CN102540299A - Grating polarizer - Google Patents
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- CN102540299A CN102540299A CN2012100298416A CN201210029841A CN102540299A CN 102540299 A CN102540299 A CN 102540299A CN 2012100298416 A CN2012100298416 A CN 2012100298416A CN 201210029841 A CN201210029841 A CN 201210029841A CN 102540299 A CN102540299 A CN 102540299A
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Abstract
The invention relates to a grating polarizer, which comprises a substrate and a plurality of grating structures, wherein the grating structures are periodically arranged on the substrate; each grating structure comprises a dielectric layer, a first metal layer and a second metal layer respectively; the dielectric layer is arranged on the substrate and comprises a bottom surface close to the substrate, a top surface far away from the substrate, and two side faces connected with the bottom surface and the top surface; the top surface of the dielectric layer is longer than the bottom surface of the dielectric layer; the first metal layer is arranged on the dielectric layer; and the second metal layer is arranged on the substrate and is positioned on one side of the dielectric layer. Because the top surface of the dielectric layer is longer than the bottom surface of the dielectric layer, the transmission efficiency of TM light is improved, the leakage of TE light is suppressed and an extinction ratio of the grating polarizer is improved without reduction in the periods of the grating structures.
Description
Technical field
The present invention relates to the polaroid technical field, particularly a kind of grating polarization sheet.
Background technology
Polaroid, for example the metal grating polaroid is a kind of very important optical element in the systems such as liquid crystal display, optical measurement, optical communication, it has boundless market.The metal grating polaroid has unique polarization property, and its reason is perpendicular to grating vector (TM polarization) different with the boundary condition that is parallel to grating vector (TE polarization) polarized light, and its equivalent refractive index is also different.Existing metal grating polaroid mainly is divided into individual layer and double-decker, and in order to improve TM optical transmission efficient, in general, the cycle that requires metal grating is less than 200nm.For double-decker, utilize the mode of inclination evaporation metal to obtain double-decker mostly at present, be plugged to avoid the opening between the adjacent metal.
Since at present higher to the cycle request of metal grating, generally all require below 200nm, can cause the preparation difficulty of metal grating polaroid bigger like this.In addition, the metal bump of existing metal grating is a rectangular configuration, as easy as rolling off a logly during evaporation metal blocks opening, thereby can reduce TM optical transmission efficient and extinction ratio (being TM optical transmission efficient/TE optical transmission efficient).Even adopt the mode of inclination evaporation metal, also can't effectively improve TM optical transmission efficient and extinction ratio.
Therefore, how to design a kind of prepare simple, be easy to process, grating polarization sheet that cost performance is high, become this area research Development Trend.
Summary of the invention
Therefore, the present invention provides the grating polarization sheet, to overcome the problem that exists in the existing polaroid technology.
Particularly, a kind of grating polarization sheet that the embodiment of the invention proposes comprises substrate and a plurality of optical grating construction; A plurality of optical grating constructions periodically are arranged in the substrate, and wherein each optical grating construction comprises dielectric layer, the first metal layer and second metal level respectively; Dielectric layer is arranged in the substrate, and dielectric layer comprises bottom surface near substrate, away from end face and two sides that are connected bottom surface and end face of substrate, the length of the end face of dielectric layer is greater than the length of bottom surface; The first metal layer is arranged on the dielectric layer; Second metal level is arranged in the substrate and is positioned at a side of dielectric layer.
In embodiments of the present invention, the height of above-mentioned dielectric layer is greater than the height of second metal level.
In embodiments of the present invention, the cross section of above-mentioned dielectric layer is a trapezium structure.
In embodiments of the present invention, the side of the connection bottom surface of above-mentioned dielectric layer and end face is the curved surface of arcuation.
In embodiments of the present invention, above-mentioned dielectric layer and substrate are adopted same material and are processed.
In embodiments of the present invention, above-mentioned dielectric layer and substrate are adopted material different and are processed.
In embodiments of the present invention, the refractive index of above-mentioned dielectric layer and substrate is identical.
In embodiments of the present invention, the refractive index of above-mentioned dielectric layer and substrate is 1.5.
In embodiments of the present invention, above-mentioned dielectric layer adopts the high photoresist material of the little transmittance of visible absorption is processed.
In addition; A kind of grating polarization sheet that the embodiment of the invention proposes; It comprises substrate, first grating array and second grating array, and first grating array has a plurality of first optical grating constructions, and wherein each first optical grating construction comprises dielectric layer and metal level respectively; Dielectric layer is arranged in the substrate; And metal level is arranged on the dielectric layer, and dielectric layer comprises bottom surface near substrate, away from end face and two sides that are connected bottom surface and end face of substrate, the length of the end face of each first optical grating construction medium layer is greater than the length of bottom surface; Second grating array has second optical grating construction of a plurality of non-printing opacities, and wherein each second optical grating construction is separately positioned in the substrate and is positioned at a side of the dielectric layer of the first corresponding optical grating construction.
The above embodiment of the present invention since the length of the end face of dielectric layer greater than the length of bottom surface; Under the prerequisite in the cycle that need not reduce optical grating construction, just can increase substantially TM optical transmission efficient like this, suppress the leakage of TE light; Can also improve simultaneously the extinction ratio of grating polarization sheet; Promptly improved the rejection ratio of TM optical transmission efficient/TE optical transmission efficient, it satisfies the requirement that liquid crystal display brightness improves so fully greater than 30:1.In addition, because dielectric layer roughly adopts inverted trapezoidal structure, the metal of the first metal layer and second metal level deposition also is not easy to block opening like this, thereby makes that the preparation process of grating polarization sheet is simpler in the preparation process of grating polarization sheet.
Above-mentioned explanation only is the general introduction of technical scheme of the present invention; Understand technological means of the present invention in order can more to know; And can implement according to the content of instructions, and for let of the present invention above-mentioned with other purposes, feature and advantage can be more obviously understandable, below special act preferred embodiment; And conjunction with figs., specify as follows.
Description of drawings
Fig. 1 is the structural representation of the grating polarization sheet of embodiment of the invention proposition.
Fig. 2 A is the graph of a relation of TM light, TE optical transmission efficient and the incident light wavelength of existing a kind of grating polarization sheet.
Fig. 2 B is the extinction ratio that obtained by Fig. 2 A and the graph of a relation of incident light wavelength.
Fig. 3 A is the graph of a relation of TM light, TE optical transmission efficient and the incident light wavelength of the grating polarization sheet of Fig. 1.
Fig. 3 B is the extinction ratio that obtained by Fig. 3 A and the graph of a relation of incident light wavelength.
Fig. 4 is the difference in height of grating polarization sheet between its dielectric layer and second metal level of Fig. 1 when being first difference in height, the graph of a relation of TM optical transmission efficient and incident light wavelength.
Fig. 5 A is the difference in height of grating polarization sheet between its dielectric layer and second metal level of Fig. 1 when being second difference in height, the graph of a relation of TM optical transmission efficient and incident light wavelength.
Fig. 5 B is the difference in height of grating polarization sheet between its dielectric layer and second metal level of Fig. 1 when being second difference in height, the graph of a relation of TE optical transmission efficient and incident light wavelength.
Fig. 5 C is the extinction ratio that obtained by Fig. 5 A and Fig. 5 B and the graph of a relation of incident light wavelength.
Fig. 6 is the structural representation of the grating polarization sheet of another embodiment of the present invention proposition.
Fig. 7 A is TM optical transmission efficient and the graph of a relation of incident light wavelength of the grating polarization sheet of Fig. 6.
Fig. 7 B is TE optical transmission efficient and the graph of a relation of incident light wavelength of the grating polarization sheet of Fig. 6.
Fig. 8 is the extinction ratio that obtained by Fig. 7 A and Fig. 7 B and the graph of a relation of incident light wavelength.
Embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention; Below in conjunction with accompanying drawing and preferred embodiment; To its embodiment of grating polarization sheet, structure, characteristic and the effect that proposes according to the present invention, specify as after.
Relevant aforementioned and other technology contents, characteristics and effect of the present invention can clearly appear in following the cooperation in the graphic preferred embodiment detailed description of reference.Through the explanation of embodiment, when can being to reach technological means and the effect that predetermined purpose takes to be able to more deeply and concrete understanding to the present invention, yet the appended graphic usefulness that only provides reference and explanation be not to be used for the present invention is limited.
Fig. 1 is the structural representation of the grating polarization sheet of embodiment of the invention proposition.Please refer to Fig. 1, the grating polarization sheet of present embodiment comprises substrate 11 and a plurality of optical grating construction 12, and wherein these optical grating constructions 12 periodically are arranged in the substrate 11.And each optical grating construction 12 comprises dielectric layer 121, the first metal layer 122 and second metal level 123 respectively.
In addition, the material of the material of dielectric layer 121 and substrate 11 can be identical, also can be inequality, and for example the material of dielectric layer 121 can adopt materials such as the high photoresists of the little transmittance of visible absorption and process.Certainly, in the present invention, the material of dielectric layer 121 and substrate 11 also can adopt the non-absorbent material of visible light.The refractive index of dielectric layer 121 and substrate 11 is identical or approaching, for example is approximately 1.5.
The first metal layer 122 is arranged on the dielectric layer 121.Preferably, the cross section of the first metal layer 122 can be rectangle, and its base is consistent with the length of the end face 121a of dielectric layer 121.
In other words; In the present invention; The grating polarization sheet can comprise substrate 11, first grating array and second grating array; Wherein, first grating array comprises a plurality of first optical grating constructions of being made up of dielectric layer 121 and the first metal layer 122, and second grating array comprises second optical grating construction of a plurality of non-printing opacities of being made up of second metal level 123.Dielectric layer 121 is arranged in the substrate 11, and the first metal layer 122 is arranged on the dielectric layer 121, and dielectric layer 121 comprises bottom surface 121b near substrate 11, is connected the side 121c of bottom surface 121b and end face 121a away from the end face 121a of substrate 11 with two.And be separately positioned in the substrate 11 as each second metal level 123 of non-printing opacity second optical grating construction in second grating array and be arranged in a side of the dielectric layer 121 of the first corresponding optical grating construction.The cross section of each first optical grating construction medium layer 121 is roughly trapezium structure, and promptly the length of its end face 121a is greater than the length of its bottom surface 121b.
Because the cross section of dielectric layer 121 in the present invention is roughly trapezium structure; Therefore can form opening between second metal level 123 and the dielectric layer 121; And in the process of the preparation the first metal layer 122 and second metal level 123; The deposition of metal is not easy to block opening 126,127 in the first metal layer 122 and second metal level 123, thereby makes that the preparation process of grating polarization sheet of the present invention is simpler.
In addition; Because the cross section of the dielectric layer 121 among the present invention in each optical grating construction 12 is a trapezium structure; Be the length of the length of its end face 121a greater than bottom surface 121b, and the height of dielectric layer 121 is greater than the height of second metal level 123, therefore the optical characteristics of grating polarization sheet of the present invention is better.The grating polarization sheet that proposes through the experimental verification embodiment of the invention below has higher TM optical transmission efficient, lower TE optical transmission efficient (leakage that is TE light is suppressed) and higher extinction ratio under the prerequisite in the cycle of the optical grating construction 12 that need not reduce the grating polarization sheet, thereby can overcome the existing grating polarization sheet shortcoming high to the cycle request of optical grating construction 12.
Suppose the incident light wavelength still between 0.4 μ m between the 0.8 μ m.The structural parameters of the grating polarization sheet of Fig. 1 are following: the period p=150nm of optical grating construction 12, the length w1=100nm of the end face 121a of dielectric layer 121, the length w2=100nm of the bottom surface 121b of dielectric layer 121, and the height h1=100nm of dielectric layer 121.In addition, the difference in height Δ h between the height h of the height h1 of dielectric layer 121 and second metal level 123 between 10nm between the 40nm.Like this, the dielectric layer 121 in the grating polarization sheet under these structural parameters w1=w2 is a rectangular configuration.With this understanding, the relation of TM light and TE optical transmission efficient and incident light wavelength is shown in Fig. 2 A, and wherein curve 21,22,23,24 is respectively that Δ h is a TM optical transmission efficient under 40nm, 30nm, 20nm, the 10nm.Curve 25,26,27,28 is respectively that Δ h is a TE optical transmission efficient under 40nm, 30nm, 20nm, the 10nm.The extinction ratio that is obtained by Fig. 2 A and the relation of incident light wavelength are shown in Fig. 2 B, and wherein curve 201,202,203,204 is respectively that Δ h is the extinction ratio under 40nm, 30nm, 20nm, the 10nm.
Suppose the incident light wavelength between 0.4 μ m between the 0.8 μ m.The structural parameters of the grating polarization sheet of Fig. 1 of the present invention are following: the period p=150nm of optical grating construction 12; The length w1=100nm of the end face 121a of dielectric layer 121; The length w2=80nm of the bottom surface 121b of dielectric layer 121; The height of second metal level 123 is h, and the height of dielectric layer 121 is h1, and the difference between the height h of the height h1 of dielectric layer 121 and second metal level 123 is Δ h.Δ h=h1-h, Δ h between 10nm between the 40nm.With this understanding, the relation of TM light and TE optical transmission efficient and incident light wavelength is shown in Fig. 3 A, and wherein curve 31,32,33,34 is respectively that Δ h is a TM optical transmission efficient under 40nm, 30nm, 20nm, the 10nm.Curve 35,36,37,38 is respectively that Δ h is a TE optical transmission efficient under 40nm, 30nm, 20nm, the 10nm.The extinction ratio that is obtained by Fig. 3 A and the relation of incident light wavelength are shown in Fig. 3 B, and wherein curve 301,302,303,304 is respectively that Δ h is the extinction ratio under 40nm, 30nm, 20nm, the 10nm.Through the comparison of Fig. 2 A and Fig. 3 A being found out among Fig. 3 A at Δ h is that TM optical transmission efficient is higher under 40nm, 30nm, 20nm, the 10nm, TE optical transmission efficient is lower, and TM optical transmission efficient is higher when incident light is the short wavelength especially, TE optical transmission efficient is lower.Through Fig. 2 B can be found out that with the comparison of Fig. 3 B Fig. 3 B is also to significantly improve under 40nm, 30nm, 20nm, the 10nm than the extinction ratio among Fig. 2 B at Δ h.TM optical transmission efficient when therefore above-mentioned experimental result proof adopts the dielectric layer 121 of trapezium structure can increase substantially incident light for the short wavelength; And incident light when being the long wavelength TM optical transmission efficiency change very little; Extinction ratio also significantly improves; It satisfies the requirement that liquid crystal display brightness improves fully greater than 30:1.
Suppose the incident light wavelength between 0.4 μ m between the 0.8 μ m.The structural parameters of the grating polarization sheet of Fig. 1 are following: the period p=150nm of optical grating construction 12; The length w1=100nm of the end face 121a of dielectric layer 121; The length w2 of the bottom surface 121b of dielectric layer 121 between 40nm between the 100nm, the poor Δ h=30nm between the height h of the height h1 of dielectric layer 121 and second metal level 123.With this understanding, the relation of TM optical transmission efficient and incident light wavelength is as shown in Figure 4, and wherein curve 41,42,43,44 is respectively that w2 is a TM optical transmission efficient under 40nm, 60nm, 80nm, the 100nm.The structural parameters w1=w2 in the curve 44 wherein, the dielectric layer in the grating polarization sheet under these structural parameters is a rectangular configuration.The TM optical transmission efficient that is grating polarization sheet of the present invention of curve 41,42,43 representatives.With the structure of grating polarization sheet of the present invention and dielectric layer is that the grating polarization sheet of rectangular configuration is compared; As can beappreciated from fig. 4; The structure of grating polarization sheet of the present invention can increase substantially incident light TM optical transmission efficient when the short wavelength, and incident light when being the long wavelength TM optical transmission efficiency change very little.
Suppose the incident light wavelength between 0.4 μ m between the 0.8 μ m.The structural parameters of the grating polarization sheet of Fig. 1 are following: the period p=150nm of optical grating construction 12; The length w1=100nm of the end face 121a of dielectric layer 121; The length w2 of the bottom surface 121b of dielectric layer 121 between 40nm between the 100nm, the poor Δ h=20nm between the height h of the height h1 of dielectric layer 121 and second metal level 123.With this understanding, the relation of TM optical transmission efficient and incident light wavelength is shown in Fig. 5 A, and wherein curve 501,502,503,504 is respectively that w2 is a TM optical transmission efficient under 40nm, 60nm, 80nm, the 100nm.With this understanding, the relation of TE optical transmission efficient and incident light wavelength is shown in Fig. 5 B, and wherein curve 508,507,506,505 is respectively that w2 is a TE optical transmission efficient under 40nm, 60nm, 80nm, the 100nm.With this understanding, the extinction ratio that is obtained by Fig. 5 A, Fig. 5 B and the relation of incident light wavelength are shown in Fig. 5 C, and wherein curve 509,510,511,512 is respectively that w2 is the extinction ratio under 40nm, 60nm, 80nm, the 100nm.Can find out from Fig. 5 A and Fig. 5 B; TM optical transmission efficient along with the length w2 of the bottom surface 121b of dielectric layer 121 reduce improve also clearly; Simultaneously TE optical transmission efficient along with the length w2 of the bottom surface 121b of dielectric layer 121 reduce also significantly reduce, i.e. the leakage of TE light also is suppressed.Can find out that from Fig. 5 C extinction ratio significantly improves along with the reducing of length w2 of the bottom surface 121b of dielectric layer 121.
Fig. 6 is the structural representation of the grating polarization sheet of another embodiment of the present invention proposition.Please refer to Fig. 6, the difference of the grating polarization sheet of Fig. 6 and the grating polarization sheet of Fig. 1 is: the side 521c of dielectric layer 521 is roughly the curved surface of circular shape.Mainly be that promptly dielectric layer 521 can not be standard trapezium structure shown in Figure 1, and is trapezium structure roughly because the influence of the technology of actual fabrication makes the side 521c of dielectric layer 521 can not be the rectilinear form of Fig. 1.The structure of the first metal layer 522 is all identical with Fig. 1 with the position relation, repeats no more.
Grating polarization sheet through experimental verification Fig. 6 also has higher TM optical transmission efficient, lower TE optical transmission efficient and higher extinction ratio under the prerequisite in the cycle of the optical grating construction that need not reduce the grating polarization sheet below.Thereby can overcome the existing grating polarization sheet shortcoming high equally to the cycle request of optical grating construction.Suppose the incident light wavelength between 0.4 μ m between the 1 μ m.The structural parameters of grating polarization sheet are following among Fig. 6: the cycle of optical grating construction 52 is p5=150nm; The length w51=100nm of the end face 521a of dielectric layer 521; The length w52 of the bottom surface 521b of dielectric layer 521 between 40nm between the 100nm, the poor Δ h5=20nm between the height h5 of the height h51 of dielectric layer 521 and second metal level 523.With this understanding, the relation of TM optical transmission efficient and incident light wavelength is shown in Fig. 7 A, and wherein curve 60,61,62,63,64 is respectively that w2 is a TM optical transmission efficient under 40nm, 50nm, 60nm, 80nm, the 100nm.With this understanding, the relation of TE optical transmission efficient and incident light wavelength is shown in Fig. 7 B, and wherein curve 65,66,67,68,69 is respectively that w2 is a TE optical transmission efficient under 100nm, 80nm, 60nm, 50nm, the 40nm.With this understanding, the extinction ratio that is obtained by Fig. 7 A, Fig. 7 B and the relation of incident light wavelength are as shown in Figure 8, and wherein curve 81,82,83,84,85 is respectively that w52 is the extinction ratio under 40nm, 50nm, 60nm, 80nm, the 100nm.Can find out from Fig. 7 A and Fig. 7 B; TM optical transmission efficient along with the length w52 of the bottom surface 521b of dielectric layer 521 reduce improve also clearly; Simultaneously TE optical transmission efficient along with the length w52 of the bottom surface 521b of dielectric layer 521 reduce also significantly reduce, i.e. the leakage of TE light also is suppressed.As can beappreciated from fig. 8, extinction ratio significantly improves along with the reducing of length w52 of the bottom surface 521b of dielectric layer 521.
In sum; The present invention's grating polarization sheet is owing to adopt the dielectric layer 121,521 that is roughly trapezium structure; The length of end face that is dielectric layer 121,521 is greater than the length of its bottom surface; TM optical transmission efficient in the time of under the prerequisite in cycle of the optical grating construction that need not reduce the grating polarization sheet 12,52, just can increasing substantially incident light like this, suppressed the leakage of TE light, can also improve the extinction ratio of grating polarization sheet simultaneously, promptly improved the rejection ratio of TM optical transmission efficient/TE optical transmission efficient for the short wavelength; It satisfies the requirement that liquid crystal display brightness improves so fully greater than 30:1.In addition, because dielectric layer roughly adopts trapezium structure, the metal of the first metal layer and second metal level deposition also is not easy to block opening like this, thereby makes that the preparation process of grating polarization sheet is simpler in the preparation process of grating polarization sheet.
The above only is preferred embodiment of the present invention, is not the present invention is done any pro forma restriction; Though the present invention discloses as above with preferred embodiment; Yet be not in order to limiting the present invention, anyly be familiar with the professional and technical personnel, in not breaking away from technical scheme scope of the present invention; When the technology contents of above-mentioned announcement capable of using is made a little change or is modified to the equivalent embodiment of equivalent variations; In every case be not break away from technical scheme content of the present invention, to any simple modification, equivalent variations and modification that above embodiment did, all still belong in the scope of technical scheme of the present invention according to technical spirit of the present invention.
Claims (10)
1. grating polarization sheet is characterized in that it comprises:
Substrate; With
A plurality of optical grating constructions periodically are arranged in this substrate, and wherein each optical grating construction comprises respectively:
Dielectric layer is arranged in this substrate, and this dielectric layer comprises bottom surface near this substrate, away from end face and two sides that are connected this bottom surface and this end face of this substrate;
The first metal layer is arranged on this dielectric layer; And
Second metal level is arranged in this substrate and is positioned at a side of this dielectric layer;
Wherein, the length of this end face of this dielectric layer is greater than the length of this bottom surface.
2. grating polarization sheet according to claim 1 is characterized in that the height of this dielectric layer is greater than the height of this second metal level.
3. grating polarization sheet according to claim 2 is characterized in that, the cross section of this dielectric layer is a trapezium structure.
4. grating polarization sheet according to claim 2 is characterized in that, this side of this bottom surface of the connection of this dielectric layer and this end face is the curved surface of arcuation.
5. grating polarization sheet according to claim 1 is characterized in that, this dielectric layer adopts same material with this substrate and processes.
6. grating polarization sheet according to claim 1 is characterized in that, this dielectric layer adopts material different with this substrate and processes.
7. grating polarization sheet according to claim 1 is characterized in that, the refractive index of this dielectric layer and this substrate is identical.
8. grating polarization sheet according to claim 7 is characterized in that, the refractive index of this dielectric layer and this substrate is 1.5.
9. grating polarization sheet according to claim 1 is characterized in that, this dielectric layer adopts the high photoresist material of the little transmittance of visible absorption is processed.
10. grating polarization sheet is characterized in that it comprises:
Substrate;
First grating array; Have a plurality of first optical grating constructions; Wherein each first optical grating construction comprises dielectric layer and metal level respectively; This dielectric layer is arranged in this substrate, and this metal level is arranged on this dielectric layer, and this dielectric layer comprises bottom surface near this substrate, away from end face and two sides that are connected this bottom surface and this end face of this substrate;
Second grating array has second optical grating construction of a plurality of non-printing opacities, and wherein each second optical grating construction is separately positioned in the substrate and is positioned at a side of this dielectric layer of this corresponding first optical grating construction;
Wherein, in each first optical grating construction the length of this end face of this dielectric layer greater than the length of this bottom surface.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879849A (en) * | 2012-10-26 | 2013-01-16 | 苏州大学 | Sub-wavelength grating structure polarizer |
| CN108622848A (en) * | 2017-03-16 | 2018-10-09 | 厦门大学 | A kind of three-dimensional composite nanostructure of large area and preparation method thereof |
| CN108845385A (en) * | 2016-09-08 | 2018-11-20 | 苏州大学 | Pixel type based on plasma primitive is orientated double-layer nanometer grating linear polarizer more |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101290371A (en) * | 2008-05-30 | 2008-10-22 | 苏州大学 | Sub-wavelength grate structure polarizing film and its manufacture method |
| CN101377555A (en) * | 2008-09-26 | 2009-03-04 | 苏州大学 | Sub-wave length embedded type grating structure polarizing sheet and manufacturing method thereof |
| US20090268295A1 (en) * | 2008-04-25 | 2009-10-29 | John Michael Miller | Surface-relief diffraction grating |
-
2012
- 2012-02-10 CN CN2012100298416A patent/CN102540299A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090268295A1 (en) * | 2008-04-25 | 2009-10-29 | John Michael Miller | Surface-relief diffraction grating |
| CN101290371A (en) * | 2008-05-30 | 2008-10-22 | 苏州大学 | Sub-wavelength grate structure polarizing film and its manufacture method |
| CN101377555A (en) * | 2008-09-26 | 2009-03-04 | 苏州大学 | Sub-wave length embedded type grating structure polarizing sheet and manufacturing method thereof |
Non-Patent Citations (1)
| Title |
|---|
| ZHICHENG YE 等: "Surface plasmon-mediated transmission in double-layer metallic grating polarizers", 《JOURNAL OF THE OPTICAL SOCIETY OF AMERICA》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879849A (en) * | 2012-10-26 | 2013-01-16 | 苏州大学 | Sub-wavelength grating structure polarizer |
| CN102879849B (en) * | 2012-10-26 | 2015-04-15 | 苏州大学 | Sub-wavelength grating structure polarizer |
| CN108845385A (en) * | 2016-09-08 | 2018-11-20 | 苏州大学 | Pixel type based on plasma primitive is orientated double-layer nanometer grating linear polarizer more |
| CN108622848A (en) * | 2017-03-16 | 2018-10-09 | 厦门大学 | A kind of three-dimensional composite nanostructure of large area and preparation method thereof |
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Application publication date: 20120704 |