CN102539114A - Laser parameter measuring system - Google Patents

Laser parameter measuring system Download PDF

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Publication number
CN102539114A
CN102539114A CN2010106168440A CN201010616844A CN102539114A CN 102539114 A CN102539114 A CN 102539114A CN 2010106168440 A CN2010106168440 A CN 2010106168440A CN 201010616844 A CN201010616844 A CN 201010616844A CN 102539114 A CN102539114 A CN 102539114A
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China
Prior art keywords
wedge
lens
measuring system
collecting device
parameter measuring
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CN2010106168440A
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Chinese (zh)
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CN102539114B (en
Inventor
樊仲维
邱基斯
唐熊忻
张晶
张国新
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Beijing GK Laser Technology Co Ltd
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Beijing GK Laser Technology Co Ltd
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Publication of CN102539114B publication Critical patent/CN102539114B/en
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Abstract

The invention relates to a laser parameter measuring system, which comprises a first lens, a first wedge plate, a second wedge plate, a third wedge plate, a first image collecting device, a second image collecting device, an energy probe and a waveform probe, wherein light beams output by an external laser to be measured are transmitted to the first wedge plate through the first lens, the light beam reflected by the first wedge plate sequentially pass through the second wedge plate and the third wedge plate and enter the first image collecting device, the light beams transmitted by the first wedge plate enter the energy probe, the light beams reflected by the second wedge plate enter the second image collecting device, and the light beams reflected by the third wedge plate enter the waveform probe. The laser parameter measuring system has the advantages that the occupied space is small, the cost is low, the installation and the regulation are convenient, and in addition, the application range is wide.

Description

The laser parameter measuring system
Technical field
The present invention relates to a kind of measuring system, particularly a kind of measuring system that laser parameter is measured of being used for.
Background technology
The continuous development of laser technique makes it be applied to every field widely.Thus; Also seem for the detection of each parameter of laser instrument and to become more and more important; Common one-stop laser instrument testing synthesis parameter system mainly comprises energy test unit, time waveform test cell, time waveform test cell, near-field test unit, far field test cell.The energy test unit mainly carries out the monitoring and the measurement of laser single-pulse energy, energy stability.The time waveform test cell carries out pulse width, pulse front edge, edge, back, pulse stability, the isoparametric measurement of repetition frequency.Best near field position is found out through control driven by motor one scientific grade CCD start in the near-field test unit, measures spot size, the softening factor, near field percentage modulation Rayleigh distance, as transmitting position etc.The far field test cell is found out beam waist position through the one scientific grade CCD start of control driven by motor, measures the angle of divergence, directive property and diffraction multiple, beam waist.
As shown in Figure 1; Existing laser instrument comprehensive parameter measuring system comprises one first lens setting gradually according to the light beam incident direction 110, one first wedge 120, far field image harvester 130, one second wedge 140,150, one the 3rd wedge of energy probe 160, waveform 170, one second lens 180 of probe and a near field image collecting device 190; This measuring system also comprises a platform (figure does not show), and said elements all is arranged on this platform.
According to the lens imaging principle; Is the focal length of said first lens 110 to the distance of said far field image harvester 130 again from said first lens 110 through said first wedge 120; The focal length that equals first lens 110 to the distance of said second lens 180 again through said first wedge 120, said second wedge 140, said the 3rd wedge 160 from said first lens 110 adds the distance of the focal distance f of second lens 180; Promptly greater than the focal length of said first lens 110; Take all factors into consideration above distance, the platform that then carries said elements needs bigger size.In like manner; If it is x that the picture of last a slice lens emergent light of the outside laser instrument to be measured of system requirements transmits distance; First lens 110 in the then existing measuring system transmit apart from x for picture with the distance of last a slice lens (figure does not show) of outside laser instrument to be measured; Promptly first lens 110 just in time are positioned on the picture plane of outside laser instrument to be measured, and promptly the platform of this measuring system is far away to the distance of last a slice lens of outside laser instrument to be measured.
This shows,, do not meet the trend of current lightness, portability because the use of existing measuring system need occupy bigger space.In addition, the platform size that existing measuring system is used for carrying each element is bigger, has increased the hard work amount to mass production, and it is not easy to reach up and down move left and right, makes range of application receive very big restriction.And when testing laser device and above-mentioned optical table not at grade the time; As shown in Figure 1; The general employing of existing measuring system hangs over a vertical frame with two 45 degree catoptrons 113,115, and the light beam of the output of testing laser device is imported this measuring system, causes the cost of total system higher thus; And increased the operation of installing and regulating above-mentioned two 45 degree catoptrons 113,115, caused the installation of total system and regulate comparatively complicated.
Summary of the invention
Big for taking up room of solving that prior art laser parameter measuring system exists, cost is high and regulate the complicated technology problem, the present invention provide a kind of take up room little, cost is low, be convenient to the laser parameter measuring system of installing and regulating.
The present invention provides a kind of laser parameter measuring system; It comprises one first lens, first wedge, second wedge, the 3rd wedge, first image collecting device, second image collecting device, an energy probe and a waveform probe; The light beam of laser instrument output outside to be measured is transmitted to said first wedge through said first lens; The said first wedge beam reflected of process is passed second wedge successively, the 3rd wedge gets into first image collecting device; Light beam through the said first wedge transmission gets into said energy probe; Get into second image collecting device through the said second wedge beam reflected, get into said waveform probe through said the 3rd wedge beam reflected.
Said laser parameter measurement system also comprises a platform, and said first wedge, said second wedge, said the 3rd wedge, said first image collecting device, said second image collecting device, said energy probe and said waveform probe all are arranged on the said platform.
Said first lens are arranged on the output end position of laser instrument outside to be measured, and the distance of the outgoing mirror of the output terminal of the laser instrument that said first lens and outside are to be measured is transmitted distance less than the picture of this outgoing mirror.
Said laser parameter measuring system also comprises one second lens, and said second lens are arranged on the said platform, and said second lens of light beam process of said the 3rd wedge transmission enter into said first image collecting device after contracting and restrainting.
Said laser parameter measuring system also comprises one the 3rd lens, and the 3rd lens are arranged on the said platform, and the light beam of the said first wedge transmission expands the bundle back through said the 3rd lens and gets into said energy probe.
Said first lens and said second lens are convex lens, and said the 3rd lens are concavees lens.
Said first lens and its are the focal length of said first lens along said first wedge, the said second wedge direction to the distance of the projection of said second image collecting device.
Said first wedge, said second wedge and said the 3rd wedge all are glass plate.
Said first image collecting device and said second image collecting device all are CCD.
Said platform also comprises a lifting structure and a translation structure, and said lifting structure is controlled said platform and vertically moved, and said translation structure is controlled said platform along continuous straight runs and moved.
Compared to prior art, main beneficial effect of the present invention is:
Laser parameter measuring system according to the invention is arranged on laser output position to be measured, outside according to the virtual object image-forming principle with its first lens; And transmit distance less than the picture of this outgoing mirror with the distance of the outgoing mirror of output terminal; And other elements all are arranged on the platform, institute so that this laser parameter measuring system when using occupation space less.In addition; Because reduced by one first lens on the said platform, thus the size of having dwindled said platform, and platform provided by the invention can carry out up and down and move left and right; Make its range of application comparatively extensive, the installation of total system and adjusting are also comparatively easy.
Description of drawings
Fig. 1 is the schematic top plan view of prior art laser parameter measuring system.
Fig. 2 is the schematic top plan view of the driver module of laser parameter measuring system embodiment 1 of the present invention.
Embodiment
Embodiment 1
The present invention relates to a kind of laser parameter measuring system, it comprises one first lens 210, one second lens 212, one the 3rd lens 214, one first wedge 220, one second wedge 222, one the 3rd wedge 224, one first image collecting device 230, one second image collecting device 232,250 and platforms 260 of 240, waveforms probes of energy probe.Said first lens 210 are convex lens with said second lens 212, and said the 3rd lens 214 are concavees lens.Said first lens 210 are used for the bundle that contracts of the Laser Output Beam that the outside is to be measured and get into said first wedge 220; Said second lens 212 are used for making light beam to contract and restraint said first image collecting device 230 of entering, and said the 3rd lens 214 are used for making beam expander to get into said energy probe 240.Said first wedge 220, said second wedge 222 and said the 3rd wedge 224 all are glass plate, can make and incide its surperficial light generation partial reflection and part transmission.
Said first lens 210 are arranged on the laser instrument outside to be measured output terminal of (figure does not show) (figure does not show) position, promptly when total system is in running order, said first lens 210 is set is fixed together with outside laser instrument to be measured; When being in off working state, said first lens can being set separating with outside laser instrument to be measured.Picture transmits the image distance before that lens and object are become that is commonly defined as of distance in these lens.According to the virtual object image-forming principle, the distance that said first lens and the outgoing mirror (figure does not show) of the output terminal of outside laser instrument to be measured be set is transmitted distance less than the picture of this outgoing mirror.Said first lens 210 are the focal length of said first lens 210 along said first wedge 220, said second wedge, 220 directions to the distance of the projection of said second image collecting device 232 with it.
Said second lens 212, said the 3rd lens 214, said first wedge 220, said second wedge 222, said the 3rd wedge 224, said first image collecting device 230, said second image collecting device 232, said energy probe 240 and said waveform probe 250 all are arranged on the said platform 260.Said second lens 212 are between said the 3rd wedge 220 and said first image collecting device 230.Said the 3rd lens 214 are between said first wedge 220 and said energy probe 240.Said energy probe 240 receives successively the light beam that transmits through said first wedge 220, said second lens 212, and it is used for surveying the energy of incident beam.Said waveform probe 250 receives successively through 220 reflections of said first wedge, 222 transmissions of said second wedge, said the 3rd wedge 224 beam reflected, and it is used for surveying the waveform of incident beam.Said first image collecting device 230 all is CCD with said second image collecting device 232, all is used for writing light beam.
Said platform 260 also comprises a lifting structure (figure does not show) and a translation structure (figure does not show), and said lifting structure vertically moves said platform, and said translation structure moves said platform along continuous straight runs.
The principle of work of said laser parameter measuring system is: the output end position that said first lens 210 is arranged on laser instrument outside to be measured; Adjust the lifting structure and the translation structure of said platform 260, make this platform 260 corresponding in same plane and position with the output of this laser instrument to be measured; The light beam of this laser instrument to be measured output contracts to restraint through said first lens 210 and is transmitted to said first wedge 220; Light beam through 220 transmissions of said first wedge gets into said energy probe 240 through said the 3rd lens 214 expansion bundle backs again; Said energy probe 240 is surveyed the energy value of this light beam, enters into said second wedge 222 through said first wedge, 220 beam reflected; Get into said second image collecting device 232 through said second wedge, 222 beam reflected, said second image collecting device 232 is used for writing down this light beam, and the light beam of said second wedge of process 222 transmissions enters into said the 3rd wedge; Get into said waveform probe 250 through said the 3rd wedge 224 beam reflected; Said waveform probe 250 is surveyed the waveform of this light beam; Contracting through said second lens 212 through the light beam of said the 3rd wedge 224 transmissions enters into said first image collecting device 230 behind the bundle again, and said first image collecting device 230 is used for writing down this light beam.
Embodiment 2
The laser parameter measuring system of laser parameter measuring system of the present invention and embodiment 1 is roughly the same; Its key distinction is: this measuring system also comprises a support; Said support is arranged between the laser instrument and said platform outside to be measured; Said first lens are arranged on this support, said support Height Adjustable.
In other distortion embodiment, according to the needs of practical operation, said first wedge, said second wedge and said the 3rd wedge can all be selected for use with a kind of transparent medium, also can select three kinds of different transparent mediums respectively for use.
Compared to prior art, main beneficial effect of the present invention is:
Laser parameter measuring system according to the invention is arranged on laser output position to be measured, outside according to the virtual object image-forming principle with its first lens; And transmit distance less than the picture of this outgoing mirror with the distance of the outgoing mirror of output terminal; And other elements all are arranged on the platform, institute so that this laser parameter measuring system when using occupation space less.In addition; Because reduced by one first lens on the said platform, thus the size of having dwindled said platform, and platform provided by the invention can carry out up and down and move left and right; Make its range of application comparatively extensive, the installation of total system and adjusting are also comparatively easy.

Claims (10)

1. laser parameter measuring system; It is characterized in that; This laser parameter measuring system comprises one first lens, first wedge, second wedge, the 3rd wedge, first image collecting device, second image collecting device, an energy probe and a waveform probe; The light beam of laser instrument output outside to be measured is transmitted to said first wedge through said first lens; The said first wedge beam reflected of process is passed second wedge successively, the 3rd wedge gets into first image collecting device; Light beam through the said first wedge transmission gets into said energy probe, gets into second image collecting device through the said second wedge beam reflected, gets into said waveform probe through said the 3rd wedge beam reflected.
2. laser parameter measuring system according to claim 1; It is characterized in that; This laser parameter measurement system also comprises a platform, and said first wedge, said second wedge, said the 3rd wedge, said first image collecting device, said second image collecting device, said energy probe and said waveform probe all are arranged on the said platform.
3. laser parameter measuring system according to claim 1 and 2; It is characterized in that; Said first lens are arranged on the output end position of laser instrument outside to be measured, and the distance of the outgoing mirror of the output terminal of the laser instrument that said first lens and outside are to be measured is transmitted distance less than the picture of this outgoing mirror.
4. laser parameter measuring system according to claim 3; It is characterized in that; This laser parameter measuring system also comprises one second lens; Said second lens are arranged on the said platform, and said second lens of light beam process of said the 3rd wedge transmission enter into said first image collecting device after contracting and restrainting.
5. laser parameter measuring system according to claim 4; It is characterized in that; This laser parameter measuring system also comprises one the 3rd lens, and the 3rd lens are arranged on the said platform, and the light beam of the said first wedge transmission expands the bundle back through said the 3rd lens and gets into said energy probe.
6. laser parameter measuring system according to claim 5 is characterized in that, said first lens and said second lens are convex lens, and said the 3rd lens are concavees lens.
7. laser parameter measuring system according to claim 6 is characterized in that, said first lens and its are the focal length of said first lens along said first wedge, the said second wedge direction to the distance of the projection of said second image collecting device.
8. laser parameter measuring system according to claim 1 is characterized in that, said first wedge, said second wedge and said the 3rd wedge all are glass plate.
9. laser parameter measuring system according to claim 1 is characterized in that, said first image collecting device and said second image collecting device all are CCD.
10. laser parameter measuring system according to claim 2; It is characterized in that; Said platform also comprises a lifting structure and a translation structure, and said lifting structure is controlled said platform and vertically moved, and said translation structure is controlled said platform along continuous straight runs and moved.
CN 201010616844 2010-12-31 2010-12-31 Laser parameter measuring system Expired - Fee Related CN102539114B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109655232A (en) * 2017-10-12 2019-04-19 致茂电子(苏州)有限公司 Optical measurement device
CN111723621A (en) * 2019-03-21 2020-09-29 上海耕岩智能科技有限公司 Image acquisition device and electronic equipment

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4523469A (en) * 1983-01-19 1985-06-18 The United States Of America As Represented By The Secretary Of The Navy Laser generation of ultrasonic waveform reconstructions
US6043885A (en) * 1996-07-12 2000-03-28 Essilor International Fringe deflectometry apparatus and method
CN1740759A (en) * 2005-09-23 2006-03-01 左昉 Laser beam parameter measuring method based on image processing
CN101782435A (en) * 2010-03-11 2010-07-21 中国科学院上海光学精密机械研究所 Laser parameter integrated test system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4523469A (en) * 1983-01-19 1985-06-18 The United States Of America As Represented By The Secretary Of The Navy Laser generation of ultrasonic waveform reconstructions
US6043885A (en) * 1996-07-12 2000-03-28 Essilor International Fringe deflectometry apparatus and method
CN1740759A (en) * 2005-09-23 2006-03-01 左昉 Laser beam parameter measuring method based on image processing
CN101782435A (en) * 2010-03-11 2010-07-21 中国科学院上海光学精密机械研究所 Laser parameter integrated test system

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赵天卓等: "低重复频率激光光束多参数实时监测系统", 《中国激光》 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109655232A (en) * 2017-10-12 2019-04-19 致茂电子(苏州)有限公司 Optical measurement device
CN109655232B (en) * 2017-10-12 2021-08-10 致茂电子(苏州)有限公司 Optical measuring device
CN111723621A (en) * 2019-03-21 2020-09-29 上海耕岩智能科技有限公司 Image acquisition device and electronic equipment
CN111723621B (en) * 2019-03-21 2023-11-03 上海耕岩智能科技有限公司 Image acquisition device and electronic equipment

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Denomination of invention: Laser parameter measuring system

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Pledgee: Zhongguancun Beijing technology financing Company limited by guarantee

Pledgor: Beijing GK Laser Technology Co., Ltd.

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