CN102607468A - Small-angle displacement sensor based on double-channel grating - Google Patents
Small-angle displacement sensor based on double-channel grating Download PDFInfo
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- CN102607468A CN102607468A CN201210061110XA CN201210061110A CN102607468A CN 102607468 A CN102607468 A CN 102607468A CN 201210061110X A CN201210061110X A CN 201210061110XA CN 201210061110 A CN201210061110 A CN 201210061110A CN 102607468 A CN102607468 A CN 102607468A
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Abstract
The invention discloses a small-angle displacement sensor based on a double-channel grating. The small-angle displacement sensor mainly comprises a linear laser and a focusing lens, wherein the linear laser can be used for generating linear laser light which is converged through a collimating lens, radiated onto a tested object and reflected; the focusing lens is used for receiving the reflected linear laser light and converging; a channel I grating region and a channel II grating region which are respectively irradiated and transmitted by the converged linear laser light are formed behind the focusing lens; a channel I photoelectric detector and a channel II photoelectric detector for receiving linear laser light are arranged respectively corresponding to the channel I grating region and the channel II grating region; and the output ports of the channel I photoelectric detector and the channel II photoelectric detector are connected with the input port of a real-time signal processing circuit respectively. The small-angle displacement sensor has the characteristics of simple structure, high linearity, high sensitivity, high measuring frequency, high resolution, high instantaneity and the like, and can be applied to online or offline detection of static and dynamic characteristics of small angle displacement of elements such as high-frequency permanent magnet torque motors.
Description
Technical field
The present invention relates to a kind of micro angular displacement sensor, belong to the photoelectric sensor technical field based on dual-channel grating.
Background technology
High frequency permanent magnetic torque motor has the frequency response height, displacement is little, output torque is less and characteristics such as contour structures complicacy.Therefore it is carried out the measurement of static and dynamic performance, need to adopt to have high resolving power, high frequency sound, high sensitivity, good linearity and real-time, and be applicable to the sensor of non-contact measurement.High precision commonly used, the displacement transducer of non-contact measurement have two kinds of current vortex sensor and laser displacement sensors.
Current vortex sensor is based on eddy current effect work; The displacement measurement that can be used for metallic conductor (ferromagnetic material or nonferromagnetic material all can); Have non-contact measurement, highly sensitive, antijamming capability by force, does not receive the influence of non-magnetic conductive media like oil, greasy dirt, dust, water and steam; Reliability is high, can work in advantages such as corrosion environment.But the contour structures of elements such as permanent magnetic torque motor is complicated, and its fixed part and moving component are metal, so current vortex sensor is not suitable for the measurement of elements such as high frequency permanent magnetic torque motor.
Laser displacement sensor is the transmission medium of displacement signal with laser and light path thereof, the good directionality of laser, light power stabilising, so measuring accuracy is high, and the linearity is good, good stability, and volume is little, and is applicable to non-contact measurement.Laser displacement sensor is a photoelectric apparatus with charge-coupled device (CCD), cmos device or position sensitive detector (PSD); Measurement Resolution and frequency are high; But the driving circuit complicacy of photoelectric apparatus such as high-res CCD, CMOS and cost are high, cause that the laser sensor general structure is complicated, cost is high; And the after-treatment system of forming with high speed microprocessor (MCU) or digital signal processor (DSP) and software thereof, inevitably system's time delay has limited the real-time of sensor kinetic measurement, therefore is difficult to use in real-time measurement.Simultaneously, the laser triangulation sensor of prior art such as the product of Micro-Epsilon company adopt the converging light direct scan, and the product of Keyence company adopts the converging light angle beam method, all is difficult to use in the measurement of micro angular displacement.
Summary of the invention
The objective of the invention is to overcome the deficiency that prior art exists; And provide a kind of simple in structure; The linearity is good, and is highly sensitive, and survey frequency is high; High and the good micro angular displacement sensor based on dual-channel grating of real-time of resolution, it can be applicable to the online or offline inspection of quiet dynamic perfromance of the micro angular displacement of element such as high frequency permanent magnetic torque motor.
The objective of the invention is to accomplish through following technical scheme; A kind of micro angular displacement sensor based on dual-channel grating: it mainly comprises: one linear laser can take place and assemble through collimation lens after be mapped to the linear laser device that is reflected on the testee; One can receive the condenser lens of the said linear laser that is reflected and by being assembled; After this condenser lens, be provided with by assembling a passage grating and two zones of two passage gratings that the back linear laser shines and see through dual-channel grating respectively; Be provided with a passage photodetector and the two passage photodetectors that receive linear laser respectively corresponding to a said passage grating and two zones of two passage gratings, the output port of a said passage photodetector and two passage photodetectors links to each other with the input port of a real time signal processing circuit respectively.
Described dual-channel grating:, be parallel to each other between light and dark striped and the width unanimity, and be divided into a passage grating and two zones of two passage gratings for it is provided with the clear glass thin slice of the light and dark striped of high resolving power.
Described light and dark striped adopts etching method to be processed into, and wherein the width of single striped is less than 5 μ m; Geographically be provided with side-play amount between the light and shade striped of one passage grating and two passage gratings; And when the spacing of adjacent bright fringe or adjacent dark fringe is Δ; Its side-play amount is set to Δ/4, and making the phase differential between the output signal of its corresponding respectively passage photodetector and two passage photodetectors is 90 °.
Described real time signal processing circuit: comprise signal conditioning circuit, counter, timing generator circuit and digital to analog converter; Signal conditioning circuit is made up of amplifying circuit and trigger circuit; Counter is made up of CPLD; Timing generator circuit is shaken by CPLD and high frequency clock and is formed; The output port of one passage photodetector and two passage photodetectors links to each other with the input port of signal conditioning circuit respectively; The output port of signal conditioning circuit links to each other with the input port of counter; The output port of counter links to each other with the data bus port of digital to analog converter, and the output port of timing generator circuit links to each other with the control port of digital-to-analog conversion device.
Described linear laser device: adopting wavelength is the 650nm semiconductor laser, and the length that the linear laser of said semiconductor laser takes place is 10-20mm, and width is 0.01-0.05mm.
Described semiconductor laser configurations has can carry out real-time regulated to the light intensity of linear laser, guarantee that thereby stabilized intensity guarantees the stabilized intensity circuit of measuring accuracy.
The present invention has following beneficial technical effects:
1, adopts directional light oblique fire formula laser triangulation, be applicable to the measurement of micro angular displacement, and the placement location of testee is not had strict demand, be applicable to the measurement of micro angular displacement;
2, adopt dual-channel grating, improved the measurement resolution, have the measuring accuracy height, resolution is high, the characteristics that the linearity is good;
3, adopt the real time signal processing circuit, shortened the processing time, have the survey frequency height, the characteristics that real-time is good;
4, the output with this sensor is connected to oscillograph, and quiet dynamic perfromance that can the real-time online measuring micro angular displacement comprises step response, sinusoidal response etc.;
5, simple in structure, cost is low, realizes easily.
Therefore the present invention can be applicable to the online or offline inspection of quiet dynamic perfromance of the micro angular displacement of element such as high frequency permanent magnetic torque motor.
Description of drawings
Fig. 1 is a structural principle synoptic diagram of the present invention;
Fig. 2 is the structural representation of dual-channel grating of the present invention
Fig. 3 is the structured flowchart of real time signal processing circuit of the present invention;
Fig. 4 is an application implementation illustration intention of the present invention;
Fig. 5 is that high frequency permanent magnetic torque motor step response is measured curve.
Among the figure: 1. testee, 2. collimation lens, 3. linear laser device, 4. condenser lens, 5. dual-channel grating; 6. a passage photodetector, 7. two passage photodetectors, 8. treatment circuit, 9. signal conditioning circuit in real time; 10. counter, 11. timing generator circuit, 12. digital-to-analogues are changed converter, 13. signal generators; 14. power amplifier, 15. sensors, 16. oscillographs, 17. step response curves.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is described further.
Fig. 1,2, shown in 3; The present invention mainly comprises: one linear laser can take place and assemble through collimation lens 2 after be mapped to the linear laser device 3 that is reflected on the testee 1; One can receive the condenser lens 4 of the said linear laser that is reflected and assembled; After this condenser lens 4, be provided with by assembling a passage grating and two zones of two passage gratings that the back linear laser shines and see through dual-channel grating 5 respectively; Be provided with a passage photodetector 6 and the two passage photodetectors 7 that receive linear laser respectively corresponding to a said passage grating and two zones of two passage gratings, the output port of a said passage photodetector 6 and two passage photodetectors 7 links to each other with the input port of a real time signal processing circuit 8 respectively.
Described dual-channel grating 5: for it is provided with the clear glass thin slice of high-resolution light and dark striped; Be parallel to each other between the light and shade striped and the width unanimity; Be divided into a passage grating and two zones of two passage gratings, correspond respectively to a passage photodetector 6 and two passage photodetectors 7; The processing of light and shade striped can be adopted etching method, and by present technology, the width of single striped can be less than 5 μ m; Geographically be provided with side-play amount between the light and shade striped of one passage grating and two passage gratings; When the spacing of adjacent bright fringe or adjacent dark fringe is Δ; Its side-play amount is set to Δ/4, and making the phase differential between the output signal of its corresponding respectively passage photodetector 6 and two passage photodetectors 7 is 90 °.
Described real time signal processing circuit 8: comprise signal conditioning circuit 9, counter 10, timing generator circuit 11 and digital to analog converter (D/A) 12; Signal conditioning circuit 9 is made up of amplifying circuit (not shown) and trigger circuit (not shown); Counter 10 is made up of CPLD (CPLD); Timing generator circuit 11 is shaken by CPLD (CPLD) and high frequency clock and is formed.The output port of one passage photodetector 6 and two passage photodetectors 7 links to each other with the input port of signal conditioning circuit 9 respectively; The output port of signal conditioning circuit 9 links to each other with the input port of counter 10; The output port of counter 10 links to each other with the data bus port of digital to analog converter (D/A) 12; The output port of timing generator circuit 11 links to each other with the control port of digital-to-analog conversion device (D/A) 12.The alternating signal of 9 pairs one passage photodetectors 6 of signal conditioning circuit and 7 outputs of two passage photodetectors amplifies and shaping, and phase difference output is 90 ° two-way square-wave signal a to counter 10; Counter 10 is judged the direction of motion of testee 1 according to the phase differential of two-way square-wave signal, and according to judged result square-wave signal is added, subtracts counting, exports count results to digital to analog converter (D/A) 12 then; Timing generator circuit 11 produces the control timing of digital to analog converter (D/A) 12, drives digital to analog converter (D/A) 12 and changes output, and its output voltage values is directly proportional with the angular displacement of testee 1.
Described linear laser device 3: adopting wavelength is the 650nm semiconductor laser; The linear laser length that takes place is 10-20mm, and width is 0.01-0.05mm, and adopts the stabilized intensity circuit that its light intensity is carried out real-time regulated; Guarantee stabilized intensity, thereby guarantee measuring accuracy.
A described passage photodetector 6, two passage photodetectors 7 and digital to analog converter (D/A) 12 all adopt short time delay, fireballing device, to guarantee the real-time of sensor.
Embodiment:
The focal length that present embodiment is got condenser lens is 25mm; The width of the single striped of dual-channel grating 5 is 10 μ m; Be 100 (50 bright fringes and 50 dark fringes) effectively as fringe number; Calculating the range that can get the embodiment of the invention according to principle of work is 0.02rad, and resolution is 0.0002rad, and survey frequency is 10KHz.
Shown in Figure 4, adopt the dynamic property of embodiment of the invention sensor 15 pairs of high frequency permanent magnetic torques motor (damping is bigger) to test.High frequency permanent magnetic torque motor as testee 1, is installed on the tested position; The output port of signal generator 13 links to each other with the input port of power amplifier 14, and the output port of power amplifier 14 links to each other with the input port of testee 1, and output port of the present invention links to each other with oscillograph 16.The linear laser that linear laser device 3 takes place is divergent shape; After collimation lens 2 is converged to directional light; Be incident on testee 1 surface; Its reflected light is focused into the consistent linear laser of single light and shade width of fringe of live width and dual-channel grating 5 behind collectiong focusing lens 4, be radiated on the dual-channel grating 5; The signal of signal generator 13 outputs rotates through the armature that power amplifier 14 amplifies rear drive testee 1; When armature rotational angle θ; Drive the laser-beam deflection after reflecting; The one passage grating of the dual-channel grating 5 that shines and see through and the position of two passage gratings change thereupon, record the output of embodiment of the invention sensor 15 with oscillograph 16.Amplitude is the step signal power input amplifier 14 of 4V; Amplify the armature movement of rear drive testee 1 through power amplifier 14; Record the step response curve 17 of high frequency permanent magnetic torque motor 1, as shown in Figure 5, the angular displacement of tested permanent magnetic torque motor 1 is 0.0062rad; The rise time of step response is about 0.68ms, and response frequency reaches 3.8kHz.
Equivalent transformation of the present invention all should be thought and falls into protection scope of the present invention.
Claims (6)
1. micro angular displacement sensor based on dual-channel grating; It is characterized in that it mainly comprises: one can take place to be mapped to the linear laser device (3) that is reflected on the testee (1) after linear laser is also assembled through collimation lens (2); One can receive the condenser lens (4) of the said linear laser that is reflected and by being assembled; Be provided with afterwards by assembling a passage grating and two zones of two passage gratings that the back linear laser shines and see through dual-channel grating (5) respectively at this condenser lens (4); Be provided with a passage photodetector (6) and the two passage photodetectors (7) that receive linear laser respectively corresponding to a said passage grating and two zones of two passage gratings, the output port of a said passage photodetector (6) and two passage photodetectors (7) links to each other with the input port of a real time signal processing circuit (8) respectively.
2. the micro angular displacement sensor based on dual-channel grating according to claim 1; It is characterized in that described dual-channel grating (5): for it is provided with the clear glass thin slice of the light and dark striped of high resolving power; Be parallel to each other between light and dark striped and the width unanimity, and be divided into a passage grating and two zones of two passage gratings.
3. the micro angular displacement sensor based on dual-channel grating according to claim 2 is characterized in that described light and dark striped adopts etching method to be processed into, and wherein the width of single striped is less than 5 μ m; Geographically be provided with side-play amount between the light and shade striped of one passage grating and two passage gratings; And when the spacing of adjacent bright fringe or adjacent dark fringe is Δ; Its side-play amount is set to Δ/4, and making the phase differential between the output signal of its corresponding respectively passage photodetector 6 and two passage photodetectors 7 is 90 °.
4. the micro angular displacement sensor based on dual-channel grating according to claim 1 is characterized in that described real time signal processing circuit (8): comprise signal conditioning circuit (9), counter (10), timing generator circuit (11) and digital to analog converter (12); Signal conditioning circuit (9) is made up of amplifying circuit and trigger circuit; Counter (10) is made up of CPLD; Timing generator circuit (11) is shaken by CPLD and high frequency clock and is formed; The output port of one passage photodetector (6) and two passage photodetectors (7) links to each other with the input port of signal conditioning circuit (9) respectively; The output port of signal conditioning circuit (9) links to each other with the input port of counter (10); The output port of counter (10) links to each other with the data bus port of digital to analog converter (12), and the output port of timing generator circuit (11) links to each other with the control port of digital-to-analog conversion device (12).
5. the micro angular displacement sensor based on dual-channel grating according to claim 1; It is characterized in that described linear laser device (3): adopting wavelength is the 650nm semiconductor laser; And the length that the linear laser of said semiconductor laser takes place is 10-20mm, and width is 0.01-0.05mm.
6. the micro angular displacement sensor based on dual-channel grating according to claim 5, thus it is characterized in that described semiconductor laser configurations has can carry out real-time regulated to the light intensity of linear laser, guarantees that stabilized intensity guarantees the stabilized intensity circuit of measuring accuracy.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201210061110 CN102607468B (en) | 2012-03-09 | 2012-03-09 | Small-angle displacement sensor based on double-channel grating |
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| CN 201210061110 CN102607468B (en) | 2012-03-09 | 2012-03-09 | Small-angle displacement sensor based on double-channel grating |
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| CN102607468B CN102607468B (en) | 2013-08-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110006366A (en) * | 2019-03-25 | 2019-07-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of angle displacement measuring device that image is reflective and its method |
Citations (7)
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| CN87106274A (en) * | 1986-08-15 | 1988-02-24 | 株式会社三丰制作所 | Optical type displacement detecting device |
| US4985623A (en) * | 1988-01-22 | 1991-01-15 | Mitytoyo Corporation | Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations |
| US5065014A (en) * | 1989-03-03 | 1991-11-12 | Gunther Krieg | Rotation angle measuring with overlap area is between two optical grating axes |
| WO1998053271A2 (en) * | 1997-05-16 | 1998-11-26 | Ibsen Micro Structures A/S | Method and apparatus for determining angular displacement, surface translation, and twist |
| US20040183701A1 (en) * | 2003-03-06 | 2004-09-23 | Harmonic Drive Systems Inc. | Projection-type rotary encoder |
| CN1563883A (en) * | 2004-03-31 | 2005-01-12 | 西北工业大学 | Fiber glass motion transducer |
| CN1841027A (en) * | 2005-03-28 | 2006-10-04 | 索尼株式会社 | Displacement detection apparatus, displacement measuring apparatus and fixed point detection apparatus |
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2012
- 2012-03-09 CN CN 201210061110 patent/CN102607468B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87106274A (en) * | 1986-08-15 | 1988-02-24 | 株式会社三丰制作所 | Optical type displacement detecting device |
| US4985623A (en) * | 1988-01-22 | 1991-01-15 | Mitytoyo Corporation | Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations |
| US5065014A (en) * | 1989-03-03 | 1991-11-12 | Gunther Krieg | Rotation angle measuring with overlap area is between two optical grating axes |
| WO1998053271A2 (en) * | 1997-05-16 | 1998-11-26 | Ibsen Micro Structures A/S | Method and apparatus for determining angular displacement, surface translation, and twist |
| US20040183701A1 (en) * | 2003-03-06 | 2004-09-23 | Harmonic Drive Systems Inc. | Projection-type rotary encoder |
| CN1563883A (en) * | 2004-03-31 | 2005-01-12 | 西北工业大学 | Fiber glass motion transducer |
| CN1841027A (en) * | 2005-03-28 | 2006-10-04 | 索尼株式会社 | Displacement detection apparatus, displacement measuring apparatus and fixed point detection apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110006366A (en) * | 2019-03-25 | 2019-07-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of angle displacement measuring device that image is reflective and its method |
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