CN102534494B - Cutting tool with hard CBN coating - Google Patents
Cutting tool with hard CBN coating Download PDFInfo
- Publication number
- CN102534494B CN102534494B CN 201210020397 CN201210020397A CN102534494B CN 102534494 B CN102534494 B CN 102534494B CN 201210020397 CN201210020397 CN 201210020397 CN 201210020397 A CN201210020397 A CN 201210020397A CN 102534494 B CN102534494 B CN 102534494B
- Authority
- CN
- China
- Prior art keywords
- coating
- boron nitride
- cubic boron
- cutting tool
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Ceramic Products (AREA)
Abstract
The invention provides a cutting tool with a hard CBN (Cubic Boron Nitride) coating on the surface, wherein, the coating is prepared on a high speed steel substrate through radio-frequency magnetron sputtering, and a small quantity of Fe is added when a BN (Boron Nitride) target is sintered, so that a small quantity of Fe or an iron nitride phase is formed in a CBN coating or between the CBN and a basal body so as to reduce the thermal expansion coefficient of the CBN and the material of the high speed steel substrate, cracking stripping of the coating and the basal body can be further avoided, and the compactness and the binding force between the coating and the basal body can be improved; in addition, the uniform and thicker CBN coating can be prepared on the surface of the cutting toolthrough reasonable parameter control.
Description
Technical field
The present invention relates to a kind of cutting tool, a kind of surface preparation has the cutting tool of cubic boron nitride hard coat specifically.
Background technology
Along with the development of modern industrial technology, also more and more higher to the cutting tool performance demands.Particularly along with the continuous development of Materials science, the material of many new research and development, for example ultrafine powder metal, metal-base composites and superalloy of sintering etc., have a lot of extraordinary performance combinations, for example intensity, rigidity hardness and wear resistance etc., this makes traditional cutting tool more and more unable to do what one wishes for the processing of these materials, presses for harder stronger cutting tool.And diamond, cubic boron nitride materials such as (c-BN) with ultrahigh hardness are undoubtedly good selection, and wherein diamond is that nature exists, and also can synthesize, and cube boron nitride then can only be passed through synthetic.Though diamond has strong hardness free from controversy, but there is tangible limitation in it, the one, the cost costliness, the 2nd, the high temperature use properties is not good, namely have bigger pyrochemistry activity, be oxidized to carbonic acid gas and carbon monoxide easily, also easily and iron, nickel etc. react, therefore it not only is unsuitable for being prepared as separately cutting tool, and the hard coat that also is not suitable as materials such as iron, nickel uses.
By contrast, cubic boron nitride with the obvious advantage, it not only has and is only second to adamantine hardness, also has useful high temperature use properties, particularly it has relative high temperature inert with respect to iron, be well suited for the hard coat as iron, thereby only need use relatively inexpensive iron as the main body of instrument, saved the cost of cutting tool, hardness and the work-ing life of cutting tool have significantly been improved simultaneously by cubic boron nitride, therefore, the research of preparation cubic boron nitride coating has worldwide obtained extensive concern.
But synthesizing cubic boron nitride not only needs High Temperature High Pressure and then increases cost, and often be difficult to obtain the compactness of good coating and matrix bond, and thicker coat-thickness, be easy to peel off with body material or be worn through, thereby cause the inefficacy of cutting tool.
Summary of the invention
Purpose of the present invention namely is to provide a kind of surface to have the cutting tool of cubic boron nitride hard coat, and hard coat is combined densification and is not peeled off with tool base, and coat-thickness meets the demands.
For achieving the above object, the technical solution adopted in the present invention may further comprise the steps:
At first, select for use rapid steel as tool base, in ultrasonic wave, clean the back with acetone and dry up standby with argon gas.
Subsequently, matrix is put on the vacuum chamber sample table of rf magnetron sputtering, and sintering BN target is placed target position, be added with the Fe that accounts for atom total amount 5-10% in the described sintering BN target.
Subsequently vacuum tightness in the vacuum chamber is extracted into≤5 * 10
-4Pa, feeding flow simultaneously is the pure Ar of 300-400sccm, when gas pressure in vacuum is 2-3Pa, pre-sputter 15-20min, the power of pre-sputter is 80-90W, substrate bias is 600-650V, substrate temperature is 450-500 ℃, with impurity and the activated surface atom activity of further removing matrix surface.
Begin to feed the N that flow is 10-15sccm subsequently
2And the flow that reduces Ar is that 35-40sccm, gas pressure in vacuum are that the negative bias of 0.9-1.1Pa, body material is 100-150V, the temperature of keeping body material is 450-500 ℃, remove the baffle plate of BN target, carry out sputter with 150-200W power, sputtering time is 3h at least, satisfies the cubic boron nitride coating of thickness requirement with formation.
Keep the inert atmosphere of Ar subsequently, under 600-650 ℃ of condition coating is implemented insulation and handle, the treatment time is 1-1.5h.
Advantage of the present invention is: add certain Fe in sintering BN target, thereby can be in the cubic boron nitride coating or between cubic boron nitride and the matrix, form a spot of iron or nitrogenize iron phase, thereby reduce cubic boron nitride and high speed steel substrate material coefficient of thermal expansion coefficient, and then avoided the explosion of coating and matrix to peel off, improved compactness and the bonding force of coating and matrix; By reasonable parameter control, prepare even and thicker cubic boron nitride coating.
Embodiment
Below, the present invention is described in detail by specific embodiment.
Embodiment 1.
At first, select for use the W18Cr4V rapid steel as tool base, with acetone in ultrasonic wave, clean dry up with argon gas behind the 10min standby.
Subsequently, matrix is put on the vacuum chamber sample table of rf magnetron sputtering, and sintering BN target is placed apart from the target position of matrix surface 70mm, be added with the Fe that accounts for atom total amount 5% in the described sintering BN target.
Subsequently vacuum tightness in the vacuum chamber is extracted into≤5 * 10
-4Pa, feeding flow simultaneously is the pure Ar of 300sccm, when gas pressure in vacuum is 2Pa, pre-sputter 15min, the power of pre-sputter is 80W, and substrate bias is 600V, and substrate temperature is 450 ℃, with impurity and the activated surface atom activity of further removing matrix surface.
Begin to feed the N that flow is 10sccm subsequently
2, and the flow that reduces Ar is that 40sccm, gas pressure in vacuum are that the negative bias of 0.9Pa, body material is 100V, and the temperature of keeping body material is 450 ℃, removes the baffle plate of BN target, carries out sputter with 150W power, sputtering time is 3h.
Keep the inert atmosphere of Ar subsequently, under 600 ℃ of conditions coating is implemented insulation and handle, the treatment time is 1h.
After testing, main absorption peak in the coating is cubic boron nitride and do not find tangible hexagonal boron nitride absorption peak, coating hardness is about 34GPa, shown that also it mainly is cubic boron nitride, coat-thickness is about 200nm, and phenomenon only appears peeling off on a small quantity in the long-time back coatingsurface of placing under atmospheric environment.
Embodiment 2.
Identical with embodiment 1, select for use the W18Cr4V rapid steel as tool base, with acetone in ultrasonic wave, clean dry up with argon gas behind the 10min standby.
Subsequently, matrix is put on the vacuum chamber sample table of rf magnetron sputtering, and sintering BN target is placed apart from the target position of matrix surface 70mm, be added with the Fe that accounts for atom total amount 7% in the described sintering BN target.
Subsequently vacuum tightness in the vacuum chamber is extracted into≤5 * 10
-4Pa, feeding flow simultaneously is the pure Ar of 350sccm, when gas pressure in vacuum is 2.5Pa, pre-sputter 18min, the power of pre-sputter is 85W, substrate bias is 620V, substrate temperature is 480 ℃, with impurity and the activated surface atom activity of further removing matrix surface.
Begin to feed the N that flow is 13sccm subsequently
2, and the flow that reduces Ar is that 37sccm, gas pressure in vacuum are that the negative bias of 1Pa, body material is 130V, and the temperature of keeping body material is 480 ℃, removes the baffle plate of BN target, carries out sputter with 180W power, sputtering time is 5h.
Keep the inert atmosphere of Ar subsequently, under 620 ℃ of conditions coating is implemented insulation and handle, the treatment time is 1.2h.
After testing, main absorption peak in the coating still is cubic boron nitride and do not find tangible hexagonal boron nitride absorption peak, coating hardness is about 32GPa, and coat-thickness is about 450nm, and phenomenon does not appear obviously peeling off in the long-time back coatingsurface of placing under atmospheric environment.
Embodiment 3.
Identical with the embodiment of front, select for use the W18Cr4V rapid steel as tool base, with acetone in ultrasonic wave, clean dry up with argon gas behind the 10min standby.
Subsequently, matrix is put on the vacuum chamber sample table of rf magnetron sputtering, and sintering BN target is placed apart from the target position of matrix surface 70mm, be added with the Fe that accounts for atom total amount 10% in the described sintering BN target.
Subsequently vacuum tightness in the vacuum chamber is extracted into≤5 * 10
-4Pa, feeding flow simultaneously is the pure Ar of 400sccm, when gas pressure in vacuum is 3Pa, pre-sputter 20min, the power of pre-sputter is 90W, and substrate bias is 650V, and substrate temperature is 500 ℃, with impurity and the activated surface atom activity of further removing matrix surface.
Begin to feed the N that flow is 15sccm subsequently
2, and the flow that reduces Ar is that 35sccm, gas pressure in vacuum are that the negative bias of 1Pa, body material is 150V, and the temperature of keeping body material is 500 ℃, removes the baffle plate of BN target, carries out sputter with 200W power, sputtering time is 10h.
Keep the inert atmosphere of Ar subsequently, under 650 ℃ of conditions coating is implemented insulation and handle, the treatment time is 1.5h.
After testing, the main absorption peak in the coating still is cubic boron nitride and do not find tangible hexagonal boron nitride absorption peak, and coating hardness is about 28GPa, and coat-thickness is about 700nm, and phenomenon does not appear peeling off in the long-time back coatingsurface of placing under atmospheric environment.
By The above results as can be known, the addition of the Fe among the embodiment 2 is more suitable, when having improved the anti-stripping performance of coating, guaranteed the high rigidity of coating, and its preparation technology has higher film forming efficiency.
Claims (3)
1. a surface has the cutting tool of cubic boron nitride hard coat, it is characterized in that it is prepared by following steps:
Step 1) selects for use the W18Cr4V steel as tool base, cleans the back with acetone in ultrasonic wave and dries up standby with argon gas;
Step 2), matrix is put on the vacuum chamber sample table of rf magnetron sputtering, and sintering BN target is placed target position, be added with the Fe that accounts for atom total amount 7% in the described sintering BN target;
Step 3), vacuum tightness in the vacuum chamber is extracted into≤5 * 10
-4Pa, feeding flow simultaneously is the pure Ar of 300-400sccm, when gas pressure in vacuum is 2-3Pa, pre-sputter 15-20min, the power of pre-sputter is 80-90W, substrate bias is 600-650V, substrate temperature is 450-500 ℃, with impurity and the activated surface atom activity of further removing matrix surface;
Step 4) begins to feed the N that flow is 10-15sccm
2And the flow that reduces Ar is that 35-40sccm, gas pressure in vacuum are that the negative bias of 0.9-1.1Pa, body material is 100-150V, the temperature of keeping body material is 450-500 ℃, remove the baffle plate of BN target, carry out sputter with 150-200W power, sputtering time is 3h at least, satisfies the cubic boron nitride hard coat of thickness requirement with formation;
Step 5) is kept the inert atmosphere of Ar, under 600-650 ℃ of condition coating is implemented insulation and handles, and the treatment time is 1-1.5h.
2. cutting tool according to claim 1, wherein said cubic boron nitride hard coat has the hardness of 32GPa at least.
3. cutting tool according to claim 1, the thickness of wherein said cubic boron nitride hard coat surpasses 450nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201210020397 CN102534494B (en) | 2012-01-19 | 2012-01-19 | Cutting tool with hard CBN coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201210020397 CN102534494B (en) | 2012-01-19 | 2012-01-19 | Cutting tool with hard CBN coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102534494A CN102534494A (en) | 2012-07-04 |
| CN102534494B true CN102534494B (en) | 2013-09-11 |
Family
ID=46342500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201210020397 Active CN102534494B (en) | 2012-01-19 | 2012-01-19 | Cutting tool with hard CBN coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102534494B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106399938A (en) * | 2016-10-20 | 2017-02-15 | 富耐克超硬材料股份有限公司 | Preparation method for cubic boron nitride film |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104889430A (en) * | 2015-05-29 | 2015-09-09 | 苏州亚思科精密数控有限公司 | Cutter used for numerical control machine tool |
| CN110484865B (en) * | 2019-09-17 | 2021-11-02 | 富耐克超硬材料股份有限公司 | Preparation method of cutter containing cubic boron nitride coating |
-
2012
- 2012-01-19 CN CN 201210020397 patent/CN102534494B/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106399938A (en) * | 2016-10-20 | 2017-02-15 | 富耐克超硬材料股份有限公司 | Preparation method for cubic boron nitride film |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102534494A (en) | 2012-07-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102534494B (en) | Cutting tool with hard CBN coating | |
| JP5063831B2 (en) | Cutting tools | |
| CN109402564B (en) | AlCrSiN and AlCrSiON double-layer nano composite coating and preparation method thereof | |
| CN108977775B (en) | TiAlSiN coating cutter preparation process | |
| CN102371385B (en) | Surface cladding cutting tool | |
| CN111188016B (en) | High-performance CrAlSiX alloy target and preparation method thereof | |
| CN102869807B (en) | Titanium diboride target | |
| CN107058948A (en) | A kind of soft and rigid composite coating layer and preparation method thereof | |
| CN102560356B (en) | Method for preparing BN coat | |
| JP5971472B2 (en) | Hard material, manufacturing method of hard material, cutting tool and friction stir welding tool | |
| CN112689688B (en) | Coating cutter for processing titanium alloy and high-temperature alloy and preparation method thereof | |
| CN104073770B (en) | TiWAlN ganoine thin film and preparation method | |
| TWI515321B (en) | Multi-component alloy sputtering target, method of producing the same, and multi-component alloy layer | |
| CN105951047A (en) | Preparation method for tungsten-nickel alloy with nitrogen-yttrium-zirconium hard coating | |
| CN102021516B (en) | Surface-coated cutting tool | |
| CN108239716A (en) | A kind of preparation method for having nitrogen-yttrium-zirconium hard coat tungsten nickel | |
| CN103372764A (en) | Surface-coated cutting tool with flaking-poof hard coating layer | |
| CN109457087B (en) | Process method for preparing intermetallic compound coating on metal surface | |
| CN102534534B (en) | Optical thin film with excellent performances | |
| JP2012066341A (en) | Cutting tool made of surface-coated cubic boron nitride-based ultra-high-pressure sintered material | |
| CN103952672B (en) | TaCN hard nanometer structural membrane and preparation method | |
| CN112176298A (en) | High-wear-resistance compound coating and preparation method thereof | |
| CN102345106B (en) | Preparation and heat treatment method of B-C-N ternary film | |
| CN111876732B (en) | Molybdenum boride/molybdenum sulfide nano composite coating and preparation method thereof | |
| CN110484865B (en) | Preparation method of cutter containing cubic boron nitride coating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: NINGBO RUITONG NEW MATERIAL TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: ZHANG JINFENG Effective date: 20130814 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20130814 Address after: 315177 Zhejiang province Ningbo city Yinzhou District town water village turnip Applicant after: Ningbo Ruitong New Material Technology Co., Ltd. Address before: 315177 Zhejiang province Ningbo city Yinzhou District town water village turnip Applicant before: Zhang Jinfeng |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: NANTONG TONGZHOU YIDA PORT MACHINERY CO., LTD. Free format text: FORMER OWNER: NINGBO RUITONG NEW MATERIAL TECHNOLOGY CO., LTD. Effective date: 20141114 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 315177 NINGBO, ZHEJIANG PROVINCE TO: 226300 NANTONG, JIANGSU PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20141114 Address after: 226300, No. 6, West Zone, stone port town Industrial Park, Nantong, Jiangsu, Tongzhou District Patentee after: NANTONG TONGZHOU YIDA PORT MACHINERY CO., LTD. Address before: 315177 Zhejiang province Ningbo city Yinzhou District town water village turnip Patentee before: Ningbo Ruitong New Material Technology Co., Ltd. |