CN102534572B

CN102534572B - Offset generation method and device

Info

Publication number: CN102534572B
Application number: CN201010610648.2A
Authority: CN
Inventors: 易璨
Original assignee: Beijing North Microelectronics Co Ltd
Current assignee: Beijing North Microelectronics Co Ltd
Priority date: 2010-12-17
Filing date: 2010-12-17
Publication date: 2014-04-09
Anticipated expiration: 2030-12-17
Also published as: CN102534572A

Abstract

The invention discloses an offset generation method and device. The offset generation method comprises the following steps of: generating an apex offset according to a first actual position and a first standard position, wherein the first actual position is an actual position of a first characteristic point, and the first standard position is a standard position of the first character point; generating a lateral offset according to a placement column list, the first actual position, a second actual position, the first standard position and a second standard position, wherein the second standard position is a standard position of a second character point, and the second actual position is an actual position of a second character point; generating a longitudinal offset according to the placement column list, the first actual position, the second actual position, the first standard position and a second standard position; and generating an entire offset angle according to the first actual position, the second actual position, the first standard position and a second standard position. According to the offset generation method and device disclosed by the invention, the film coating effect of the wafer is enhanced.

Description

The generation method and apparatus of side-play amount

Technical field

The present invention relates to microelectronics technology, particularly a kind of generation method and apparatus of side-play amount.

Background technology

At present, conventional crystal silicon solar batteries producing apparatus is PECVD equipment.PECVD equipment mostly is the hardware configuration form of line style (In-line), and this line style PECVD equipment is by adopting in line style plated film (In-line PECVD) technology to reach the object of high-level efficiency, high yield.Fig. 1 is a kind of structural representation of line style PECVD equipment, and as shown in Figure 1, this line style PECVD equipment comprises: preheating cavity 1, process cavity 2, cooling chamber 3, load platform 7 and unloading platform 8 and carrier plate transmission device 9.Wherein, between each chamber, by family of power and influence G1, family of power and influence G2, family of power and influence G3 and family of power and influence G4, be connected.Process cavity 2 is by valve 6 and be connected with vacuum pump (pump).The workflow of line style PECVD equipment is: wafer 4 is positioned on support plate 5; Support plate 5 is transported in preheating cavity 1, particularly, can support plate 5 be transported in preheating cavity 1 by automatic gear (not shown)s such as wheel or mechanical manipulators; 1 pair of support plate of preheating cavity 5 carries out thermal pretreatment, to heat support plate 5 and wafer 4; Support plate 5 is transported in process cavity 2, the wafer 4 on support plate 5 is carried out to coating film treatment.After coating film treatment completes, support plate 5 is transported in cooling chamber 3 and carries out cooling process, then support plate 5 is transported on unloading platform 8, the wafer 4 that art breading is completed is taken away from support plate 5.Support plate 5 returns to load platform 7 by carrier plate transmission device 9.After support plate 5 arrives on load platform 7 or unloading platform 8, have automatic mounting unloading device the wafer 4 on support plate 5 is loaded and unloaded to action, the wafer 4 that completes plated film is unloaded from support plate 5, and uncoated wafer 4 is put on support plate 5.X1 to x9 in Fig. 1 is support plate operational process.

Due to the error of carrier plate transmission device,, the distortion that may cause after heating of the discordance of support plate itself and support plate, the position that support plate arrives load platform or unloading platform at every turn may be offset to some extent.The side-play amount of support plate can comprise: overall offset amount and transversal displacement, wherein overall offset amount comprises apex offset amount and integral-rotation angle.Apex offset amount is the actual transmissions position on support plate summit (generally getting the upper left corner of support plate) and the side-play amount of scheduled transmission position.Transversal displacement is the ranging offset amount of adjacent two the wafer putting positions of same a line that cause due to support plate thermal distortion.Generate after the side-play amount of support plate, can draw according to this side-play amount the putting position of each wafer.Particularly, can draw by the unique point of setting the side-play amount of support plate on support plate.In the predetermined position of load platform or the predetermined position of unloading platform, preset the normal place of unique point.In the art breading flow process to wafer, if support plate is offset,, when support plate arrives the predetermined position of load platform or the predetermined position of unloading platform, the physical location of unique point and the normal place of unique point overlap.But in the art breading flow process to wafer, due to the error of carrier plate transmission device, the distortion that causes after heating of the discordance of support plate itself and support plate can be offset support plate.Fig. 2 sets the schematic diagram of unique point on a kind of support plate, as shown in Figure 2, specific position at support plate 5 is set First Characteristic point and Second Characteristic point, First Characteristic point is parallel unique point with Second Characteristic point, wherein First Characteristic point is fixed with the relative position of wafer putting position A, and Second Characteristic point is fixed with the relative position of wafer putting position B.When support plate 5 arrives behind load position or unloading piece position, by camera, obtain the physical location of First Characteristic point and the physical location of Second Characteristic point of support plate 5, according to the normal place of the normal place of the physical location of the physical location of First Characteristic point, Second Characteristic point, First Characteristic point and Second Characteristic point, draw the side-play amount of support plate.According to side-play amount, draw the putting position of each wafer.The side-play amount that aforesaid method can access comprises: apex offset amount, integral-rotation angle and row distance side-play amount.

Aforesaid method can draw by apex offset amount and integral-rotation angle the overall offset situation of support plate position, and draws by row distance side-play amount the transverse excursion situation that support plate causes due to thermal distortion.Support plate thermal distortion not only can cause the putting position of wafer to produce transverse excursion, and can cause the putting position of wafer to produce vertical misalignment amount, the ranging offset amount of the putting position that this vertical misalignment amount is adjacent two row wafers.Distance on support plate between the putting position of adjacent two row wafers is changeless, and along with putting the increase of wafer line number on support plate, the cumulative meeting of vertical misalignment amount causes wafer actual putting position and predetermined putting position skew on support plate excessive.But, because the method in background technology cannot draw vertical misalignment amount, while therefore putting wafer on support plate, only can on support plate, put wafer according to apex offset amount, integral-rotation angle and row distance side-play amount, do not consider the impact of vertical misalignment amount on wafer putting position, this can cause wafer actual putting position and predetermined putting position skew on support plate excessive, thereby causes the actual putting position of wafer on support plate incorrect.When being mounted with the support plate of wafer when entering process cavity and by process cavity, wafer being carried out to coating film treatment, because the actual putting position of wafer on support plate is incorrect, and process cavity is, according to the standard putting position of wafer, wafer is carried out to plated film, this can cause the coating effects of wafer to reduce.

Summary of the invention

The invention provides a kind of generation method and apparatus of side-play amount, with so that wafer skew of actual putting position and predetermined putting position on support plate reduce, thereby the coating effects of raising wafer.

For achieving the above object, the invention provides a kind of generation method of side-play amount, comprising:

According to the first physical location and the first normal place, generate apex offset amount, the physical location that described the first physical location is First Characteristic point, the normal place that described the first normal place is First Characteristic point;

According to putting columns, the first physical location, the second physical location, described the first normal place and the second normal place, generate transversal displacement, the normal place that described the second normal place is Second Characteristic point, the physical location that described the second physical location is Second Characteristic point;

According to putting line number, described the first physical location, described the second physical location, described the first normal place and described the second normal place, generate vertical misalignment amount;

According to described the first physical location, described the second physical location, described the first normal place and described the second normal place, generate whole deflection angle.

Further, described First Characteristic point and the diagonal angle setting of described Second Characteristic point.

Further, described the first normal place comprises the first standard lateral coordinate figure and the first standard along slope coordinate value, described the second normal place comprises the second standard lateral coordinate figure and the second standard along slope coordinate value, described the first standard lateral coordinate figure is 0, and described the first standard along slope coordinate value is 0.

Further, described the first physical location comprises the first actual lateral coordinates value and the first actual along slope coordinate value, and described apex offset amount comprises summit transversal displacement and summit vertical misalignment amount;

Described according to the first physical location and the first normal place, generate apex offset amount and comprise:

Described the first actual lateral coordinates value and described the first standard lateral coordinate figure are subtracted each other, generate described summit transversal displacement;

Described the first actual along slope coordinate value and described the first standard along slope coordinate value are subtracted each other, generate described summit vertical misalignment amount.

Further, described the first physical location comprises the first actual lateral coordinates value and the first actual along slope coordinate value, and described the second physical location comprises the second actual lateral coordinates value and the second actual along slope coordinate value;

Described basis is put columns, the first physical location, the second physical location, described the first normal place and the second normal place, generates transversal displacement and comprises before:

Described the first actual lateral coordinates value is carried out coordinate transform and described the first actual along slope coordinate value is carried out to coordinate transform, generating first shifts one's position, described first the shifting one's position for First Characteristic point of shifting one's position, described first shifts one's position comprises the 3rd actual lateral coordinates value and the 3rd actual along slope coordinate value, described the 3rd actual lateral coordinates value is 0, and described the 3rd actual along slope coordinate value is 0;

Described the second actual lateral coordinates value is deducted to described the first actual lateral coordinates value and described the second actual along slope coordinate value is deducted to described the first actual along slope coordinate value, generating second shifts one's position, described second shifts one's position as the shifting one's position of Second Characteristic point, and described second shifts one's position comprises the 4th actual lateral coordinates value and the 4th actual along slope coordinate value.

Further, described in put columns and be greater than or equal to 2, described basis is put columns, the first physical location, the second physical location, described the first normal place and the second normal place, generates transversal displacement and comprises:

According to describedly putting that columns, described first is shifted one's position, described second shifted one's position, described the first normal place and described the second normal place, generate described transversal displacement, specifically comprise:

According to described the 3rd actual lateral coordinates value, described the 3rd actual along slope coordinate value, described the 4th actual lateral coordinates value and described the 4th actual along slope coordinate value, generate the first physical location wire length, described the first physical location wire length is second to shift one's position and the first length of shifting one's position a line;

According to described the first standard lateral coordinate figure, described the first standard along slope coordinate value, described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first normal place wire length, described the first normal place wire length is the length of line between the first normal place and the second normal place;

According to described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first angle α, described the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place;

The difference of described the first physical location wire length and described the first normal place wire length and sin α are multiplied each other, generate lateral length difference;

By described lateral length difference with described in put columns and 1 difference be divided by, generate described transversal displacement.

Further, described in put line number and be greater than or equal to 2, described basis is put line number, described the first physical location, described the second physical location, described the first normal place and described the second normal place, generates vertical misalignment amount and comprises:

According to describedly putting that line number, described first is shifted one's position, described second shifted one's position, described the first normal place and described the second normal place, generate vertical misalignment amount, specifically comprise:

According to described the first standard lateral coordinate figure, described the first standard along slope coordinate value, described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first normal place wire length, described the first normal place wire length is the length of line between the special position of the first normal place and the second standard;

The difference of described the first physical location wire length and described the first normal place wire length and cos α are multiplied each other, generate longitudinal length difference;

By described longitudinal length difference with described in put line number and 1 difference be divided by, generate described vertical misalignment amount.

Further, described according to described the first physical location, described the second physical location, described the first normal place and described the second normal place, generate whole deflection angle and comprise:

According to described first shifting one's position, described second shift one's position, described the first normal place and described the second normal place, generate described whole deflection angle, specifically comprise:

Described the 4th actual lateral coordinates value is deducted to described lateral length difference and generate lateral reference coordinate figure, and described the 4th actual along slope coordinate value is deducted to described longitudinal length difference generate longitudinal reference coordinate value, described lateral reference coordinate figure and longitudinally reference coordinate value are the coordinate figure of the first reference position, the reference position that described the first reference position is Second Characteristic point;

According to described lateral reference coordinate figure and described longitudinal reference coordinate value, generate the second angle β, described the second angle β is the angle of the longitudinal axis in line and rectangular coordinate system between the first reference position and the first normal place;

Described the first angle α is deducted to described the second angle β, generate described whole deflection angle.

For achieving the above object, the invention provides a kind of generating apparatus of side-play amount, comprising:

The first generation module, for according to the first physical location and the first normal place, generates apex offset amount, the physical location that described the first physical location is First Characteristic point, the normal place that described the first normal place is First Characteristic point;

The second generation module, for basis, put columns, the first physical location, the second physical location, described the first normal place and the second normal place, generate transversal displacement, the normal place that described the second normal place is Second Characteristic point, the physical location that described the second physical location is Second Characteristic point;

The 3rd generation module, for according to putting line number, described the first physical location, described the second physical location, described the first normal place and described the second normal place, generates vertical misalignment amount;

The 4th generation module, for according to described transversal displacement, described vertical misalignment amount and the second physical location, generates whole deflection angle.

Described the first generation module comprises:

Summit transversal displacement generation module, for described the first actual lateral coordinates value and described the first standard lateral coordinate figure are subtracted each other, generates described summit transversal displacement;

Summit vertical misalignment amount generation module, for described the first actual along slope coordinate value and described the first standard along slope coordinate value are subtracted each other, generates described summit vertical misalignment amount.

Described device also comprises:

First generation module of shifting one's position, for described the first actual lateral coordinates value is carried out coordinate transform and described the first actual along slope coordinate value is carried out to coordinate transform, generating first shifts one's position, described first the shifting one's position for First Characteristic point of shifting one's position, described first shifts one's position comprises the 3rd actual lateral coordinates value and the 3rd actual along slope coordinate value, described the 3rd actual lateral coordinates value is 0, and described the 3rd actual along slope coordinate value is 0;

Second generation module of shifting one's position, for described the second actual lateral coordinates value is deducted to described the first actual lateral coordinates value and described the second actual along slope coordinate value is deducted to described the first actual along slope coordinate value, generating second shifts one's position, described second shifts one's position as the shifting one's position of Second Characteristic point, and described second shifts one's position comprises the 4th actual lateral coordinates value and the 4th actual along slope coordinate value.

Further, the described columns of putting is greater than or equal to 2, described the second generation module shifts one's position specifically for putting columns, described first described in basis, described second shift one's position, described the first normal place and described the second normal place, generates described transversal displacement;

Described the second generation module comprises:

The first wire length generation module, be used for according to described the 3rd actual lateral coordinates value, described the 3rd actual along slope coordinate value, described the 4th actual lateral coordinates value and described the 4th actual along slope coordinate value, generate the first physical location wire length, described the first physical location wire length is second to shift one's position and the first length of shifting one's position a line; And according to described the first standard lateral coordinate figure, described the first standard along slope coordinate value, described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first normal place wire length, described the first normal place wire length is the length of line between the first normal place and the second normal place;

The first angle generation module, be used for according to described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first angle α, described the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place;

The poor generation module of lateral length, for the difference of described the first physical location wire length and described the first normal place wire length and sin α are multiplied each other, generates lateral length difference;

Transversal displacement generation module, for by described lateral length difference with described in put columns and 1 difference be divided by, generate described transversal displacement.

Further, the described line number of putting is greater than or equal to 2, described the 3rd generation module, specifically for putting line number, described the first physical location, described the second physical location, described the first normal place and described the second normal place described in basis, generates vertical misalignment amount;

Described the 3rd generation module comprises:

The second wire length generation module, be used for according to described the 3rd actual lateral coordinates value, described the 3rd actual along slope coordinate value, described the 4th actual lateral coordinates value and described the 4th actual along slope coordinate value, generate the first physical location wire length, described the first physical location wire length is second to shift one's position and the first length of shifting one's position a line; And according to described the first standard lateral coordinate figure, described the first standard along slope coordinate value, described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first normal place wire length, described the first normal place wire length is the length of line between the special position of the first normal place and the second standard;

The second angle generation module, be used for according to described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first angle α, described the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place;

The poor generation module of longitudinal length, for the difference of described the first physical location wire length and described the first normal place wire length and cos α are multiplied each other, generates longitudinal length difference;

Vertical misalignment amount generation module, for by described longitudinal length difference with described in put line number and 1 difference be divided by, generate described vertical misalignment amount.

Further, described the 4th generation module specifically for according to described first shifting one's position, described second shift one's position, described the first normal place and described the second normal place, generate described whole deflection angle, specifically comprise:

Described the 4th generation module comprises:

The 5th wire length generation module, be used for according to described the 3rd actual lateral coordinates value, described the 3rd actual along slope coordinate value, described the 4th actual lateral coordinates value and described the 4th actual along slope coordinate value, generate the first physical location wire length, described the first physical location wire length is second to shift one's position and the first length of shifting one's position a line; And according to described the first standard lateral coordinate figure, described the first standard along slope coordinate value, described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first normal place wire length, described the first normal place wire length is the length of line between the first normal place and the second normal place;

The 3rd angle generation module, be used for according to described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first angle α, described the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place;

Length difference generation module, for the difference of described the first physical location wire length and described the first normal place wire length and sin α are multiplied each other, generates lateral length difference; And the difference of described the first physical location wire length and described the first normal place wire length and cos α are multiplied each other, generate longitudinal length difference;

Reference position generation module, for described the 4th actual lateral coordinates value being deducted to described lateral length difference, generate lateral reference coordinate figure, and described the 4th actual along slope coordinate value is deducted to described longitudinal length difference generate longitudinal reference coordinate value, described lateral reference coordinate figure and longitudinally reference coordinate value are the coordinate figure of the first reference position, the reference position that described the first reference position is Second Characteristic point;

The 4th angle generation module, for according to described lateral reference coordinate figure and described longitudinal reference coordinate value, generates the second angle β, and described the second angle β is the angle of the longitudinal axis in line and rectangular coordinate system between the first reference position and the first normal place;

Whole deflection angle generation module, for described the first angle α is deducted to described the second angle β, generates described whole deflection angle.

The present invention has following beneficial effect:

The generation method and apparatus of side-play amount provided by the invention, can be according to First Characteristic point and Second Characteristic dot generation apex offset amount, whole deflection angle, transversal displacement and vertical misalignment amount.Apex offset amount, whole deflection angle, transversal displacement and the vertical misalignment amount that while putting wafer on support plate, can generate according to the present embodiment are put wafer, the vertical misalignment amount generating in the present invention reduces wafer skew of actual putting position and predetermined putting position on support plate, thereby has improved the coating effects of wafer.

Accompanying drawing explanation

Fig. 1 is a kind of structural representation of line style PECVD equipment;

Fig. 2 sets the schematic diagram of unique point on a kind of support plate;

The schema of the generation method of a kind of side-play amount that Fig. 3 provides for the embodiment of the present invention one;

Fig. 4 sets the schematic diagram of unique point on support plate in the present invention;

Fig. 5 is a kind of schematic diagram of the generation method of side-play amount in the present invention;

Fig. 6 is the another kind of schematic diagram of the generation method of side-play amount in the present invention;

The structural representation of the generating apparatus of a kind of side-play amount that Fig. 7 provides for the embodiment of the present invention two.

Embodiment

For making those skilled in the art understand better technical scheme of the present invention, below in conjunction with accompanying drawing, the generation method and apparatus of side-play amount provided by the invention is described in detail.

The schema of the generation method of a kind of side-play amount that Fig. 3 provides for the embodiment of the present invention one, as shown in Figure 3, the method comprises:

Step 101, according to the first physical location and the first normal place, generate apex offset amount, the physical location that the first physical location is First Characteristic point, the normal place that the first normal place is First Characteristic point.

In the present embodiment, on support plate, set First Characteristic point and Second Characteristic point.Fig. 4 sets the schematic diagram of unique point on support plate in the present invention, as shown in Figure 4, on support plate 5, the quantity of the putting position of wafer is the capable * n row of m, and m is more than or equal to 2, n and is more than or equal to 2.In other words, putting line number is m, and putting columns is n.The quantity of the putting position shown in Fig. 4 is only a kind of example.In the present embodiment, First Characteristic point and Second Characteristic point in need to marking on support plate 5, particularly can be on support plate 5 in actually operating the position of First Characteristic point and the position of Second Characteristic point mark respectively two round dots, to represent First Characteristic point and Second Characteristic point.

In the predetermined position of load platform or the predetermined position of unloading platform, preset the normal place of First Characteristic point and the normal place of Second Characteristic point.In the predetermined position of load platform or the predetermined position of unloading platform, if support plate is offset, when support plate arrives the predetermined position of load platform or the predetermined position of unloading platform, the physical location of First Characteristic point (i.e. the first physical location) and the normal place of First Characteristic point overlap, and the physical location of Second Characteristic point (i.e. the second physical location) and the normal place of Second Characteristic point overlap.But in the art breading flow process to wafer, due to the error of carrier plate transmission device, the distortion that causes after heating of the discordance of support plate itself and support plate, support plate can be offset, therefore can obtain by support plate position acquisition device the first physical location and second physical location of support plate, for example: this support plate position acquisition device can adopt camera, sensor or other can get the device of characteristic point position on support plate, and preferably this support plate position acquisition device adopts camera.

Fig. 5 is a kind of schematic diagram of the generation method of side-play amount in the present invention, as shown in Figure 5, the normal place that the first normal place P1 is First Characteristic point, the first normal place can comprise the first standard lateral coordinate figure X _p1with the first standard along slope coordinate value Y _p1, in other words in Fig. 5, the coordinate figure of P1 is (X _p1, Y _p1); The normal place that the second normal place P2 is Second Characteristic point, the second normal place can comprise the second standard lateral coordinate figure X _p2with the second standard along slope coordinate value Y _p2, in other words in Fig. 5, the coordinate figure of P2 is (X _p2, Y _p2); The physical location that the first physical location P1a is First Characteristic point, the first physical location can comprise the first actual lateral coordinates value X _p1awith the first actual along slope coordinate value Y _p1a, in other words the coordinate figure of P1a is (X _p1a, Y _p1a); The physical location that the second physical location P2a is Second Characteristic point, the second physical location can comprise the second actual lateral coordinates value X _p2awith the second actual along slope coordinate value Y _p2a, in other words the coordinate figure of P2a is (X _p2a, Y _p2a).Wherein, P1a and P2a are not shown in Fig. 5.

Preferably, First Characteristic point and the setting of Second Characteristic point diagonal angle.As shown in Figure 4, First Characteristic point is arranged in the position at the first row place of putting position, and the relative position of First Characteristic point and a first row first row wafer putting position is fixed; Second Characteristic point is arranged in last column of putting position, and the relative position of Second Characteristic point and last row wafer putting position of last column is fixed.Preferably, P1 is set as to initial point, the first standard lateral coordinate figure X _p1be 0, the first standard along slope coordinate value Y _p1be 0.

In the present embodiment, apex offset amount comprises summit transversal displacement and summit vertical misalignment amount, and this step specifically comprises:

Step 1011, the first actual lateral coordinates value and the first standard lateral coordinate figure are subtracted each other, generate summit transversal displacement.

As shown in Figure 5, summit transversal displacement d _x=X _p1a-X _p1, due to X _p1be 0, so summit transversal displacement d _x=X _p1a.

Step 1012, the first actual along slope coordinate value and the first standard along slope coordinate value are subtracted each other, generate summit vertical misalignment amount.

As shown in Figure 5, summit vertical misalignment amount d _y=Y _p1a-Y _p1, due to Y _p1be 0, so summit transversal displacement d _y=Y _p1a.

Step 102, basis are put columns, the first physical location, the second physical location, the first normal place and the second normal place, generate transversal displacement, the second normal place is the normal place of Second Characteristic point, the physical location that the second physical location is Second Characteristic point.

In the present embodiment, further, before step 102, can also comprise:

Step 102a, the first actual lateral coordinates value is carried out coordinate transform and the first actual along slope coordinate value is carried out to coordinate transform, generating first shifts one's position, first the shifting one's position for First Characteristic point of shifting one's position, first shifts one's position comprises the 3rd actual lateral coordinates value and the 3rd actual along slope coordinate value, the 3rd actual lateral coordinates value is that 0, the three actual along slope coordinate value is 0.

This step generates the first process of shifting one's position P1b for the first physical location P1a being carried out to coordinate transform.As shown in Figure 5, to X _p1acarry out coordinate transform and to Y _p1acarry out coordinate transform, generate first P1b that shifts one's position, P1b comprises the 3rd actual lateral coordinates value X _p1bwith the 3rd actual along slope coordinate value Y _p1b, wherein, X _p1bbe 0, Y _p1bbe 0.To X _p1athe process of carrying out coordinate transform specifically can adopt following formulate: X _p1b=X _p1a-X _p1a=0, Y _p1b=Y _p1a-Y _p1a=0.

Step 102b, the second actual lateral coordinates value is deducted to the first actual lateral coordinates value and the second actual along slope coordinate value is deducted to the first actual along slope coordinate value, generating second shifts one's position, second shifts one's position as the shifting one's position of Second Characteristic point, and second shifts one's position comprises the 4th actual lateral coordinates value and the 4th actual along slope coordinate value.

This step generates the second process of shifting one's position P2b for the second physical location P2a being carried out to coordinate transform.As shown in Figure 5, to X _p2athe process of carrying out coordinate transform specifically can adopt following formulate: the 4th actual lateral coordinates value X _p2b=X _p2a-X _p1a, the 4th actual along slope coordinate value Y _p2b=Y _p2a-Y _p1a.

In the present embodiment, step 102 can comprise: according to putting, columns, first is shifted one's position, second shifted one's position, the first normal place and the second normal place, generates transversal displacement.And according to putting, columns, first is shifted one's position, second is shifted one's position, the first normal place and the second normal place, generate transversal displacement, specifically can comprise:

Step 1021, according to the 3rd actual lateral coordinates value, the 3rd actual along slope coordinate value, the 4th actual lateral coordinates value and the 4th actual along slope coordinate value, generate the first physical location wire length, the first physical location wire length is second to shift one's position and the first length of shifting one's position a line.

As shown in Figure 5, the first physical location wire length L2 is second the shift one's position length of line between P1b of P2b and first of shifting one's position, and the line between P2b and P1b of take in Fig. 5 is that hypotenuse builds right-angle triangle.Due to the 3rd actual lateral coordinates value X _p1bbe 0, the three actual along slope coordinate value Y _p1bbe 0, two of this right-angle triangle square edges are respectively X _p2band Y _p2b.Therefore

Step 1022, according to the first standard lateral coordinate figure, the first standard along slope coordinate value, the second standard lateral coordinate figure and the second standard along slope coordinate value, generate the first normal place wire length, the first normal place wire length is the length of line between the first normal place and the second normal place.

As shown in Figure 5, the first normal place wire length L1 is the length of line between the second normal place P2 and the first normal place P1, and the line between P2 and P1 of take in Fig. 5 is hypotenuse structure right-angle triangle.Due to the first standard lateral coordinate figure X _p1be 0, the first standard along slope coordinate value Y _p1be 0, two of this right-angle triangle square edges are respectively X _p2and Y _p2.Therefore

Step 1023, according to the second standard lateral coordinate figure and the second standard along slope coordinate value, generate the first angle α, the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place.

For example: first angle α=arctan (X _p2/ Y _p2).

Step 1024, the difference of the first physical location wire length and the first normal place wire length and sin α are multiplied each other, generate lateral length difference.

As shown in Figure 5, for ease of calculating, line between P2 and P1 is extended to P3, and make the length of line between P1 and P3 equal the length of line between P2b and P1b.The line between P2 and P3 of take is hypotenuse structure right-angle triangle, and two of this right-angle triangle square edges are respectively Δ x and Δ y.Lateral length difference is Δ x, Δ x=(L2-L1) sin α.

Step 1025, lateral length difference and the difference of putting columns and 1 are divided by, generate transversal displacement.

Particularly, transversal displacement Dx=Δ x/ (n-1).N is the columns of putting between First Characteristic point and Second Characteristic point.

Step 103, basis are put line number, the first physical location, the second physical location, the first normal place and the second normal place, generate vertical misalignment amount.

In the present embodiment, step 103 can comprise: according to putting, line number, first is shifted one's position, second shifted one's position, the first normal place and the second normal place, generates vertical misalignment amount.And according to putting, line number, first is shifted one's position, second is shifted one's position, the first normal place and the second normal place, generate vertical misalignment amount, specifically can comprise:

Step 1031, according to the 3rd actual lateral coordinates value, the 3rd actual along slope coordinate value, the 4th actual lateral coordinates value and the 4th actual along slope coordinate value, generate the first physical location wire length, the first physical location wire length is second to shift one's position and the first length of shifting one's position a line.

The specific descriptions of this step can, referring to the description in step 1021, be repeated no more herein.

Step 1032, according to the first standard lateral coordinate figure, the first standard along slope coordinate value, the second standard lateral coordinate figure and the second standard along slope coordinate value, generate the first normal place wire length, the first normal place wire length is the length of line between the special position of the first normal place and the second standard.

The specific descriptions of this step can, referring to the description in step 1022, be repeated no more herein.

Step 1033, according to the second standard lateral coordinate figure and the second standard along slope coordinate value, generate the first angle α, the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place.

The specific descriptions of this step can, referring to the description in step 1023, be repeated no more herein.

Step 1034, the difference of the first physical location wire length and the first normal place wire length and cos α are multiplied each other, generate longitudinal length difference.

As shown in Figure 5, longitudinal length difference is Δ y, Δ y=(L2-L1) cos α.

Step 1035, longitudinal length difference and the difference of putting line number and 1 are divided by, generate vertical misalignment amount.

Particularly, vertical misalignment amount Dy=Δ y/ (m-1).M is the line number of putting between First Characteristic point and Second Characteristic point.

Step 104, according to the first physical location, the second physical location, the first normal place and the second normal place, generate whole deflection angle.

In the present embodiment, step 104 can comprise: according to first shifting one's position, second shift one's position, the first normal place and the second normal place, generate whole deflection angle.And according to first shifting one's position, second shift one's position, the first normal place and the second normal place, generate whole deflection angle, specifically comprise:

Step 1041, according to the 3rd actual lateral coordinates value, the 3rd actual along slope coordinate value, the 4th actual lateral coordinates value and the 4th actual along slope coordinate value, generate the first physical location wire length, the first physical location wire length is second to shift one's position and the first length of shifting one's position a line.

Step 1042, according to the first standard lateral coordinate figure, the first standard along slope coordinate value, described the second standard lateral coordinate figure and the second standard along slope coordinate value, generate the first normal place wire length, the first normal place wire length is the length of line between the first normal place and the second normal place.

Step 1043, according to the second standard lateral coordinate figure and the second standard along slope coordinate value, generate the first angle α, the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place.

Step 1044, the difference of the first physical location wire length and the first normal place wire length and sin α are multiplied each other, generate lateral length difference.

The specific descriptions of this step can, referring to the description in step 1024, be repeated no more herein.

Step 1045, the difference of the first physical location wire length and the first normal place wire length and cos α are multiplied each other, generate longitudinal length difference.

The specific descriptions of this step can, referring to the description to step 1034, be repeated no more herein.

Step 1046, the 4th actual lateral coordinates value is deducted to lateral length difference generate lateral reference coordinate figure, and the 4th actual along slope coordinate value is deducted to longitudinal length difference generate longitudinal reference coordinate value, lateral reference coordinate figure and longitudinally reference coordinate value are the coordinate figure of the first reference position, the reference position that the first reference position is Second Characteristic point.

For eliminating support plate thermal distortion to calculating the interference of the whole deflection angle of support plate, need to process and generate the first reference position P2c first P2b that shifts one's position, particularly, the 4th actual lateral coordinates value is deducted to lateral length difference and generate lateral reference coordinate figure, and the 4th actual along slope coordinate value is deducted to longitudinal length difference generate longitudinal reference coordinate value, thereby reject support plate thermal distortion to calculating the interference of the whole deflection angle of support plate.Fig. 6 is the another kind of schematic diagram of the generation method of side-play amount in the present invention, as shown in Figure 6, and lateral reference coordinate figure X _p2c=X _p2b-Δ x, lateral reference coordinate figure Y _p2c=Y _p2b-Δ y.The the first reference position P2c generating comprises X _p2cand Y _p2c, in other words the coordinate figure of P2c is (X _p2c, Y _p2c).

Step 1047, according to lateral reference coordinate figure and longitudinal reference coordinate value, generate the second angle β, the second angle β is the angle of the longitudinal axis in line and rectangular coordinate system between the first reference position and the first normal place.

As shown in Figure 6, build and take the right-angle triangle that between the first reference position P2c and the first normal place P1, line is hypotenuse, the second angle β is the angle of line and the longitudinal axis (being Y-axis) between P1c and P1.For example: second angle β=arctan (X _p2c/ Y _p2c).

Step 1048, according to the second standard lateral coordinate figure and the second standard along slope coordinate value, generate the first angle α, the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place.

As shown in Figure 6, for example: first angle α=arctan (X _p2/ Y _p2).

Step 1048, the first angle α is deducted to the second angle β, generate whole deflection angle.

For example: whole deflection angle θ=alpha-beta in this step.

In the method that the present embodiment provides, the execution sequence of each step is only a kind of example, can change as required in actual applications the execution sequence of each step.

In the generation method of the side-play amount that the present embodiment provides, can be according to First Characteristic point and Second Characteristic dot generation apex offset amount, whole deflection angle, transversal displacement and vertical misalignment amount.Apex offset amount, whole deflection angle, transversal displacement and the vertical misalignment amount that while putting wafer on support plate, can generate according to the present embodiment are put wafer, the vertical misalignment amount generating in the present embodiment reduces wafer skew of actual putting position and predetermined putting position on support plate, thereby has improved the coating effects of wafer.

The structural representation of the generating apparatus of a kind of side-play amount that Fig. 7 provides for the embodiment of the present invention two, as shown in Figure 7, this device comprises: the first generation module 11, the second generation module 12, the 3rd generation module 13 and the 4th generation module 14.

The first generation module 11, for according to the first physical location and the first normal place, generates apex offset amount, the physical location that described the first physical location is First Characteristic point, the normal place that described the first normal place is First Characteristic point;

The second generation module 12, for basis, put columns, the first physical location, the second physical location, described the first normal place and the second normal place, generate transversal displacement, the normal place that described the second normal place is Second Characteristic point, the physical location that described the second physical location is Second Characteristic point;

The 3rd generation module 13, for according to putting line number, described the first physical location, described the second physical location, described the first normal place and described the second normal place, generates vertical misalignment amount;

The 4th generation module 14, for according to described transversal displacement, described vertical misalignment amount and the second physical location, generates whole deflection angle.

Further, state the first physical location and comprise the first actual lateral coordinates value and the first actual along slope coordinate value, described apex offset amount comprises summit transversal displacement and summit vertical misalignment amount.The first generation module 11 specifically comprises: summit transversal displacement generation module 111 and summit vertical misalignment amount generation module 112.

Summit transversal displacement generation module 111, for described the first actual lateral coordinates value and described the first standard lateral coordinate figure are subtracted each other, generates described summit transversal displacement;

Summit vertical misalignment amount generation module 112, for described the first actual along slope coordinate value and described the first standard along slope coordinate value are subtracted each other, generates described summit vertical misalignment amount.

Further, described the first physical location comprises the first actual lateral coordinates value and the first actual along slope coordinate value, and described the second physical location comprises the second actual lateral coordinates value and the second actual along slope coordinate value.The generating apparatus of this side-play amount also comprises:

First generation module 15 of shifting one's position, for described the first actual lateral coordinates value is carried out coordinate transform and described the first actual along slope coordinate value is carried out to coordinate transform, generating first shifts one's position, described first the shifting one's position for First Characteristic point of shifting one's position, described first shifts one's position comprises the 3rd actual lateral coordinates value and the 3rd actual along slope coordinate value, described the 3rd actual lateral coordinates value is 0, and described the 3rd actual along slope coordinate value is 0;

Second generation module 16 of shifting one's position, for described the second actual lateral coordinates value is deducted to described the first actual lateral coordinates value and described the second actual along slope coordinate value is deducted to described the first actual along slope coordinate value, generating second shifts one's position, described second shifts one's position as the shifting one's position of Second Characteristic point, and described second shifts one's position comprises the 4th actual lateral coordinates value and the 4th actual along slope coordinate value.

Further, the described columns of putting is greater than or equal to 2, the second generation module 12 shifts one's position specifically for putting columns, described first described in basis, described second shift one's position, described the first normal place and described the second normal place, generates described transversal displacement.

The second generation module 12 specifically comprises:

The first wire length generation module 121, be used for according to described the 3rd actual lateral coordinates value, described the 3rd actual along slope coordinate value, described the 4th actual lateral coordinates value and described the 4th actual along slope coordinate value, generate the first physical location wire length, described the first physical location wire length is second to shift one's position and the first length of shifting one's position a line;

The second wire length generation module 122, be used for according to described the first standard lateral coordinate figure, described the first standard along slope coordinate value, described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first normal place wire length, described the first normal place wire length is the length of line between the first normal place and the second normal place;

The first angle generation module 123, be used for according to described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first angle α, described the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place;

The poor generation module 124 of lateral length, for the difference of described the first physical location wire length and described the first normal place wire length and sin α are multiplied each other, generates lateral length difference;

Transversal displacement generation module 125, for by described lateral length difference with described in put columns and 1 difference be divided by, generate described transversal displacement.

Further, the described line number of putting is greater than or equal to 2, described the 3rd generation module, specifically for putting line number, described the first physical location, described the second physical location, described the first normal place and described the second normal place described in basis, generates vertical misalignment amount.

The 3rd generation module 13 comprises:

The 3rd wire length generation module 131, be used for according to described the 3rd actual lateral coordinates value, described the 3rd actual along slope coordinate value, described the 4th actual lateral coordinates value and described the 4th actual along slope coordinate value, generate the first physical location wire length, described the first physical location wire length is second to shift one's position and the first length of shifting one's position a line;

The 4th wire length generation module 132, be used for according to described the first standard lateral coordinate figure, described the first standard along slope coordinate value, described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first normal place wire length, described the first normal place wire length is the length of line between the special position of the first normal place and the second standard;

The second angle generation module 133, be used for according to described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first angle α, described the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place;

The poor generation module 134 of longitudinal length, for the difference of described the first physical location wire length and described the first normal place wire length and cos α are multiplied each other, generates longitudinal length difference;

Vertical misalignment amount generation module 135, for by described longitudinal length difference with described in put line number and 1 difference be divided by, generate described vertical misalignment amount.

Further, described according to described transversal displacement, described vertical misalignment amount and the second physical location.

Further, the 4th generation module 14 specifically for according to described first shifting one's position, described second shift one's position, described the first normal place and described the second normal place, generate described whole deflection angle.

The 4th generation module 14 comprises:

The 5th wire length generation module 141, be used for according to described the 3rd actual lateral coordinates value, described the 3rd actual along slope coordinate value, described the 4th actual lateral coordinates value and described the 4th actual along slope coordinate value, generate the first physical location wire length, described the first physical location wire length is second to shift one's position and the first length of shifting one's position a line; And according to described the first standard lateral coordinate figure, described the first standard along slope coordinate value, described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first normal place wire length, described the first normal place wire length is the length of line between the first normal place and the second normal place;

The 3rd angle generation module 142, be used for according to described the second standard lateral coordinate figure and described the second standard along slope coordinate value, generate the first angle α, described the first angle α is the angle of the longitudinal axis in line and rectangular coordinate system between the first normal place and the second normal place;

Length difference generation module 143, for the difference of described the first physical location wire length and described the first normal place wire length and sin α are multiplied each other, generates lateral length difference; And the difference of described the first physical location wire length and described the first normal place wire length and cos α are multiplied each other, generate longitudinal length difference;

Reference position generation module 144, for described the 4th actual lateral coordinates value being deducted to described lateral length difference, generate lateral reference coordinate figure, and described the 4th actual along slope coordinate value is deducted to described longitudinal length difference generate longitudinal reference coordinate value, described lateral reference coordinate figure and longitudinally reference coordinate value are the coordinate figure of the first reference position, the reference position that described the first reference position is Second Characteristic point;

The 4th angle generation module 145, for according to described lateral reference coordinate figure and described longitudinal reference coordinate value, generates the second angle β, and described the second angle β is the angle of the longitudinal axis in line and rectangular coordinate system between the first reference position and the first normal place;

Whole deflection angle generation module 146, for described the first angle α is deducted to described the second angle β, generates described whole deflection angle.

The generating apparatus of the side-play amount that the present embodiment provides can be used for realizing the generation method of the side-play amount in above-described embodiment one.

The generating apparatus of the side-play amount that the present embodiment provides, can be according to First Characteristic point and Second Characteristic dot generation apex offset amount, whole deflection angle, transversal displacement and vertical misalignment amount.Apex offset amount, whole deflection angle, transversal displacement and the vertical misalignment amount that while putting wafer on support plate, can generate according to the present embodiment are put wafer, the vertical misalignment amount generating in the present embodiment reduces wafer skew of actual putting position and predetermined putting position on support plate, thereby has improved the coating effects of wafer.

Be understandable that, above embodiment is only used to principle of the present invention is described and the illustrative embodiments that adopts, yet the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.

Claims

1. a generation method for side-play amount, is characterized in that, comprising:

According to the first physical location and the first normal place, generate apex offset amount, the physical location that described the first physical location is First Characteristic point, the normal place that described the first normal place is First Characteristic point; Wherein, described the first normal place comprises the first standard lateral coordinate figure and the first standard along slope coordinate value, described the second normal place comprises the second standard lateral coordinate figure and the second standard along slope coordinate value, and described the first standard lateral coordinate figure is 0, and described the first standard along slope coordinate value is 0; Described the first physical location comprises the first actual lateral coordinates value and the first actual along slope coordinate value, and described the second physical location comprises the second actual lateral coordinates value and the second actual along slope coordinate value;

Described the second actual lateral coordinates value is deducted to described the first actual lateral coordinates value and described the second actual along slope coordinate value is deducted to described the first actual along slope coordinate value, generating second shifts one's position, described second shifts one's position as the shifting one's position of Second Characteristic point, and described second shifts one's position comprises the 4th actual lateral coordinates value and the 4th actual along slope coordinate value; According to putting columns, the first physical location, the second physical location, described the first normal place and the second normal place, generate transversal displacement, the normal place that described the second normal place is Second Characteristic point, the physical location that described the second physical location is Second Characteristic point;

According to putting line number, described the first physical location, described the second physical location, described the first normal place and described the second normal place, generate vertical misalignment amount; Wherein, described in to put line number be the capable quantity of putting between First Characteristic point and Second Characteristic point, and its numerical value is greater than or equal to 2; Specifically comprise:

By described longitudinal length difference with described in put line number and 1 difference be divided by, generate described vertical misalignment amount;

2. method according to claim 1, is characterized in that, described First Characteristic point and the diagonal angle setting of described Second Characteristic point.

3. method according to claim 1, is characterized in that, described the first physical location comprises the first actual lateral coordinates value and the first actual along slope coordinate value, and described apex offset amount comprises summit transversal displacement and summit vertical misalignment amount;

4. method according to claim 1, it is characterized in that, the described columns of putting is greater than or equal to 2, and described basis is put columns, the first physical location, the second physical location, described the first normal place and the second normal place, generates transversal displacement and comprises:

5. method according to claim 1, is characterized in that, described according to described the first physical location, described the second physical location, described the first normal place and described the second normal place, generates whole deflection angle and comprises:

6. a generating apparatus for side-play amount, is characterized in that, comprising:

The first generation module, for according to the first physical location and the first normal place, generates apex offset amount, the physical location that described the first physical location is First Characteristic point, the normal place that described the first normal place is First Characteristic point; Wherein, described the first normal place comprises the first standard lateral coordinate figure and the first standard along slope coordinate value, described the second normal place comprises the second standard lateral coordinate figure and the second standard along slope coordinate value, and described the first standard lateral coordinate figure is 0, and described the first standard along slope coordinate value is 0; Described the first physical location comprises the first actual lateral coordinates value and the first actual along slope coordinate value, and described the second physical location comprises the second actual lateral coordinates value and the second actual along slope coordinate value;

Described device also comprises first generation module and second generation module of shifting one's position of shifting one's position, wherein

Second generation module of shifting one's position, for described the second actual lateral coordinates value is deducted to described the first actual lateral coordinates value and described the second actual along slope coordinate value is deducted to described the first actual along slope coordinate value, generating second shifts one's position, described second shifts one's position as the shifting one's position of Second Characteristic point, and described second shifts one's position comprises the 4th actual lateral coordinates value and the 4th actual along slope coordinate value;

The 3rd generation module, for according to putting line number, described the first physical location, described the second physical location, described the first normal place and described the second normal place, generates vertical misalignment amount; Wherein, described in to put line number be the capable quantity of putting between First Characteristic point and Second Characteristic point, and its numerical value is greater than or equal to 2; Described the 3rd generation module comprises:

Vertical misalignment amount generation module, for by described longitudinal length difference with described in put line number and 1 difference be divided by, generate described vertical misalignment amount;

7. device according to claim 6, is characterized in that, described First Characteristic point and the diagonal angle setting of described Second Characteristic point.

8. device according to claim 6, is characterized in that, described the first physical location comprises the first actual lateral coordinates value and the first actual along slope coordinate value, and described apex offset amount comprises summit transversal displacement and summit vertical misalignment amount;

Described the first generation module comprises:

9. device according to claim 6, it is characterized in that, the described columns of putting is greater than or equal to 2, described the second generation module shifts one's position specifically for putting columns, described first described in basis, described second shift one's position, described the first normal place and described the second normal place, generates described transversal displacement;

Described the second generation module comprises:

10. device according to claim 6, it is characterized in that, described the 4th generation module specifically for according to described first shifting one's position, described second shift one's position, described the first normal place and described the second normal place, generate described whole deflection angle, specifically comprise:

Described the 4th generation module comprises: