CN102575340A - Method for manufacturing optical component, and optical component - Google Patents
Method for manufacturing optical component, and optical component Download PDFInfo
- Publication number
- CN102575340A CN102575340A CN2010800482381A CN201080048238A CN102575340A CN 102575340 A CN102575340 A CN 102575340A CN 2010800482381 A CN2010800482381 A CN 2010800482381A CN 201080048238 A CN201080048238 A CN 201080048238A CN 102575340 A CN102575340 A CN 102575340A
- Authority
- CN
- China
- Prior art keywords
- functional membrane
- optical functional
- sphere lens
- optics
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00403—Producing compound lenses
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Toxicology (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Optical Filters (AREA)
Abstract
Disclosed are a method for manufacturing an optical component having desired optical characteristics, and the optical component having the desired optical characteristics. An optical functional film (33) is formed by means of a vapor deposition method, while rotating a ball lens (32) about a second center axis (C2), which is the center axis that rotates about a first center axis (C1), and which is tilted with respect to the first center axis (C1).
Description
Technical field
The present invention relates to the method for manufacture and the optics of optics.
Background technology
Now, a kind of as the optics of optically focused of the light that is used for optical communication field etc. etc., known have an optics with sphere lens.In such optics, the reduction of the transmittance that causes for the reflection of light on the surface that is suppressed at sphere lens therefore on the surface of sphere lens, generally is formed with the optical functional membrane that reflection suppresses film etc.
But sphere lens is compared with common lens and to be had very large curvature, therefore is difficult on the surface of sphere lens, form optical functional membrane.
In view of such situation, in following patent documentation 1～3 grade, motion has the various methods that on the surface of sphere lens, form optical functional membrane.
Specifically, record:,, form the method for the optical functional membrane of homogeneous thickness to the big lens of the curvature that is supported on the element supporting device through disposing a plurality of vapor deposition source with respect to the element supporting device that can revolve round the sun or revolve round the sun certainly at patent documentation 1.
Record at patent documentation 2: through being the center, make sphere lens rotation and revolution ground carry out film forming, on the surface of sphere lens, form the method for the optical functional membrane (filter coating) of homogeneous thickness with the axis of rotation to the vertical direction inclination.
Record at patent documentation 3: when the film forming of one side rotation and revolution on one side is positioned at in the diaphragm area with anchor clamps; Through being maintained in the state of mould material to the middle body flight of sphere lens, the method for the optical functional membrane that the thickness of the Film Thickness Ratio central part of formation circumference is thin on the surface of sphere lens.
The prior art document
Patent documentation 1: japanese kokai publication hei 11-106901 communique
Patent documentation 2: TOHKEMY 2006-342384 communique
Patent documentation 3: TOHKEMY 2007-108425 communique
Summary of the invention
The problem that solves is wanted in invention
But the mode like patent documentation 1,2 records when being formed with the optical functional membrane of homogeneous thickness on the surface at sphere lens, is difficult to obtain desired optical characteristics sometimes.Equally, like the mode of patent documentation 3 record,, also be difficult to obtain desired optical characteristics sometimes even when on the surface of sphere lens, being formed with the thin optical functional membrane of the thickness of Film Thickness Ratio central part of circumference.
The present invention accomplishes in view of this point, its objective is method of manufacture that the optics with desired optical characteristics is provided and the optics with desired optical characteristics.
Be used to solve the method for problem
The method of manufacture of the optics that the present invention relates to relates to the method for manufacture with sphere lens and optics of the lip-deep optical functional membrane that is formed at sphere lens.In the method for manufacture of the optics that the present invention relates to, Yi Bian make said sphere lens around around first hub rotation and with respect to second hub rotation of said first inclined, Yi Bian utilize vapor deposition method to form optical functional membrane.
In addition, in the present invention, " rotation " be meant with not through in the object the axle be that circumferential motion is carried out at the center.On the other hand, " revolution " be meant with through in the object the axle be that circumferential motion is carried out at the center.
The optical characteristics of optical functional membrane exists with ... the input angle to the light of optical functional membrane.In detail, the optical characteristics of optical functional membrane is carried out short wavelength's displacement greatly along with the input angle to the light of optical functional membrane becomes.For example when optical functional membrane be the reflection that suppresses the reflection of light of the wavelength region may below the cutoff wavelength of regulation when suppressing film, cutoff wavelength is along with short wavelength's displacement is carried out in the input angle change to the light of optical functional membrane greatly.
In addition, the optical characteristics of optical functional membrane also exists with ... the thickness of optical functional membrane.In detail, the optical characteristics of optical functional membrane is along with the thickness thickening of optical functional membrane carries out long wavelength shifted.When for example the reflection of the reflection of light of the wavelength region may below optical functional membrane is the cutoff wavelength that suppresses to stipulate suppressed film, cutoff wavelength was along with the thickness thickening of optical functional membrane carries out long wavelength shifted.
In addition, in the present invention, " thickness of optical functional membrane " is meant the thickness of normal to a surface direction of the sphere lens of the part that is formed with optical functional membrane.
At this, when collimated light (collimated light) or diffusion light incident were formed at the lip-deep optical functional membrane of sphere lens, the input angle that is positioned at the light of the part on the optical axis of sphere lens was 0 °.On the other hand, along with the optical axis from sphere lens leaves, it is big that the input angle of light becomes.
Therefore, under the situation of the thickness homogeneous of optical functional membrane, the optical characteristics of the optical functional membrane of the part of leaving from the optical axis of sphere lens is compared with the optical characteristics of part on the optical axis that is positioned at sphere lens and have been carried out short wavelength's displacement.That is, when being benchmark with the part on the optical axis that is positioned at sphere lens, finding the mode of desired optical characteristics, during the optical functional membrane of design homogeneous, the optical characteristics of the part of leaving from the optical axis of sphere lens is different with desired optical characteristics.Its result as a whole, is difficult to make the optics with desired optical characteristics.
For example; When the reflection of the reflection of light of the wavelength region may below optical functional membrane is the cutoff wavelength that suppresses to stipulate suppresses film; The cutoff wavelength that the reflection of the part of leaving from the optical axis of sphere lens the suppresses film light wavelength that becomes than uses is short, the problem that exists the reflection of light rate of the part of leaving from the optical axis of sphere lens to become too high.In this case, be difficult to make optics with desired transmittance.
Mode like above-mentioned patent documentation 3 records; When the thin optical functional membrane of the thickness of the Film Thickness Ratio central part that is formed with circumference on the surface at sphere lens; Less and through the input angle of light as the central part of thick film; Big and as the periphery of film, it is widely different that optical characteristics becomes with the input angle of light.Its result is difficult to make the optics of desired optical characteristics more.
To this, in the present invention, like above-mentioned mode, Yi Bian make said sphere lens around around first hub rotation and with respect to second hub rotation of said first inclined, Yi Bian utilize the optical functional membrane of vapor deposition method.Therefore, the part that the thickness in the optical functional membrane becomes the thickest is not the part that is positioned on the optical axis of sphere lens, at the central part of optical functional membrane, and along with the optical axis from sphere lens leaves, the thickness thickening.Under these circumstances, be that the situation of homogeneous is compared with the thickness of optical functional membrane at the central part of optical functional membrane, can reduce the deviation of optical characteristics.The deviation of the optical characteristics of the part that particularly, can reduce to leave from the optical axis of sphere lens.Its result, the optics that can obtain to have desired optical characteristics.
For example, when optical functional membrane is the reflection that suppresses the reflection of light of the wavelength region may below the cutoff wavelength of regulation when suppressing film, can prevent to leave the situation that the cutoff wavelength of part of the optical axis of sphere lens becomes too short.So, can suppress to leave the increase of reflection of light rate of part of the optical axis of sphere lens.Its result can obtain the desired optics with high transmission rate.
In addition, " sphere lens " is meant that the one side at least of injecting outgoing plane of light is the lens of dome shape, and the shape of other parts is not particularly limited in dome shape." sphere lens " for example also comprises lens body with the dome shape of injecting outgoing plane that is arranged at light and has the edge (flange) that is arranged at the part beyond the lens body or the parts of recess.
In the present invention, first hub and the formed angle θ of second hub
0, preferably big than 0 °, be the central angle θ in the zone that is formed with optical functional membrane
1Below 1/2.As angle θ
0Than central angle θ
11/2 when big, the thickness that is positioned at the part on the optical axis of optical functional membrane sometimes became thin, can not obtain desired optical property on the contrary.
In addition, in the present invention, the kind of vapor deposition method does not limit especially.For example can utilize the vapor deposition method (CVD:Chemical Vapor Deposition) of chemistry or the vapor deposition method (PVD:Physical Vapor Deposition) of physics to form optical functional membrane.Particularly, the vapor deposition method of physics is compared with the vapor deposition method of chemistry, on the surface of sphere lens, forms the optical functional membrane of two dimension easily, and is therefore preferred.In addition, the vapor deposition method of physics is also referred to as sputtering method or vacuum vapour deposition.
The method of manufacture of the optics that the optics that the present invention relates to can relate to through the invention described above is suitably made.The optics that the present invention relates to has sphere lens and optical functional membrane.Optical functional membrane is formed on the surface of sphere lens.In the optics that the present invention relates to, the thickness when the central part of the optical functional membrane when the direction of the extension of the optical axis of sphere lens is watched becomes big along with the optical axis from sphere lens leaves.Therefore, the optics that the present invention relates to is that the situation of homogeneous is compared with thickness at the optical functional membrane of central part of optical functional membrane, and the deviation of optical characteristics reduces.Its result, the optics that the present invention relates to can be realized higher optical characteristics.For example when optical functional membrane be when suppressing the reflection inhibition film of reflection of light of the wavelength region may below the cutoff wavelength of regulation, be that the situation of homogeneous is compared with the thickness of optical functional membrane, the cutoff wavelength of part of optical axis of leaving sphere lens is longer.Therefore, can suppress the increase of the reflection of light rate in the part of optical axis in the optics, that leave sphere lens.So, can obtain high transmittance.
In addition, when the thickness of the peripheral part in the outside that is positioned at central part of the optical functional membrane when the direction of the extension of the optical axis of sphere lens is watched, might not be along with the optical axis thickening that leaves sphere lens.That is, in the integral body of optical functional membrane, do not need thickness along with the optical axis thickening that leaves sphere lens.The thickness of peripheral part also can be along with the optical axis attenuation of leaving sphere lens.
In the present invention, preferred: any part of the central part of optical functional membrane all comprises the optical axis of sphere lens and the intersection point of optical functional membrane, and is positioned at than the position of more leaning on the central side of sphere lens with respect to the vertical plane of the optical axis of sphere lens.This be because; When the intersection point of the optical axis that contains sphere lens and optical functional membrane and be positioned at when more leaning on the part of the position of an opposite side with the center of sphere lens to be present in the central part of optical functional membrane with respect to the vertical plane of the optical axis of sphere lens, optical characteristics reduces on the contrary sometimes.
In the present invention, the material of sphere lens does not limit especially.Sphere lens for example also can be glass, also can be resin system.
Optical functional membrane so long as have the film of optical function, does not just limit especially.Optical functional membrane for example also can suppress film for the reflection of the reflection of light that suppresses the provision wavelengths zone or has the filter coating of wavelength selection function, mainly makes the decay film of optical attenuation, the reflection of light film in reflection provision wavelengths zone etc. through absorb light.
Optical functional membrane for example can be made up of specific refractory power low relatively low-index layer and the high relatively formed stack membrane of high refractive index layer alternative stacked of specific refractory power.Low-index layer for example can be formed by alkali fluoride earth metalss such as silicon oxide, aluminum oxide, Calcium Fluoride (Fluorspan) etc.On the other hand, high refractive index layer for example can be formed by titanium oxide, niobium oxides, lanthanum trioxide, tantalum oxide, Tungsten oxide 99.999 etc.
Description of drawings
Fig. 1 is the mode chart of the manufacturing installation of the optics in an embodiment of the invention.
Fig. 2 is the vertical view of the pattern of support unit.
Fig. 3 is the pattern sectional view that the part of supporting plate is amplified.
Fig. 4 is the pattern sectional view of the optics of an embodiment of the invention manufacturing.
Fig. 5 is the chart of the thickness of the optical functional membrane (wavelength of 1310nm and 1490nm is selected filter coating, 48 tunics) in the expression embodiments of the invention.In chart shown in Figure 5, transverse axis is represented the incident angle to the light of optical functional membrane.The longitudinal axis is represented the thickness of optical functional membrane.
Fig. 6 is the chart of the thickness of the optical functional membrane (wavelength of 1310nm and 1490nm is selected filter coating, 48 tunics) in the expression comparative example of the present invention.In chart shown in Figure 6, transverse axis is represented the incident angle to the light of optical functional membrane.The longitudinal axis is represented the thickness of optical functional membrane.
Fig. 7 is the chart of transmittance of obverse of transmittance and the optical functional membrane in the comparative example of the present invention of the central part of the optical functional membrane of expression in the embodiments of the invention.
Embodiment
Below, an example of preferred implementation of the present invention is described.
Fig. 1 is the mode chart of the manufacturing installation of the optics in this embodiment.Manufacturing installation 1 shown in Figure 1 is the device that is used to make the optics of this embodiment shown in Figure 4.Specifically, manufacturing installation 1 is the film deposition system that carries out electron beam evaporation plating.
As shown in Figure 1, manufacturing installation 1 has: the apparatus main body 10 that is separated to form the 10a of filming chamber.The 10a of filming chamber is connected with the mechanism of decompressor 14 of drawdown pump etc.The 10a of filming chamber can reduce pressure through this mechanism of decompressor 14.
10a is provided with in filming chamber: as the target 13 of supply source; Electron beam gun 12; With supporting device 20.Supporting device 20 has step disk 21.It can be center steering with the first hub C1 that step disk 21 is set to respect to the 10a of filming chamber.The lower surface 21a of step disk 21 forms dome-shaped.
As depicted in figs. 1 and 2, at the lower surface 21a of step disk 21 a plurality of flat supporting plates 22 are installed.Each supporting plate 22 be arranged at step disk 21 with the different position of the first hub C1.Each supporting plate 22 can be a center steering with the second hub C2.The second hub C2 tilts with respect to the first hub C1.In this embodiment, the angle θ that the first hub C1 and the second hub C2 form
0Be to be formed with the regional center angle θ of optical functional membrane 33 shown in Figure 4
1Below 1/2.
As shown in Figures 2 and 3, a plurality of optics main bodys 30 with the second hub C2 be the center matrix shape be installed on supporting plate 22.But, mounting optical component main body 30 not on the second hub C2 of supporting plate 22.
As shown in Figure 3, optics main body 30 comprises: retainer 31; With sphere lens 32.Retainer 31 as long as can keep sphere lens 32, does not just limit especially.Retainer 31 for example can be made up of metal system or resinous cartridge.
Then, the method for manufacture to the optics 34 (with reference to Fig. 4) that uses above-mentioned manufacturing installation 1 describes.
At first, a plurality of optics main bodys 30 are installed on supporting plate 22.Then, as shown in Figure 2, supporting plate 22 is installed on step disk 21.Then, make the 10a of filming chamber (with reference to Fig. 1) be reduced atmosphere, and as required, never illustrated gas supply mechanism is supplied with the gas that film forming needs to the 10a of filming chamber through the mechanism of decompressor 14.
Then,,, particle is dispersed from target 13, thus, on the surface of sphere lens 32, carry out film forming Yi Bian drive electron beam gun 12 Yi Bian, drive step disk 21 and supporting plate 22 through utilizing driving mechanism 11.Therefore; Lip-deep film forming to sphere lens 32; Be through making on one side sphere lens 32 around around the first hub C1 rotation and the second hub C2 rotation of tilting, Yi Bian utilize the vapor deposition method of the physical vapor precipitator method etc. to carry out with respect to the first hub C1.
Therefore, as shown in Figure 4, the optical functional membrane 33 that forms like this, the thickness of peripheral part 33b is along with the optical axis A attenuation of leaving sphere lens 32, and the thickness of central part 33a is along with the optical axis A thickening that leaves sphere lens 32.So, as stated, be that the situation of homogeneous is compared at the central part 33a of optical functional membrane 33 with the thickness of optical functional membrane 33, can reduce the deviation of optical characteristics.Its result, the optics 34 that can obtain to have desired optical characteristics.
In addition, preferred: arbitrary part of the central part 33a of optical functional membrane 33 all is positioned at more the position by the central side of sphere lens 32 than the vertical plane P of optical axis with respect to the sphere lens 32 of the intersection point of the optical axis A that comprises sphere lens 32 and optical functional membrane 33.This be because: when being positioned at more the part of leaning on an opposite side with the center of sphere lens 32 than plane P and being present in the central part 33a of optical functional membrane 33, optical characteristics reduces sometimes on the contrary.
In addition, preferred: the angular velocity of rotation of step disk 21 is different each other with the angular velocity of rotation around the second hub C2 of supporting plate 22.
(embodiment)
According to above-mentioned method of manufacture, make optics shown in Figure 4 with following design variable.Then, measure the thickness of the optical functional membrane of optics with the perviousness flying-spot microscope.Fig. 5 representes this result.In addition, in chart shown in Figure 5, transverse axis is represented the incident angle to the light of optical functional membrane.The longitudinal axis is represented the thickness of optical functional membrane.Use general single-mode fiber (SMF) at the light exit wound of bullet, use the sphere lens of the glass material of specific refractory power Nd1.8, sphere diameter Φ 2.0mm.
In addition, make the central part of light beam incident optical sexual function film, use tunable laser and power meter, determine the transmittance of optic article.Equally, also determine the transmittance that forms the preceding optics main body of optical functional membrane.According to these results, obtain the transmittance of the central part of optical functional membrane.Fig. 7 representes this result.
The membrane structure of optical functional membrane: the membrane structure shown in the below table 1
Table 1
| Layer | Material | Thickness (nm) | Layer | Material | Thickness (nm) |
| 1 | TiO 2 | 157 | 25 | TiO 2 | 195 |
| 2 | SiO 2 | 243 | 26 | SiO 2 | 174 |
| 3 | TiO 2 | 150 | 27 | TiO 2 | 84 |
| 4 | SiO 2 | 232 | 28 | SiO 2 | 215 |
| 5 | TiO 2 | 126 | 29 | TiO 2 | 164 |
| 6 | SiO 2 | 216 | 30 | SiO 2 | 264 |
| 7 | TiO 2 | 172 | 31 | TiO 2 | 168 |
| 8 | SiO 2 | 187 | 32 | SiO 2 | 267 |
| 9 | TiO 2 | 178 | 33 | TiO 2 | 169 |
| 10 | SiO 2 | 657 | 34 | SiO 2 | 268 |
| 11 | TiO 2 | 117 | 35 | TiO 2 | 169 |
| 12 | SiO 2 | 267 | 36 | SiO 2 | 267 |
| 13 | TiO 2 | 220 | 37 | TiO 2 | 188 |
| 14 | SiO 2 | 270 | 38 | SiO 2 | 700 |
| 15 | TiO 2 | 170 | 39 | TiO 2 | 194 |
| 16 | SiO 2 | 271 | 40 | SiO 2 | 224 |
| 17 | TiO 2 | 170 | 41 | TiO 2 | 88 |
| 18 | SiO 2 | 257 | 42 | SiO 2 | 171 |
| 19 | TiO 2 | 60 | 43 | TiO 2 | 156 |
| 20 | |
100 | 44 | SiO 2 | 261 |
| 21 | TiO 2 | 60 | 45 | TiO 2 | 167 |
| 22 | SiO 2 | 254 | 46 | SiO 2 | 265 |
| 23 | TiO 2 | 188 | 47 | TiO 2 | 204 |
| 24 | SiO 2 | 700 | 48 | SiO 2 | 400 |
(comparative example)
When film forming, supporting plate 22 is rotated around the second hub C2, only make step disk 21 outside first hub C1 rotation, likewise make optics with the foregoing description, determine the thickness and the transmittance of optical functional membrane.Fig. 6,7 these results of expression.In addition, in chart shown in Figure 6, transverse axis is represented the incident angle to the light of optical functional membrane.The longitudinal axis is represented the thickness of optical functional membrane.The light exit wound of bullet uses general SMF, uses the sphere lens of the glass material of Nd1.8, sphere diameter Φ 2.0mm.
Can know according to Fig. 5, the result shown in 7: according to the present invention; Through while sphere lens is centered on around first hub C1 rotation and the second hub C2 rotation of tilting with respect to the first hub C1, the film forming of carrying out optical functional membrane, the thickness that can form central part leaves the optical functional membrane of thickening along with the optical axis A from sphere lens.
In addition, the thickness of the central part through making optical functional membrane can obtain high optical characteristics along with the optical axis A from sphere lens leaves thickening.That is, optical characteristics from the diffusion light that optical fiber penetrates, oblique face incident light is carried out short wavelength's displacement, through making the thickness thickening, can revisal be equivalent to the amount of short wavelength's displacement, can obtain and optical characteristics identical on optical axis.
Nomenclature
1 ... Manufacturing installation
10 ... Apparatus main body
10a ... Filming chamber
11 ... Driving mechanism
12 ... Electron beam gun
13 ... Target
14 ... The mechanism of decompressor
20 ... Supporting device
21 ... Step disk
21a ... The lower surface of step disk
22 ... Supporting plate
30 ... The optics main body
31 ... Retainer
32 ... Sphere lens
33 ... Optical functional membrane
33a ... The central part of optical functional membrane
33b ... The peripheral part of optical functional membrane
34 ... Optics
C1 ... First hub
C2 ... Second hub
Claims (7)
1. the method for manufacture of an optics, said optics has: sphere lens; With the lip-deep optical functional membrane that is formed at said sphere lens, the method for manufacture of this optics is characterised in that:
Make on one side said sphere lens around around the rotation of first hub and with respect to second hub rotation of said first inclined, Yi Bian utilize vapor deposition method on the surface of said sphere lens, to form said optical functional membrane.
2. the method for manufacture of optics as claimed in claim 1 is characterized in that:
Said first hub and the formed angle θ of said second hub
0Central angle θ for the zone that is formed with said optical functional membrane
1Below 1/2.
3. according to claim 1 or claim 2 the method for manufacture of optics is characterized in that:
Utilize the chemical gaseous phase deposition method or the physical vapor precipitator method to form said optical functional membrane.
4. optics has: sphere lens and the lip-deep optical functional membrane that is formed at said sphere lens, and this optics is characterised in that, comprising:
The thickness of the central part of the said optical functional membrane when the direction of the extension of the optical axis of said sphere lens is watched, the thickening along with the optical axis that leaves said sphere lens.
5. optics as claimed in claim 4 is characterized in that:
Any part of the central part of said optical functional membrane all comprises the intersection point of said optical axis and said optical functional membrane, and is positioned at than the position of more leaning on the central side of said sphere lens with respect to the vertical plane of said optical axis.
6. like claim 4 or 5 described opticses, it is characterized in that:
The thickness of the peripheral part in the outside that is positioned at central part of the said optical functional membrane when the direction of the extension of the optical axis of said sphere lens is watched, the attenuation along with the optical axis that leaves said sphere lens.
7. like each the described optics in the claim 4～6, it is characterized in that:
Said optical functional membrane is: have the filter coating of wavelength selection function or the reflection of inhibition reflection of light and suppress film.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-289264 | 2009-12-21 | ||
| JP2009289264A JP5493824B2 (en) | 2009-12-21 | 2009-12-21 | Optical component manufacturing method and optical component |
| PCT/JP2010/070981 WO2011077892A1 (en) | 2009-12-21 | 2010-11-25 | Method for manufacturing optical component, and optical component |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102575340A true CN102575340A (en) | 2012-07-11 |
| CN102575340B CN102575340B (en) | 2014-04-02 |
Family
ID=44195431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080048238.1A Expired - Fee Related CN102575340B (en) | 2009-12-21 | 2010-11-25 | Method for manufacturing optical component, and optical component |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5493824B2 (en) |
| CN (1) | CN102575340B (en) |
| TW (1) | TWI486620B (en) |
| WO (1) | WO2011077892A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106707725A (en) * | 2017-01-20 | 2017-05-24 | 中国电子科技集团公司第十二研究所 | Optical transmission window for atomic clock |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5749223B2 (en) * | 2012-07-13 | 2015-07-15 | 株式会社メイハン | Method for forming spherical film |
| JP6206410B2 (en) | 2012-08-29 | 2017-10-04 | 旭硝子株式会社 | Near-infrared cut filter |
| CN112916341B (en) * | 2021-01-25 | 2022-10-18 | 上海应用技术大学 | Rotatable flexible clamp for coating bearing rolling body |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4380212A (en) * | 1980-09-26 | 1983-04-19 | Balzers Aktiengesellschaft | Arrangement for uniformly coating surfaces of revolution by vapor deposition in a high vacuum |
| JPH0428859A (en) * | 1990-05-23 | 1992-01-31 | Matsushita Electric Ind Co Ltd | Vacuum deposition device |
| JPH06192835A (en) * | 1992-12-25 | 1994-07-12 | Canon Inc | Device for vapor deposition of thin film |
| JP2004271658A (en) * | 2003-03-06 | 2004-09-30 | Pentax Corp | Objective lens for optical pickup device and optical pickup device |
| JP2006091600A (en) * | 2004-09-27 | 2006-04-06 | Konica Minolta Opto Inc | Method and apparatus for forming film on lens |
| JP2007108425A (en) * | 2005-10-13 | 2007-04-26 | Nippon Electric Glass Co Ltd | Method and device of manufacturing optical component, and the optical component |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002217132A (en) * | 2001-01-23 | 2002-08-02 | Sony Corp | Vacuum deposition apparatus |
-
2009
- 2009-12-21 JP JP2009289264A patent/JP5493824B2/en not_active Expired - Fee Related
-
2010
- 2010-11-25 WO PCT/JP2010/070981 patent/WO2011077892A1/en active Application Filing
- 2010-11-25 CN CN201080048238.1A patent/CN102575340B/en not_active Expired - Fee Related
- 2010-11-30 TW TW099141386A patent/TWI486620B/en not_active IP Right Cessation
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4380212A (en) * | 1980-09-26 | 1983-04-19 | Balzers Aktiengesellschaft | Arrangement for uniformly coating surfaces of revolution by vapor deposition in a high vacuum |
| JPH0428859A (en) * | 1990-05-23 | 1992-01-31 | Matsushita Electric Ind Co Ltd | Vacuum deposition device |
| JPH06192835A (en) * | 1992-12-25 | 1994-07-12 | Canon Inc | Device for vapor deposition of thin film |
| JP2004271658A (en) * | 2003-03-06 | 2004-09-30 | Pentax Corp | Objective lens for optical pickup device and optical pickup device |
| JP2006091600A (en) * | 2004-09-27 | 2006-04-06 | Konica Minolta Opto Inc | Method and apparatus for forming film on lens |
| JP2007108425A (en) * | 2005-10-13 | 2007-04-26 | Nippon Electric Glass Co Ltd | Method and device of manufacturing optical component, and the optical component |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106707725A (en) * | 2017-01-20 | 2017-05-24 | 中国电子科技集团公司第十二研究所 | Optical transmission window for atomic clock |
| CN106707725B (en) * | 2017-01-20 | 2022-07-22 | 中国电子科技集团公司第十二研究所 | Optical transmission window for atomic clock |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102575340B (en) | 2014-04-02 |
| TWI486620B (en) | 2015-06-01 |
| JP5493824B2 (en) | 2014-05-14 |
| JP2011127213A (en) | 2011-06-30 |
| TW201142340A (en) | 2011-12-01 |
| WO2011077892A1 (en) | 2011-06-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5840448B2 (en) | Antireflection film and method of manufacturing antireflection film | |
| CN102575340B (en) | Method for manufacturing optical component, and optical component | |
| JP2012189846A (en) | Antireflection optical element and method for manufacturing antireflection optical element | |
| JP2011013654A (en) | Multilayer antireflection layer and method of producing the same, and plastic lens | |
| JP2010102157A (en) | Optical article and method for manufacturing the same | |
| US9268067B2 (en) | Optical component having antireflection structure | |
| CN102439488A (en) | Modified oblique incident angle deposition apparatus, method for manufacturing non-reflective optical thin film using the same, and non-reflective optical thin film | |
| WO2020162463A1 (en) | Optical element and optical element manufacturing method | |
| JP2007279203A (en) | Multilayer antireflection layer and method for manufacturing the same, and plastic lens | |
| US20070224342A1 (en) | Apparatus and method for forming antireflection film | |
| CN104066867B (en) | Optical element, optical thin film forming apparatus and optical thin film forming method | |
| CN113646462A (en) | Device and method for coating a substrate having a planar or profiled surface by means of magnetron sputtering | |
| JP2021026163A (en) | Optical member with antireflection film and method for manufacturing the same | |
| JP2011179102A (en) | Vapor deposition apparatus for lens | |
| JPWO2018159335A1 (en) | Lens and method for manufacturing lens | |
| JP6714399B2 (en) | Optical element and optical thin film forming method | |
| CN210142210U (en) | Light splitting self-focusing Glens lens | |
| JP5654255B2 (en) | Vapor deposition equipment | |
| JP2017523450A (en) | Manufacturing method of microarray lens | |
| US20220146816A1 (en) | Actively deformable metamirror | |
| US20110020623A1 (en) | Method and Apparatus for Repairing an Optical Component Substrate Through Coating | |
| US12058429B2 (en) | Lens, lens assembly, and mobile electronic device | |
| JP2007034337A (en) | Fresnel mirror | |
| WO1992016014A2 (en) | Method and apparatus for concave substrates | |
| KR20190008044A (en) | CCTV dome lens anti- reflection coated by vacuum coating method and its product method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140402 Termination date: 20201125 |