CN102583216A - Microstructure for detecting mechanical properties of one-dimensional nanometer materials - Google Patents
Microstructure for detecting mechanical properties of one-dimensional nanometer materials Download PDFInfo
- Publication number
- CN102583216A CN102583216A CN2012100234715A CN201210023471A CN102583216A CN 102583216 A CN102583216 A CN 102583216A CN 2012100234715 A CN2012100234715 A CN 2012100234715A CN 201210023471 A CN201210023471 A CN 201210023471A CN 102583216 A CN102583216 A CN 102583216A
- Authority
- CN
- China
- Prior art keywords
- micro
- structural
- nanometer material
- platform
- detect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention discloses a microstructure for detecting mechanical properties of a one-dimensional nanometer material. The microstructure comprises a frame-shaped bracket, wherein two symmetrically arranged upper platforms are connected on the frame-shaped bracket by at least four symmetrical upper vertical beams; the measured nanometer material is fixed between the two upper platforms; two ends of each of the two upper platforms are respectively supported on a supporting seat of the frame-shaped bracket by a lower supporting beam; a lower platform is connected below the two upper platforms by at least four symmetrical oblique beams; and the lower platform is used for applying an external load. The preparation material of the microstructure is polycrystalline silicon, the preparation process of the microstructure is compatible with the existing silicon micromachining process, and the microstructure can be prepared in batches. The load on the one-dimensional nanometer material and the deformation situation of the nanometer material under an effect of the load can be obtained at the same time, and the properties of the nanometer material are not influenced in a detection process.
Description
Technical field
The present invention relates to micro mechanical technology and nanometer material science field; Be a kind of micro mechanical structure particularly; Be used to detect the micro-structural that monodimension nanometer material stretches and compresses mechanical property, be fit to be used for detecting monodimension nanometer material Young's modulus, hot strength, fracture strength etc.
Background technology
Monodimension nanometer material like nanotube, nano wire and nano belt etc., is the low-dimensional nano structure material with excellent rerum natura, estimates will to be with a wide range of applications in Mechatronic Systems, gas sensor, nano-electron and the field of optoelectronic devices receiving of future.But along with reducing of scantling, when being reduced to nanometer, highlighting of correlation effects such as dimensional effect, skin effect and quantum effect makes some physical propertys of nano material and conventional body material be very different, and the characteristic of many novelties occurs.The mechanical characteristics of nano material and behavior will directly have influence on its application, and the nano-device that constitutes by it with receive the function of Mechatronic Systems, therefore, important to the research ten minutes of nano material mechanics characteristic and behavior.
At present, be subject to current experiments condition and measuring technique, nano material is carried out direct Experiments of Machanics and measured also quite difficulty, most of measurement means are based on the hybrid system of electronic/mechanical or heat/machinery.In situ detection means to the nano material under the bearing load situation; The tension measurement that comprises the MEMS that utilizes static driven or heat driving; Bending, compression and stretching measurement etc. that AFM is auxiliary; These measuring methods or measurement are not direct, or only can measure qualitatively.Most of qualitative, directly measuring method can not be measured for the distortion of the load that acts on sample and sample simultaneously individually.Though can overcome the problems referred to above in the measuring method of utilizing static driven or heat to drive, have shortcomings such as implementation cost height, the error of calculation are big, and be prone to sample itself is exerted an influence.
Research work in sum, novel measurement device and measuring method need to measure monodimension nanometer material bearing load and distortion situation simultaneously, and sample itself is not had influence.
Summary of the invention
The object of the invention is to provide a kind of micro-structural that is used to detect the monodimension nanometer material mechanical property; This structure can obtain monodimension nanometer material bearing load and the distortion situation under the load effect simultaneously, and in testing process, the nano material self character is not influenced.
The objective of the invention is to realize through following technical proposals.
A kind of micro-structural that is used to detect the monodimension nanometer material mechanical property of the present invention comprises a frame support, connects two upper platforms that are symmetrically set through at least four to being much of vertical beam on the wherein said frame support; The two ends of two upper platforms are supported on the bearing of frame support through following brace summer respectively; The below of said two upper platforms connects lower floor's platform through the cant beam of at least four symmetries.
Above-mentioned upper platform is that two ends are tip-like and needle tip is oppositely arranged the levelling bench that is used for fixing monodimension nanometer material.
Above-mentioned be provided with between upper platform and lower floor platform that two groups of quantity equate and with respect to the cant beam of micro-structural vertical center line symmetry.
Said cant beam is obliquely installed to micro-structural vertical center line direction symmetry along the two ends of upper platform, or is obliquely installed along upper platform vertical center line direction to lower floor platform upper table surface two ends symmetry.
About above-mentioned last vertical beam and cant beam are divided into two groups, every group adopt at least two go up vertical beams and two cant beams respectively up and down each two be connected support linked to each other with upper platform and lower floor's platform.
The middle part surface of above-mentioned lower floor's platform has the locating hole that is used for the micro mechanical structure imposed load.
Above-mentioned following brace summer is vertical beam or symmetrical inclined beams.
Said micro-structural is taked the polysilicon material.
The equipment that the present invention and existing is used to detect monodimension nanometer material has following advantage:
1. preparation material of the present invention is a polysilicon, and preparation technology is compatible mutually with existing micromachined technology, and the cost of material is low, and preparation is convenient, but prepared in batches.
2. the present invention can obtain being applied to the load and the displacement at nano material two ends simultaneously when carrying out the monodimension nanometer material detection, makes and measures intuitively.
3. the present invention through nanometer pressure head imposed load, can not impact the characteristic of nano material itself in the testing process when carrying out the monodimension nanometer material detection, has guaranteed the accuracy that detects.
4. go up vertical beam among the present invention and be used to support two upper platforms with following brace summer; Improved the rigidity of system; Can effectively prevent the variation of distance between two upper platforms that factor caused such as structure self gravitation; This design can weaken the effect of weight of structure power greatly to nano material mechanics Effect on Performance, guarantees the accuracy that detects.
5. the cant beam between two upper platforms and the lower floor's platform among the present invention is used for the guiding of two upper platform relative motions.Through changing the incline direction of cant beam, when lower floor's platform receives nanometer pressure head active force and moves upward, just can realize the increase of two upper platform spacings or reduce, thereby measure the mechanical property of the stretching or the compression of nano material.
6. the micro-structural that is contained among the present invention both can have been measured the tensile property of nano material, and the compression performance that can measure nano material is arranged again.
Description of drawings
Fig. 1 (a) is the structural representation of the embodiment of the invention 1, is used to test the tensile property of nano material.
Fig. 1 (b) is the structural representation of the embodiment of the invention 2, is used to test the tensile property of nano material.
Fig. 2 (a) is the structural representation of the embodiment of the invention 3, is used to test the compression performance of nano material.
Fig. 2 (b) is the structural representation of the embodiment of the invention 4, is used to test the compression performance of nano material.
Fig. 3 (a)-Fig. 3 (j) makes configuration process sketch map of the present invention.
Fig. 4 (a)-Fig. 4 (c) is the mechanical property simulation result figure of the embodiment of the invention 1.
Among the figure: 101, frame type support; 102, go up vertical beam; 103, following brace summer; 104, upper platform; 105, cant beam; 106 lower floor's platforms.
The specific embodiment
Further specify structure of the present invention below in conjunction with accompanying drawing 1-2.
Shown in Fig. 1 (a), for the present invention have four go up vertical beams, two following brace summers and four cant beams (with the upper platform angle be 26 degree) an embodiment sketch map, be used to test the tensile property of nano material.The micro-structural of this detection monodimension nanometer material mechanical property comprises a frame support 101; Wherein be provided with six roots of sensation vertical beam; Comprise the four last vertical beams 102 in top, two following brace summers 103 in bottom (being vertical beam), the support that is used for whole micro mechanical structure is located; One end links to each other with frame type support 101, and an end links to each other with the upper platform 104 of micro mechanical structure.
Wherein, go up vertical beam 102 through four on the frame support 101 and connect two upper platforms that are symmetrically set 104; The two ends of two upper platforms 104 are supported on the bearing of frame type support 101 through following brace summer 103; The below of two upper platforms 104 connects lower floor's platform 106 through four cant beams 105 respectively; Two groups of cant beams 105 are obliquely installed to micro-structural vertical center line direction symmetry along the two ends of upper platform 104, with the displacement of the vertical direction of lower floor's platform 106 and displacement and the load that load converts upper platform 104 horizontal directions to.
Wherein, upper platform 104 is divided into left and right sides two parts of symmetry, links to each other with three vertical beams (comprising that two are gone up vertical beam 102, a following brace summer 103), two cant beams 104 respectively.The upper platform 104 that is positioned at the micro mechanical structure middle part is horizontally disposed with, and its end is prepared to pointed and its most advanced and sophisticated setting in pairs, is used for fixing nano material to be tested.
Wherein, between upper platform 104 and lower floor platform 106, be provided with the cant beam 105 that identical quantity is arranged with last vertical beam 102.About last vertical beam 102 is divided into cant beam 105 two groups, last vertical beam 102 and cant beam 105 are distinguished up and down each two support 101 are linked to each other with upper platform 104 and lower floor's platform 106.
Wherein, the middle part surface of lower floor's platform 106 has the locating hole that is used for the micro mechanical structure imposed load, is used for the micro mechanical structure imposed load.Load is applied to the platform bottom, but in the vertical direction produces displacement.
Micro-structural of the present invention is taked the polysilicon material.
Shown in Fig. 1 (b), for the present invention have four go up vertical beams, two following brace summers and four cant beams (with the upper platform angle be 26 degree) embodiment 2 sketch mapes, be used to test the tensile property of nano material.This structure and embodiment 1 are basic identical, and its difference is down that brace summer 103 is symmetrical inclined beams, can be so that micro-structural under the prerequisite that guarantees " reducing the test error that factor such as gravity causes ", reduces system stiffness, thereby improves the transformation ratio of power.
Shown in Fig. 2 (a), for the present invention have four go up vertical beams, two following brace summers and four cant beams (with the upper platform angle be 26 degree) embodiment 3 sketch mapes, be used to test the compression performance of nano material.This structure and embodiment 1 are similar, two groups of incline directions that its difference is cant beam 105 respectively with corresponding embodiment 1 in the incline direction of cant beam opposite.Two groups of cant beams 105 are obliquely installed along upper platform 104 vertical center line direction to lower floor platforms 106 upper table surface two ends symmetries.According to kinematics of mechanism, when lower floor's platform 106 received pressure vertically upward and moves upward, the spacing of two upper platforms 104 can reduce, thereby makes nano material be compressed the effect of power.
Shown in Fig. 2 (b), for the present invention have four go up vertical beams, two following brace summers and four cant beams (with the upper platform angle be 26 degree) embodiment 4 sketch mapes, be used to test the compression performance of nano material.This structure and embodiment 2 are similar, two groups of incline directions that its difference is cant beam 105 respectively with corresponding embodiment 1 in the incline direction of cant beam opposite.Two groups of cant beams 105 are obliquely installed along upper platform 104 vertical center line direction to lower floor platforms 106 upper table surface two ends symmetries.
Further specify preparation process of the present invention below in conjunction with accompanying drawing 3.
With reference to Fig. 3 (a), 01 is mechanical floor, and material selection polysilicon, thickness are about 10 μ m; 02 is sacrifice layer, and material is a silica; 03 is silicon base; 04 is protective layer; 05 is a photoresist; 06 is the secondary photoresist.
With reference to Fig. 3 (b), at mechanical floor surface coated one deck photoresist 05.
With reference to Fig. 3 (c), the etching photoresist forms the micro mechanical structure figure.
With reference to Fig. 3 (d), the etching apparatus layer forms micro mechanical structure.
With reference to Fig. 3 (e), remove photoresist.
With reference to Fig. 3 (f), at mechanical floor and the protective layer surface coated photoresist 06 that etching is good.
With reference to Fig. 3 (g), etching protective layer photoresist is of a size of the watch window size.
With reference to Fig. 3 (h), etching protective layer.
With reference to Fig. 3 (i), the etching substrate forms observation window.
With reference to Fig. 3 (j), remove photoresist and protective layer, with the sacrifice layer at watch window place.
Further specify effect of the present invention below in conjunction with accompanying drawing 4.
In embodiment 1, between two upper platforms, place also fixing nano wire, (Young's modulus of equivalent nano wire is 0～2.6 * 10 to its rigidity from 0～3800N/m
11Pa) change between; And apply a pressure F vertically upward in the geometric center of lower floor's platform, come the mechanical property of emulation embodiment 1 based on this.
Shown in Fig. 4 (a)-Fig. 4 (c), provided the analogous diagram of embodiment 1 in test nano material mechanics performance.Fig. 4 (a) is the analogous diagram of power conversion coefficient, and Fig. 4 (b) is the analogous diagram of displacement transformation ratio, and Fig. 4 (c) is the analogous diagram of system stiffness.Here, definition " power transformation ratio " is the axially loaded of nano wire and the ratio of F; Definition " displacement transformation ratio " is the length variations and the lower floor platform ratio in the variation of F direction top offset of nano wire; Definition " system stiffness " is F and the lower floor platform ratio in the variation of F direction top offset.
Can find out that by Fig. 4 (a) when nano wire rigidity increased to 3800N/m gradually by zero, the power transformation ratio of micro-structural increased gradually, and levels off to 100%.Can find out that by Fig. 4 (b) when nano wire rigidity increased gradually, the displacement transformation ratio of micro-structural slightly descended, minimum about 70%.Can find out that by Fig. 4 (c) when nano wire rigidity increased gradually, the system stiffness of micro-structural increased gradually.From figure, can know, take micro-structural of the present invention to improve the rigidity of system; Can measure monodimension nanometer material bearing load and distortion situation simultaneously, and sample itself is not had influence.
The above; Be merely the preferable specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, any technical staff who is familiar with the present technique field is in the technical scope that the present invention discloses; The variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.
Claims (8)
1. micro-structural that is used to detect the monodimension nanometer material mechanical property; Comprise a frame support (101), it is characterized in that: said frame support (101) is gone up through at least four and is connected two upper platforms that are symmetrically set (104) to being much of vertical beam (102); The two ends of two upper platforms (104) are supported on the bearing of frame support (101) through following brace summer (103) respectively; The below of said two upper platforms (104) connects lower floor's platform (106) through the cant beam (105) of at least four symmetries.
2. a kind of micro-structural that is used to detect the monodimension nanometer material mechanical property according to claim 1 is characterized in that: said upper platform (104) is that two ends are tip-like and needle tip is oppositely arranged the levelling bench that is used for fixing monodimension nanometer material.
3. a kind of micro-structural that is used to detect the monodimension nanometer material mechanical property according to claim 1 is characterized in that: saidly be provided with between upper platform (104) and lower floor's platform (106) that two groups of quantity equate and with respect to the cant beam (105) of micro-structural vertical center line symmetry.
4. a kind of micro-structural that is used to detect the monodimension nanometer material mechanical property according to claim 3; It is characterized in that: said cant beam (105) is obliquely installed to micro-structural vertical center line direction symmetry along the two ends of upper platform (104), or symmetry is obliquely installed along upper platform (104) vertical center line direction to lower floor's platform (106) upper table surface two ends.
5. according to claim 1 or 3 described a kind of micro-structurals that are used to detect the monodimension nanometer material mechanical property; It is characterized in that: said go up vertical beam (102) and be divided into cant beam (105) about two groups, every group adopt two at least on vertical beams (102) respectively frame support (101) is linked to each other with upper platform (104) and lower floor's platform (106) with two cant beams (105).
6. a kind of micro-structural that is used to detect the monodimension nanometer material mechanical property according to claim 1 is characterized in that: the middle part surface of said lower floor platform (106) has the locating hole that is used for the micro mechanical structure imposed load.
7. a kind of micro-structural that is used to detect the monodimension nanometer material mechanical property according to claim 1 is characterized in that: said brace summer (103) down is vertical beam or symmetrical inclined beams.
8. a kind of micro-structural that is used to detect the monodimension nanometer material mechanical property according to claim 1, it is characterized in that: said micro-structural is taked the polysilicon material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210023471.5A CN102583216B (en) | 2012-02-02 | 2012-02-02 | Microstructure for detecting mechanical properties of one-dimensional nanometer materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210023471.5A CN102583216B (en) | 2012-02-02 | 2012-02-02 | Microstructure for detecting mechanical properties of one-dimensional nanometer materials |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102583216A true CN102583216A (en) | 2012-07-18 |
| CN102583216B CN102583216B (en) | 2014-07-09 |
Family
ID=46472586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210023471.5A Expired - Fee Related CN102583216B (en) | 2012-02-02 | 2012-02-02 | Microstructure for detecting mechanical properties of one-dimensional nanometer materials |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102583216B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104764660A (en) * | 2015-03-29 | 2015-07-08 | 北京工业大学 | Thermal-driving uniaxial drawing/compressive deformation device for scanning/transmission electron microscope |
| CN114608963A (en) * | 2022-03-25 | 2022-06-10 | 电子科技大学 | Metal wire Young modulus measuring device and method based on exhaust method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH085656A (en) * | 1994-06-16 | 1996-01-12 | Kyowa Electron Instr Co Ltd | Acceleration converter |
| CN101109680A (en) * | 2007-08-24 | 2008-01-23 | 清华大学 | Film single-axis bidirectional decline micro-stretching device and method for measuring |
| CN101113946A (en) * | 2007-07-20 | 2008-01-30 | 北京工业大学 | Force and electrical behavior testing device under Nanometer lines in-situ compressing in transmission electron microscope |
| CN201159704Y (en) * | 2008-01-30 | 2008-12-03 | 赵宏伟 | Micro-stretching device of test piece material nano dimension mechanical property test |
| CN102221499A (en) * | 2011-03-29 | 2011-10-19 | 天津大学 | Alignment loading device used for stretching test of nanoscale, micron-size thin film materials |
| CN102230865A (en) * | 2011-04-02 | 2011-11-02 | 赵宏伟 | Trans-scale micro-nano scale in situ tension compression mechanical property test platform |
| CN202614584U (en) * | 2012-02-02 | 2012-12-19 | 西安电子科技大学 | Micro-mechanical structure for detecting nanometer material tensile and compressive mechanical properties |
-
2012
- 2012-02-02 CN CN201210023471.5A patent/CN102583216B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH085656A (en) * | 1994-06-16 | 1996-01-12 | Kyowa Electron Instr Co Ltd | Acceleration converter |
| CN101113946A (en) * | 2007-07-20 | 2008-01-30 | 北京工业大学 | Force and electrical behavior testing device under Nanometer lines in-situ compressing in transmission electron microscope |
| CN101109680A (en) * | 2007-08-24 | 2008-01-23 | 清华大学 | Film single-axis bidirectional decline micro-stretching device and method for measuring |
| CN201159704Y (en) * | 2008-01-30 | 2008-12-03 | 赵宏伟 | Micro-stretching device of test piece material nano dimension mechanical property test |
| CN102221499A (en) * | 2011-03-29 | 2011-10-19 | 天津大学 | Alignment loading device used for stretching test of nanoscale, micron-size thin film materials |
| CN102230865A (en) * | 2011-04-02 | 2011-11-02 | 赵宏伟 | Trans-scale micro-nano scale in situ tension compression mechanical property test platform |
| CN202614584U (en) * | 2012-02-02 | 2012-12-19 | 西安电子科技大学 | Micro-mechanical structure for detecting nanometer material tensile and compressive mechanical properties |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104764660A (en) * | 2015-03-29 | 2015-07-08 | 北京工业大学 | Thermal-driving uniaxial drawing/compressive deformation device for scanning/transmission electron microscope |
| CN114608963A (en) * | 2022-03-25 | 2022-06-10 | 电子科技大学 | Metal wire Young modulus measuring device and method based on exhaust method |
| CN114608963B (en) * | 2022-03-25 | 2023-11-28 | 电子科技大学 | Device and method for measuring Young modulus of metal wire based on exhaust method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102583216B (en) | 2014-07-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103808499B (en) | A kind of vibration isolator dynamic stiffness method of testing and device thereof | |
| JP6095676B2 (en) | Wind tunnel balance | |
| CN104749047B (en) | A kind of flexural member Mechanics Performance Testing device and its application method | |
| CN102539028B (en) | Vertical ultra-micro force value measuring device based on principle of electrostatic force and source tracing method thereof | |
| CN107179252A (en) | One kind becomes the typical friction pair skimming wear experimental machine of gravity orientation and test method | |
| CN105115690A (en) | Test device and test method for testing multidirectional impedance matrix and rigidity of vibration isolator | |
| CN202372410U (en) | Anchor rod performance test device | |
| CN110967264A (en) | Dynamic-static coupling loading test system based on lever principle | |
| CN101393064B (en) | Gravity centre detection test stand for small-sized working machine | |
| CN102583216B (en) | Microstructure for detecting mechanical properties of one-dimensional nanometer materials | |
| CN201273850Y (en) | Gravity center detection apparatus for small operation machine | |
| CN202614584U (en) | Micro-mechanical structure for detecting nanometer material tensile and compressive mechanical properties | |
| US7348502B2 (en) | Counterbalance for a platform balance | |
| CN103293065A (en) | Outward bending testing device of microstructural mechanical property sheet | |
| CN106680092B (en) | Coarse-grained soil strength and deformation characteristic measuring device based on vacuum negative pressure | |
| KR101988605B1 (en) | Test apparatus of characteristic of wheel dynamometer | |
| CN110967265A (en) | Coupled dynamic-static loading test system | |
| CN206960085U (en) | A kind of experimental rig for simulating bridge collision | |
| CN211735564U (en) | Foundation pile uplift resistance and pile body quality detection device | |
| CN108896382B (en) | Mechanical load testing device for variable working conditions | |
| CN102788661B (en) | Lift car gravity center tester | |
| CN208223762U (en) | A kind of bridge structure object static force loading device | |
| CN112345383A (en) | Multi-direction rock shearing test system capable of realizing acoustic emission test | |
| CN112129454B (en) | Three-degree-of-freedom force measuring device and method | |
| Chen et al. | A new type of MEMS two axis accelerometer based on silicon |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140709 Termination date: 20200202 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |