trough inner water, water surface ripple produces modulation reflection to incoming laser beam, premenstrual tank water ground roll modulation reflexes to right front catoptron, by right front catoptron, reflexed on display screen, on display screen, present interference fringe, through after tank water ground roll modulation reflex to right back catoptron, by right back catoptron, reflexed on display screen, on display screen, present interference fringe.
By the interference fringe on CCD camera continuous acquisition display screen, and convert digital signal to and output to computing machine, select in two row interference fringes of continuous acquisition the maximum row interference fringes of striped number separately, and respectively to an interference fringe counting number of selecting, be calculated as follows the go forward excited vibration amplitude of tank and rear tank present position of optical table:
A
0＝0.944(N-1)-7.5
A in formula
0for optical table go forward tank or rear tank present position excited vibration amplitude, unit is μ m; N is that the surface wave of front tank or rear water trough inner water produces modulation reflection to incoming laser beam, the number of the row interference fringe that the striped number that presents on display screen is maximum.Detect the excited vibration amplitude of front tank and rear tank present position optical table, relatively the size of excited vibration amplitude; Change front tank and rear tank in the position of optical table center line both sides, super large yardstick optical table table top center line both sides different symmetric position excited vibration amplitude uniformity is detected, the difference of more different symmetric position excited vibration amplitude sizes, judges that whether excited vibration amplitude is consistent.
The present invention adopt the front and back of optical table center line symmetria bilateralis arrange before tank, rear tank, left front catoptron, left back catoptron, right front catoptron, right back catoptron, can be in the symmetrical movement in both sides, front and back of the center line of optical table by front tank, rear tank, left front catoptron, left back catoptron, right front catoptron, right back catoptron, realize the different antimeres in optical table table top center line both sides are excited to the detection of amplitude uniformity.Reasonable in design, simple in structure, easy to operate, the advantage such as production cost is low, intuitive measurement results that apparatus of the present invention have.The inventive method adopts laser beam incident to reflex on display screen to the surface wave of the upper surface formation of vibration water in tank of optical table table top again, presents interference fringe on display screen.The interference fringe of CCD camera continuous acquisition is also input to computing machine, by computing machine, according to the program of prior setting, calculates the number of interference fringe, and the different antimeres in definite optical table table top center line both sides are excited amplitude uniformity.
Accompanying drawing explanation
Fig. 1 is that one of the present invention is the structural representation of embodiment.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is the formed interference fringe photo of front tank 9 water surface ripple modulation reflection lasering beam of embodiment 1.
Fig. 4 is the formed interference fringe photo of rear tank 14 water surface ripple modulation reflection lasering beam of embodiment 1.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in more detail with each embodiment, but the invention is not restricted to these embodiment.
Embodiment 1
In Fig. 1, the super large yardstick optical table of the present embodiment is excited amplitude uniformity pick-up unit and is consisted of computing machine 1, support 2, CCD camera 3, laser instrument 4, beam splitter 5, minute beam steering mirror 6, left front catoptron 7, diaphragm 8, front tank 9, right front catoptron 10, display screen 11, left back catoptron 13, rear tank 14, right back catoptron 15.
Support 2 is fixed on optical table 12 center line left ends, on support 2, with screw threads for fastening connector, be fixedly connected laser instrument 4 is installed, laser instrument 4 emergent lights are positioned at optical table 12 central planes, the wavelength of laser instrument 4 is 632.8nm, on laser instrument 4, with screw threads for fastening connector, be fixedly connected CCD camera 3 is installed, CCD camera 3 is connected with computing machine 1 by wire, on support 2, the right side of laser instrument 4 is fixedly connected beam splitter 5 is installed with screw threads for fastening connector along the light exit direction of optical table centerline direction, the transmitted light direction of beam splitter 5 is fixedly connected minute beam steering mirror 6 is installed with screw threads for fastening connector, the angle of beam splitter 5 and minute beam steering mirror 6 is adjustable, the laser beam being penetrated by laser instrument 4 is that 632.8nm laser penetrates to being divided into two bundle wavelength after beam splitter 5.On support 2, on the optical table 12 of the reflected light direction of beam splitter 5, be provided with on the optical table 12 of reflected light direction of left front catoptron 7, minute beam steering mirror 6 and be provided with left back catoptron 13, position and the optical table center line of left front catoptron 7 and left back catoptron 13 are symmetrical, and can move left and right in both sides before and after optical table center line, left front catoptron 7 is for reflecting the reflected light of beam splitter 5, left back catoptron 13 is for reflecting the light of minute beam steering mirror 6 reflections, and left front catoptron 7 and left back catoptron 13 can rotate adjusts catoptrical direction.On the optical table 12 of the light reflection direction of left front catoptron 7, be provided with front tank 9, on the optical table 12 of the light reflection direction of left back catoptron 13, be provided with rear tank 14, front tank 9 and rear tank 14 are a rectangle tank, and the length of front tank 9 and rear tank 14 * wide is 30 * 20cm
2the length direction of front tank 9 and rear tank 14 is identical with the length direction of optical table 12, front tank 9 and rear tank 14 is symmetrical and can move left and right in both sides before and after optical table center line with optical table center line, in front tank 9 and rear tank 14, water is housed, the water surface elevation in front tank 9 and rear tank 14 is 60mm.In the reflected light direction of the left front catoptron 7 in left side wall center line upper end of front tank 9, with screw threads for fastening connector, be fixedly connected 1 diaphragm 8 is installed, in the reflected light direction of the left back catoptron 13 in left side wall center line upper end of rear tank 14, with screw threads for fastening connector, be fixedly connected 1 diaphragm 8 is installed, the aperture of diaphragm 8 is 2.3mm.Right front catoptron 10 is set on water-reflected light direction optical table 12 in front tank 9, right back catoptron 15 is set on water-reflected light direction optical table 12 in rear tank 14, right front catoptron 10 and right back catoptron 15 positions and optical table center line is symmetrical and can move left and right both sides before and after the optical table center line, right front catoptron 10 and right back catoptron 15 can rotate adjusts catoptrical direction.The reflected light of right front catoptron 10 and right back catoptron 15 reflexes on the display screen 11 that is arranged on optical table center line right-hand member.
The laser beam of beam splitter 5 reflection through left front catoptron 7, through diaphragm 8,9 water surface wave reflections of premenstrual tank to right front catoptron 10, reflexed on display screen 11 by right front catoptron 10, the transmission laser Shu Jingfen beam steering mirror 6 of beam splitter 5 reflex to left back catoptron 13, through diaphragm 8, through after tank 14 water surface wave reflections to right back catoptron 15, reflexed on display screen 11 by right back catoptron 15, the reflected light of left front catoptron 7 and left back catoptron 13 is symmetrical to the light path of display screen 11, synchronously presents two row interference fringe images on display screen 11.
Adopting above-mentioned super large yardstick optical table to be excited amplitude uniformity pick-up unit detects 7TBP60-15 type optical table (6000 * 1500 * 800) to be excited the method for amplitude uniformity as follows:
1, at front tank 9, the interior distilled water that injects respectively of rear tank 14, the height of water level of front tank 9 and rear tank 14 interior distilled water is 60mm.
2, the angle of adjusting respectively left front catoptron 7 and left back catoptron 13 to the reflected light of left front catoptron 7 and left back catoptron 13 by diaphragm 8, respectively with front tank 9, the parallel sidewalls of rear tank 14 length directions, the crossing center of tank 9 diagonal line before the incidence point of the reflection lasering beam that makes left front catoptron 7 on front tank 9 waters surface is positioned at, the incident angle of reflection lasering beam and the front tank 9 interior waters surface is 88.5 °, the crossing center of tank 14 diagonal line after the incidence point of the reflection lasering beam that makes left back catoptron 13 on rear tank 14 waters surface is positioned at, the incident angle of reflection lasering beam and the rear tank 14 interior waters surface is 88.5 °.
3, on the center line of front tank 9 and rear tank 14 right side optical tables 12, the weight with cone Rubber end that is 350g by quality, by 5cm eminence, freely fall and click table top, on the water surface of the vibration of bottom of gullet optical table in front tank 9 and rear tank 14, form water surface ripple, water surface ripple produces modulation reflection to incoming laser beam, premenstrual tank 9 water surface ripple modulation reflex to right front catoptron 10, by right front catoptron 10, reflexed on display screen 11, on display screen 11, present interference fringe, through after tank 14 water surface ripples modulation reflex to right back catoptron 15, by right back catoptron 15, reflexed on display screen 11, on display screen 11, present interference fringe.
The interference fringe of pressing on 16 width continuous acquisition display screens 11 per second with CCD camera 3, and convert digital signal to and output to computing machine 1, select in two row interference fringes of continuous acquisition the maximum row interference fringes of striped number separately, and respectively to an interference fringe counting number of selecting, result is as Fig. 3, shown in Fig. 4, Fig. 3 is the maximum row interference fringe of the front tank 9 water surface ripple modulation formed striped number of reflection lasering beam, interference fringe has 12, Fig. 4 is the maximum row interference fringe of the rear tank 14 water surface ripple modulation formed striped number of reflection lasering beam, interference fringe has 12, computing machine 1 is pressed
A
0＝0.944(N-1)-7.5
The excited vibration amplitude that calculates front tank 9 and rear tank 14 bottom optical tables 12 is 2.88 μ m, illustrate take 7TBP60-15 type optical table (6000 * 1500 * 800) table top center line as symmetrical front tank 9 consistent with the excited vibration amplitude of rear tank 14 present position optical tables 12.
Claims (1)
1. super large yardstick optical table is excited a detection method for amplitude uniformity pick-up unit, it is characterized in that it is comprised of following step:
A, at front tank (9), rear tank, in (14), inject respectively distilled water, front tank (9) is identical with the water level height of the interior distilled water of rear tank (14);
B, adjust respectively angle to the folded light beam of left front catoptron (7) and left back catoptron (13) of left front catoptron (7) and left back catoptron (13) and pass through diaphragm (8), respectively with front tank (9), the parallel sidewalls of rear tank (14) and optical table length direction, the incidence point of the reflection lasering beam that makes left front catoptron (7) on front tank (9) water surface is positioned at the crossing center of front tank (9) diagonal line, the incident angle of reflection lasering beam and the interior water surface of front tank (9) is 88.5 °, the incidence point of the reflection lasering beam that makes left back catoptron (13) on rear tank (14) water surface is positioned at the crossing center of front tank (9) diagonal line, the incident angle of reflection lasering beam and the interior water surface of rear tank (14) is 88.5 °,
C, on the center line of front tank (9) and rear tank (14) right side optical table (12), the weight with cone Rubber end that is 350g by quality, by 5cm eminence, freely fall and click table top, the surface of vibration water in front tank (9) and rear tank (14) of front tank (9) and rear tank (14) bottom optical table forms water surface ripple, water surface ripple produces modulation reflection to incoming laser beam, the modulation of premenstrual tank (9) water surface ripple reflexes to right front catoptron (10), by right front catoptron (10), reflexed on display screen (11), on display screen (11), present interference fringe, through after tank (14) water surface ripple modulation reflex to right back catoptron (15), by right back catoptron (15), reflexed on display screen (11), on display screen (11), present interference fringe,
By the interference fringe on CCD camera (3) continuous acquisition display screen (11), and convert digital signal to and output to computing machine (1), select in two row interference fringes of continuous acquisition the maximum row interference fringes of striped number separately, and respectively to an interference fringe counting number of selecting, be calculated as follows the go forward excited vibration amplitude of tank (9) and rear tank (14) present position of optical table (12):
A
0=0.944(N－1)－7.5
A in formula
0for optical table (12) go forward tank (9) or rear tank (14) present position excited vibration amplitude, unit is μ m; N is that the surface wave of front tank (9) or rear interior the water of tank (14) produces modulation to incoming laser beam and reflects, the number of the row interference fringe that the striped number that presents on display screen (11) is maximum; Detect the excited vibration amplitude of front tank (9) and rear tank (14) present position optical table (12), relatively the size of excited vibration amplitude; Change front tank (9) and rear tank (14) in the position of optical table (12) center line both sides, super large yardstick optical table (12) table top center line both sides different symmetric position excited vibration amplitude uniformity is detected, the difference of more different symmetric position excited vibration amplitude sizes, judges that whether excited vibration amplitude is consistent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210083220.6A CN102607692B (en) | 2012-03-27 | 2012-03-27 | Excited amplitude consistency detection system and detection method for super-large size optical platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210083220.6A CN102607692B (en) | 2012-03-27 | 2012-03-27 | Excited amplitude consistency detection system and detection method for super-large size optical platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102607692A CN102607692A (en) | 2012-07-25 |
| CN102607692B true CN102607692B (en) | 2014-03-05 |
Family
ID=46525275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210083220.6A Expired - Fee Related CN102607692B (en) | 2012-03-27 | 2012-03-27 | Excited amplitude consistency detection system and detection method for super-large size optical platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102607692B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113828867A (en) * | 2021-10-12 | 2021-12-24 | 科益展智能装备有限公司 | Ultrasonic machining apparatus and control method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6655215B2 (en) * | 2001-06-15 | 2003-12-02 | Honeywell International Inc. | Inverse corner cube for non-intrusive three axis vibration measurement |
-
2012
- 2012-03-27 CN CN201210083220.6A patent/CN102607692B/en not_active Expired - Fee Related
Non-Patent Citations (10)
| Title |
|---|
| 低频液体表面波的激光干涉测量;苗润才等;《中国激光》;20040630;第31卷(第6期);全文 * |
| 低频液体表面波衍射条纹的不对称性;刘香莲等;《激光技术》;20071231;第31卷(第6期);全文 * |
| 刘香莲等.低频液体表面波衍射条纹的不对称性.《激光技术》.2007,第31卷(第6期),全文. |
| 小振幅低频液体表面波的光学干涉效应的研究;祁建霞等;《光学技术》;20090930;第35卷(第5期);全文 * |
| 液体表面波振幅与激发深度的关系;苗润才等;《光子学报》;20110630;第40卷(第6期);第1部分实验装置及现象，图1 * |
| 液面微幅波动的激光干涉测量;罗道斌等;《光学技术》;20110131;第37卷(第1期);全文 * |
| 祁建霞等.小振幅低频液体表面波的光学干涉效应的研究.《光学技术》.2009,第35卷(第5期),全文. |
| 罗道斌等.液面微幅波动的激光干涉测量.《光学技术》.2011,第37卷(第1期),全文. |
| 苗润才等.低频液体表面波的激光干涉测量.《中国激光》.2004,第31卷(第6期),全文. |
| 苗润才等.液体表面波振幅与激发深度的关系.《光子学报》.2011,第40卷(第6期),第1部分实验装置及现象，图1. |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102607692A (en) | 2012-07-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102607788B (en) | Device and method for detecting vibration isolation performance consistency of oversized optical platform | |
| CN102147234B (en) | Laser triangulation sensor | |
| CN105423958A (en) | Multi-optical-axis parallelism detection apparatus and method | |
| RU2015116588A (en) | SPECTROSCOPIC MEASURING DEVICE | |
| CN105157618A (en) | Calculated intensity correlated imaging autocollimator and measurement method | |
| CN102735380B (en) | Multi-function electronic speckle interferometer | |
| RU2013143824A (en) | DEVICE FOR MEASURING OPTICAL CHARACTERISTICS AND METHOD FOR MEASURING OPTICAL CHARACTERISTICS | |
| CN102944312A (en) | Method for measuring partially coherent vortex light beam topological charge number | |
| CN103267482A (en) | High-accuracy displacement detection device and method | |
| CN207623515U (en) | A kind of discrete fixed multi-line laser radar of photoelectricity module | |
| CN102607692B (en) | Excited amplitude consistency detection system and detection method for super-large size optical platform | |
| CN102564895B (en) | Liquid density on-line monitoring system based on ultrasonic diffraction grating | |
| CN102679907A (en) | High-precision differential interference measuring system and method based on LED light source | |
| CN103307969A (en) | White-light interferometric measuring device | |
| CN100410628C (en) | Laser-interfering measurement device | |
| CN105606488B (en) | The manoscopy system and its measurement method easily adjusted | |
| CN201514225U (en) | Light interference fringe reversible counting device with image display function | |
| CN103674220B (en) | Vibration measuring system | |
| CN203825297U (en) | Optical system for generating adjustable-parameter approximate non-diffraction gating structured light | |
| CN102620906B (en) | Optical table vibration isolation performance acoustooptic modulation detection device and detection method | |
| CN203310374U (en) | High precision displacement detection device | |
| CN102983492A (en) | Saturated absorption Doppler broadening spectral line device | |
| CN108007394B (en) | Remote high-precision centering debugging device and debugging method thereof | |
| CN216161296U (en) | Sound velocity sound intensity measurement experimental instrument based on liquid acousto-optic effect | |
| CN102607693B (en) | Acousto-optic modulation detection device and detection method for vibration performance of optical table |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C53 | Correction of patent of invention or patent application | ||
| CB02 | Change of applicant information |
Address after: 710062 Changan South Road, Shaanxi, No. 199, No. Applicant after: Shaanxi Normal University Applicant after: Xi'an Aeronautical University Address before: 710062 Changan South Road, Shaanxi, No. 199, No. Applicant before: Shaanxi Normal University Applicant before: Xi'an Aerotechnical College |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140305 Termination date: 20150327 |
|
| EXPY | Termination of patent right or utility model |